用于近场集成光学头的面阵平面微透镜

讨论了采用常规的光刻热熔法及灰度掩模技术制作非梯度折射率型平面折射和平面衍射微透镜的情况。定性地分析了在不同的工艺条件下可能得到的平面端面微光学器件的种类和形貌特征。给出了在石英衬底表面通过光刻热熔工艺和氢离子束蚀刻所得到的球面及圆弧轮廓特征的凹形掩模的SEM照片 ,并对用于近场集成光学头的平面微透镜和半导体激光器的集成结构作了初步分析。利用这一技术所制成的平面折射微透镜可以很方便地与半导体光源等器件匹配耦合及集成固联     

凹折射微透镜阵列的离子束刻蚀制作

利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。     

连续型平面衍射聚光透镜掩模的制作

针对目前二元光学元件掩模制作工艺过程的诸多不足，对连续型平面衍射聚光透镜掩模的激光直写制作工艺进行了研究。基于基尔霍夫标量衍射理论，采用光线追迹法设计了连续型平面衍射聚光透镜掩模。采用激光直写技术，利用CLWS 300M／C极坐标激光直写设备、S1830光刻胶和MICROPOSIT 351显影液，进行了刻写实验。实验表明，激光能量、预烘烤温度、显影液浓度以及预曝光对掩模微结构的制作均有影响。最后制作了掩模。与二元光学元件掩模的制作工艺相比，该技术具有工艺简单、制作周期短且易于操作的优点。     

飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.     

飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.     

红外微透镜阵列及其与MCT红外焦平面的集成

针对中短波碲镉汞（MCT）红外焦平面探测器的使用要求,设计了用于混合集成和单片集成且尺寸大小与探测器像元结构匹配的方形底折射微透镜阵列。采用热熔成形和（反应）离子柬刻蚀转移技术制作了多种红外材料微透镜,如Si、Ge、GaAs、蓝宝石以及红外玻璃（IRG-103和IRG-104）微透镜。针对混合集成和单片集成的不同要求,选用多种光刻胶如AZ6112和AZ6130等不同厚度的胶以及SUN-120P低熔点正型光刻胶,进行热熔和刻蚀实验,遴选分别适用于混合和单片集成的光刻胶。优化光刻胶和衬底材料的刻蚀速率比,得到高填充因子和合适光学参数的微透镜阵列。探究了SUN-120P低熔点正型光刻胶的特性和通过离子柬刻蚀转移视线实现零间距透镜的工艺。最后介绍了与MCT红外焦平面阵列器件的集成方式和工艺进展。     

折射微透镜阵列的非成象光学特性研究

本文针对微透镜阵列与红外焦平面阵列集成的应用,对折射性微透镜阵列的非成象光学特性进行了研究和总结.采用系统性能评价因子来衡量微透镜的聚能效率,分析了系统参数对会聚效率的影响,并用标量衍射方法对几何光学分析结果进行了校验,为红外焦平面阵列微镜集成的设计和制作提供了理论依据.     

集成微光机电系统中的矢量光学问题

集成微光机电(MOEM) 系统是近年来迅速地发展起来的一门新兴的综合学科,它融合了微光学元件、微电子器件和微机械结构的优点.不但在技术上有重要的应用,还蕴涵着与小尺寸器件有关的力学、热学、电学、光学,以及材料科学等丰富的基础科学研究课题.文章探讨了MOEM 系统中典型的微光学元件,如衍射微透镜、折射微透镜和微光栅中的矢量光学问题,简要地介绍了相应的求解方法.     

紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。     

SNOM应用于光电材料和器件的光学特性的探测和表征

介绍了近场光学及近场探测的原理 ,给出了其用于光电器件研究中的一些结果。近场光学方法具有超衍射分辩的本领和纳米局域光场探测的能力 ,适用于多种光电材料的探测与表征 ,包括 :LD、光纤波导器件、光子晶体器件等。纳米局域光场和倏逝场的探测发现了许多远场探测无法得到的结果 ,为光电器件纳米结构的研究提供了有力证据     

Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices.     

灰阶编码掩模制作微光学元件

提出一种基于改变灰阶编码掩模的单元形状和位置的掩模设计新方法,并根据成像过程中的非线性因素,用这种方法对掩模图形进行了预畸变校正,根据部分相干光成像理论和抗蚀剂曝光显影模型,模拟计算了这种灰阶编码掩模产生的空间光强分布和光刻胶上的浮雕结构,采用电子束曝光系统制作了这种掩模,并在光刻胶上获得具有连续面形的微透镜的阵列。     

Fabrication and characterization of polydimethylsiloxane concave microlens array

Concave microlens array is fabricated with PDMS (polydimethylsiloxane) material. Resist thermal reflow method and reverse pattern replication method are employed to fabricate the concave microlens array. The optical performance of the PDMS concave microlens array is analyzed with ray-trace method. Profile of the PDMS concave microlens array is observed by metallographic microscope and Talystep. It is indicated by the results that the surface profile of the PDMS concave microlens array is clear and distinct. Optical properties are also tested with Beamprofiler system. The shine spots on the focal plane of the microscope objective are of highly uniformity, and essentially coincide well with the simulation result. The PDMS concave microlens array has potential application in many optoelectronic devices, such as diffusers and scanners.     

Ultraviolet-Cured Polymer Micro-Optical Elements

A new fabrication method for polymer micro-optical elements is described which uses the contracting effect of photopolymers during the process of polymerization. Convex and concave microlens arrays and phase gratings were formed by irradiating a ultraviolet (UV)-curable monomer with incoherent UV light through an appropriate metallic mask. The morphological and optical characterization of the fabricated elements reveals that the surface profile of the elements depends on the pattern and aperture size of the mask employed.     

Focusing in microlenses close to a wavelength in diameter

Light focused from air into a spherical microlens is affected by diffraction at the lens surface as its diameter approaches the wavelength of light. Through an extension of Mie theory, we show that a converging wave that is incident upon a Si microlens with a diameter less than approximately 4lambda creates a spot as much as 25% smaller than predicted with vector diffraction theory. Si microlenses only a wavelength in diameter are shown to be virtually insensitive to variations in the maximum illumination angle, and changes in index of refraction are not found to cause the proportional changes in spot size that would be expected from vector diffraction theory.     

大数值孔径自聚焦平面微透镜列阵研究

采用离子交换工艺,在PS—1玻璃基片上制作自聚焦平面微透镜列阵,由于窗口区凸起,数值孔径高达0.58。本文还对窗口凸起的透镜特性和窗口直径对折射率分布的影响进行了理论分析,得到了有益结果。最后对样品的光学特性进行了讨论。     

Fabrication of concave refractive microlens arrays in solgel glass by a simple proximity-effect-assisted reflow technique

We report a simple method for fabricating a concave refractive microlens array (MLA) in solgel glass by using a proximity-effect-assisted reflow technique. The solgel concave refractive MLA that we fabricated had excellent surface smoothness; good dimensional conformity, with an 8.23% nonuniformity of the microlens elements; and structural perfection, with a biggest deviation of 1% from a perfect concave spherical crown. The relative error between the measured and the designed values of the concave MLA's focal length was only 1.83%. Compared with the conventional fabrication techniques for concave MLAs, the proposed method has significant advantages including simplicity, low cost, good element conformity, and smooth device surface.