CuO薄膜的制备及其光伏特性

通过反应磁控溅射在n型硅和玻璃衬底上制备了p型CuO薄膜.使用X射线衍射仪和紫外-可见光-近红外光度计研究了p型CuO薄膜的结构和光学特性,得出其平均晶粒尺寸和光学带隙分别为8nm和1.36eV.通过研究其电压-电流关系确定了在p型CuO薄膜和n型硅衬底之间形成了p-n结.在AM 1.5光照条件下p-CuO/n-Si电池的开路电压为0.33V,短路电流密度为6.27mA/cm2,填充因数和能量转化效率分别为0.2和0.41%.     

氧化锌/金刚石薄膜异质结紫外光探测器

采用射频磁控溅射法在p型自支撑金刚石衬底上制备了高度c轴取向的n型氧化锌薄膜.研究了不同的溅射功率对氧化锌薄膜质量的影响.通过半导体特性分析系统测试了氧化锌/金刚石异质结的电流-电压特性,结果显示该异质结二极管具有良好的整流特性,开启电压约为1.6 V.在此基础上制备了结型紫外光探测器,并对其光电性能进行了研究.结果表...     

ZnO/Si异质结的光电转换特性研究

利用直流反应溅射方法在p型Si衬底上生长掺Al的n型ZnO薄膜,测量了由n型ZnO薄膜和p型Si衬底组成的异质结在黑暗和光照条件下的I-V特性,结果表明该异质结具有优良的整流特性,而且在光照条件下的反向电流迅速增大并很快趋于饱和.通过测量ZnO薄膜的光电流和异质结的光电压的光谱响应,初步分析了异质结的光电转换机理.测量结果显示,在入射光波长为380nm时光电流强度明显下降,反映出光电流与ZnO薄膜禁带宽度的密切关系;同时还发现,在与ZnO禁带宽度相对应的波长前后所产生的光生电压方向相反.推测这一现象与异质结的能带结构密切相关. 关键词： ZnO薄膜 异质结 光电转换 光谱响应     

CuO薄膜的三阶非线性光学特性研究

采用脉冲激光沉积技术在Si(100)和熔石英基片上制备了单相的CuO薄膜.通过X射线衍射仪,拉曼光谱仪,场发射扫描电镜和紫外可见光光度计对薄膜的结构,表面形貌和光学性质进行了表征. 场发射扫描电镜结果表明CuO薄膜中晶粒排列致密且分布均匀,其尺寸约为45nm.结合飞秒激光(800nm,50fs)和Z扫描方法测量了薄膜的三阶非线性光学特性,结果表明CuO薄膜具有超快的非线性光学响应且非线性折射率和非线性吸收系数均为负值,其大小分别为-3.96×10^-17 m^{2< 关键词： CuO薄膜 Z-扫描')" href="#">Z-扫描 三阶光学非线性}     

氧氩比对SnO2/Ag/SnO2透明导电膜光电性能的影响

在室温及不同的氧氩比条件下,采用射频磁控溅射Ag层和直流磁控溅射SnO₂层,在载玻片衬底上制备出了SnO₂/Ag/SnO₂多层薄膜.用霍尔效应测试仪、四探针电阻测试仪和紫外-可见-近红外光谱仪等表征了薄膜的电学性质和光学性质.实验结果表明:当氧氩比为1:14时,所制得的薄膜的光电性质优良指数最大,为1.69×10^-2 Ω^-1;此时,薄膜的电阻率为9.8×10^-5 Ω·cm,方电阻为9.68 Ω/sq,在400~800 nm可见光区的平均光学透射率达85%;并且,在氧氩比为1:14时,利用射频磁控溅射Ag层和直流磁控溅射SnO₂层在PET柔性衬底上制备出了光电性质优良的柔性透明导电膜,其在可见光区的平均光学透过率达85%以上,电阻率为1.22×10^-4 Ωcm,方电阻为12.05 Ω/sq.     

化学溶液法制备的Pb(Mg1/3 Nb2/3)O3-PbTiO3薄膜的光学性能

用化学溶液方法在宝石衬底及有LaNiO3缓冲层的Pt/TiO2/SiO2/Si衬底上制备了92%Pb(Mg1/3 Nb2/3)O3-8%PbTiO3(PMNT)薄膜,X射线衍射测试结果表明:在有LaNiO3缓冲层的Pt/TiO2/SiO2/Si衬底上制备的PMNT薄膜几乎是纯钙钛矿相,且薄膜呈现(110)择优取向.通过对Pt/TiO2/SiO2/Si衬底上的PMNT薄膜在2.5-12.6μm波长范围内的红外椭圆偏振光谱测试,并拟合得到了PMNT薄膜在2.5-12.6μm波长范围内的光学常数(n和k),通过对宝石衬底上的PMNT薄膜在200-1100nm波长范围内的可见-紫外透过率测试,并拟合得到了PMNT薄膜在200-1100nm波段的光学常数(n和k)和吸收系数α,进而推导出PMNT薄膜的禁带宽度为4.03eV.     

p型ZnO薄膜的制备及特性

采用射频磁控溅射在Si片上制备ZnO薄膜，通过离子注入对样品进行N掺杂，在不同温度下进行退火并实现了p型转变.用扫描电子显微镜、X射线衍射和Hall测量对薄膜进行了表征，结果表明薄膜具有良好的表面形貌和高度c轴择优取向，退火后p型ZnO薄膜的最高载流子浓度和最低电阻率分别为1.68×10¹⁶cm^-3和41.5Ω·cm.讨论并分析了退火温度和时间对ZnO薄膜p型转变的影响.     

牺牲Ni退火对硅衬底GaN基发光二极管p型接触影响的研究

本文通过在硅衬底发光二极管(LED)薄膜p-GaN表面蒸发不同厚度的Ni覆盖层,将其在N₂ ∶O₂=4 ∶1的气氛中、400℃—750℃的温度范围内进行退火,在去掉薄膜表面Ni覆盖层之后制备Pt/p-GaN欧姆接触层.实验结果表明:退火温度和Ni覆盖层厚度均对硅衬底GaN基LED薄膜p型欧姆接触有重要影响,Ni覆盖退火能够显著降低p型层中Mg受主的激活温度.经牺牲Ni退火后,p型比接触电阻率随退火温度的升高呈先变小后变大的规律,随Ni覆盖层厚度的增加呈先变小后变 关键词： 氮化镓 发光二极管 牺牲Ni退火 p型接触     

衬底温度和硼掺杂对p型氢化微晶硅薄膜结构和电学特性的影响

以B₂H₆为掺杂剂,采用射频等离子体增强化学气相沉积技术在玻璃衬底上制备p型氢化微晶硅薄膜.研究了衬底温度和硼烷掺杂比对薄膜的微结构和暗电导率的影响.结果表明：在较高的衬底温度下很低的硼烷掺杂比即可导致薄膜非晶化;在实验范围内,随着衬底温度升高薄膜的晶化率单调下降,暗电导率先缓慢增加然后迅速下降,变化趋势与硼烷掺杂比的影响极为相似.最后着重讨论了p型氢化微晶硅薄膜的生长机理. 关键词： p型氢化微晶硅薄膜 衬底温度 晶化率 电导率     

微晶硅n-i-p太阳电池中n型掺杂层对本征层结构特性的影响

采用高压射频等离子体增强化学气相沉积方法在非晶和微晶两种n型硅薄膜衬底上沉积了一系列不同厚度的本征微晶硅薄膜,研究了不同n型硅薄膜对本征微晶硅薄膜的表面形貌、晶化率和结晶取向等结构特性的影响.结果表明,本征微晶硅薄膜结构对n型掺杂层具有强烈的依赖作用,微晶n型掺杂层能够有效减少n/i界面非晶孵化层的厚度,改善本征微晶硅薄膜的纵向均匀性,进而提高微晶硅n-i-p太阳电池性能. 关键词： 孵化层 微晶硅薄膜 纵向均匀性 n-i-p太阳电池     

Polycrystalline GaSb films prepared by the coevaporation technique

Gallium antimonide (GaSb) films were deposited onto fused silica and n-Si (100) substrates by coevaporating Ga and Sb from appropriate evaporation sources. The films were polycrystalline in nature. The size and the shape of the grains varied with the change in the substrate temperature during deposition. The average surface roughness of the films was estimated to be 10 nm. Grain boundary trap states varied between 2×10¹² and 2.2×10¹² cm^?2 while barrier height at the grain boundaries varied between 0.09 eV and 0.10 eV for films deposited at higher temperatures. Stress in the films decreased for films deposited at higher temperatures. XPS studies indicated two strong peaks located at ～543 eV and ～1121 eV for Sb 3d_3/2 and Ga 2p_3/2 core-level spectra, respectively. The PL spectra measured at 300 K was dominated by a strong peak located ～0.55 eV followed by two low intensity peaks ～0.63 eV and 0.67 eV. A typical n-Si/GaSb photovoltaic cell fabricated here indicated V _oc～311 mV and J～29.45 mA/cm², the density of donors (N _d)～3.87×10¹⁵ cm^?3, built in potential (V _bi)～0.48 V and carrier life time (τ)～28.5 ms. Impedance spectroscopy measurements indicated a dielectric relaxation time ～100 μs.     

Fabrication and characterization of dual-band organic/inorganic photodetector for optoelectronic applications

In this work, the optoelectronic performance of organic/inorganic heterojunction photodiode based on alpha-sexithiophene (α-6T/n-Si) is introduced. A thin film of α-6T was deposited on the n-type silicon substrate by a thermal evaporation technique. The topographical properties of the α-6T thin film grown on the n-Si substrate were investigated using a field emission scanning electron microscope (FESEM) technique. A network of nanocrystalline needles over the film surface was observed which give rise to an improvement in the electric charge transport. The optical properties of the prepared thin film were investigated using a spectrophotometric technique. The high absorption of α-6T in UV and visible region suggested the ability of this architecture for UV and visible light detection. The I-V characteristics of the fabricated photodiode were investigated in dark and under different illumination intensities and different wavelengths. The present architecture showed a good response to halogen lamb light, where the estimated values of rising and falling time at 160 mW/cm² were about 400 ms and 450 ms, respectively. The results show the possibility of using Au/α-6T/n-Si/Al structure as a photodetector for a wide range of the solar spectrum (UV–Visible).     

用于聚合物介电材料的双硅氧烷链接的环化聚合物

We studied the dielectric properties of organosilicon-containing helical cyclopolymer PbMA which consists of PMMA main chains and tetramethyldisiloxane side rings. PbMA formed films with excellent uniformity through spin-coating onto highly n-doped silicon (n-Si) wafers for constructing devices of dielectric measurements, on which the dielectric properties and I-V characteristics of PbMA were studied. PbMA has a much lower dielectric constant (lower than 2.6) in the frequency range of 10-10⁵ Hz, and better thermal stability than PMMA does. I-V data showed that the metal/PbMA/n-Si devices have different conducting directions, depending on whether Au or Al deposited over PbMA layers.     

Pulsed laser deposited ZrAlON films for high-k gate dielectric applications

ZrAlON films were fabricated using the reactive ablation of a ceramic ZrAlO target in N₂ ambient by pulsed laser deposition (PLD) technique. ZrAlON films were deposited directly on n-Si(100) substrates and Pt coated silicon substrates, respectively, at 500 °C in a 20 Pa N₂ ambient, and rapid thermal annealed (RTA) in N₂ ambient at 1000 °C for 1 min. Cross sectional high-resolution transmission electron microscopy (HRTEM) images clearly show that the ZrAlON/Si interface is atomically sharp without an interfacial layer, and the films are completely amorphous. The electron diffraction pattern of TEM also indicates the amorphous structure of the RTA ZrAlON film. X-ray photoelectron spectroscopy (XPS) measurement was performed to confirm the effective incorporation of nitrogen with a content of about 6 at. %, and to reveal the N–O bonding in ZrAlON films. The dielectric constant of amorphous ZrAlON was determined to be about 18.2 which is more than 16.8 for ZrAlO by measuring the Pt/films/Pt capacitors. Capacitance–voltage (C–V) measurements show that a small equivalent oxide thickness (EOT) of 1.03 nm for 4 nm ZrAlON film on the n-Si substrate with a leakage current of 28.7 mA/cm² at 1 V gate voltage was obtained. PACS 77.55.+f; 81.15.Fg; 73.40.Qv     

Characteristics of SrBi2Ta2O9 ferroelectric films on Si using LaAlO3 thin film as an insulator

Metal–ferroelectric–insulator–semiconductor structures using LaAlO₃ (LAO) layers as an insulating barrier have been investigated. LAO films were deposited on n-Si substrates by low-pressure metalorganic chemical vapor deposition (MOCVD). SrBi₂Ta₂O₉ (SBT) films were prepared as ferroelectric layers at a low processing temperature of 650 °C by a metalorganic decomposition method. The MOCVD-derived LAO buffer layer shows an amorphous structure, relatively high dielectric constant, and good electrical properties. Au/SBT/LAO/n-Si exhibits a larger counterclockwise C–V memory window of 3.7 V and a lower leakage-current density of 2.5×10^-8 A/cm² at an applied voltage of 10 V. It has been confirmed that the hysteresis loop is caused by ferroelectricity. The Auger electron spectrometry depth profile indicates that the introduction of the LAO buffer layer prevents the interfacial diffusion between SBT and the Si substrate effectively and improves the interface quality. PACS 77.84.Dy; 81.15.Fg     

Room temperature weak ferromagnetism and magnetoconductance in functional CuO film

The granular CuO films are deposited on n-Si (1 0 0) and sapphire substrates using sol-gel route. Small microstrain leads to ∼5 times larger grain sizes (200-300 nm) and ∼2.5 times larger film thickness (∼0.57 μm) for sapphire than n-Si substrate, which are confirmed by X-ray diffraction and Atomic Force Microscopy. A diode-like current-voltage characteristics are observed for film deposited on n-Si substrate, which is absent for sapphire substrate. Typical manifestation of ferromagnetic character is observed for CuO films, which are strongly influenced by the substrates. Magnetic anisotropy is larger for sapphire substrate than n-Si substrate. At room temperature considerably large magnetoconductance ∼21% and soft ferromagnetic character of CuO film on n-Si substrate are attractive for functional applications.     

Preparation and characterization of iron oxide thin films by spray pyrolysis using methanolic and ethanolic solutions

Iron oxide thin films have been obtained by spray pyrolysis using 100% methanolic and ethanolic solutions of iron tri-chloride. The films were deposited onto ITO-coated glass substrates. The preparative conditions have been optimized to obtain compact, pin-hole-free and smooth thin films which are adherent to the substrate. The structural, morphological and compositional characterizations have been carried out by X-ray diffraction, scanning electron microscopy and energy dispersive X-ray analysis. The films deposited using ethanolic solution results into pure hematite; α-Fe₂O₃ thin films, however, films deposited using methanolic solution consists of hematite and maghemite-c phases of iron oxide. The films are nanocrystalline with particle size of 30-40 nm. The optical absorbance of the film was of the order of 10⁵ cm⁻¹. The optical band gap of films was found to be 2.26 and 2.20 eV for the films deposited using methanolic and ethanolic solutions, respectively.     

沉积工艺条件对金刚石薄膜红外椭偏光学性质的影响

采用红外椭圆偏振光谱仪对不同工艺条件下制备的CVD金刚石薄膜在红外波长范围内的光学参量进行了测量，分析了工艺条件对金刚石薄膜红外光学性质的影响.获得了最佳的沉积工艺参数，优化了薄膜的制备工艺.结果表明薄膜的折射率和消光系数与薄膜质量密切相关，当温度为750℃，碳源浓度为0.9%和压强为4.0 kPa时，金刚石薄膜的红外椭偏光学性质最佳，折射率平均值为2.385，消光系数在10^-4范围内，在红外波段具有良好的透过性. 关键词： 薄膜光学 红外光学性质 工艺条件 金刚石薄膜     

银薄膜对光学基底表面粗糙度及光散射的影响

为了研究金属银薄膜与光学基底表面粗糙度和光散射的关系,提出了通过对光学薄膜矢量散射公式积分来获得界面粗糙度完全相关模型和完全非相关模型下其表面的总反射散射的方法.理论计算了光学基底上两种模型在不同厚度银膜下的总反射散射和双向反射分布函数.结果表明,当沉积在光学基底上的银薄膜的厚度大于80 nm后,两种模型下计算的银薄膜的表面总反射散射都等于基底的总积分散射,银薄膜能较好地复现出基底的粗糙度轮廓.实验研究表明为了复现基底的粗糙度,银薄膜的最佳厚度应在80~160 nm之间.