双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Visible-light-induced,autopromoted nickel-catalyzed three-component arylsulfonation of 1,3-enynes and mechanistic insights

Science China Chemistry - A light-induced, nickel-catalyzed three-component arylsulfonation of 1,3-enynes in the absence of photocatalyst is reported. This methodology exhibited mild conditions,...     

Efficient modeling and order reduction of new 3D beam elements with warping via absolute nodal coordinate formulation

Nonlinear Dynamics - To describe the particular mechanical behaviors of beams with both uniform and non-uniform cross sections, such as the bidirectional bending, torsion-bending coupling, the...     

Geometric inequalities for free boundary hypersurfaces in a ball

Annals of Global Analysis and Geometry - In this paper, we prove a family of sharp geometric inequalities for free boundary hypersurfaces in a ball in space forms.     

Dynamic behavior and stability analysis of nonlinear modes in the fourth-order generalized Ginzburg–Landau model with near $$\mathcal{PT}$$ PT -symmetric potentials

Nonlinear Dynamics - Parametrically excited oscillators are used in several domains, in particular to improve the dynamical behaviour of systems like in the case of the parametric amplification or...     

非线性玻尔兹曼方程的傅里叶谱方法

玻尔兹曼方程作为空气动理学中最基本的方程之一,是连接微观牛顿力学和宏观连续介质力学的重要桥梁.该方程描述了一个由大量粒子组成的复杂系统的非平衡态时间演化:除了基本的输运项,其最重要的特性是粒子间的相互碰撞由一个高维,非局部且非线性的积分算子来描述,从而给玻尔兹曼方程的数值求解带来非常大的挑战.在过去的二十年间,基于傅里叶级数的谱方法成为了数值求解玻尔兹曼方程的一种很受欢迎且有效的确定性算法.这主要归功于谱方法的高精度及它可以被快速傅里叶变换加速的特质.本文将回顾玻尔兹曼方程的傅里叶谱方法,具体包括方法的导出,稳定性和收敛性分析,快速算法,以及在一大类基于碰撞的空气动理学方程中的推广.     

Experimental study on the runaway behaviors of Panasonic 21,700 LiNi0.8Co0.15Al0.05O2 battery used in electric vehicle under thermal failure

Journal of Thermal Analysis and Calorimetry - Thermal runaway phenomena of the Panasonic 21,700 LiNi0.8Co0.15Al0.05O2 lithium-ion batteries with 100, 50 and 25% capacity were studied under thermal...     

Nonlinear compressed sensing-based adaptive modal shapes selection approach for efficient dynamic response analysis of flexible multibody system

Nonlinear Dynamics - The modal truncation is usually used in the dynamic response analysis of flexible multibody systems, in which, appropriate selection of modal shapes is very critical to achieve...     

Differential Entropy of Induced Random State Ensemble

International Journal of Theoretical Physics - In this paper, we will consider the exact calculation of differential entropy of induced random state ensemble by partial tracing a subsystem over...     

硅和锗纳米线的原子排布和电荷分布的密度泛函紧束缚方法研究

低维硅锗材料是制备纳米电子器件的重要候选材料，是研发高效率、低能耗和超高速新一代纳米电子器件的基础材料之一，有着潜在的应用价值。采用密度泛函紧束缚方法分别对厚度相同、宽度在0.272 nm~0.554 nm之间的硅纳米线和宽度在0.283 nm~0.567 nm之间的锗纳米线的原子排布和电荷分布进行了计算研究。硅、锗纳米线宽度的改变使原子排布，纳米线的原子间键长和键角发生明显改变。纳米线表层结构的改变对各层内的电荷分布产生重要影响。纳米线中各原子的电荷转移量与该原子在表层内的位置相关。纳米线的尺寸和表层内原子排列结构对体系的稳定性产生重要影响。