双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Inherent electrochemical activity of TiO2 (anatase,rutile) enhances the charge capacity of cathodes of lithium-sulfur batteries

Journal of Solid State Electrochemistry - The addition of nanocrystalline titanium dioxide (P90) to a cathode of Li/S cell enhances its voltammetric charge capacity by 19%, from which only a small...     

Phase Transitions in the Diluted Two-Dimensional Potts Model with the Number of Spin States q = 3 on a Square Lattice

Physics of the Solid State - The phase transitions in the two-dimensional diluted Potts model with the number of spin states q = 3 are studied by computer simulation method. The systems...     

Alpha-gamma decay studies of $$^{247}$$ Md

The European Physical Journal A - The goal of the present paper is twofold. First, a novel expansion many-body method applicable to superfluid open-shell nuclei, the so-called Bogoliubov in-medium...     

Determination of Vardenafil in Pure and Dosage Forms by Spectrophotometry

Journal of Applied Spectroscopy - Three simple, sensitive, precise, and rapid spectrophotometric methods are developed and optimized for the assay of vardenafil in pharmaceutical formulations. The...     

Plasma Crystal in (3 + 1) Dimensions

JETP Letters - A quasi-two-dimensional plasma crystal in (3 + 1) dimensions has been experimentally observed for the first time; i.e., three spatial coordinates of each microparticles of the...     

On Laser-Induced High-Order Wave Mixing and Harmonic Generation in a Graphene Quantum Dot

JETP Letters - We present results of numerical investigations of high-order wave mixing/harmonic generation (HWM/HHG) with many-body interaction processes derived by a strong two-frequency circular...     

Synthesis and Properties of Magnetically Susceptible Porous Carbon Materials Based on Hydrolysis Lignin Modified with ZnCl2 and FeCl3

Russian Journal of Applied Chemistry - A method for the disposal of hydrolysis lignin waste based on its modification with ZnCl2 and FeCl3 and subsequent carbonization at 800°C was proposed....     

Structural,Computational and 3D Interaction Energy Calculations of the Compound 2-chloro-3-(1-napthyl)-5,5-dimethyl-2-cyclohexenone

Crystallography Reports - The molecular structure of 2-chloro-3-(1'-napthyl)-5,5-dimethyl-2- cyclohexenone was determined by single crystal X-ray diffraction. The compound crystallized in a...     

Nonlinear elastic constitutive relations of residually stressed composites with stiff curved fibres

Applied Mathematics and Mechanics - Mechanical models of residually stressed fibre-reinforced solids, which do not resist bending, have been developed in the literature. However, in some residually...