反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率，低旁带反射，窄带以及带宽可控等优良特性引起了人们极大的关注，采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能，在弱调制模式下，其共振带宽可以被压缩到零点几纳米，但是由于介质表面和空气层的菲涅耳反射，使得偏离或者远离共振区时的反射率偏高，根据等效介质理论，亚波长光栅在远离共振区可以被看为均匀的薄膜，本文通过对导模共振光栅进行单层、双层以及三层抗反射设计，有效的降低了导模共振光栅的旁带反射率，从而在可见光波段获得了性能优良的共振滤波     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率,低旁带反射,窄带以及带宽可控等优良特性引起了人们极大的关注,采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能,在弱调制模式下,其共振带宽可以被压缩到零点几纳米,但是由于介质表面和空气层的菲涅耳反射,使得偏离或者远离共振区时的反射率偏高,根据等效介质理论,亚波长光栅在远离共振区可以被看为均匀的薄膜,本文通过对导模共振光栅进行单层、双层以及三层抗反射设计,有效的降低了导模共振光栅的旁带反射率,从而在可见光波段获得了性能优良的共振滤波 关键词： 导模共振 平面波导 傅里叶模式理论 窄带滤波     

一维TiO2亚波长光栅的衍射异常现象及其结构设计

研究了一维TiO₂亚波长光栅（SWG）的衍射异常现象,具体表现为泄漏模共振效应和瑞利异常。研究表明,一定参数条件下的横磁波（TM偏振）和横电波（TE偏振）入射均会出现瑞利异常和泄漏模共振效应。在TM偏振光情况下,会出现传统的窄带、高衍射效率泄漏模共振效应,而在TE偏振光情况下,由于多个接近的泄漏模共振峰相互叠加,故会形成宽带、高衍射效率的反射谱。采用严格耦合波理论计算了一维TiO₂ SWG的衍射效率,研究了光栅周期、高度和占空比对光栅反射率的影响。当光栅周期为0.49μm,高度为0.25μm,占空比为0.34时,SWG具有TE偏振选择性,在0.52μm波段处的反射率接近1,且高反带（反射率达到99.9%以上）宽度为26 nm。优化各结构参数,得到光栅周期、占空比、高度的制作容差分别为1.6%、8.3%、2.0%,故SWG理论上可以作为垂直腔面发射激光器的反射镜。     

基于导模共振效应的自支撑超灵敏生物探测器

基于多层平面波导理论,采用自支撑共振光栅,提出了一种应用于生物探测领域的超高准确度传感器,理论计算表明,本文提出的生物传感器,其探测准确度于共振光栅的周期成正比,接近基于共振效应传感器的理论极限,采用单层共振光栅的归一化色散方程,计算了色散曲线随探测介质折射率的变化关系,从而证明了其探测准确度,此外,基于此共振光栅结构,设计了工作在近红外和中红外波段的生物探测器,分别应用于液体(1.3～1.7)和气体探测,折射率的分辨能力在近红外波段可以达到1×10-5,在红外波段优于1×10-6,能满足绝大多数生物材料的探测.相比于传统的基于导模共振效应的共振传感器,本文提出的生物传感器,其探测准确度有一至两个数量级的提高.     

GeSi/Si异质结光波导光栅耦合器的设计与模拟

GeSi/Si异质结光波导是硅基光电集成(OEIC)领域一种重要的连接器件,研究其光的输入耦合,提高耦合效率有着重要的意义.通过分析导模-辐射模的耦合理论求得光栅耦合器的辐射损耗系数,设计分析了波导层厚度为2500 nm,入射波长为1300 nm的单模Ge0.05Si0.95/Si异质结波导光栅耦合器的周期、长度和槽深,得出从空气中输入角为75°(从衬底中入射角为16°)时,周期为0.512 μm,槽宽为0.256 μm,光栅长度为2.3 mm,从空气侧输入时耦合效率为22.5%,从衬底输入时耦合效率为46.3%,并对其输入、输出光场进行了数值模拟.     

基于导模共振效应的自支撑超灵敏生物探测器

基于多层平面波导理论,采用自支撑共振光栅,提出了一种应用于生物探测领域的超高准确度传感器.理论计算表明,本文提出的生物传感器,其探测准确度于共振光栅的周期成正比,接近基于共振效应传感器的理论极限.采用单层共振光栅的归一化色散方程,计算了色散曲线随探测介质折射率的变化关系,从而证明了其探测准确度.此外,基于此共振光栅结构,设计了工作在近红外和中红外波段的生物探测器,分别应用于液体(1.3～1.7)和气体探测,折射率的分辨能力在近红外波段可以达到1×10^-5,在红外波段优于1×10^-6,能满足绝大多数生物材料的探测.相比于传统的基于导模共振效应的共振传感器,本文提出的生物传感器,其探测准确度有一至两个数量级的提高.     

光栅周期不一致对莫尔条纹法测量扭转角的影响

为了提高用莫尔条纹法测量扭转角的测量精度,分析了光栅周期不一致对扭转角测量误差的影响。从基于莫尔条纹法测量扭转角的原理出发,论述了光栅周期不一致与测量精度的关系,讨论了引起两光栅周期不一致的两个因素,即光栅刻划误差以及两光栅栅面不平行。理论分析表明,前者是引起光栅周期不一致的主要原因。当两光栅等效周期比值β＜1.001时,在±15′的测量范围内,选择光栅周期为50 μm,莫尔条纹宽度为1 400~1 800 μm时,光栅周期不一致引起的测量误差可以控制在1.6″之内。     

布儒斯特角附近的透射光栅传输特性

 减小光栅表面的反射率以得到更高的衍射效率是目前光栅设计与制造中需要解决的重要问题之一。提出利用偏振光沿布儒斯特角入射时具有的特性来实现降低光栅表面反射率的方案，介绍了这种方案的物理模型，并利用严格耦合波分析法进行了模拟计算。计算结果显示，对入射光为TM偏振，波长0.35 μm，当光栅周期较长为2.80 μm时,以布儒斯特角入射的光波，它的表面反射被大大抑制；当光栅周期较短为0.21 μm时也有类似的结论，并且透射光的一级衍射效率极大值出现在刻槽深度为3.50 μm处附近，衍射效率大于95%。     

长周期光纤光栅折射率传感器的结构优化

为了提高长周期光纤光栅对环境介质折射率的传感灵敏度,提出一种长周期光纤光栅的周期和包层半径的结构优化.基于长周期光纤光栅的耦合模理论,分析了长周期光纤光栅的周期和包层半径的大小分别与环境介质折射率传感灵敏度的关系,讨论了长周期光纤光栅的周期和包层半径对折射率传感的影响以及控制光栅周期与包层半径对折射率传感的重要性.为使优化的长周期光纤光栅具有实用性,谐振波长设计在1.55 μm的常规波长范围,经过多次摸拟实验,提出最佳优化参量为：Λ=380 μm,rcl=17 μm,对环境介质折射率从1.26~1.38不同值的实验测试,折射率传感灵敏度达到0.000 12,长周期光纤光栅的结构优化获得理想的预期效果.     

亚波长介质光栅导模共振研究

从平板波导的本征值方程出发,导出弱调制介质光栅共振位置的表达式,其预测结果与利用严格的耦合波理论所得值一致.对正入射时导模共振产生双反射峰现象进行解释,并就导模共振对入射角和光栅周期敏感性的成因进行了探讨.从薄膜的特征矩阵方程出发,在理论上分析了利用导模共振获得性能良好的反射滤光片的途径.     

Study on guided-mode resonance characteristic of multilayer dielectric grating with broadband and wide using-angle

Guided-mode resonance in a diffraction band of multilayer dielectric gratings may lead to a catastrophic result in laser system, especially in the ultrashort pulse laser system, so the inhibition of guided-mode resonance is very important. In this paper the characteristics of guided-mode resonance in multilayer dielectric grating are studied with the aim of better understanding the physical process of guided-mode resonance and designing a broadband multilayer dielectric grating with no guided-mode resonance. By employing waveguide theory, all guided-wave modes appearing in multilayer dielectric grating are found, and the incident conditions, separately, corresponding to each guided-wave mode are also obtained. The electric field enhancement in multilayer dielectric grating is shown obviously. Furthermore, from the detailed analyses on the guided-mode resonance conditions, it is found that the reduction of grating period would effectively avoid the appearing of guided-mode resonance. And the expressions for calculating maximum periods, which ensure that no guided-mode resonance occurs in the requiring broad angle or wavelength range, are first reported. The above results calculated by waveguide theory and Fourier mode method are compared wit each other, and they are coincident completely. Moreover, the method that relies on waveguide theory is more helpful for understanding the guided-mode resonance excited process and analyzing how each parameter affects the characteristic of guided-mode resonance. Therefore, the effects of multilayer dielectric grating parameters, such as period, fill factor, thickness of grating layer, {\it et al.}, on the guided-mode resonance characteristic are discussed in detail based on waveguide theory, and some meaningful results are obtained.     

A method to accurately control the period of subwavelength planar holographic grating in the fabrication process of guided mode resonance filter

Subwavelength optical element such as guided-mode resonance filter has gained much interest recently due to its properties and applications. It is very hard to fabricate an ideal guided-mode resonance filter with the same parameters as the designed one. The reason is that the resonance wavelength of guided-mode resonance filter is susceptible to the fabrication errors of its parameters, such as the period, the groove depth, the thickness of a guided-wave layer, and the refraction indexes of materials, etc. In this article, a method to accurately control the period of subwavelength planar holographic grating which was used as a sub-layer of the guided mode resonance filter is investigated. Results show that utilizing a convex lens placed in the exposure position can cause the adjusting of the period of subwavelength planar grating more convenient in the holographic optical path during the fabrication process. Accuracy controlling the period of grating which was used as the sub-layer of guided-mode resonance filter has great significance in the fabrication of guided-mode resonance filter.     

Pressure-tunable guided-mode resonance sensor for single-wavelength characterization

A method of tuning a one-dimensional guided-mode resonance grating through the use of an air-pressure-responsive membrane is demonstrated here using finite-element method simulation. The device consists of a titanium dioxide (TiO(2)) grating structure embedded in a flexible polydimethylsiloxane membrane. This grating has a resonant response to TM-polarized light at a wavelength dependent upon the refractive index of the surrounding medium. By varying the pressure by 5500 Pa, lateral strain may be applied to the grating; this allows resonances to be produced for medium refractive indices ranging from 1.33 to 1.50 for a fixed-wavelength 850 nm light source.     

Tunable intensity of the spectral reflectance of a guided-mode resonance filter with dual channels

Simulating the characteristics of a guided-mode resonance filter with rigorous coupled wave analysis, we find that, by adjusting the azimuthal angle of the grating used as a sub-layer of the guided-mode resonance filter from 0° to 90° under TE-reflectance, the intensity of the spectral reflectance of the guided-mode resonance filter monotonically increases at the wavelength of 684.6 nm, while the spectral reflectance monotonically decreases at the wavelength of 723 nm. Moreover, the spectral reflectance with TE-reflectance at 90° corresponds to the TM-reflectance at 0°. The phenomenon means that the intensity of the spectral reflectance can be easily tuned with different azimuthal angles by choosing appropriate structure parameters of the guided-mode resonance filter.     

Analysis of restriction factors of widening diffraction bandwidth of multilayer dielectric grating

In order to design a multilayer dielectric grating with wide-bandwidth diffraction spectrum, the restriction factors of both the reflection bandwidth of multilayer dielectric high-reflectivity mirror and the guided-mode resonance phenomenon are studied in detail. The reflection characteristics of high-reflectivity mirror in zeroth and 1st transmitted diffraction orders are quantitatively evaluated. It is found that the reflection bandwidth of high-reflectivity mirror in 1st transmitted diffraction order, which determines the final diffraction bandwidth of multilayer dielectric grating, is evidently compressed. Furthermore, it is demonstrated that the reducing of grating period is an effective approach to the elimination of guided mode resonance over a required broad band range both spectrally and angularly. In addition, the expressions for calculating the maximum period ensuring no guided mode resonance in the required bandwidth are derived. Finally, two high-efficiency pulse-compression gratings with broad-band are presented.     

基于导模共振的窄带可调谐滤波器

提出了一种分离的导模共振滤波器.该结构由光栅层和两个被空气薄层隔开的平板介质波导组成.使用时域有限差分法分析了该光栅结构在不同的结构参数下的光谱特性.研究表明,当TM偏振入射时改变空气薄层的厚度可以实现共振波长的可调谐,并且共振波长几乎随着空气薄层厚度线性变化.浅调制光栅被用于实现窄线宽特性.波长可调谐范围为1 515~1 558nm,半高全宽小于0.6nm.     

Transmission guided-mode resonance filters based on high reflection multilayer stacks

The transmission guided-mode resonance filters are implemented by integration of diffraction grating into classical thin films to produce high efficiency in the central wavelength and arbitrarily low sideband response over a quite large spectral range. Transmission guided-mode resonance filters require considerable fewer thin films to acquire narrow line width and high peak transmission in the central wavelength compared with classical multilayer high-reflectance coatings with a stack of quarter-wave thickness. The properties of transmission filters with single/double waveguide grating in the different layers of high refection stacks are compared each other. It is demonstrated that the narrow line width transmission filters can be abstained with only two different materials.     

Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence

We demonstrate that properly designed one-dimensional guided-mode resonance filters (GMRFs) with only one grating layer can exhibit a nonpolarizing resonant filtering effect under normal incidence. A sinusoidal profile nonpolarizing GMRF is realized by photoinduced surface-relief grating formation on thin films of polymer-azobenzene complexes and subsequent atomic layer deposition, showing the feasibility of fabrication of such compact GMRFs.     

Guided-mode resonance Brewster filter

A new type of optical filter is predicted theoretically and verified experimentally. The filter operates under guided-mode resonance conditions in a thin-film waveguide grating. A high-efficiency reflection filter response is produced at the Brewster angle at which TM reflection is classically prohibited. Low-reflectance sidebands are obtained that are adjacent to the resonance peak induced by the Brewster effect in the neighborhood of the resonance peak. A double-layer waveguide grating yields 94% experimental reflectance at the thin-film Brewster angle for a Gaussian laser beam with TM polarization at the 1064-nm wavelength.