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就如何在4英寸热氧化硅衬底上沉积高质量的磁性隧道结纳米多层薄膜材料和如何利用光刻方法微加工制备均匀性较好的磁性隧道结方面做了初步研究,并对磁性隧 道结的磁电性质及其工作特性进行了初步测量和讨论.利用现有的光刻设备和工艺条 件在4英寸热氧化硅衬底上直接制备出的磁性隧道结,其结电阻与面积的积 矢的绝对误差在10% 以内,隧穿磁电阻的绝对误差在7% 以内,样品的磁性隧道结性质具有较好的均匀性和一致性,可以满足研制磁随机存储器存储单元演示器件的基本要求.
关键词:
磁性隧道结
隧穿磁电阻
磁随机存储器
4英寸热氧化硅衬底 相似文献
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磁性隧道结材料中自旋相关的量子阱态所导致的共振隧穿现象具有很重要的研究和应用价值,文章介绍了最近在Fe(001)/MgO/Fe/MgO/Fe双势垒磁性隧道结中存在的量子阱共振隧穿效应的理论研究工作,通过量子阱态的第一性原理的计算以及结合对中间Fe薄膜孤岛结构所导致Coulomb阻塞效应的分析,证实了最近Nozaki等人(Nozaki T et al.Phys.Rev.Lett.,2006,96:027208)实验中得到的振荡效应确实来源于中间Fe层多数自旋电子在Г点处形成的△1对称性的量子阱态.Coulomb阻塞效应的存在正是导致实验中低温下量子阱共振隧穿效应不够明显的主要原因. 相似文献
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Magnetic tunnel junctions (MTJs) with structures of Ta(5 nm)/Cu(30nm)/Ta(5 nm)/Ni79Fe21 (5 nm)/Ir22Mn78 (12 nm)/Co62Fe20B18 (4 nm)/MgO(d)/Al(0.8 nm)-oxide/Co62Fe20B18 (6 nm)/Cu(30 nm)/Ta(5 nm) on a thermally oxidized Si wafer substrate were fabricated by magnetron sputtering and photolithographic patterning method. The tunnel magnetoresistance (TMR) and the bias dependence of TMR at room temperature for the MTJs with different thickness d of MgO are investigated. TMR values of over 50% as high as those of the MTJs with pure Al-O barrier and the TMR-voltage curve asymmetries, which vary with the increase of d, are observed in the MTJs with hybrid barriers after annealing at 265℃ for an hour. The dependences of TMR, resistance and coercivity of the MTJs with composite barriers on temperature are also investigated. 相似文献
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本文采用EAM作用势,通过平衡分子动力学(EMD)模拟的方法计算了Co熔体的自扩散系数、剪切粘度等物理性质.同时采用非平衡分子动力学(NEMD)方法计算了Co的剪切粘度.研究表明有关传输性质的计算是可与实验比较的,能够反映出液态Co典型的动力学特性. 相似文献
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The response of superconducting Nb films with a diluted triangular and square array of holes to a perpendicular magnetic field are investigated.Due to small edge-to-edge separation of the holes,the patterned films are similar to multi-connected superconducting islands.Two regions in the magnetoresistance R(H) curves can be identified according to the field intervals of the resistance minima.Moreover,in between these two regions,variation of the minima spacing was observed.Our results provide strong evidence of the coexistence of interstitial vortices in the islands and fluxoids in the holes. 相似文献
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近年来,自旋晶体管作为具有强大功能的未来集成电路的组成部分已得到相当多的关注.实现自旋晶体管,至关重要的是提高半导体中自旋注入和自旋检测的效率.然而,这并非容易,因为在实际中的铁磁/半导体界面存在很多问题. 相似文献
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