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Quartz crystal resonators (QCRs) with circular electrodes have been widely used for various liquid and gas sensing applications. In this work,quartz crystal resonators with elliptical electrodes were studied and tested for liquid property measurement. Mindlin’s theory was used to optimize the dimension and geometry of the electrodes and a 5-MHz QCR with minimum series resistance and without any spurious modes was obtained. A series of AT-cut QCRs with elliptical electrodes of different sizes were fabricated and their sensing performances were compared to devices with circular electrodes. The experimental result shows that the device with elliptical electrodes can obtain lower resonance impedance and a higher Q factor,which results in a better loading capability. Even though the sensitivities of devices with elliptical and circular electrodes are found to be similar,the sensor with elliptical electrodes has much higher resolution due to a better frequency stability. The study indicates that the performance of QCRs with elliptical electrodes is superior to that of traditional QCRs with circular electrodes. 相似文献
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时间延迟型声表面波无源传感器的无线访问 总被引:2,自引:1,他引:1
介绍了一种基于无源声表面波(SAW)器件的无线传感器.作为敏感器件的 SAW器件由作为换能器的 ID-Tag和一组反射栅组成.由访问系统发射出的电磁波通过 ID-Tag在 SAW器件上激励起声表面波,此声表面波在器件表面传播,被SAW器件本身状态参数调制后,反射回波再通过ID-Tag转变成电磁波向空间发射.因此对访问系统接收到的回波信号进行分析即可得到被测量。即实现了无线传感.由于以SAW器件为敏感元件可以研制各种各样的物理量、化学量传感器,这种无线访问传感系统可在各种场合得到应用. 相似文献
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Properties study of LiNbO3 lateral field excited device working on thickness extension mode 下载免费PDF全文
This paper investigates the properties of thickness extension mode excited by lateral electric field on LiNbO3 by using the extended Christoffel-Bechmann method. It finds that the lateral field excitation coupling factor for amode (quasi-extensional mode) reaches its maximum value of 28% on X-cut LiNbO3. The characteristics of a lateral field excitation device made of X-cut LiNbO3 have been investigated and the lateral field excitation device is used for the design of a high frequency ultrasonic transducer. The time and frequency domain pulse/echo response of the LiNbO3 lateral field excitation ultrasonic transducer is analysed with the modified Krimholtz-Leedom-Matthae model and tested using traditional pulse/echo method. A LiNbO3 lateral field excitation ultrasonic transducer with the centre frequency of 33.44 MHz and the -6 dB bandwidth of 33.8% is acquired, which is in good agreement with the results of the Krimholtz-Leedom-Matthae model. Further analysis suggests that the LiNbO3 lateral field excitation device has great potential in the design of broadband high frequency ultrasonic transducers. 相似文献
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LiNbO 3 has been found attractive for lateral field excitation (LFE) applications due to its high piezoelectric coupling. In this paper, bulk acoustic wave propagation properties for LiNbO 3 single crystal excited by a lateral electric field have been investigated using the extended Christoffel-Bechmann method. It is found that the LFE piezoelectric coupling factor for c mode reaches its maximum value of 95.46% when ψ = 0 for both (yxl)-58 and (yxwl)±60 /58 LiNbO 3 . The acoustic wave phase velocity of c mode TSM (thickness shear mode) changes from 3456 m/s to 3983 m/s as a function of ψ. Here ψ represents the angle between the lateral electric field and the crystallographic X-axis in the substrate major surface. A 5 MHz LFE device of (yxl)-58 LiNbO 3 with ψ = 0 was designed and tested in air. A major resonance peak was observed with the motional resistance as low as 17 and the Q-factor value up to 10353. The test result is well in agreement with the theoretical analysis, and suggests that the LFE LiNbO 3 device can be a good platform for high performance resonator or sensor applications. 相似文献
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In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational modes of lateral field excitation (LFE) on langasite substrate, namely the (yxl)65o (pure-LFE mode), (yxl)45o (quasi-LFE mode), and (yxl)0o (pseudo-LFE mode). Devices on langasite substrate with the above cuts were fabricated and tested, and the experimental results agree well with the theoretical analysis. It is found that a pure thickness shear mode exists in the (yxl)65o langasite LFE device with the bare side facing liquid, and no spurious mode is found due to its moderately large piezoelectric coupling factor. In addition, (yxl)0o langasite LFE device is also found suitable for liquid phase sensing applications. 相似文献
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