共查询到17条相似文献,搜索用时 359 毫秒
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离焦写入线宽的动态高斯模型 总被引:1,自引:0,他引:1
为提高集成光学器件中的多线宽制作效率,提出了基于激光直接写入技术的离焦加工模式,即加工时激光束的聚焦点不落在胶层表面而是在其前方或后方;同时还建立了基于多个加工参量的线宽数学模型。此线宽模型首先假定激光束经物镜变换后,在像方任意离焦面上的能量仍保持高斯分布,其次还考虑了光束动态扫描引起的光斑线度对曝光能量分布的影响,故称其为动态高斯模型。此线宽模型涉及光功率、基片离焦量、光束扫描速度、胶层曝光能量阈值等加工参量。对线宽模型的验证在自行研发的极坐标型激光图形发生器上进行,实验表明:相对于不考虑光斑运动的静态高斯模型,动态高斯模型更为符合实验结果。 相似文献
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针对目前二元光学元件掩模制作工艺过程的诸多不足,对连续型平面衍射聚光透镜掩模的激光直写制作工艺进行了研究。基于基尔霍夫标量衍射理论,采用光线追迹法设计了连续型平面衍射聚光透镜掩模。采用激光直写技术,利用CLWS 300M/C极坐标激光直写设备、S1830光刻胶和MICROPOSIT 351显影液,进行了刻写实验。实验表明,激光能量、预烘烤温度、显影液浓度以及预曝光对掩模微结构的制作均有影响。最后制作了掩模。与二元光学元件掩模的制作工艺相比,该技术具有工艺简单、制作周期短且易于操作的优点。 相似文献
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为了实时准确地将激光直写系统中经直写物镜聚焦的光斑定位于待加工元件表面,提出了一种基于波像差判据的同步相移显微干涉检焦方法,实现了对离焦量的实时检测与调整。在直写系统中引入检焦光路,与直写光路共享同一物镜,构建Linnik型同步相移显微干涉检焦系统,提取包含离焦量的波面相位信息;再从大数值孔径(NA)的物镜波像差数据中解析出离焦量的大小与方向。仿真结果验证了基于波像差判据的离焦计算方法的正确性,NA≥0.5时,离焦探测灵敏度可达4 nm, 通过实验验证了同步相移显微干涉检焦方法的可行性,检焦精度可达10 nm以内,满足激光直写高精度的测量要求。 相似文献
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针对大角度(大于50°)衍射光学元件低成本、批量化制备的需求,提出一种基于纳米压印技术的制备方法.首先利用光学曝光技术或电子束直写技术制备衍射元件的原始母板,然后将原始母板的结构通过纳米压印过程复制到压印胶上,完成衍射光学元件的制备.由于纳米压印母板可以多次重复使用,降低了制作成本,提高了效率.用该方法制备了不同特征尺寸(最小为250nm,衍射全角为70°)的衍射光学元件,具有良好的衍射效果,实现了对高深宽比浮雕结构的高保真复制.该技术可实现从微米到纳米跨尺度兼容的衍射光学元件的高保真、低成本、批量化制备. 相似文献
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Jiubin Tan 《Optics Communications》2008,281(8):2233-2237
A defocusing exposure dose distribution model is established with the integral effect of light intensity on time taken into account for laser direct writing on a thin photoresist with total reflection substrate. Exposure dose distribution curves are established using the established model for different photoresist depths. A side slope angle is established for each defocusing amount in accordance with the exposure dose distribution curves, and so depth of focus can be estimated by simply checking to see if the maximum side slope angle with the horizontal is in the range of 80-100°. Simulation results indicate that when laser direct writing is done on a thin photoresist with total reflection substrate using a laser with wavelength equal to 442 nm and a lens with numerical aperture equal to 0.5, the depth of focus estimated using the proposed method is 1 μm, which is just 1/3 of the depth of focus estimated using the method based on intensity distribution. It is therefore concluded that it is the integral effect of light intensity on time that causes the depth of focus estimation error, and the proposed method can be used to achieve a more accurate depth of focus estimation compared to the intensity distribution based method. 相似文献
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In industrial processes using fibre beam delivery of high peak power laser light, diffractive optical elements are a very useful and flexible tool in maximising the amount of light reaching the work surface. This is due to the ability of diffractive optical elements to accurately couple light into multiple fibres, while conditioning the light in order to maximise the throughput for each fibre. We discuss the design techniques for diffractive optical elements and the application of these techniques to fibre-coupling problems. The flexibility of diffractive optical elements is demonstrated by their application to several fibre-coupling geometries, including a fibre bundle, a linear array of fibres, and a rotationally symmetric fibre connector. The diffraction efficiencies for the elements approach 90% with uniformity errors of less than 5%. 相似文献
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L. Kuna C. Sommer E. Zinterl J. R. Krenn P. Pachler P. Hartmann S. Tasch G. Leising F. P. Wenzl 《Applied Physics A: Materials Science & Processing》2008,93(2):421-427
We report on the micro-fabrication of diffractive optical elements (DOEs) such as 1D, 2D and concentric grating structures
inside the volume of thin silicone films by femtosecond laser direct writing. In addition, we show that such structures can
also be integrated into silicone films that act as encapsulation layers of high power light-emitting diodes. The latter strategy
opens new possibilities to homogenize and to control the light emitted from such devices. 相似文献
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为确定卷积效应以及深度制作误差对小F数连续浮雕衍射透镜(DOE)轴向聚焦特性影响,基于瑞利-索末菲衍射理论建立了激光直写制作的连续浮雕衍射透镜非旁轴近似轴向光强分布模型.该模型考虑了连续浮雕衍射透镜的轴向衍射聚焦特性与透镜结构参数、写入光斑尺寸和扫描间距以及深度制作误差的关系,克服了傍轴近似条件下传统模型的不精确性.为验证模型的正确性,用激光直写制作了设计波长为441.6 nm,F数为4以及相位匹配因子为3的连续浮雕衍射透镜,并测试了波长441.6 nm激光入射时透镜的轴向聚焦特性.实验与分析表明,该模型分析结果与实验测试结果符合,从而证实模型的有效性,为激光直写制作的小F数连续浮雕衍射透镜的应用提供了理论依据. 相似文献
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Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass 总被引:2,自引:0,他引:2
A new technique of laser-assisted single-step chemical etching for diffractive microlens fabrication upon high-energy-beam sensitive glass is reported. Laser direct writing with calibrated writing parameters results in gray-level mask patterns upon the ion-exchanged layer of the glass. The transmittance-dependent chemical etching upon the glass is then effectively utilized to yield suitable surface relief structures for multiple-phase-level diffractive optical elements. The one-step nonphotolithographic fabrication technique has been successfully applied for the realization of an eight-phase-level diffractive microlens. 相似文献