Mitigation of laser damage growth in fused silica by using a non-evaporative technique

A non-evaporative technique is used to mitigate damage sites with lateral sizes in a range from 50 μm to 400 μm and depths smaller than 100 μm.The influence of the pulse frequency of a CO 2 laser on the mitigation effect is studied.It is found that a more symmetrical and smooth mitigation crater can be obtained by increasing the laser pulse frequency form 0.1 to 20 kHz.Furthermore,the sizes of laser-affected and distorted zones decrease with the increase of the laser pulse frequency,leading to less degradation of the wave-front quality of the conditioned sample.The energy density of the CO 2 laser beam is introduced for selecting the mitigation parameters.The damage sites can be successfully mitigated by increasing the energy density in a ramped way.Finally,the laser-induced damage threshold(LIDT) of the mitigated site is tested using 355 nm laser beam with a small spot(0.23 mm 2) and a large spot(3.14 mm 2),separately.It is shown that the non-evaporative mitigation technique is a successful method to stop damage re-initiation since the average LIDTs of mitigated sites tested with small or large laser spots are higher than that of pristine material.     

Two localized CO2 laser treatment methods for mitigation of UV damage growth in fused silica

Two methods：high-power,short-time,single-shot irradiation（Method A） and low-power,long-time,multi-shot irradiation（Method B） are investigated to mitigate the UV damage growth in fused silica by using a 10.6-μm CO2 laser.To verify the mitigation effect of the two methods,the laser induced damage thresholds（LIDTs） of the mitigated sites are tested with a 355-nm,6.4-ns Nd：YAG laser,and the light modulation of the mitigation sites are tested with a 351-nm continuous Nd：YLF laser.The mitigated damaged sites treated with the two methods have almost the same LIDTs,which can recover to the level of pristine material.Compared with Method A,Method B produces mitigated sites with low crater depth and weak light modulation.In addition,there is no raised rim or re-deposited debris formed around the crater edge for Method B.Theoretical calculation is utilized to evaluate the central temperature of the CO2 laser beam irradiated zone and the radius of the crater.It is indicated that the calculated results are consistent with the experimental results.     

Characterization of the laser cleaving on glass sheets with a line-shape laser beam

A CO₂ laser with a line-shape beam was used to cleave a soda-lime glass substrate at various beam-rotation angles to the cutting direction. The stress distribution on the glass substrate cleaved by the laser beam has been analyzed in this study. An uncoupled thermal-elastic analysis was achieved by the ABAQUS software based on the finite element method. The numerical results show that the stress field of the fracture is caused by a complex stress state and the cleavages are significantly affected by the heat diffusion and beam rotation angle. At the rotation angle of zero degree to the cleaving direction, the phenomena of the chip formation have been found due to a large temperature gradient at the cleaving depth of the glass substrate.     

Optimization of a laser mitigation process in damaged fused silica

One of the major concerns encountered in high power laser is the laser-induced damage of optical components. This is a main issue of the development of the Europe's biggest laser, known as Laser Méga Joule (LMJ) especially in the section where the beam wavelength is 351 nm. This study deals with the development of a laser treatment process to improve the laser damage resistance of silica optical components. First, by irradiating the component at 355 nm in the nanosecond regime, defects of the silica optic are revealed and evolve as damage. Next, the damaged sites are irradiated with a CO₂ laser at a 10.6 μm wavelength in order to melt and evaporate the silica in the damage neighborhood. In this study, we performed a variation of the CO₂ laser parameters to obtain the most efficient stabilization. To check this stabilization, damage resistance tests were performed with an UV laser representative of the LMJ (at 355 nm/2.5 ns). The results show that we can stabilize weak points and thereby make the component resistant to subsequent UV laser irradiation.     

Validity of reciprocity rule on mouse skin thermal damage due to CO2 laser irradiation

CO₂ laser (10.6 μm) is a well-known infrared coherent light source as a tool in surgery. At this wavelength there is a high absorbance coefficient (860 cm^?1), because of vibration mode resonance of H₂O molecules. Therefore, the majority of the irradiation energy is absorbed in the tissue and the temperature of the tissue rises as a function of power density and laser exposure duration. In this work, the tissue damage caused by CO₂ laser (1–10 W, ～40–400 W cm^?2, 0.1–6 s) was measured using 30 mouse skin samples. Skin damage assessment was based on measurements of the depth of cut, mean diameter of the crater and the carbonized layer. The results show that tissue damage as assessed above parameters increased with laser fluence and saturated at 1000 J cm^?2. Moreover, the damage effect due to high power density at short duration was not equivalent to that with low power density at longer irradiation time even though the energy delivered was identical. These results indicate the lack of validity of reciprocity (Bunsen-Roscoe) rule for the thermal damage.     

Temperature prediction for CO2 laser heating of moving glass rods

This paper presents a heat transfer model to calculate the temperature field in moving glass rods heated by a CO₂ laser. Conduction and radiation heat transfer in radial and axial directions are taken into account in the current model. The Rosseland diffusion approximation is incorporated to analyze the radiation heat transfer in the glass rod. A two-band model is used to simulate the spectral property of the glass. Results of the simulation show that glass rods of sufficiently large optical thickness should be treated as a semitransparent medium for radiative transfer, and it is reasonably accurate to assume it to be opaque to CO₂ laser irradiation. It has been shown that the resulting temperature profile is strongly dependent on the laser parameters, i.e., the size of laser beam and the power of the laser. The diameter and speed of the moving glass rod are also important in determining the temperature field although the convective heat transfer coefficient between the glass rod and the environment has little effect.     

Irradiation effects of CO2 laser parameters on surface morphology of fused silica

To understand the surface morphology evolution of fused silica induced by 10.6-μm CO2 laser irradiation at different parameters,this paper reports that optical microscopy,profilometry,and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.     

Nanoimprint lithography using IR laser irradiation

A new technique called “infrared laser-assisted nanoimprint lithography” was utilised to soften the thermoplastic polymer material mR-I 8020 during nanoimprint lithography. A laser setup and a sample holder with pressure and temperature control were designed for the imprint experiments. The polymer was spin coated onto crystalline Si <1 1 1> substrates. A prepatterned Si <1 1 1> substrate, which is transparent for the CO₂ laser irradiation, was used as an imprint stamp as well. It was shown, that the thermoplastic resist mR-I 8020 could be successfully imprinted using the infrared CW CO₂ laser irradiation (λ = 10.6 μm). The etching rate of the CO₂ laser beam irradiated mR-I 8020 resist film under O₂ RF (13.56 MHz) plasma treatment and during O₂ reactive ion beam etching was investigated as well.     

Damage/ablation morphology of laser conditioned sapphire under 1064 nm laser irradiation

The damage/ablation morphologies and laser induced damage threshold (LIDT) of three different sapphire samples: original, 1064 nm laser conditioned and 10.6 μm CO₂ laser polished substrates are investigated with ns pulses laser irradiation. The results indicate that the damage resistance capability cannot be enhanced by 1064 nm laser conditioning or CO₂ laser polishing. The damage/ablation morphology of 1064 nm-laser conditioned samples is same as that of the original sapphire. But it is different from the damage/ablation morphology of the CO₂ laser polished sapphire. The “gentle and strong” ablation phases are observed in this work and several phenomena are observed in the two ablation phases. Ripple is observed in the “gentle” ablation processes, while convex spots and raised rims are observed in the “strong” ablation processes. Meanwhile, stripe damage and pin-points are observed in the CO₂ laser conditioned sapphire after ns laser irradiation. The formation mechanisms of the phenomena are also discussed for the explanation of related damage/ablation morphology. The results may be helpful for the damage/ablation investigation of sapphire in high power laser systems.     

CO_2激光预处理参数对石英基片表面粗糙度的影响

为研究CO2激光预处理参数对熔石英基片表面粗糙度的影响,采用频率为100 Hz,光斑面积为1 mm2的CO2激光对理想的熔石英基片进行辐照处理,根据处理后基片表面微观形貌特征将修复程度分别定义为轻度、中度和重度修复,并对3种修复程度下基片的表面粗糙度值进行了统计。研究了不同脉冲作用时间和不同占空比(激光功率)的激光束单点单次辐照基片后的表面粗糙度。结果表明:石英基片的表面粗糙度均方根值和处理造成的凹陷深度均随脉冲作用时间和功率的增加逐渐变大;均方根值的增幅逐渐增加,凹陷深度的增幅逐渐减小。     

Microstructure evolution of WC/steel composite by laser surface re-melting

WC/steel composites fabricated by electro-slag melting and casting were re-melted by transverse flow CO₂ laser. Optical microscopy, scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction and transmission electron microscopy were used to analyze the microstructure evolution in laser melted layer. It was found that the laser-affected zone has three distinguished zones, the melted, transient and heat affected zone. The phases of the melted zone were composed of WC, Fe₃W₃C, (Cr,Fe)₇C₃, martensite and retained austenite. The microstructure evolution in the melted zone was represented by the transformation of three parts including the steel matrix, WC particles cluster and dispersed carbides. A significant reactant was herringbone eutectic carbide of Fe₃W₃C. The effect of laser scanning rate was mainly behaved in affecting the melt depth, microstructure of transient zone and dissolution of medium carbides. In comparison with the substrate, the melted zone has much higher microhardness.     

Optical fiber cleaved at an angle by CO2 laser ablation: Application to micromachining

Laser ablation can be achieved by delivering short power pulse with durations much smaller than the heat diffusion time. In this investigation, we are collimating and magnifying a beam from a CO₂ laser with a Keplerian telescopic system. Then we study the quality of the cut performed by scanning the beam at a fast speed over an optical fiber just after focusing a well collimated CO₂ beam at λ=10.6 μm. It is found that the best results for cutting optical fibers depend upon both the time required in raising matter temperature to the vaporization point and the scanning speed of the CO₂ laser beam. Some aspects of the laser beam collimation before focusing is reviewed briefly and results for optical fibers being cleaved at low and fast speed under various conditions are also shown and discussed.     

Micromachining of microchannel on the polycarbonate substrate with CO2 laser direct-writing ablation

Low-power CO₂ laser direct-writing ablation was used to micromachine a microchannel on the polycarbonate substrate in this work. The influence of the process parameters (the laser power, the moving velocity of the laser beam and the scanning times) on the micromachining quality (the depth, the width and their aspect ratio) of the microchannel was experimentally studied. The depth and width of microchannel both increase with the increase of the laser power and the decrease of the moving velocity of the laser beam. When higher laser power and slower moving velocity were used, the polycarbonate surface bore more heat irradiated from the CO₂ laser for longer time which results in the formation of deeper and wider molten pool, hence the ability to fabricate bigger microchannel. Because of the effect of the laser power on the depth and width of microchannels, higher aspect (depth/width) ratio could be achieved using slower moving velocity and higher laser power, and it would reach a steady state when the laser power increases to 9.0 W possibly caused by the effect of laser power on the different directions of microchannel. The polycarbonate–polycarbonate chip was bonded with hot-press bonding technique.     

Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films

Zirconium dioxide (ZrO₂) thin films were deposited on BK7 glass substrates by the electron beam evaporation method. A continuous wave CO₂ laser was used to anneal the ZrO₂ thin films to investigate whether beneficial changes could be produced. After annealing at different laser scanning speeds by CO₂ laser, weak absorption of the coatings was measured by the surface thermal lensing (STL) technique, and then laser-induced damage threshold (LIDT) was also determined. It was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. The LIDT of the ZrO₂ coatings decreased greatly when the laser scanning speeds were below some value. A Nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. The influences of post-deposition CO₂ laser annealing on the structural and mechanical properties of the films have also been investigated by X-ray diffraction and ZYGO interferometer. It was found that the microstructure of the ZrO₂ films did not change. The residual stress in ZrO₂ films showed a tendency from tensile to compressive after CO₂ laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. The residual stress may be mitigated to some extent at proper treatment parameters.     

Evaluation of fracture toughness of ZrO2 and Si3N4 engineering ceramics following CO2 and fibre laser surface treatment

The fracture toughness property (K_1C) of Si₃N₄ and ZrO₂ engineering ceramics was investigated by means of CO₂ and a fibre laser surface treatment. Near surface modifications in the hardness were investigated by employing the Vickers indentation method. Crack lengths and the crack geometry were then measured by using the optical microscopy. A co-ordinate measuring machine was used to investigate the diamond indentations and to measure the lengths of the cracks. Thereafter, computational and analytical methods were employed to determine the K_1C. An increase in the K_1C of both ceramics was found by the CO₂ and the fibre laser surface treatment in comparison to the as-received surfaces. The K_1C of the CO₂ laser radiated surface of the Si₃N₄ was over 3% higher in comparison to that of the fibre laser treated surface. This was by softening of the near surface layer of the Si₃N₄ which comprised of lowering of hardness, which in turn increased the crack resistance. The effects were not similar in ZrO₂ ceramic to that of the Si₃N₄ as the fibre laser radiation in this case had produced an increase of 34% compared to that of the CO₂ laser radiation. This occurred due to propagation of lower crack resulting from the Vickers indentation test during the fibre laser surface treatment which inherently affected the end K_1C through an induced compressive stress layer. The K_1C modification of the two ceramics treated by the CO₂ and the fibre laser was also believed to be influenced by the different laser wavelength and its absorption co-efficient, the beam delivery system as well as the differences in the brightness of the two lasers used.     

Experimental study of laser induced decomposition based processing of a brittle plastic,CR-39 (allyl diglycol carbonate)

A cw CO₂ laser, coupled with an astigmatism free beam focussing mirrors arrangement is used for processing a brittle plastic, CR-39 without producing cracks, vents or chips. The processing is based on the formation of volatile products of laser-induced decomposition in the plastic. Threshold fluence for the decomposition (found to be independent of the power density and beam residence time) in CR-39 at=10.6m is determined to be 25 J cm^–2 and the decomposition threshold power density for cw irradiation 2.1±0.5 W cm^–2. The depth and width of the tapered laser processed region are observed to increase with power density and beam residence time. The widths attain a steady state value of 1 mm at beam residence time above 65 ms, for a fixed power density (2.5×10⁴ W cm^–2) and sheet thickness (250 m). Taper angle of the edges decreases with increasing power density and/or beam residence time. The heat affected zone (measured in crossed polarisers) around the processed region is found to extend with increasing beam residence time but remains unaffected on changing power density. The results are discussed in terms of the optical and thermophysical properties of CR-39 and the parameters of the interacting laser beam.     

Investigation of cutting of engineering ceramics with Q-switched pulse CO2 laser

In this paper, the cutting of Si₃N₄ engineering ceramics with Q-switched pulse CO₂ laser is studied. Considering the influence of the cut front shape on the absorption of the laser beam, a simplified 2D mathematic model is developed based on a pulsed laser vaporization cut process. This model is based on the conservation of energy. The experimental results show that it would realize crack-free cutting by using high-speed and multi-pass feed cutting process.     

Influence of laser fluence and irradiation timing of F2 laser on ablation properties of fused silica in F2-KrF excimer laser multi-wavelength excitation process

A collinear irradiation system of F₂ and KrF excimer lasers for high-quality and high-efficiency ablation of hard materials by the F₂ and KrF excimer lasers’ multi-wavelength excitation process has been developed. This system achieves well-defined micropatterning of fused silica with little thermal influence and little debris deposition. In addition, the dependence of ablation rate on various conditions such as laser fluence, irradiation timing of each laser beam, and pulse number is examined to investigate the role of the F₂ laser in this process. The multi-wavelength excitation effect is strongly affected by the irradiation timing, and an extremely high ablation rate of over 30 nm/pulse is obtained between -10 ns and 10 ns of the delay time of F₂ laser irradiation. The KrF excimer laser ablation threshold decreases and its effective absorption coefficient increases with increasing F₂ laser fluence. Moreover, the ablation rate shows a linear increase with the logarithm of KrF excimer laser fluence when the F₂ laser is simultaneously irradiated, while single KrF excimer laser ablation shows a nonlinear increase. The ablation mechanism is discussed based on these results. Received: 16 July 2001 / Accepted: 27 July 2001 / Published online: 2 October 2001     

The effect of irradiation angle on laser ignition of cellulose sheet in microgravity

The objective of this work was to investigate the effect of external radiation angle on radiative ignition of solid materials. A laser ignition experiment was performed in microgravity to investigate events occurring in the ignition process in a quiescent atmosphere. Filter paper was used as the test material, and it was heated by infrared radiation (CO₂ laser 10.6 μm) or near-infrared radiation (diode laser, 800.1 nm). The ignition time was determined for various irradiation angles, and the gas phase density change before ignition was observed by a Mach–Zehnder interferometer for each test condition. The results showed that the ignition by CO₂ laser occurred on the laser beam line depending on the irradiation angle, while diode laser caused a similar ignition position independent of the irradiation angle. The period from gasification to ignition with CO₂ laser was almost the same for different irradiation angles, while it varied with the irradiation angle for diode laser, and the ignition time was much shorter than that with diode laser. According to these results, it is considered that solid ignition with inclined external radiation is characterized based on (1) solid surface heating and (2) gas phase heating, and the second factor, gas phase heating, causes the different dependence of solid ignition on irradiation angle with different radiation wavelengths.     

Study of modulation property to incident laser by surface micro-defects on KH2PO4 crystal

KH₂PO₄ crystal is a crucial optical component of inertial confinement fusion. Modulation of an incident laser by surface micro-defects will induce the growth of surface damage, which largely restricts the enhancement of the laser induced damage threshold. The modulation of an incident laser by using different kinds of surface defects are simulated by employing the three-dimensional finite-difference time-domain method. The results indicate that after the modulation of surface defects, the light intensity distribution inside the crystal is badly distorted, with the light intensity enhanced symmetrically. The relations between modulation properties and defect geometries (e.g., width, morphology, and depth of defects) are quite different for different defects. The modulation action is most obvious when the width of surface defects reaches 1.064 μ. For defects with smooth morphology, such as spherical pits, the degree of modulation is the smallest and the light intensity distribution seems relatively uniform. The degree of modulation increases rapidly with the increase of the depth of surface defects and becomes stable when the depth reaches a critical value. The critical depth is 1.064 μ for cuboid pits and radial cracks, while for ellipsoidal pits the value depends on both the width and the length of the defects.