Photoresponse of the In0.3Ga0.7N metal-insulator-semiconductor photodetectors

In0.3Ga0.7N metal-insulator-semiconductor （MIS） and metal-semiconductor （MS） surface barrier photodetectors have been fabricated. The In0.3Ga0.7N epilayers were grown on sapphire by metalorganic chemical vapour deposition （MOCVD）. The photoresponse and reverse current-voltage characteristics of the In0.3Ga0.7N MIS and MS photodetectors were measured. A best zero bias responsivity of 0.18 A/W at 450 nm is obtained for the In0.3Ga0.7N MIS photodetector with 10 nm Si3N4 insulator layer, which is more than ten times higher than the In0.3Ga0.7N MS photodetector. The reason is attributed to the decrease of the interface states and increase of surface barrier height by the inserted insulator. The influence of the thickness of the Si3N4 insulator layer on the photoresponsivity of the MIS photodetector is also discussed.     

Au/Pt/InGaN/GaN Heterostructure Schottky Prototype Solar Cell

A patterned Au/Pt/In0.2Ga0.8N/GaN heterostructure Sehottky prototype solar cell is fabricated. The forward current-voltage characteristics indicate that thermionie emission is a dominant current transport mechanism at the Pt/InGaN interface in our fabricated cell. The Sehottky solar cell has an open-circuit voltage of 0.91 V, short-circuit current density of 7mA/cm^2, and fill factor of 0.45 when illuminated by a Xe lamp with a power density of 300 mW/cm^2. It exhibits a higher short-circuit current density of 30 mA/cm^2 and an external quantum efficiency of over 25% when illuminated by a 20-roW-power He-Cd laser.     

AlGaN/GaN异质结构中极化与势垒层掺杂对二维电子气的影响

从Ⅲ族氮化物中压电极化对应变弛豫度的依赖关系出发，通过自洽求解薛定谔方程和泊松方程,分别研究了自发极化、压电极化和AlGaN势垒层掺杂对AlxGa1-xN/GaN异质结构二维电子气的浓度、分布、面密度以及子带分布等性质的影响.结果表明：二维电子气性质强烈依赖于极化效应,不考虑AlGaN势垒层掺杂，当Al组分为0.3时，由极化导致的二维电子气浓度达1.6×10--13cm-2,其中压电极化对二维电子气贡献为0.7×10-13cm-2，略小于自发极化的贡献(0.9×10-13cm-2)，但为同一数量级，因而通过控制AlGaN层应变而改变极化对于提高二维电子气浓度至关重要. AlGaN势垒层掺杂对二维电子气的影响较弱, 当掺杂浓度从1×10-17增加到1×10-18cm-3时，二维电子气面密度增加0.2×10-13cm-2. 关键词： AlxGa1-xN/GaN 异质结构 二维电子气 自发极化 压电极化     

InN薄膜的氧化特性研究

研究了InN薄膜在不同氧气氛中的氧化特性. 研究表明，在400 ℃以下，InN薄膜很难被氧化，而金属In很容易被氧化. 因此富In的InN薄膜的氧化在400 ℃以下主要是金属In的氧化，在400 ℃以上为金属In和InN的同时被氧化. 在400 ℃以上的氧化过程中，InN的表观氧化速率非常慢，这可能和InN的高温分解有关. InN的湿氧和干氧氧化结果说明湿氧氧化速率比干氧快. 关键词： InN 氧化铟 氧化 X射线衍射     

Influence of Polarization Effects on the Energy Band of AlGaN／GaN／AlGaN Heterostructures

The unintentionally doped samples of Al0.22Ga0.78N/GaN/Al0.22Ga0.78N/GaN multi-heterostructures have been designed and fabricated. The polarization induced charge and free-carrier charge distributions have been demonstrated and the energy band profile has also been calculated. The results indicate the existence of two-dimensional     

Investigation into the Energy Band Diagram and Charge Distribution in A1GaN／GaN Double Heterostructures by Self-Consistent Poisson-Schroedinger Calculations

The energy band diagram and charge distribution of the unintentional doped AIGaN/GaN/AIGaN/GaN double heterostructure were obtained by self-consistent Poisson Schroedinger calculations. The severe band tilting and high two-dimensional electron gas (2DEG) density mainly attribute to the large internal polarization intensity,which is c/ose to a linear function orAl composition. The influence orAl composition is investigated. The results show that band tilting enlarges and 2DEG gains with AI composition, and two-dimensional hole gas occurs when AI composition reaches a certain extent. The influence orAl composition and two-dimensional hole gas (2DHG)on devices is discussed.     

Photocurrent properties of high-sensitivity GaN ultraviolet photodetectors

GaN epilayers were grown on sapphire substrates by metal-organic chemical vapour deposition. Metal-semiconductor-metal photoconductive detectors were fabricated using this material. The photocurrent properties of the detectors were measured and analysed. The spectrum response shows a high sensitivity in the wavelength region from 330 to 360nm, with a peak at 358um and a sharp cutoff near 360nm. The maximum responsivities at 358nm were 700A/W (2V) and 7000A/W (30V). The relationship between responsivity and bias indicates that the responsivity increases linearly with bias until 30V. The influence of the spacing between two electrodes on the detector responsivity was also studied.     

Photocurrent properties of high—sensitivity GaN ultraviolet photodetectors

GaN epilayers were grown on sapphire substrates by metal-organic chemical vapour deposition. Metal－semiconductor－metal photoconductive detectors were fabricated using this material. The photocurrent properties of the detectors were measured and analysed. The spectrum response shows a high sensitivity in the wavelength region from 330 to 360nm, with a peak at 358nm and a sharp cutoff near 360nm. The maximum responsivities at 358nm were 700A/W (2V) and 7000A/W (30V). The relationship between responsivity and bias indicates that the responsivity increases linearly with bias until 30V. The influence of the spacing between two electrodes on the detector responsivity was also studied.     

AlN-Si(111)异质结构界面陷阱态研究

利用Al_AlN_Si(111) MIS结构电容_频率谱研究了金属有机化学气相沉积法生长的 Si 基AlN的AlN_Si异质结构中的电荷陷阱态. 揭示了AlN_Si异质结构界面电荷陷阱态以及A lN层中的分立陷阱中心. 结果指出：AlN层中存在E_t-E_v=2.55eV的分立陷阱中心；AlN_Si界面陷阱态在Si能隙范围内呈连续分布，带中央态密度最低，N_ss为8×10^11eＶ^-1cm^-2，对应的时间常数τ为8×10^-4s ，俘获截面σn为1.58×10^-14cm^2；在AlN界面层存在三种陷阱 态，导致Al_AlN_Si异质结构积累区电容的频散. 关键词： 界面陷阱态 AlN-Si 电容-频率谱     

用于紫外探测器DBR结构的高质量AlGaN材料MOCVD生长及其特性研究

利用MOCVD方法在(0001)取向的蓝宝石衬底上实现了不同工艺条件下的高质量AlGaN材料的制备.得到了无裂纹的全组分Al_xGa_1-xN(0<x<1)薄膜.通过XRD，SEM，AFM等测量分析方法系统研究了生长工艺参数对材料的结构质量、组分、厚度和表面形貌的影响.分析了不同生长工艺对AlGaN材料特性的影响.研制的高质量AlGaN材料在紫外探测器的DBR结构应用中得到比较好的特性.