Lateral-field-excitation properties of LiNbO3 single crystal

LiNbO 3 has been found attractive for lateral field excitation (LFE) applications due to its high piezoelectric coupling. In this paper, bulk acoustic wave propagation properties for LiNbO 3 single crystal excited by a lateral electric field have been investigated using the extended Christoffel-Bechmann method. It is found that the LFE piezoelectric coupling factor for c mode reaches its maximum value of 95.46% when ψ = 0 for both (yxl)-58 and (yxwl)±60 /58 LiNbO 3 . The acoustic wave phase velocity of c mode TSM (thickness shear mode) changes from 3456 m/s to 3983 m/s as a function of ψ. Here ψ represents the angle between the lateral electric field and the crystallographic X-axis in the substrate major surface. A 5 MHz LFE device of (yxl)-58 LiNbO 3 with ψ = 0 was designed and tested in air. A major resonance peak was observed with the motional resistance as low as 17 and the Q-factor value up to 10353. The test result is well in agreement with the theoretical analysis, and suggests that the LFE LiNbO 3 device can be a good platform for high performance resonator or sensor applications.