排序方式: 共有86条查询结果,搜索用时 7 毫秒
21.
Influence of reaction gas flows on the properties of SiGe:H thin film prepared by plasma assisted
reactive thermal chemical vapour deposition 总被引:1,自引:0,他引:1 下载免费PDF全文
A new preparing technology, very high frequency plasma assisted reactive thermal chemical vapour deposition (VHFPA-RTCVD), is introduced to prepare SiGe:H thin films on substrate kept at a lower temperature. In the previous work, reactive thermal chemical vapour deposition (I~TCVD) technology was successfully used to prepare SiGe:H thin films, but the temperature of the substrate needed to exceed 400℃. In this work, very high frequency plasma method is used to assist RTCVD technology in reducing the temperature of substrate by largely enhancing the temperature of reacting gases on the surface of the substrate. The growth rate, structural properties, surface morphology, photo- conductivity and dark-conductivity of SiGe:H thin films prepared by this new technology are investigated for films with different germanium concentrations, and the experimental results are discussed. 相似文献
22.
Research on the boron contamination at the p/i interface of microcrystalline silicon solar cells deposited in a single PECVD chamber 下载免费PDF全文
This paper studies boron contamination at the interface between the
p and i layers of μ c-Si:H solar cells deposited in a
single-chamber PECVD system. The boron depth profile in the i layer
was measured by Secondary Ion Mass Spectroscopy. It is found that
the mixed-phase μ c-Si:H materials with 40% crystalline
volume fraction is easy to be affected by the residual boron in the
reactor. The experimental results showed that a 500-nm thick μ
c-Si:H covering layer or a 30-seconds of hydrogen plasma treatment
can effectively reduce the boron contamination at the p/i interface.
However, from viewpoint of cost reduction, the hydrogen plasma
treatment is desirable for solar cell manufacture because the
substrate is not moved during the hydrogen plasma treatment. 相似文献
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24.
实验采用脉冲磁控溅射法制备铝掺杂氧化锌(AZO)薄膜.为了进一步提高AZO薄膜的光电性能,在溅射过程中加入一定流量的氢气,以高纯ZnO ∶Al2O3陶瓷靶为溅射靶材,制备AZO/H透明导电薄膜.通过测试薄膜的结构特性、表面形貌及其光电性能,详细地研究了氢气流量对AZO薄膜性能的影响.溅射过程中引入氢气,可以促进薄膜的晶化,提高薄膜的迁移率和透过率(400—1100 nm).采用纯氩气溅射制备AZO薄膜的电阻率为5.664×10-4 Ω·cm
关键词:
氧化锌
氢气流量
磁控溅射
太阳电池 相似文献
25.
采用高压射频等离子体增强化学气相沉积方法在非晶和微晶两种n型硅薄膜衬底上沉积了一系列不同厚度的本征微晶硅薄膜,研究了不同n型硅薄膜对本征微晶硅薄膜的表面形貌、晶化率和结晶取向等结构特性的影响.结果表明,本征微晶硅薄膜结构对n型掺杂层具有强烈的依赖作用,微晶n型掺杂层能够有效减少n/i界面非晶孵化层的厚度,改善本征微晶硅薄膜的纵向均匀性,进而提高微晶硅n-i-p太阳电池性能.
关键词:
孵化层
微晶硅薄膜
纵向均匀性
n-i-p太阳电池 相似文献
26.
The study of a new n/p tunnel recombination junction and its application in a-Si:H/μc-Si:H tandem solar cells 总被引:1,自引:0,他引:1 下载免费PDF全文
This paper reports that a double N layer (a-Si:H/μc-Si:H) is used to substitute the single microcrystalline silicon n layer (n-μc-Si:H) in n/p tunnel recombination junction between subcells in a-Si:H/μc-Si:H tandem solar cells. The electrical transport and optical properties of these tunnel recombination junctions are investigated by current-voltage measurement and transmission measurement. The new n/p tunnel recombination junction shows a better ohmic contact. In addition, the n/p interface is exposed to the air to examine the effect of oxidation on the tunnel recombination junction performance. The open circuit voltage and FF of a-Si:H/μc-Si:H tandem solar cell are all improved and the current leakage of the subcells can be effectively prevented efficiently when the new n/p junction is implemented as tunnel recombination junction. 相似文献
27.
Analysis of heating effect on the process of high deposition rate microcrystalline silicon 下载免费PDF全文
A possible heating effect on the process of high deposition rate microcrystalline silicon has been studied.It includes the discharge time-accumulating heating effect,discharge power,inter-electrode distance,and total gas flow rate induced heating effect.It is found that the heating effects mentioned above are in some ways quite similar to and in other ways very different from each other.However,all of them will directly or indirectly cause the increase of the substrate surface temperature during the process of depositing microcrystalline silicon thin films,which will affect the properties of the materials with increasing time.This phenomenon is very serious for the high deposition rate of microcrystalline silicon thin films because of the high input power and the relatively small inter-electrode distance needed.Through analysis of the heating effects occurring in the process of depositing microcrystalline silicon,it is proposed that the discharge power and the heating temperature should be as low as possible,and the total gas flow rate and the inter-electrode distance should be suitable so that device-grade high quality deposition rate microcrystalline silicon thin films can be fabricated. 相似文献
28.
采用直流脉冲反应磁控溅射方法生长W掺杂ZnO(WZO)透明导电氧化物薄膜并研究了衬底温度对薄膜微观结构、组分、表面形貌以及光电性能的影响.实验结果表明,WZO薄膜具有良好的(002)晶面择优取向,且适当的衬底温度是制备优质WZO薄膜的关键因素.随着衬底温度升高,薄膜表面粗糙度先增大后减小;衬底温度较高时,薄膜的结构致密,结晶质量好,电子迁移率高.当衬底温度为325℃时,WZO薄膜获得最低电阻率9.25×10-3Ω·cm,方块电阻为56.24Ω/□,迁移率为11.8 cm2 V-1·s-1,其在可见光及近红外区域(400—1500 nm)范围的平均透过率达到85.7%. 相似文献
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30.
采用甚高频等离子体增强化学气相沉积技术制备了不同衬底温度的微晶硅薄膜.利用傅里叶变换红外吸收对制备薄膜进行了结构方面的测试分析.结果表明:随衬底温度的升高,材料 中的氢含量总的趋势下降;傅里叶变换红外吸收和二次离子质谱测试结果都显示薄膜中氧含 量随衬底温度的升高而增加(在1019cm-3量级);与高衬底温度相 比,低衬底温度制备的材料易于后氧化,这说明低温制备材料的稳定性不好.
关键词:
甚高频等离子体增强化学气相沉积
微晶硅薄膜
傅里叶变换红外吸收 相似文献