一种通带平坦的粗波分复用/解复用器件的研制

随着粗波分复用(CWDM)系统在城域网和接入网中日益广泛的应用,人们对粗波分复用／解复用器的研究也逐渐展开。报道了一种8通道波长间隔为20nm的粗复用／解复用器。该器件基于阵列波导光栅(AWG)原理设计,利用平面光波导技术(PLC)制作,采用多模干涉输入结构和“S”形阵列波导结构,实现了较宽的通带宽度和较低的串扰。实验测得1dB带宽大于10nm,相邻串扰大于24dB,非相邻串扰大于32dB。介绍了其设计原理和制作过程,给出了光束传播法(BPM)数值模拟结果,并和实验结果进行了对比。     

阵列波导光栅平坦化的研究

阵列波导光栅的平坦化在实际应用中有很重要的意义.本文系统地研究了阵列波导光栅的平坦化.在输入波导、输出波导、阵列波导输入端与输出端上分别引入了指数型锥形波导.通过改变锥形波导的形状和尺寸来实现平坦化的优化.本文首先从理论上论述了引入指数型锥形波导的输出光谱特性,给出了结构参量的关系表达式,阐明了输入波导处的锥形波导是影响输出光谱平坦化的主要因素,阵列波导和输出波导处的锥形波导对输出光谱的平坦化有一定的影响.其次采用数值模拟的方法模拟了输出光谱,优化了结构参量,总结出了指数型锥形波导对平坦化影响的趋势和规律.模拟结果显示,输出光谱1 dB带宽大于通道间隔的50%,插入损耗从5.2 dB减小到了4.0 dB,串扰小于-30 dB.最后,本文给出了实验结果,插入损耗减小了0.87 dB,串扰减小了3.67 dB,1 dB带宽增加0.1 nm,增加了54.7%.实验结果表明引入指数型锥形波导提高了阵列波导光栅器件的光谱性能.     

A concise design of 16 × 16 polymer AWG with low insertion loss and crosstalk

In this paper, a 16-channel arrayed waveguide grating multiplexer (AWG) has been designed using polymer materials with 1.5% refractive index difference. Certain important parameters are optimized using the coupling mode theory and Beam Propagation Method. The factors that affect the insertion loss and the crosstalk are analyzed in this paper. In our design we introduced the parabolic taper structure and evaluated the suitable number of the arrayed waveguide, obtaining a total insertion loss of 2.19 dB. For obtaining a low crosstalk we evaluate the pitches of adjacent input/output waveguides ΔX and arrayed waveguides d as different values. We chose the value of ΔX about 2.5 times of d by enlarging the pitches of adjacent input/output waveguides. The crosstalk of the designed AWG is lower than −40 dB.     

Analysis of optical rib self-imaging multimode interference (MMI) waveguide devices using the discrete spectral index method

We have developed a semianalytical approach to study the propagation characteristics of multimode interference (MMI) waveguide structures. The effect of transverse crosssection geometry on self-imaging length and optical power throughput are investigated. We present results confirming that the nonquadratic modal dispersion encountered in stripe-loaded waveguides impairs self-imaging performance. Results indicate that the image degradation is more predominant for asymmetrically fed MMI waveguides.     

SOI大截面单模脊形X型分支波导的研制

报道了硅片直接键合（ＳＤＢ）ＳＯＩ大截面单模脊形互型分支波导的研制．对于波长为１．３μｍ的光，在θ＝２°小分支角时，这种分支波导的通道串音小于－２０ｄＢ，辐射损耗小于０．３ｄＢ．直通传输损耗小于０．８５ｄＢ／ｃｍ．     

基于Si3N4/SiNx/Si3N4三明治结构的偏振无关1×2多模干涉型解复用器的设计

提出一种基于Si3N4/SiNx/Si3N4三明治结构多模干涉波导的偏振无关1×2解复用器,用于分离1310和1550 nm两个波长.通过合理选择三明治结构中间层SiNx的折射率,可以调节同一波长两个正交偏振态的拍长相等,实现偏振无关;根据多模干涉原理,通过合理选择多模干涉波导的长度与宽度,可以使两个波长的输出像点分别成正像和反像,实现解复用功能.运用三维有限时域差分法进行建模仿真,对结构参数进行优化,并对器件关键结构参数的制作容差进行了分析.结果表明:该器件多模干涉波导的尺寸为4.6μm×227.7μm,插入损耗低至0.18dB,输出波导间的串扰低至–25.7dB, 3dB带宽可达60 nm.另外,本文提出的器件采用Si3N4/SiO2平台,可有效减小波导尺寸,提高集成度,不仅实现了偏振无关,而且结构紧凑、损耗低,在未来的集成光路中具有潜在的应用价值.     

Optimal design for a flat-top AWG demultiplexer by using a fast calculation method based on a Gaussian beam approximation

Passband broadening of an AWG (array waveguide grating) demultiplexer with an MMI (multimode interference) coupler connected at the end of a tapered input waveguide is considered. An explicit formula based on the field propagation of an approximate Hermit-Gaussian beam is used to calculate quickly and reliably the spectral response of the AWG demultiplexer. The widths of the input waveguide, the output waveguides and the MMI coupler are optimized. The optimal design is verified with the experimental measurement.     

基于硅基二氧化硅阵列波导光栅宽带低串扰单纤三向器

采用硅基二氧化硅阵列波导光栅设计并制作了宽带低串扰单纤三向器.为使三个波长间隔相差较大的输出谱获得相同的带宽,在输出波导与罗兰圆交界采用了不同结构的多模干涉器.二维有限差分束传播法的模拟结果表明,理论上1310nm、1490nm和1550nm波长的3dB带宽分别达到23nm、23.5nm和25nm,插入损耗均为4dB,1310nm波长的串扰小于-40dB,1490nm与1550nm波长间串扰小于-40dB;采用宽带光源测试结果表明,1550nm波长的3dB带宽为23nm,采用三个独立窄带光源测试结果表明,三个波长的插入损耗均为7dB,1310nm波长的串扰小于-40dB,1490nm与1550nm波长间的串扰小于-39dB,测试与模拟结果基本一致.     

Analysis of multiple reflections in hybrid photonic crystal multimode interference coupler

In this paper the analysis of multiple reflections in photonic crystal (PhC) multimode interference (MMI) couplers using eigen-mode expansion method is presented. The analysis is conducted on a hybrid PhC structure which consisted of 1-D PhC multimode waveguide sandwiched between 2-D PhC input/output waveguides. In PhC multimode waveguide, where the mechanism of wave confinement is not due to total internal reflection but due to photonic bandgap properties, the reflectivity at 2-D PhC facet wall would be very large for all the guided modes in the waveguide when ever the image formed due to MMI effect does not coincides with the output access waveguide.     

一阶模的滤除及在Y分支和多模干涉结构中的应用

Y分支和多模干涉结构广泛应用于平面光波导器件中，在这些器件中，Y分支和多模干涉结构输出对称性具有重要意义。引入Y分支和多模干涉结构输出的不对称主要原因是这两种结构中产生了一阶导模，设计一种新的耦合器结构，在这个结构中．两根单模波导分别放置在一根多模波导两边，并且单模波导的传播常量与多模波导的一阶模的传播常量相同，这种结构可以将一阶导模滤除。在Y分支和多模干涉结构中使用了这种结构，模拟结果表明，采用这种耦合器的Y分支和多模干涉结构具有非常好的输出对称性。     

Numerical and experimental investigation of 2 × 2 multimode interference couplers in silica-on-silicon

In this paper we examine, theoretically as well as experimentally, the influence of a number of design parameters for a 2 × 2 multimode interference (MMI) coupler. We confirm that wide access waveguides are preferable but these should not exceed the width of the MMI. It is shown that the waveguide separation can be chosen in a reasonably wide range and that MMI's can be as short as directional couplers. That the imbalance is less than 0.2 dB if the length is within 5% of the optimum. Experimentally we observe the same variation, but at an imbalance of 0.6 dB. We show that this imbalance can be explained by a stress induced parabolic non-uniformity of the refractive index of the core across the MMI width with a peak variation of 5 × 10^–5.     

Simulation and optimization of a polymer 2×2 multimode interference-Mach Zehnder interferometer electro-optic switch with push-pull electrodes

Structural model and design technique are proposed for a polymer 2×2 multimode interference-Mach Zehnder interferometer electro-optic (MMI-MZI EO) switch with push-pull electrodes. The electric field distribution is analyzed by the conformal transforming method and image method. To get the minimum mode loss and half-wave voltage, the parameters of the waveguide and electrodes are optimized, such as the core width, core thickness, buffer layer thickness, size of the MMI couplers and the modulating region, electrode thickness, electrode width, and electrode gap. Switching characteristics are analyzed, including the output power, crosstalk, and wavelength shift. Simulation results show that the half-wave voltage is 0.74 V, the optical 3 dB bandwidth is 12.66 GHz, and the crosstalk is less than −30 dB for the designed device.     

O波段8通道硅基二氧化硅平坦化阵列波导光栅的设计及制备

设计并制作了一款应用于IEEE 200/400GbE标准802.3bs的阵列波导光栅.该阵列波导光栅使用2.0%的超高折射率差硅基二氧化硅材料,使得芯片尺寸及损耗较小.为了获得平坦化的接收光谱,将输出波导进行展宽,采用多模波导结构,激发若干个高阶模,数个模式叠加使得原本高斯状的光谱顶部产生平坦化,形成箱形接收光谱.设计的阵列波导光栅的中心波长为1 291.10nm,通道间隔为800GHz,芯片尺寸为11mm×4mm.经过等离子增强化学气相沉积和感应耦合等离子刻蚀工艺制备了芯片,测试结果表明最小的插入损耗为-3.3dB,相邻通道间串扰小于-20dB,单通道1dB带宽在2.12~3.06nm范围,实现了良好的解复用和平坦化效果,在实际光通信系统中有一定的实用价值.     

Low-Loss 256-Channel AWG Module with Monolithically Integrated Spot-Size Converters

We developed a compact fiber-pigtailed 256-channel AWG module with 1.5% △ waveguides.By monolithically integrating spot-size converters with input/output waveguides, we achieved a lowinsertion loss of 2.6-4.1 dB with a low background crosstalk of -40 dB.     

掩埋式弱限制MMI的性能模拟

采用精确模式分析方法(EMA)对一种掩埋式折射率差为0.47%的弱限制MMI进行了数值模拟,通过和强限制MMI对比表明,这种弱限制的MMI可以实现良好的均衡性(9.7×10-4dB)和附加损耗(0.13dB),比强限制MMI具有更大的带宽,更好的宽度和长度容差性。虽然这种弱限制MMI的最小附加损耗和最佳均衡性不能在同一长度同时获得,但由于其良好的容差性,在最佳均衡性长度处仍能获得低于0.8dB的附加损耗。用紫外写入波导的方法制作掩埋式结构的弱限制MMI器件是可行的。     

Design and characterization of arrayed waveguide gratings using ultra-low loss Si3N4 waveguides

Planar waveguides with ultra-low propagation loss are necessary for integrating optoelectronic systems that require long optical time delay or narrowband optical filters. In this paper, we review an ultra-low loss planar waveguide platform that uses thin (<150 nm) Si₃N₄ cores and thick (>8 μm) SiO₂ cladding layers. In particular, we discuss the performance of arrayed waveguide gratings (AWGs) fabricated with the platform. We propose the use of a practical design method that takes the statistical nature of worst-case crosstalk into account. We also demonstrate the measurement of amplitude and phase error distributions in an AWG using an optical backscatter reflectometer. We show that the waveguides have phase errors small enough to achieve AWG crosstalk below ?30 dB, while crosstalk below ?40 dB should also be possible with optimization of the component design.     

GaAs非对称X结波导混合耦合器的研究

本文报道了ＧａＡｓ非对称Ｘ结波导耦合器的工作原理。该器件制作在ｎ＾－／ｎ＾＋ＧａＡｓ外延材料上。文中采用有效折射率法分析了这个耦合器的分离角、波导脊高及其两个非对称波导传播常数差之间的关系。器件在λ＝１．１５μｍ下测量，得到了小于－２．９ｄＢ的分光性能和小于－２０ｄＢ的串音比。     

减少聚合物阵列波导光栅损耗的蒸气回溶技术

阵列波导光栅(AWG)器件是波分复用(WDM)系统的一种关键器件,其中,聚合物阵列波导光栅由于其制备工艺、器件集成等方面的优势而受到人们的日益关注。侧壁散射损耗是聚合物阵列波导光栅损耗的一个主要因素,减少阵列波导光栅波导的侧壁损耗对制备低损耗阵列波导光栅具有重要意义。一种蒸气回溶技术被用来有效地减少硅基聚合物阵列波导光栅的散射损耗,该技术的机理是饱和溶剂分子融入并软化波导侧壁,增加其流动性,从而降低波导侧壁粗糙度。用扫描电镜方法验证了用该技术能获得更光滑的波导侧壁。对直波导和阵列波导光栅样品进行回溶处理,测试后得到直波导的侧壁散射损耗减少2.1 dB/cm,阵列波导光栅中心信道和周边信道的插入损耗分别减少5.5 dB和6.7 dB,串扰减少2.5 dB。     

采用三维波束传输法的多模干涉耦合器成像位置的数值计算

多模干涉(MMI)耦合器需要精确定位成像位置,以便器件的设计制作。针对强限制和弱限制的三维多模波导干涉耦合器,采用三维交替方向隐式有限差分光束传输法(BPM),数值计算得出多模波导长度、输入波导和输出波导位置。首先通过对对称干涉多模干涉耦合器的数值分析求得多模干涉耦合器的等效宽度Weq及最低二阶模之间的拍长Lc,然后将这些参量结合光束传输法直接用于器件设计。计算显示该方法得到的成像位置和导模传输分析法(MPA)的理论预测比较接近,但Weq和Lc却是由光束传输法计算得到的,导模传输分析法理论只能在得到Weq和Lc的前提下才能得到成像位置。该方法直接针对三维波导进行,没有采用基于等效折射率方法的从三维波导到二维波导的简化处理,并且也没有采用导模传输分析法所采用的近似,保证了计算精度,对于实际多模干涉器件的设计制作可起参考作用。     

阵列波导光栅解复用器输入/输出波导结构串扰的数值分析

本论文采用Marcatili方法分析矩形波导的模场特性,在此基础上计算了AWG波分复用/解复用器串扰与输入/输出波导间隙参数(dr/w),波导结构参数V的变化关系.计算了串扰值一定时,选取V参数与dr/w的关系曲线.分析了在不同折射率差波导中,串扰与偏振的相关性,为器件的整体优化设计提供了参考数据.