Surface evolution and laser damage resistance of CO2 laser irradiated area of fused silica

A 10.6 μm CO₂ laser has been reported to effectively mitigate the laser damage growth of fused silica. Two zones of the laser irradiated area are defined in this work: the distorted zone and the laser affected zone. The parameters of the two zones are studied at different CO₂ laser beam sizes, irradiation times, and powers by microscopy, profilometry, and photoelastic method. The results show that the diameter of laser affected zone is almost completely determined by the laser beam size and the distorted zone is associated with the mitigation range of CO₂ laser beam. The diameter and depth of the distorted zone increase as the laser power and irradiation time increase. The depth grows exponentially depending on the irradiation time. The maximum residual stress discrepancy is located near the boundary of the laser affected zone. The laser damage resistance test results show that the distorted zone and the laser affected zone have a better damage resistance than the original substrate.