Subwavelength-resolution direct writing using submicron-diameter fibers

<正>A novel direct writing technique using submicron-diameter fibers is presented.This technique adopts contact mode in the process of writing,and submicron lines with different widths have been obtained. Experimental results demonstrate that the resolution of this technique can be smaller than the exposure wavelength of 442 nm,and 380-nm-wide line is achieved.In addition,the distribution of light fields in the photoresist layer is analyzed by finite-difference time-domain method.     

离焦写入线宽的动态高斯模型

为提高集成光学器件中的多线宽制作效率,提出了基于激光直接写入技术的离焦加工模式,即加工时激光束的聚焦点不落在胶层表面而是在其前方或后方;同时还建立了基于多个加工参量的线宽数学模型。此线宽模型首先假定激光束经物镜变换后,在像方任意离焦面上的能量仍保持高斯分布,其次还考虑了光束动态扫描引起的光斑线度对曝光能量分布的影响,故称其为动态高斯模型。此线宽模型涉及光功率、基片离焦量、光束扫描速度、胶层曝光能量阈值等加工参量。对线宽模型的验证在自行研发的极坐标型激光图形发生器上进行,实验表明:相对于不考虑光斑运动的静态高斯模型,动态高斯模型更为符合实验结果。