氧化锌基材料、异质结构及光电器件

Ⅱ-Ⅵ族直接带隙化合物半导体氧化锌（ZnO）的禁带宽度为3.37 eV,室温下激子束缚能高达60 meV,远高于室温热离化能（26 meV）,是制造高效率短波长探测、发光和激光器件的理想材料。历经10年的发展,ZnO基半导体的研究在薄膜生长、杂质调控和器件应用等方面的研究获得了巨大的进展。本文主要介绍了以国家“973”项目（2011CB302000）研究团队为主体,在上述方面所取得的研究进展,同时概述国际相关研究,主要包括衬底级ZnO单晶的生长,ZnO薄膜的同质、异质外延,表面/界面工程,异质结电子输运性质、合金能带工程,p型掺杂薄膜的杂质调控,以及基于上述结果的探测、发光和激光器件等的研究进展。迄今为止,该团队已经实现了薄膜同质外延的二维生长、硅衬底上高质量异质外延、基于MgZnO合金薄膜的日盲紫外探测器、可重复的p型掺杂、可连续工作数十小时的同质结紫外发光管以及模式可控的异质结微纳紫外激光器件等重大成果。本文针对这些研究内容中存在的问题和困难加以剖析并探索新的研究途径,期望能对ZnO材料在未来的实际应用起到一定的促进作用。     

Electroluminescence of an n-ZnO/p-GaN Heterojunction under Forward and Reverse Biases

Electroluminescent characteristics of n-ZnO/p-GaN heterojunctions under forward and reverse biases are studied. Emissions at 389nm and 57Ohm are observed under forward bias. An unusual emission at 390ram appears under reverse bias, and is attributed to the recombination in the p-GaN side of the heterojunction. The yellow emission peaked at 57Ohm is suppressed under reverse bias. The light intensity exponentially depends on the reverse current. The emission under reverse bias is correlated to tunnelling carrier transport in the heterostructure. Our results also support that the well-known yellow band of GaN comes from the transitions between some near-conduction-band-edge states and deep localized acceptor states.     

Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering

Ga-doped ZnO(GZO) films are prepared on amorphous glass substrates at room temperature by radio frequency magnetron sputtering.The results reveal that the gallium doping efficiency,which will have an important influence on the electrical and optical properties of the film,can be governed greatly by the deposition pressure and film thickness.The position shifts of the ZnO(002) peaks in X-ray diffraction(XRD) measurements and the varied Hall mobility and carrier concentration confirms this result.The low Hall mobility is attributed to the grain boundary barrier scattering.The estimated height of barrier decreases with the increase of carrier concentration,and the trapping state density is nearly constant.According to defect formation energies and relevant chemical reactions,the photoluminescence(PL) peaks at 2.46 eV and 3.07 eV are attributed to oxygen vacancies and zinc vacancies,respectively.The substitution of more Ga atoms for Zn vacancies with the increase in film thickness is also confirmed by the PL spectrum.The obvious blueshift of the optical bandgap with an increase of carrier concentration is explained well by the Burstein-Moss(BM) effect.The bandgap difference between 3.18 eV and 3.37 eV,about 0.2 eV,is attributed to the metal-semiconductor transition.     

Direct ZnO X-Ray Detector with Tunable Sensitivity

Direct ZnO x-ray detectors with tunable sensitivity are realized by delicately controlling the oxygen flux during the sputtering deposition process. The photocurrents induced by x-rays from a 40 kV x-ray tube with a Cu anode increase apparently as the oxygen flux decreases, which is attributed to the introduction of V_o detects.By introducing V_o defects, the annihilation rate of the photo-generated electron-hole pairs will be greatly slowed down, leading to a remarkable photoconductive gain. This finding informs a novel way to design the x-ray detectors based on abundant oxide materials.     

Optical simulation of CsPbI3/TOPCon tandem solar cells with advanced light management

Monolithic perovskite/Si tandem solar cells (TSCs) have experienced rapid development in recent years, demonstrating its potential to exceed the Shockley-Queisser limit of single junction Si solar cells. Unlike typical organic-inorganic hybrid perovskite/silicon heterojunction TSCs, here we propose CsPbI₃/TOPCon TSC, which is a promising architecture in consideration of its pleasurable thermal stability and good compatibility with current PERC production lines. The optical performance of CsPbI₃/TOPCon TSCs is simulated by the combination of ray-tracing method and transfer matrix method. The light management of the CsPbI₃/TOPCon TSC begins with the optimization of the surface texture on Si subcell, indicating that a bifacial inverted pyramid with a small bottom angle of rear-side enables a further minimization of the optical losses. Current matching between the subcells, as well as the parasitic absorption loss from the front transparent conductive oxide, is analyzed and discussed in detail. Finally, an optimized configuration of CsPbI₃/TOPCon TSC with a 31.78% power conversion efficiency is proposed. This work provides a practical guidance for approaching high-efficiency perovskite/Si TSCs.     

Enhanced photoresponse performance in Ga/Ga_2O_3 nanocomposite solar-blind ultraviolet photodetectors

In the present work, we explore the solar-blind ultraviolet(UV) photodetectors(PDs) with enhanced photoresponse,fabricated on Ga/Ga_2O_3 nanocomposite films. Through pre-burying metal Ga layers and thermally post-annealing the laminated Ga2 O3/Ga/Ga_2O_3 structures, Ga/Ga_2O_3 nanocomposite films incorporated with Ga nanospheres are obtained. For the prototype PD, it is found that the photocurrent and photoresponsivity will first increase and then decrease monotonically with the thickness of the pre-buried Ga layer increasing. Each of all PDs shows a spectrum response peak at 260 nm, demonstrating the ability to detect solar-blind UV light. Adjustable photoresponse enhancement factors are achieved by means of the surface plasmon in the nanocomposite films. The PD with a 20 nm thick Ga interlayer exhibits the best solar-blind UV photoresponse characteristics with an extremely low dark current of 8.52 p A at 10-V bias, a very high light-to-dark ratio of ～ 8 × 10~5, a large photoresponsivity of 2.85 A/W at 15-V bias, and a maximum enhancement factor of ～ 220. Our research provides a simple and practical route to high performance solar-blind UV PDs and potential applications in the field of optoelectronics.     

Thermal stability of Mg2Si epitaxial film formed on Si（111） substrate by solid phase reaction

A single crystalline Mg2 Si film was formed by solid phase reaction(SPR) of a Si(111) substrate with an Mg overlayer capped with an oxide layer(s),which was enhanced by post annealing from room temperature to 100 ℃in a molecular beam epitaxy(MBE) system.The thermal stability of the Mg2 Si film was then systematically investigated by post annealing in an oxygen-radical ambient at 300℃,450℃ and 650 ℃,respectively.The Mg2 Si film stayed stable until the annealing temperature reached 450 ℃ then it transformed into amorphous MgO x attributed to the decomposition of Mg2 Si and the oxidization of dissociated Mg.     

Temperature dependence of Cu20 orientations in the oxidation of Cu （111）/ZnO （0001） by oxygen plasma

The role of temperature on the oxidation dynamics of Cu20 on ZnO （0001） was investigated during the oxidation of Cu （111）/ZnO （0001） by using oxygen plasma as the oxidant. A transition from single crystalline Cu20 （111） orientation to micro-zone phase separation with multiple orientations was revealed when the oxidation temperature increased above 300 ~ C. The experimental results clearly show the effect of the oxidation temperature with the assistance of oxygen plasma on changing the morphology of Cu （111） film and enhancing the lateral nucleation and migration abilities of cuprous oxides. A vertical top-down oxidation mode and a lateral migration model were proposed to explain the different nucleation and growth dynamics of the temperature-dependent oxidation process in the oxidation of Cu （lll）/ZnO （0001）.     

Temperature dependence of Cu2O orientations in the oxidation of Cu（111）/ZnO（0001） by oxygen plasma

The role of temperature on the oxidation dynamics of Cu2O on ZnO (0001) was investigated during the oxidation of Cu (111)/ZnO (0001) by using oxygen plasma as the oxidant. A transition from single crystalline Cu2O (111) orientation to micro-zone phase separation with multiple orientations was revealed when the oxidation temperature increased above 300°C. The experimental results clearly show the effect of the oxidation temperature with the assistance of oxygen plasma on changing the morphology of Cu (111) film and enhancing the lateral nucleation and migration abilities of cuprous oxides. A vertical top-down oxidation mode and a lateral migration model were proposed to explain the different nucleation and growth dynamics of the temperature-dependent oxidation process in the oxidation of Cu (111)/ZnO (0001).     

CdSe/CdZnSe超晶格的激子光学性质的研究

用分子束外延法在GaAs衬底上生长了CdSe/Cd0.65Zn0.35Se超晶格结构。利用X射线衍射（XRD）、77K下变密度激发的光致发光光谱和变温度光致发光光谱研究了CdSe/CdZnSe超晶格结构和激光复合特性，在该材料中观测到激子－激子散射发射峰，变密度激发光致发光光谱和谱温度光致发光光谱证实了这一现象，激子发射峰的线宽随着温度的升高而展宽，低温时发光峰的宽度主要是由合金组分和阱垒起伏引起的，没温时激子线宽展宽是由于激子与纵光学声子和离化的施主杂质间的散射作用引起的，光致发光的强度随着温度的升高而降低，这主要是由激子的热离化造成的，也就是说，热激发使得电子或空穴由阱中跃迁至垒上。