共查询到20条相似文献,搜索用时 174 毫秒
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针对泡生法蓝宝石单晶生长的不同生长阶段的温场、流场和固液界面形状进行数值模拟研究.并分析了加热器相对坩埚的轴向位置和不同生长速率对蓝宝石单晶生长的影响.结果表明:在蓝宝石单晶生长中,在靠近坩埚壁面和固液界面的熔体内,等温线密,温度梯度较大;在靠近坩埚底部的熔体内,等温线稀疏,温度梯度较小.随着晶体高度的增加,熔体对流由放肩阶段的两个涡胞变成等径阶段的一个涡胞,熔体平均温度有小幅度下降;加热器相对坩埚的轴向位置对晶体生长炉内温场和固液界面形状影响很大,随着加热器位置上移,晶体内平均温度升高,温度梯度减小;熔体内平均温度降低,温度梯度增大.同时固液界面凸度增大.随着晶体生长速率增大,固液界面凸度增大,界面更加凸向熔体. 相似文献
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氟代硼鈹酸钾KBe2BO3F2(KBBF)晶体是至今发现的可相位匹配的倍频波长最短的晶体.但是,由于该晶体具有很大的面间距,层状生长习性十分明显,因此,至今采用熔盐法生长的晶体厚度较薄,无法按照相位匹配方向切割成倍频器件.我们尝试了采用水热法生长KBBF晶体并获得了成功.我们采用水热法已成功地生长出了厚度达10 mm以上的透明单晶体.本文概述了水热法生长KBBF晶体的实验方法和生长条件(如矿化剂种类,温度,压力,温度梯度,充满度,开孔率等)对晶体生长的影响.最后,用负离子配位多面体生长基元理论模型讨论了晶体的生长机制与形状. 相似文献
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冷心放肩微量提拉法大尺寸蓝宝石单晶生长过程的模拟分析 总被引:4,自引:1,他引:3
利用数值模拟方法计算了冷心放肩微量提拉法(SAPMAC)蓝宝石晶体生长过程.结合晶体直径变化、裂纹出现位置与延续方向、晶体透明性等实验现象,通过与提拉法、温梯法、坩埚移动法等相对比,分析了冷心放肩微量提拉法晶体生长各阶段的工艺特点,并根据模拟计算结果对晶体生长系统和晶体生长控制工艺进行了改进.分别利用增大热交换器的散热参数、降低加热温度、改进降温曲线、调节外加轴向和径向温度梯度的方式来实现对晶体生长的引晶、放肩、等径和收尾控制.通过实验比较证明了改进后的晶体生长系统和晶体生长控制工艺能够生长出性能较好的大尺寸蓝宝石晶体. 相似文献
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高质量LiCaAlF6晶体生长条件的探索 总被引:1,自引:0,他引:1
本文报道了采用提拉法在不同加热系统中和不同生长气氛下进行的LiCaAlF6晶体生长的实验,以探索高质量晶体的生长条件,并讨论了在晶体生长过程中晶体内部和表面上的某些缺陷的形成原因.为了获得高质量的晶体,抑制原材料的氧化和挥发,实现生长过程的稳定控制,是晶体生长过程中不可忽视的三要素.在较小的温度梯度、较高真空度(2×10-2Pa)、敞开式保温体系、较高控温精度(±0.1℃)及充入保护气体CF4条件下,可生长高质量的LiCaAlF6晶体. 相似文献
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X. J. Chen L. J. Liu H. Tezuka Y. Usuki K. Kakimoto 《Crystal Research and Technology》2007,42(10):971-975
A global simulation model is applied for a silicon carbide growth system heated by induction coils. A finite‐volume method (FVM) and a global model are applied to solve the equations for electromagnetic field, conductive and radiative heat transfer. The growth rate is predicted by Hertz‐Knudsen equation and one‐dimensional mass transfer equation. Further, simulations for five different coil positions are carried out to investigate the effects of coil position on temperature distribution in the furnace. The numerical results reveal that the variation of temperature in the radial direction along the substrate surface and the temperature difference between the powder and substrate are greatly affected by the coil position. The predicted growth rate along the substrate surface for five coil positions is also studied. Finally, a reasonable range of coil positions maintaining a balance between large‐diameter crystal, high growth rate, temperature limitation of material and lower electrical power consumption is obtained. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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A heating system is described that allows to increase the temperature gradients in rf‐heated Czochralski setups during the growth. This system applies an active afterheater, operated by a separate induction coil parallel to that heating the crucible. By changing the inductivity of an additional coil located outside the growth chamber, the ratio of the rf currents flowing through the crucible and afterheater and, consequently, the geometry of the heat input to the setup can be altered. The efficiency of the heating systems has been demonstrated in various experiments. 相似文献
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The thermal and flow transport in an inductively heated Czochralski crystal growth furnace during a crystal growth process is investigated numerically. The temperature and flow fields inside the furnace, coupled with the heat generation in the iridium crucible induced by the electromagnetic field generated by the RF coil, are computed. The results indicate that for an RF coil fixed in position during the growth process, although the maximum value of the magnetic, temperature and velocity fields decrease, the convexity of the crystal‐melt interface increases for longer crystal growth lengths. The convexity of the crystal‐melt interface and the power consumption can be reduced by adjusting the relative position between the crucible and the induction coil during growth. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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For the seeding process of oxide Czochralski crystal growth, the flow and temperature field of the system as well as the seed‐melt interface shape have been studied numerically using the finite element method. The configuration usually used initially in a real Czochralski crystal growth process consists of a crucible, active afterheater, induction coil with two parts, insulation, melt, gas and non‐rotating seed crystal. At first the volumetric distribution of heat inside the metal crucible and afterheater inducted by the RF coil was calculated. Using this heat source the fluid flow and temperature field were determined in the whole system. We have considered two cases with respect to the seed position: (1) before and (2) after seed touch with the melt. It was observed that in the case of no seed rotation (ωseed = 0), the flow pattern in the bulk melt consists of a single circulation of a slow moving fluid. In the gas domain, there are different types of flow motion related to different positions of the seed crystal. In the case of touched seed, the seed‐melt interface has a deep conic shape towards the melt. It was shown that an active afterheater and its location with respect to the crucible, influences markedly the temperature and flow field of the gas phase in the system and partly in the melt. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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For the seeding process of oxide Czochralski crystal growth, influence of the crucible bottom shape on the heat generation, temperature and flow field of the system and the seed‐melt interface shape have been studied numerically using the finite element method. The configuration usually used in a real Czochralski crystal growth process consists of a crucible, active afterheater, induction coil with two parts, insulation, melt, gas and seed crystal. At first, the volumetric distribution of heat inside the metal crucible and afterheater inducted by the RF‐coil was calculated. Using this heat generation in the crucible wall as a source the fluid flow and temperature field of the entire system as well as the seed‐melt interface shape were determined. We have considered two cases, flat and rounded crucible bottom shape. It was observed that using a crucible with a rounded bottom has several advantages such as: (i) The position of the heat generation maximum at the crucible side wall moves upwards, compared to the flat bottom shape. (ii) The location of the temperature maximum at the crucible side wall rises and as a result the temperature gradient along the melt surface increases. (iii) The streamlines of the melt flow are parallel to the crucible bottom and have a curved shape which is similar to the rounded bottom shape. These important features lead to increasing thermal convection in the system and influence the velocity field in the melt and gas domain which help preventing some serious growth problems such as spiral growth. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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高温高压生长宝石级金刚石单晶的表面特征研究 总被引:1,自引:1,他引:0
本文利用高温高压温度梯度法,NiMnCo合金作为触媒,分别采用籽晶{100}和{111}作为生长面,合成了Ib型宝石级金刚石单晶,对其表面特征进行了分析和讨论.结果发现,宝石级金刚石单晶的表面特征不具有唯一性,多数情况下,晶体{111}面明显较{100}面平整,而且{100}面生长台阶的棱角不清晰,经常会出现经触媒融融过的痕迹,并且这种现象的出现跟籽晶生长面不同和合成温度条件高低无关;{111}面有时也会出现明显的生长台阶,棱角清晰,并且形状较为规则.宝石级金刚石晶体表面特征的不唯一性说明晶体表面特征对生长条件稳定性有更高的要求. 相似文献
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Jiang Zheng Haisheng Fang Zhi Zhang Jinzhe Yang Zhiyin Gan Han Yan 《Crystal Research and Technology》2016,51(10):617-626
Three‐dimensional models, coupling fluid flow and heat transfer, have been adopted to analyze influences of the process parameters on the temperature uniformity in an industrial MOCVD reactor. Important factors, such as the inlet gas flow, the susceptor rotation, the heater power, the distance between the heat shield and the susceptor (d1), as well as the distance between the heater and the susceptor (d2), have been investigated carefully. The system heating condition is characterized by temperature uniformity denoted as the standard deviation of temperature, and by thermal efficiency expressed as a combination parameter of the dissipated energy. The results reveal that decrease of the gas flow and the rotation rate, as well as increase of the distance d1, could monotonically enhance the temperature uniformity. The results also show that decrease of the above three parameters could improve the thermal efficiency. Furthermore, increase of the distance d2 enhances the temperature uniformity, and reduces the thermal efficiency slightly. The influences of the parameters on the uniformity vary at the different locations of the susceptor as divided into Zone A, Zone B and Zone C. The conclusions help the growth engineer optimize the system design and process conditions of the reactor. 相似文献