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Properties study of LiNbO3 lateral field excited device working on thickness extension mode 下载免费PDF全文
This paper investigates the properties of thickness extension mode excited by lateral electric field on LiNbO3 by using the extended Christoffel-Bechmann method. It finds that the lateral field excitation coupling factor for amode (quasi-extensional mode) reaches its maximum value of 28% on X-cut LiNbO3. The characteristics of a lateral field excitation device made of X-cut LiNbO3 have been investigated and the lateral field excitation device is used for the design of a high frequency ultrasonic transducer. The time and frequency domain pulse/echo response of the LiNbO3 lateral field excitation ultrasonic transducer is analysed with the modified Krimholtz-Leedom-Matthae model and tested using traditional pulse/echo method. A LiNbO3 lateral field excitation ultrasonic transducer with the centre frequency of 33.44 MHz and the -6 dB bandwidth of 33.8% is acquired, which is in good agreement with the results of the Krimholtz-Leedom-Matthae model. Further analysis suggests that the LiNbO3 lateral field excitation device has great potential in the design of broadband high frequency ultrasonic transducers. 相似文献
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LiNbO 3 has been found attractive for lateral field excitation (LFE) applications due to its high piezoelectric coupling. In this paper, bulk acoustic wave propagation properties for LiNbO 3 single crystal excited by a lateral electric field have been investigated using the extended Christoffel-Bechmann method. It is found that the LFE piezoelectric coupling factor for c mode reaches its maximum value of 95.46% when ψ = 0 for both (yxl)-58 and (yxwl)±60 /58 LiNbO 3 . The acoustic wave phase velocity of c mode TSM (thickness shear mode) changes from 3456 m/s to 3983 m/s as a function of ψ. Here ψ represents the angle between the lateral electric field and the crystallographic X-axis in the substrate major surface. A 5 MHz LFE device of (yxl)-58 LiNbO 3 with ψ = 0 was designed and tested in air. A major resonance peak was observed with the motional resistance as low as 17 and the Q-factor value up to 10353. The test result is well in agreement with the theoretical analysis, and suggests that the LFE LiNbO 3 device can be a good platform for high performance resonator or sensor applications. 相似文献
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