电子束光刻的邻近效应及其模拟

用Monte Carlo方法模拟和分析了电子束光刻中限制其分辨率的主要因素——邻近效应的影响.分析了入射电子束的形状、入射电子的能量、衬底材料和厚度对邻近效应大小的影响，并与实验结果进行了比较，发现模拟结果与实验结果符合得很好.分析表明高斯分布的电子束比理想电子束的邻近效应大；衬底原子序数越大，衬底越厚，入射电子束能量越低，邻近效应越大. 关键词： 电子束光刻 邻近效应 Monte Carlo     

电子束在LB抗蚀层及衬底中散射轨迹的Monte—Carlo模拟

研究了高能电子束在ＬＢ膜及多层膜中的输运特性，用Ｍｏｎｔｅ－Ｃａｒｌｏ技术模拟电子在ＬＢ聚甲基丙燃酸甲酯抗蚀层及蒸镀有铬膜的硅衬中的散射轨迹，并讨论了电子束曝光刻蚀应用ＬＢ膜作抗蚀层的优越性。     

Monte Carlo方法研究低能电子束曝光沉积能分布规律

建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率. 关键词： 电子束曝光 MonteCarlo方法 低能电子散射 能量沉积     

厚层抗蚀剂显影轮廓分析

DILL上曝光模型和MACK显影模型，编制了接触式曝光系统的厚层抗蚀剂光刻模拟软件，用其分析在理想曝光剂量条件下，抗蚀剂显影后的线宽和侧壁陡度随显影时间的变化规律，分析得出了给定厚度的抗蚀剂的显影时间，为实验工艺上严格控制显影时间提供依据。     

高能带电粒子库仑对数量子力学效应研究

 先进燃料D-3He聚变产生的高能带电粒子在本底等离子体中慢化时间的准确性直接影响到能量平衡和高能离子压强的计算结果。结果表明：高能带电粒子与本底等离子体的离子相互作用的库仑对数量子力学效应明显。应使用高能带电粒子库仑对数力学效应来研究聚变产生的高能端部粒子慢化过程；能量大于等于25Z²_iZ²_iA_i keV的高能粒子与本底等离子体中离子的相互作用库仑对数最好也使用量子截断。     

锥形激光等离子体中Compton 散射对电子的加速

应用相对论性电子与光子非弹性碰撞模型和经典相对论电动力学理论,结合锥形飞秒强激光等离子体中的光场特性和静电场能,分析、计算了入射的高能电子束与等离子体中的光子发生多光子非线性Compton散射时对电子的加速效应,发现等离子体中的光场会引起电子加速能量的振荡;等离子体中的静电场降低电子的加速效应。用高能电子束与锥形飞秒强激光等离子体中的光子发生双光子非线性Compton散射,是加速电子最为理想的情况。     

电子束重复增量扫描曝光技术

 提出了电子束重复增量扫描曝光技术新概念，对吸收能量密度与深度和曝光剂量之间的关系、溶解速度与吸收能量密度之间的关系进行了理论分析，发现溶解速度随曝光剂量增加而增大。以此为依据，在SDS-3型电子束曝光机上采用20 keV能量的电子束对570 nm厚的聚甲基丙烯酸甲酯进行了7次重复增量扫描曝光实验，得到了轮廓清晰的梯锥和圆锥3维结构，证明了电子束重复增量扫描曝光技术的可行性，为电子束加工3维结构提供了新工艺。     

电子束放射照相的特性与参数优化

短脉冲强激光产生的电子束具有源尺寸小、脉宽窄、准单能谱等特点, 在放射照相诊断中具有独特作用. 本文通过分析电子在材料中散射并采用蒙特卡罗方法数值模拟, 研究了100 keV到几百MeV能量电子束对有厚度起伏或存在界面的靶的透视, 并与质子、X射线束透视结果比较, 给出了电子束放射照相的特性与参数优化: 基于电子在材料中非弹性散射或能量损失, 选用能量使其射程与靶厚度接近的电子束来诊断靶厚度不均匀性; 基于电子在材料中的弹性散射, 选用射程超过靶厚度的电子束来诊断靶界面.     

SPPs光刻曝光显影模拟研究

基于薄层抗蚀剂的曝光模型,建立了普遍适应于表面等离子体激元光刻的抗蚀剂曝光模型.选用AZ1500和AR3170两种抗蚀剂对表面等离子体激元干涉光刻曝光显影过程进行计算对比,获得表面等离子体激元光刻显影的最终轮廓.由此得出工艺优化的条件,对表面等离子体激元光刻的进一步工作和实验开展有着重要的意义.     

SPPs光刻曝光显影模拟研究

基于薄层抗蚀剂的曝光模型,建立了普遍适应于表面等离子体激元光刻的抗蚀剂曝光模型.选用AZ1500和AR3170两种抗蚀剂对表面等离子体激元干涉光刻曝光显影过程进行计算对比,获得表面等离子体激元光刻显影的最终轮廓.由此得出工艺优化的条件,对表面等离子体激元光刻的进一步工作和实验开展有着重要的意义.     

低能电子显微术及其应用

低能电子显微术是新发展起来的一种显微探测技术。它的特点是利用低能（１－３０ｅＶ）电子的弹性背散射使表面实空间实时成像，具有高的横向（１５ｎｍ）和纵向（原子级）分辩率，且易与低能电子衍射及其他电子显微术相结合。近年来它已有效地应用于金属和半导体表面的形貌观测、表面相变、吸附、反应及生长过程的研究。     

On the interpretation of the electron anomalous magnetic moment

Guided by a Compton-sized model, we demonstrate that: (a) the magnetic self-energy of the electron, as estimated initially by Rasetti and Fermi, can be directly related to both the sign and the magnitude of the electron anomalous magnetic moment; and (b) the classical expression for the magnetic self-energy of the electron exhibits the same characteristic logarithmic divergence that occurs in QED. This electron model quantitatively reproduces the spin, magnetic moment, and gyromagnetic ratio of the electron, correct to first order in = e² /c. It also relates the quantum-mechanical spin projection angle to the vanishing of the electric quadrupole moment, and it is capable of reproducing point-like scattering behavior.     

The effects of self-fields on the electron trajectory in a two-stream free electron laser with a helical wiggler and an axial guiding magnetic field

A theory for the two-stream free-electron laser(TSFEL) with a helical wiggler and an axial guide magnetic field is developed.In the analysis,the effects of self-fields are taken into account.An analysis of the two-stream steady-state electron trajectories is given by solving the equation of motion.Numerical calculations show that there are seven groups of orbits in the presence of self-fields instead of two groups reported in the absence of self-fields.The stability of the trajectories is studied numerically.     

Relaxation between electrons and surface phonons of a homogeneously photoexcited metal film

The energy relaxation between the hot degenerate electrons of a homogeneously photoexcited metal film and the surface phonons (phonon wave vectors in two dimensions) is considered under Debye approximation. The state of electrons and phonons is described by equilibrium Fermi and Bose functions with different temperatures. Two cases for electron scattering by the metal surface, namely specular and diffuse scattering, are considered.     

北京自由电子激光器电子束截面监测系统

报告了北京自由电子激光器(BFEL)从30MeV直线加速器出口到摇摆磁铁出口束流输运段的束流截面监测系统。该系统由四台遥控气动可伸缩荧光屏探头、光学放大系统、闭路电视摄象系统及视频图象处理系统组成。利用该系统进行模拟实验,其系统空间分辨率约100μm,达到BFEL总体要求。利用该系统可以测量摇摆磁铁入口处及内部电子束和准直激光的截面、位置和畸变,进行束流准直、聚焦和发射度测量。     

Investigation of the effect of electron cyclotron heating on runaway generation in the KSTAR tokamak

Wave enhanced runaway generation is expected to play an important role in the conversion of plasma current into runaway current during major disruptions. The fast electrons created by electron cyclotron heating (ECH) were used to study this issue in KSTAR. It is found that the fast electrons driven by ECH can enhance runaway production in the flat top phase with high loop voltage. The runaway current in disruptions was not enhanced by the ECH produced fast electron population due to the strong magnetic fluctuations which inhibited the generation of runaway electrons. It is found that a complete loss of existing REs during thermal quench has occurred in KSTAR limiter configuration discharges.     

Near threshold photodetachment cross section of negative atomic oxygen ions

A 40-target state close-coupling calculation for the photodetachment cross section of negative atomic oxygen near threshold is carried out with core－valence electron correlation by using the R-matrix method. It was shown that after considering the excitations of two electrons from the 2s shell, the electron affinity of O^- (2s^22p^5{}^2P°) agrees with the experimental result much better than that just considering the excitations of electrons only from the 2p shell as well as only one electron from the 2s shell. Total cross section as well as the main contribution of the ionization channels to the partial cross section are illustrated to show the structure near threshold clearly.     

Holes drilling in gold and silver decahedral nanoparticles by the convergent beam electron diffraction electron beam

The 200?kV focused electron beam in the convergent beam electron diffraction patterns mode in a transmission electron microscope (TEM) with field emission gun is able to drill holes in gold and silver decahedral nanoparticles. However, although they are done under the same circumstances, the holes are shapeless in the silver and faceted in gold nanoparticles. In addition to this, the holes are closed during their high-resolution TEM observation in both materials. To comment their differences, displacement energy considerations are taken into account as function of the sputtering energy in order to modify the displacement cross-section of the processes.     

Commissioning of electron cooling in CSRe

The 400 MeV/u 12C6＋ ion beam was successfully cooled by the intensive electron beam near 1 A in CSRe.The momentum cooling time was estimated near 15 s.The cooling force was measured in the cases of difierent electron beam profiles,and the difierent angles between the ion beam and electron beam.The lifetime of the ion beam in CSRe was over 80 h.The dispersion in the cooling section was confirmed as positive close to zero.The beam sizes before cooling and after cooling were measured by the moving screen.The beam diameter after cooling was about 1 mm.The bunch length was measured with the help of the signals from the beam position monitor.The difiusion was studied in the absence of the electron beam.