软刻蚀及其应用

软刻蚀是一类基于自组装和复制模塑等原理的非光刻微米和纳米加工方法。它为形成和制作微米、纳米图案提供了简便、有效、价廉的途径。在软刻蚀中，用一个表面带图案的弹性模板来实现图案的转移，其加工的分辨率可达30nm－100μm。软刻蚀是微接触印刷、复制模塑、转移微模塑、毛细微模塑、溶剂辅助微模塑等的总称。本文将简介软刻蚀的原理、方法以及它们在微米和纳米加工、微电子学、材料科学、光学、微电子机械系统、表面化学等方面的应用。     

In situ fabrication of nanostructured titania coating on the surface of titanium wire: A new approach for preparation of solid-phase microextraction fiber

Nanostructured titania-based solid-phase microextraction (SPME) fibers were fabricated through the in situ oxidation of titanium wires with H₂O₂ (30%, w/w) at 80 °C for 24 h. The obtained SPME fibers possess a ∼1.2 μm thick nanostructured coating consisting of ∼100 nm titania walls and 100-200 nm pores. The use of these fibers for headspace SPME coupled with gas chromatography with electron capture detection (GC-ECD) resulted in improved analysis of dichlorodiphenyltrichloroethane (DDT) and its degradation products. The presented method to detect DDT and its degradation products has high sensitivity (0.20-0.98 ng L⁻¹), high precision (relative standard deviation R.S.D. = 9.4-16%, n = 5), a wide linear range (5-5000 ng L⁻¹), and good linearity (coefficient of estimation R² = 0.991-0.998). As the nanostructured titania was in situ formed on the surface of a titanium wire, the coating was uniformly and strongly adhered on the titanium wire. Because of the inherent chemical stability of the titania coating and the mechanical durability of the titanium wire substrate, this new SPME fiber exhibited long life span (over 150 times).     

Rapid Fabrication of Hollow SiO2 Spheres with Novel Morphology

The hydrolysis of tetraethoxysilane (TEOS) occurred on the surface of poly(methyl methacrylate) (PMMA) microshperes immediately after these microshperes were prepared in TEOS. Micron-sized hollow SiO2 spheres were obtained by calcination of the coated PMMA microshperes. It was found that the final hollow spheres were constituted by small SiO2 particles.     

有序自组装聚合物纳米结构

采用水辅助方法(water-assisted fabrication method),分别以4-十二烷基苯磺酸掺杂的聚苯胺(PANI-DBSA)和聚2-甲氧基-5-(2′-乙烯基-己氧基)苯乙炔(MEH-PPV)两种功能高聚物为成膜材料,冷凝水滴为模板,利用水滴在聚合物溶液表面的自组装,制备出了两种纳米层次以上的蜂窝状有序多孔聚合物薄膜.通过原子力显微镜和共聚焦荧光显微镜对其形貌、电学性质和荧光图像进行了表征.     

Fabrication of high-quality submicron Nb/Al--AlOx/Nb tunnel junctions

Nb/Al-AlOx/Nb tunnel junctions are often used in the studies of macroscopic quantum phenomena and superconducting qubit applications of the Josephson devices. In this work, we describe a convenient and reliable process using electron beam lithography for the fabrication of high-quality, submicron-sized Nb/Al-AlOx/Nb Josephson junctions. The technique follows the well-known selective Nb etching process and produces high-quality junctions with Vm=100 mV at 2.3 K for the typical critical current density of 2.2 kA/cm^2, which can be adjusted by controlling the oxygen pressure and oxidation time during the formation of the tunnelling barrier. We present the results of the temperature dependence of the sub-gap current and in-plane magnetic-field dependence of the critical current, and compare them with the theoretical predictions.     

Combinational synthesis of oligonucleotides and assembly fabrication of oligonucleotide array

In this paper, a simple, reliable and flexible method, which integrated in situ synthesis with the spotting technique, was reported to fabricate oligonucleotide array. Different oligonucleotide sequences are synthesized on their relative code glass slides through combinational chemistry, thus the slides are broken into smaller pieces, in which the same code pieces have the same probe sequences. An oligonucleotide array is fabricated by arbitrarily assembling these different code pieces onto another solid substrate. In principle experimentation, four different sequences of P16 gene were synthesized and a 5 × 5 array including these four sequences and the control black was fabricated. The analysis results indicated that the hybridization fluorescence intensity of the same sequences locating different sets on the array gave the approximate values, and the fluorescence intensity ratio of matched sequence to one middle location base mismatched, two base mismatched, three middle base mismatched is (1.000 ± 0.080):(0.4991 ± 0.0671):(0.2360 ± 0.0044):(0.0493 ± 0.0033). Their relative accuracies were from 6.64 to 10.2%. This result might be used to rapidly screen single-nucleotide polymorphisms (SNPs).     

有机薄膜电致发光器件工艺检测的一种简便方法——覆膜加热观测法

提出了一种简便易行、并与有机薄膜电致发光器件制备工艺完全兼容的工艺检测方法－－覆膜加热观测法。这种方法是在器件的制备工艺过程中,同时在铟锡氧化物（ITO）电极的各层有机薄膜上覆盖一层不透气的薄膜（如金属Al膜等）,接着进行快速加热,最后对器件表面进行形貌观测。采用这种方法,观察了器件表面气泡的形成过程,观察了加热温度、ITO表面处理以及有机物纯度对敢泡形成的影响。实验表明,覆膜加热观测法能有效地对工艺进行对比检测,从而达到改进工艺、提高器件质量的目的。     

非球面光学系统设计、加工及检验的综合考虑

某研究所要求研制一台夜间红外观测系统 ,观测波段为 3～ 5 μm ,焦距 f =90 0mm ,相对口径为 1∶4,视场角 2ω =0 8°。红外焦平面是已有的 ,其冷屏直径为Φ5mm ,冷屏至焦面的距离为 2 0mm。由于从设计开始 ,要求完成的时限很短 ,因此必须将缩短加工周期的问题作为重要因素来考虑。工作在 3～ 5 μm波段 ,首选的必然是非球面反射系统 ,而非球面的加工与检验的难易直接和其参数有关。因此在评价设计结果时 ,不能仅从像质好坏来看 ,还要看其需要的加工周期长短。接受到任务之后 ,首先找到了可行的方案 ,然后设计了几个具体的系统 ,在比较了两个最可行的设计结果之后 ,选择了其中之一。     

光栅制备工艺的新进展

从全息光栅法出发 ,详细阐述了应用偶氮苯聚合物光致表面调制效应制备光栅的新工艺 ,说明使用偶氮苯聚合物薄膜制备光栅方法的特点 ,介绍了采用新工艺制备的光栅的独特性质———光栅可热擦除或光学擦除 ,同时提出应用新材料光栅制造方法所面临的问题。采用新工艺实验制备了薄膜光栅     

Physics and applications of aligned carbon nanotubes

Ever since the discovery of carbon nanotubes (CNTs) by Iijima in 1991, there have been extensive research efforts on their synthesis, physics, electronics, chemistry, and applications due to the fact that CNTs were predicted to have extraordinary physical, mechanical, chemical, optical, and electronic properties. Among the various forms of CNTs, single-walled and multi-walled, random and aligned, semiconducting and metallic, aligned CNTs are especially important since fundamental physics studies and many important applications will not be possible without alignment. Even though there have been significant endeavors on growing CNTs in an aligned configuration since their discovery, little success had been realized before our first report on growing individually aligned CNTs on various substrates by plasma-enhanced chemical vapor deposition (PECVD) [Science 282 (1998) 1105–1108]. Our report spearheaded a new field on growth, characterization, physics, and applications of aligned CNTs. Up to now, there have been thousands of scientific publications on synthesizing, studying, and utilizing aligned CNTs in various aspects. In this communication, we review the current status of aligned CNTs, the physics for their alignment, their applications in field emission, optical antennas, subwavelength light transmission in CNT-based nanocoax structures, nanocoax arrays for novel solar cell structures, etc.

The focus of this review is to examine various aligned CNT systems, either as an individual or as an array, either the orientation is vertical, parallel, or at other angles to the substrate horizon, either the CNT core structures are mostly hollow channels or are composed of complex compartments. Major fabrication methods are illustrated in detail, particularly the most widely used PECVD growth technique on which various device integration schemes are based, followed by applications whereas current limitations and challenges will also be discussed to lay down the foundation for future developments.