基于壁面反射增强模型的熔石英刻蚀形貌形成机理研究

大气等离子体刻蚀是一种非接触式、材料去除可控的加工方法,在光学元件的高精度加工中具有广泛的应用前景。但是大气等离子体刻蚀后元件存在表面形貌恶化的问题,严重影响元件的性能和使用寿命。进行氢氟酸刻蚀实验,证明了元件表面形貌的恶化是由氟碳化合物和表面凹坑微结构两个原因引起的。为了解释表面凹坑微结构的形成,提出基于micro-mask壁面反射增强理论的凹坑形成模型,并开展了样品表面旋涂金纳米颗粒充当micro-mask的刻蚀实验。实验结果验证了micro-mask壁面反射增强模型的正确性,为解决大气等离子体刻蚀后元件表面形貌恶化问题提供了新的思路和方法。     

Single- and multi-shot laser-induced damages of Ta_2O_5/SiO_2 dielectric mirrors at 1064 nm

Ta2O5/SiO2 dielectric mirrors deposited by ion beam sputtering (IBS) are studied. The multi-shot laserinduced damage threshold (LIDT) and its dependence on the number of shots are investigated, after which we find that the multi-shot LIDT is lower than that of single-shot. The accumulation effects of defects play an important role in the multi-shot laser damage. A simple model, which includes the conduction band electron production vsa multiphoton and impact ionizations, is presented to explain the experimental phenomena.     

Accumulation effect of SiO_2 protective layer on multi-shot laser-induced damage in high-reflectivity HfO_2/SiO_2 coatings

The accumulation effects in high-reflectivity(HR) HfO2/SiO2 coatings under laser irradiation are investigated.The HR HfO2/SiO2 coatings are prepared by electron beam evaporation at 1 064 nm.The laser-induced damage threshold(LIDT) are measured at 1 064 nm and at a pulse duration of 12 ns,in 1-on-1 and S-on-1 modes.Multi-shot LIDT is lower than single-shot LIDT.The laser-induced and native defects play an important role in the multi-shot mode.A correlative theory model based on critical conduction band electron density is constructed to elucidate the experimental phenomena.     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率，低旁带反射，窄带以及带宽可控等优良特性引起了人们极大的关注，采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能，在弱调制模式下，其共振带宽可以被压缩到零点几纳米，但是由于介质表面和空气层的菲涅耳反射，使得偏离或者远离共振区时的反射率偏高，根据等效介质理论，亚波长光栅在远离共振区可以被看为均匀的薄膜，本文通过对导模共振光栅进行单层、双层以及三层抗反射设计，有效的降低了导模共振光栅的旁带反射率，从而在可见光波段获得了性能优良的共振滤波 关键词： 导模共振 平面波导 傅里叶模式理论 窄带滤波     

Coaxial combination of coherent laser beams

Based on polarization state conversion, a technique for coaxially coherent combination of laser beams is introduced. Laser beams can be coaxially coupled into one beam with high combination efficiency and perfect beam quality. A polarized laser beam combination system based on master oscillator power amplifier （MOPA） configuration is developed and the efficiencies of both unit combination and the whole system are investigated. In the experiment of combining four beams with single longitudinal mode, a combination efficiency of 85.3% is achieved. It can be further enhanced by improving the stability of experimental environment and the quality of optical and mechanical components.     

Numerical model and experimental demonstration of high precision ablation of pulse CO_2 laser

To reveal the physical mechanism of laser ablation and establish the prediction model for figuring the surface of fused silica, a multi-physical transient numerical model coupled with heat transfer and fluid flow was developed under pulsed CO_2 laser irradiation. The model employed various heat transfer and hydrodynamic boundary and thermomechanical properties for assisting the understanding of the contributions of Marangoni convention,gravitational force, vaporization recoil pressure, and capillary force in the process of laser ablation and better prediction of laser processing. Simulation results indicated that the vaporization recoil pressure dominated the formation of the final ablation profile. The ablation depth increased exponentially with pulse duration and linearly with laser energy after homogenous evaporation. The model was validated by experimental data of pulse CO_2 laser ablation of fused silica. To further investigate laser beam figuring, local ablation by varying the overlap rate and laser energy was conducted, achieving down to 4 nm homogenous ablation depth.     

Intrinsic ZnO films fabricated by DC sputtering from oxygen-deficient targets for Cu（In,Ga）Se2 solar cell application

Samples with nodular defects grown from gold nanoparticles are prepared,and laser-induced damage tests are conducted on them.Nodular defects,which are in critical state of damage,are cross-sectioned by focusing on the ion beam and by imaging using a field emission scanning electron microscope.The crosssectional profile shows that cracks are generated and propagated along the nodular boundaries and the HfO2/SiO2 interface,or are even melted.The thermomechanical process induced by the heated seed region is analyzed based on the calculations of temperature increase and thermal stress.The numerical results give the critical temperature of the seed region and the thermal stress for crack generation,irradiated with threshold fluence.The numerical results are in good agreement with the experimental ones.     

Experimental study of sweep control in e-beam evaporated optical coatings

<正>High performance optical coating requires excellent uniformity of thin-film.Keeping the surface of evaporation material flat is propitious for the stability of vapor plume,and can improve the uniformity of thin-film.Based on the principle of electron beam spot sweep,a pattern controller in domestic coater is designed.For the purpose of even evaporation during auto-sweep,the influence of the depth of material surface in the crucible on the evaporation characteristic is considered.Pre-melting and evaporation experiments are performed on melting material(Ti_3O_5),subliming material(SiO_2),and semi-melting, semi-subliming material(HfO_2).The sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.     

吸收杂质热辐射诱导光学薄膜破坏的热力机制

光学元件的破坏是限制高功率激光系统发展的主要问题,理解光学元件的破坏机制对于高功率激光系统的设计、运行参量选择以及器件技术发展有重要影响.以热辐射模型为基础研究了杂质吸收诱导光学薄膜破坏的热力过程.研究发现薄膜发生初始破坏所需时间很短,脉冲的大部分时间是引起薄膜发生更大的破坏.在考虑吸收杂质发生相变的情况下,计算了吸收杂质汽化对薄膜产生的蒸汽压力,论证了薄膜发生宏观破坏的可能性.此模型能很好地解释光学薄膜的平底坑破坏形貌.     

可见光波段双层浮雕型导模共振滤波器设计与分析

基于傅里叶模式理论分析了双层浮雕型导模共振光栅的共振效应，分别讨论了光栅的槽深、剩余厚度、周期以及填充系数对峰值反射率、带宽、旁带反射率的影响. 数据计算表明，欠刻蚀情形的误差宽容度远远优于过刻蚀情形，两者在光栅槽深相对误差小于15％的范围内，都能保证共振峰的衍射效率高于99.5%，在相同的误差范围内，共振峰线宽的相对误差将分别达到7％和60％，因此厚度误差集中反映在对共振线宽的改变上. 另外，光栅周期和填充系数的变化将明显改变共振峰中心波长和线宽. 关键词： 导模共振 平面波导 窄带滤波