Numerical Calculation of SAW Propagation Properties at the x-Cut of Ferroelectric PMN-33%PT Single Crystals

Surface acoustic wave （SAW） properties at the x-cut of relaxor-based 0.67Pb（Mg1/3Nb2/3）O3-0.33PbTiO3 （PMN- 33%PT） ferroelectric single crystals are analyzed theoretically when poled along the [001]c cubic direction. It can be found that PMN-33%PT single crystal is a kind of material with a low phase velocity and high electromechanical coupling coefficient, and the single crystal possesses some cuts with zero power flow angle. The results are based on the material parameters at room temperature. The conclusions provide device designers with a few ideal cuts of PMN-33%PT single crystals. Moreover, choosing an optimal cut will dramatically improve the performance of SAW devices, and corresponding results for crystal systems working at other temperatures could also be figured out by employing the method.     

evelopment of two-port surface acoustic wave resonator with A1/Au electrodes for gas sensing

Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing. It was composed of two shorted grating reflectors and adjacent intedigital transducers （IDT）, and an active metal film in the cavity between the IDTs for the sensitive film coating. The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments. Excellent device performance as low insertion loss, high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness, cavity length and acoustic aperture. Prior to fabrication, the coupling of modes （COM） model was performed for device simulation to determine the optimal design parameters. The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of ~6.5 dB and loaded Q factor in the 3000 range. Using the fabricated resonator as the feedback element, a duaresonator-oscillator with excellent frequency stability （0.1 ppm） was developed and evaluated experimentally, and it is significant for performance improvement of SAW gas sensor.     

Propagations of Rayleigh and Love waves in ZnO films/glass substrates analyzed by three-dimensional finite element method

Propagation characteristics of surface acoustic waves(SAWs) in ZnO films/glass substrates are theoretically investigated by the three-dimensional(3D) finite element method. At first, for(11ˉ20) ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1ˉ100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films with different crystal orientations on SAW characterizations, including the phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency, are investigated. The results show that at appropriate h/λ, Rayleigh wave has a maximum k~2 of 2.4% in(90°, 56.5°, 0°) ZnO film/glass substrate structure; Love wave has a maximum k~2 of 3.81% in(56°, 90°, 0°) ZnO film/glass substrate structure. Meantime, for Rayleigh wave and Love wave devices, zero temperature coefficient of frequency(TCF) can be achieved at appropriate ratio of film thickness to SAW wavelength. These results show that SAW devices with higher k~2 or lower TCF can be fabricated by flexibly selecting the crystal orientations of ZnO films on glass substrates.     

Determination of Thermal Diffusivity of a Manganite Thin Film

Thermal diffusivity has been investigated in a manganite thin film La0.6Sr0.4MnO3 by means of transient grating （TG） technique at room temperature. A new method, which is generalized to two-layered samples of the thin film deposited on a semi-infinite substrate, is established to fit the TG signals. The thermal diffusivity of the Lao.6Sro.4MnO3 thin film with a thickness of 200nm on an MgO （100） substrate is determined to be 0.92mm^2/s, which is slightly smaller than that of the single crystal sample （1 mm^2/s）.     

A Multiple Resonant Mode Film Bulk Acoustic Resonator Based on Silicon-on-Insulator Structures

With the rapid development of wireless technol- ogy, the demand for integrating multi-band devices has spurred substantial research interest. Research on CMOS compatible radio-frequency （rf） devices has also attracted significant attention. The resonant frequency of film bulk acoustic resonators （FBARs） is mainly determined by the thickness of the piezo- electric film, complicating the integration of differ- ent frequencies on a single chip. One report real- ized multiple resonant frequencies around 2.0 GHz by changing the quality of the electrode. Another re- port obtained the 2.5 GHz main frequency response with a quality factor （Q） of 101.8 and some spuri- ous resonances, while these spurious resonances were irregular.     

Detection of a longitudinal defect in a pipe based on guided circumferential waves techniques

Based on elasticity theory, the multi-modes and disperse characteristics of guided circumferential waves in a pipe were investigated theoretically and experimentally, the disperse curves of guided circumferential waves were gotten by numerical calculations. The relationships between the angle of beam transducer, frequency and guided circumferential modes were analyzed by our guided wave experiment system. Then single guided circumferential mode was excited in the pipe (O.D 88.8 mm, I.D 80.8 mm). An artificial longitudinal defect (25×1×0.7 mm) on the surface of the pipe was detected by use of the single guided circumferential wave. The results show that single guided circumferential mode can be excited in the pipe by choosing special frequency and special angle beam transducer, similar to the excitation of Lamb wave in a plate, and it can be used to find the longitudinal defect on a pipe surface.     

Calculation of Guided Modes and Leaky Modes in Photonic Crystal Slabs

The scattering matrix S describing photonic crystal slabs is formulated. A new method is introduced to solve the eigenfrequency w for a given Bloch wave vector K from the equation det S^-1(ω, K)=0. Using this method, we can obtain not only guided modes but also leaky modes in photonic crystal slabs with a higher-frequency resolution than that of the FDTD method.     

A new model for film bulk acoustic wave resonators

Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of the film bulk acoustic resonator （FBARs）. This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke （MBVD） model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.     

A polarized micro-Raman study of a 0.65PbMg1/3Nb2/303-0.35PbTi03 single crystal

Polarized micro-Raman spectra of a 0.65PbMg_1/3Nb_2/3O₃-0.35PbTiO₃ （0.65PMN-0.35PT） single crystal poled in the [001] direction are obtained in a wide frequency range （50-2000 cm 1） at different temperatures.The best fit to the Raman spectrum at 77 K is achieved using 17 Lorenzians to convolute into it,and this is proved to be a reasonable fit.According to the group theory and selection rules of overtone and combinational modes,apart from the seven Raman modes that are from first-order Raman scattering,the remaining ones are attributed to being from second-order Raman scattering.A comparison between the experimental results and theoretical predictions shows that they are in satisfactory agreement with each other.Our results indicate that at 77 K the sample belongs to the rhombohedral symmetry with the C 5 3v （R3m） space group （Z=1）.In our study,on heating,the 0.65PMN-0.35PT single crystal undergoes a rhombohedral → tetragonal → cubic phase transition sequence.The two phase transitions occur at 340 and 440 K,which correspond to the disappearance of the soft mode near 106 cm 1 recorded in VV polarization and the vanishing of the band around 780 cm 1 in VH polarization,respectively.     

Acoustic anechoic layers with singly periodic array of scatterers: Computational methods,absorption mechanisms,and optimal design

The acoustic properties of anechoic layers with a singly periodic array of cylindrical scatterers are investigated. A method combined plane wave expansion and finite element analysis is extended for out-of-plane incidence. The reflection characteristics of the anechoic layers with cavities and locally resonant scatterers are discussed. The backing is a steel plate followed by an air half space. Under this approximate zero transmission backing condition, the reflection reduction is induced by the absorption enhancement. The absorption mechanism is explained by the scattering/absorption cross section of the isolated scatterer. Three types of resonant modes which can induce efficient absorption are revealed. Due to the fact that the frequencies of the resonant modes are related to the size of the scatterers, anechoic layers with scatterers of mixed size can broaden the absorption band. A genetic optimization algorithm is adopted to design the anechoic layer with scatterers of mixed size at a desired frequency band from 2 kHz to l0 kHz for normal incidence, and the influence of the incident angle is also discussed.     

Perturbation Analysis on Guided Waves in a Fluid-Filled Borehole Surrounded by a Cubic Crystal Anisotropic Medium

The perturbation method is employed to analyse the guided waves in a borehole surrounded by a cubic crystal medium for the first time. The cubic crystal medium is regarded as a reference unperturbed isotropic state added to the perturbation. The dispersion characteristics of Stoneley wave, pseudo-Rayleigh wave, flexural wave, and screw wave are investigated in detail. It is found that dispersion of the guided waves excited by monopole and dipole sources does not depend on the azimuth of the source, whereas the dispersion of screw wave excited by quadrupole source is significantly related to the azimuth of the source. Screw waves propagated along different azimuth in the borehole can be split. This is different from screw waves in transversely isotropic media （hexagonal crystal）, which have been widely studied.     

High sensitivity gravimetric sensor made of unidirectional carbon fiber epoxy composite on （1 -- x）Pb（Znl/3Nb2/3）O3-xPbTiO3 single crystal substrate

We have derived a general formula for sensitivity optimization of gravimetric sensors and have used it to design a high sensitivity gravimetric sensor using unidirectional carbon fiber epoxy composite （CFEC） waveguide layer on （1 -x）Pb（Znl/3Nbz/3）O3-xPbTiO3 （PZN-xPT） single crystal substrate with the carbon fibers parallel to the xj and x2 axes, respectively. The normalized maximum sensitivity （｜sfm｜λ）max exhibits an increasing tendency with the decrease of （h/λ）opt and the maximum sensitivity （｜sfm｜λ）max increases with the elastic constant c6E6 of the piezoelectric substrate material. For the CFEC/[011]c poled PZN-7%PT single crystal sensor configuration, with the carbon fibers parallel to the xa axis at λ = 24 ktm, the maximum sensitivity ｜sfm｜max can reach as high as 1156 cmZ/g, which is about three times that of a traditional SiO2/ST quartz structure gravimetric sensor. The better design selection is to have the carbon fibers parallel to the direction of propagation of Love wave in order to obtain the best sensitivity.     

Lateral-field-excitation properties of LiNbO3 single crystal

LiNbO 3 has been found attractive for lateral field excitation (LFE) applications due to its high piezoelectric coupling. In this paper, bulk acoustic wave propagation properties for LiNbO 3 single crystal excited by a lateral electric field have been investigated using the extended Christoffel-Bechmann method. It is found that the LFE piezoelectric coupling factor for c mode reaches its maximum value of 95.46% when ψ = 0 for both (yxl)-58 and (yxwl)±60 /58 LiNbO 3 . The acoustic wave phase velocity of c mode TSM (thickness shear mode) changes from 3456 m/s to 3983 m/s as a function of ψ. Here ψ represents the angle between the lateral electric field and the crystallographic X-axis in the substrate major surface. A 5 MHz LFE device of (yxl)-58 LiNbO 3 with ψ = 0 was designed and tested in air. A major resonance peak was observed with the motional resistance as low as 17 and the Q-factor value up to 10353. The test result is well in agreement with the theoretical analysis, and suggests that the LFE LiNbO 3 device can be a good platform for high performance resonator or sensor applications.     

High sensitivity gravimetric sensor made of unidirectional carbon fiber epoxy composite on （1-x）Pb(Zn1/3Nb2/3)O3-xPbTiO3 single crystal substrate

We have derived a general formula for sensitivity optimization of gravimetric sensors and have used it to design a high sensitivity gravimetric sensor using unidirectional carbon fiber epoxy composite(CFEC) waveguide layer on(1- x)Pb(Zn1/3Nb2/3)O3-xPbTiO3(PZN-xPT) single crystal substrate with the carbon fibers parallel to the x1 and x2axes, respectively. The normalized maximum sensitivity Sfm λ maxexhibits an increasing tendency with the decrease of(h/λ)optand the maximum sensitivity Sfm λ maxincreases with the elastic constant cE66 of the piezoelectric substrate material. For the CFEC/[011]c poled PZN-7%PT single crystal sensor configuration, with the carbon fibers parallel to the x1 axis at λ = 24 μm, the maximum sensitivity Sfm maxcan reach as high as 1156 cm2/g, which is about three times that of a traditional SiO2/ST quartz structure gravimetric sensor. The better design selection is to have the carbon fibers parallel to the direction of propagation of Love wave in order to obtain the best sensitivity.     

Lateral field excitation properties of langasite single crystal

In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational modes of lateral field excitation (LFE) on langasite substrate, namely the (yxl)65o (pure-LFE mode), (yxl)45o (quasi-LFE mode), and (yxl)0o (pseudo-LFE mode). Devices on langasite substrate with the above cuts were fabricated and tested, and the experimental results agree well with the theoretical analysis. It is found that a pure thickness shear mode exists in the (yxl)65o langasite LFE device with the bare side facing liquid, and no spurious mode is found due to its moderately large piezoelectric coupling factor. In addition, (yxl)0o langasite LFE device is also found suitable for liquid phase sensing applications.     

GaN Films Grown on Si （111） Substrates Using a Composite Buffer with Low Temperature A1N Interlayer

A GaN interlayer between low temperature （LT） A1N and high temperature （PIT） A1N is introduced to combine HT AIN, LT A1N and composition-graded A1GaN as a novel buffer layer for GaN films grown on Si （111） substrates. The crystal quality, surface morphology and strain state of the GaN film with this new buffer are compared with those of GaN grown on a conventional buffer structure. By changing the thickness of LT A1N, the crystal quality is optimized and the crack-free GaN film is obtained. The in-plane strain in the GaN film can be changed from tensile to compressive strain with the increase in LT A1N thickness.     

Guided modes in asymmetric metal-cladding left-handed material waveguides

We investigate guided modes in the asymmetric waveguide structure with a left-handed material (LHM) layer surrounded by air and metal. A graphical method is proposed to determine the guided modes. New properties of the oscillating and surface guided modes, such as absence of the fundamental mode, coexistence of the oscillating and surface guided modes, fast attenuation of the surface guided modes, and mode degeneracy, are analyzed in detail. We also investigate dispersive characteristics of the metal-LHM- air optical waveguide. The propagation constant increases with decreasing slab thickness for the first-order oscillating mode, which is different from that in traditional metal-cladding waveguides.     

Scattering of S0 Lamb Mode from a Blind Hole in a Plate Using Mindlin/Mindlin Plate Theory

An analytical model of Lamb wave scattering from a circular blind hole in isotropic plates is presented using the Mindlin plate theory for describing in-plane and flexural wave modes simultaneously. The model makes use of the wave function expansion technique and the boundary conditions at the hole edge to evaluate the scattered far fields of three fundamental guided wave modes. Comparisons are made to existing approximate models using Poisson/Kirchhoff theory and Poisson/Mindlin theory and a 3D model using the exact 3D equations. The results reveal that the present model is more consistent with the exact 3D model at higher frequencies than existing approximate models.     

Comparison of Properties of Pt/PZT/Pt and Ru/PZT/Pt Ferroelectric Capacitors

Pb（Zr0.4Ti0.6）O3 film prepared by sol-gel spin coating on a Pt/Ti/SiO2/Si substrate is applied to ferroelectric capacitors with Pt or Ru as the top electrode. For the Pt/PZT/Pt and Ru/PZT/Pt ferroelectric capacitors, although with the same ferroelectric film, different top electrode materials incur different properties of PZT capacitors, such as fatigue, leakage, remanent and saturated polarization, except the similar crystal orientations of the PZT film. After 10^10 switch cycles, the remanent polarizations of the Ru/PZT/Pt and Pt/PZT/Pt capacitors decrease to 70% and 84%, respectively. The leakage current density of the latter increases obviously at positive bias after 108 switch cycles, compared with the former. Different materials for the top electrode bring different conditions at the PZT/top electrode interface. The influence of oxygen-vacancy concentration at the PZT/electrode interface and the influence of oxides of the electrode material at the PZT/electrode interface to charge injection can explain the difference of properties of the PZT capacitors with Pt or Ru as the top electrodes.     

Study on resonance frequency distribution of high-overtone bulk acoustic resonators

Based on the method of characterizing piezo-films by the resonance frequency distributions, the factors influencing the resonance frequency distribution of a High-overtone Bulk Acoustic Resonator (HBAR) consisting of a piezoelectric thin film with two electrodes and a substrate are studied. Some HBARs are simulated. The results manifest that changing the acoustic impedance ratio of the substrate to piezo-film the distribution of the space of the parallel resonance frequency and the effective electromechanical coupling factor are changed. When the fundamental mode of the piezo-film is at high frequency, changing the acoustic impedance ratio of the electrode to piezo-film and the thickness of the electrodes make the resonance frequency distribution of HBARs change. These results manifest that the HBARs can be resonant at specified frequencies by means of adjusting the factors affecting the resonance frequency distribution.