脉冲激光晶化非晶硅薄膜的有限差分模拟

 根据热传导原理,建立了脉冲激光晶化非晶硅薄膜的理论模型。运用有限差分方法研究了不同激光波长、能量密度等因素对薄膜温度变化及相变过程的影响。计算了不同波长激光器对厚度500 nm非晶硅晶化的阈值能量密度。结果发现,准分子晶化的阈值能量密度最低,但是在同样的能量密度下,熔融深度却不及使用更长波长的激光器。计算并分析了升高衬底温度对结晶速度和晶粒尺寸的影响,模拟结果较好地验证了实验结论和规律。     

SiSb相变薄膜的激光初始化研究

利用直流磁控溅射法将SiSb薄膜沉积到聚碳酸酯光盘盘基上,利用相变光盘初始化仪分别在400,500,600,700,800和1200 mW的激光功率下将光盘初始化。比较了在不同激光功率下SiSb薄膜在300～800 nm波段的反射率变化情况。研究表明,随着初始化激光功率的提高,SiSb薄膜的反射率和反射率对比度逐渐增加。在400～800 nm波长范围内,SiSb薄膜在1200 mW激光初始化下高达30%～35%的反射率对比度,说明此相变薄膜是一种有前途的新型光存储材料。将沉积态与400,800和1200 mW初始化后的SiSb薄膜进行X射线衍射分析,研究表明,沉积态的SiSb为非晶态,激光初始化后的样品发生了不同程度的晶化,激光功率越高,晶化程度越高,晶化相为Sb的六方晶系菱形中心结构。     

KrF准分子激光退火氢化非晶碳化硅薄膜的晶化研究

介绍了利用KrF准分子脉冲激光对氢化非晶碳化硅(a-SiC∶H)薄膜进行激光退火以实现薄膜的结晶化。利用等离子增强化学气相沉积(PECVD)在单晶Si(100)衬底上制备a-SiC∶H薄膜, 再用不同能量密度的激光对薄膜样品进行退火。分析表明, 选用合适能量密度的激光退火能够实现a-SiC∶H薄膜的结晶化, 且结晶颗粒大小随着入射激光能量密度的增加而增大; 显微图表明当入射能量密度超过200 mJ/cm2时, 薄膜表面出现由热弹性波引起的表面波纹现象, a-SiC∶H薄膜结晶过程为液相结晶; 傅里叶红外谱(FTIR)表明随着入射能量密度增加, 薄膜中氢含量降低, Si-C峰增强并且峰位出现蓝移, 薄膜的结晶度提高。     

Ge2 Sb2 Te5相变薄膜光学及擦除性能研究

利用蓝绿激光对非晶态Ge2Sb2Te5 相变薄膜进行擦除性能的研究,分别用1000 ns,500 ns,100 ns,60 ns脉宽的蓝绿激光进行实验.结果表明,一定脉宽下,反射率对比度随擦除功率的增加而增大.并且,在1000 ns,500 ns,100 ns,60 ns的激光作用时间范围内,非晶态薄膜均可转变成晶态.对于脉宽为60 ns的蓝绿激光,擦除功率大于4.49 mW以后,薄膜的反射率对比度高于15％,这表明Ge2Sb2Te5相变薄膜在短脉宽、低擦除功率条件下,可具有较高的晶化速度.同时,分析了非晶态和晶态Ge2Sb2Te5相变薄膜的光谱特性,对比研究了780 nm,650 nm,514 nm和405 nm波长处的反射率和反射率对比度,提出了Ge2Sb2Te5相变薄膜用于蓝光光盘的改进方法.     

热致晶化高反射率SbOx薄膜的结构分析和光学性质

利用直流磁控反应溅射法制备了SbOx薄膜,利用X射线衍射分析仪和光谱仪分别研究了这种薄膜热致晶化的微观结构和光学性质的变化,并通过非晶态薄膜粉末的示差扫描量热实验测出不同加热速度条件下结晶峰温度,研究了这种薄膜的结晶动力学。发现沉积态SbOx薄膜为非晶态,非晶态SbOx薄膜在热致晶化过程中发生了两种变化,分别对应为较低温度下Sb晶体和较高温度下立方Sb2O3相的生成。退火后晶态薄膜中出现了单质Sb和Sb2O3,300℃退火后Sb2O3相含量最大。晶态薄膜的反射率均高于沉积态,在晶态薄膜中200℃退火的薄膜反射率最大。     

室温下Pr0.7Ca0.3MnO3薄膜的瞬态光响应特性

在室温下利用波长532 nm,脉冲宽度7 ns的纳秒脉冲激光研究了不同电压和激光能量密度作用下Pr0.7Ca0.3MnO3薄膜的瞬态光响应特性.在激光能量密度为275.16 mJ/cm2时,其最大电阻变化率达到92.3%,响应时间约36 ns.室温下电压变化对薄膜的光响应特性影响不大,而诱导光能量密度的影响则很明显,能量密度越大,电阻变化越大,响应时间越短,并且电阻变化和响应时间均与激光能量密度呈非线性关系.这种光响应来源于薄膜中的光致非稳态绝缘体-金属相变,有望在新型光电器件上获得应用.     

激光致晶态Ag11In12Te26Sb51相变介质光学常量的研究

研究了结晶度对Ag11In12Te26Sb51相变薄膜光学常数的影响。用初始化仪使相变薄膜晶化，改变晶化参量得到不同的结晶度，当转速固定时，随激光功率的增加，折射率基本随之减小，消光系数先是增大，而后减小；当激光功率固定时，随转速的增大，折射率也随之增大，消光系数也是先增大后减小。非晶态与晶态间的变换、薄膜微结构的变化（包括晶型的转变和原子间键合状态的变化）以及薄膜内残余应力的影响Ag11In12Te26Sb51相变薄膜复数折射率的主要原因。测量了单层膜的透过率和CD－RW相变光盘中Ag11In12Te26Sb51薄膜非晶态和晶态的反射率。     

室温下Pr0.7Ca0.3MnO3薄膜的瞬态光响应特性

在室温下利用波长532nm，脉冲宽度7ns的纳秒脉冲激光研究了不同电压和激光能量密度作用下Pr_0.7Ca_0.3MnO₃薄膜的瞬态光响应特性.在激光能量密度为275.16mJ/cm²时，其最大电阻变化率达到92.3%，响应时间约36ns.室温下电压变化对薄膜的光响应特性影响不大，而诱导光能量密度的影响则很明显，能量密度越大，电阻变化越大，响应时间越短，并且电阻变化和响应时间均与激光能量密度呈非线性关系.这种光响应来源于薄膜中的光致非稳态绝缘体-金属相变，有望在新型光电器件上获得应用.     

Ge2Sb2Te5非晶薄膜中超快载流子动力学的飞秒分辨反射光谱研究

利用飞秒时间分辨抽运-探测反射光谱技术研究了室温下Ge₂Sb₂Te₅非晶薄膜中载流子超快动力学及其激发能量密度依赖性.发现光激发后05 ps时间内,反射变化率降到最小值,然后开始迅速增加,在几个皮秒时间内达到大于初始反射率的新的最大值.反射率的减小量、增加量和增加速率均随激发能量密度的增大而增加.利用高密度等离子体的Auger复合及其感应的晶格加热模型较好地定量解释了反射率由最小到最大的快速变化过程,表明高密度等离子体的Auger复合加热 关键词： 抽运-探测光谱 2Sb₂Te₅非晶薄膜')" href="#">Ge₂Sb₂Te₅非晶薄膜 Auger复合 载流子动力学     

外加偏置电场下类金刚石薄膜激光损伤形貌

使用非平衡测控溅射技术沉积了类金刚石薄膜,对比了外加偏置电场前后薄膜的抗激光损伤表面形貌变化,发现薄膜施加偏置电场后,薄膜的激光损伤区域内有大量丝状薄膜,损伤形貌存在明显不同,损伤面积减小,薄膜的激光损伤情况得到改善。这表明外加偏置电场对薄膜的损伤有影响,激光在薄膜中激励产生的光生电子在电场作用下产生快速漂移,间接降低了激光辐照区域内的局部能量密度,减缓了薄膜的石墨化,提高了薄膜的抗激光损伤能力。     

Time resolved spectra of optical and electrical transient response induced by nanosecond laser pulses in amorphous AgInSbTe films

The phase transition dynamics of amorphous Ag₈In₁₄Sb₅₅Te₂₃ (AIST) thin films induced by single nanosecond laser pulses were studied by transient optical reflectivity and electrical resistance measurements with nanosecond resolution. Phase transition driven by nanosecond laser pulses can be achieved in a proper fluence range on AIST thin films. The results show that phase transition dynamics driven by nanosecond laser pulses was a multi-stage optical evolution process involving melt, solidification, recalescence, and recrystallion. However, it was found that the real-time responses of optical and electrical signals were quite different under the same irradiated condition. The recalescence process reflected by the second rising of optical reflectivity will not result in obvious changes in electrical resistance. The dependence of saturated time determined by optical and electrical evolution curve on laser pulse fluence was compared and analyzed. A two-dimensional percolation model was employed to explain the difference between electrical and optical transient responses.     

Write-once medium with BiOx thin films for blue laser recording

BiOx films are prepared by reactive direct current (DC) magnetron sputtering from a metallic bismuth target in Ar + O2 with different O2/Ar ratios. It is found that the optical property of BiOx films is sensitive to O2/Ar ratios and the films deposited at O2/Ar ratio of 0.5 have the best reflectivity contrast under the same conditions. The structure and optical characteristics of the films are studied by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and spectrophotometer. As revealed by investigations,the phase transition is mainly responsible for the change of optical properties. The static test results indicate that the BiOx films have good writing sensitivity for blue laser beams. A high reflectivity contrast of about 52% at a writing power of 11 mW and writing pulse width of 800 ns is obtained. In addition, the films demonstrate good stability after being read for 10000 times.     

Characterization of in-situ time-resolved optical spectra during excimer-laser crystallization

A real-time in-situ time-resolved (~1 ns) optical reflectivity and transmission (TRORT) measurement system combining two He–Ne probe lasers, a digital oscilloscope, and three fast photodiodes is developed to investigate the rapid phase-change processes of Si thin films during the excimer-laser crystallization (ELC). The changes in both reflectivity and transmission of Si thin films during ELC are recorded by the TRORT measurement system. Melting and resolidification behaviors of Si thin films during ELC are interpreted. The fall time of liquid Si is reduced with increase in the excimer-laser energy density, while the rise time of liquid Si remains approximately constant at 5 ns. The first small peak in the reflectivity spectrum is proved to be not a phenomenon of explosive crystallization.     

High Reflection Ge_(0.45)Te_(0.55) Recording Films

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干涉法测量多层透明膜系反射率

应用干涉法实现透明膜系反射率的测量。将待测膜系镀在两薄玻璃片，并构成F-P干涉仪，根据透射光谱的自由谱宽和干涉峰的半宽值，计算出膜系反射率，避免了光源波动对测量结果的影响。在实验所用膜系的反射率小于98％时，测量误差小于0．09％。     

Laser direct writing pattern structures on AgInSbTe phase change thin film

Different pattern structures are obtained on the AgInSbTe(AIST) phase change film as induced by laser beam.Atomic force microscopy(AFM) was used to observe and analyze the different pattern structures.The AFM photos clearly show the gradually changing process of pattern structures induced by different threshold effects,such as crystallization threshold,microbump threshold,melting threshold,and ablation threshold.The analysis indicates that the AIST material is very effective in the fabrication of pattern structures and can offer relevant guidance for application of the material in the future.     

薄膜厚度对AgInSbTe相变薄膜的光学性质的影响

采用射频溅射法制备了Ag8In14Sb55Te23相变薄膜,对深积态薄膜在300℃时进行了热处理,测量了不同厚度薄膜的反射、吸收谱及光学常数。研究了薄膜的光学常数与薄膜厚度的关系。结果表明在一定的厚度范围其光学常数随膜层厚度的不同有较大的变化,尤其在短波长范围内更为明显,这对于短波长记录相变光盘有重要意义。     

Laser diagnostics of nanoscale dielectric films on absorbing substrate by differential reflectivity and ellipsometry

The differential reflection characteristics for ultrathin inhomogeneous dielectric film on absorbing substrate are investigated in the long-wavelength approximation. The obtained first-order expressions for differential reflectivity and changes in the ellipsometric angles caused by ultrathin layer are of immediate interest to the solution of the inverse problem. The method to determine the averaged values (not the realistic profile) of refractive index for inhomogeneous nanometric films are shown. The novel possibilities for determining the dielectric constant and thickness of nanoscale homogeneous films by the differential ellipsometric and reflectivity measurements are developed, and a simple method to estimate whether the nanometric film is homogeneous or not is also discussed.