Sample-inverted reflow technique for fabrication of a revolved-hyperboloid microlens array in hybrid solgel glass

We propose a novel fabrication method, which is referred to as the sample-inverted reflow technique, to fabricate a refractive microlens array (MLA) with a revolved-hyperboloid profile in a solgel material. The fabricated solgel MLA demonstrates an excellent smooth profile with a fabrication error much less than the difference between the revolved hyperboloid and the spherical surface. In an application of coupling a laser diode (LD) to a single-mode fiber (SMF), we propose a two-MLA coupling scheme in which two revolved-hyperboloid MLAs are used between the LD and the SMF. In this configuration the coupling efficiency achieves 81.7% (-0.88 dB).     

PtSi IRCCD器件用长焦距Si微透镜阵列的制作研究

为了改善PtSi IRCCD器件的红外响应特性,需要添加长焦距微透镜阵列进行焦平面集光,本文提出了一种新的方法—曲率补偿法用于长焦距微透镜阵列的制作.扫描电子显微镜(SEM)显示微透镜阵列为表面极为平缓的方底拱形阵列,表面探针测试结果显示用曲率补偿法制作的微透镜阵列表面光滑,单元重复性好,其焦距可达到685.51μm.微透镜阵列器件与PtSi IRCCD器件在红外显微镜下对准胶合,显著改善了IRCCD器件的光响应特性.     

飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.     

凹折射微透镜阵列的离子束刻蚀制作

利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。     

Simple reflow technique for fabrication of a microlens array in solgel glass

A simple reflow method for fabrication of refractive microlens arrays in inorganic-organic SiO2-ZrO2 solgel glass is presented. To our knowledge, this is the first report that presents a simple reflow technique for transforming a negatively induced hybrid solgel material into desirable spherical microlenses. It is shown that the microlenses have excellent smooth surfaces and uniform dimensions. The reflow technique is considerably cheaper than use of a high-energy beam-sensitive gray-scale mask and is suitable for mass production.     

Design and fabrication of long focal length microlens arrays

In this paper, we present microlens arrays (MLA) with long focal length (in millimeter range) based on thermal reflow process. The focal length of microlens is usually in the same order of lens diameter or several hundred microns. To extend focal length, we made a photoresist (SU-8) MLA covered by a Polydimethylsiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and photoresist interface is lower than that of air and MLA interface, light is less bended when passing through MLA and is focused at longer distance. Microlenses of diameters from 50 μm to 240 μm were successfully fabricated. The longest focal length was 2.1 mm from the microlens of 240 μm diameter. The numerical aperture (NA) was reduced 0.06, which is much lower than the smallest NA (~ 0.15) by regular thermal reflow processes. Cured PDMS has high transmittance and becomes parts of MLA without too much optical power loss. Besides, other focal lengths can be realized by modifying the refractive index different between two adjacent materials as described in this paper.     

Fabrication and characterization of polydimethylsiloxane concave microlens array

Concave microlens array is fabricated with PDMS (polydimethylsiloxane) material. Resist thermal reflow method and reverse pattern replication method are employed to fabricate the concave microlens array. The optical performance of the PDMS concave microlens array is analyzed with ray-trace method. Profile of the PDMS concave microlens array is observed by metallographic microscope and Talystep. It is indicated by the results that the surface profile of the PDMS concave microlens array is clear and distinct. Optical properties are also tested with Beamprofiler system. The shine spots on the focal plane of the microscope objective are of highly uniformity, and essentially coincide well with the simulation result. The PDMS concave microlens array has potential application in many optoelectronic devices, such as diffusers and scanners.     

Polarization-dependent optical tuning of focal intensity of liquid crystal polymer microlens array

This work demonstrates the feasibility of a microlens array (MLA) with a focal intensity that can be optically tuned by controlling the polarization of incident light. The proposed MLA has a focusing unit based on birefringent liquid crystalline polymer (LCP) and a tuning unit with a photo-alignment layer for controlling the polarization state of incident laser light. The optically variable refractive indices of LCP allow a positive or negative MLA to be realized by controlling the polarization of the incident light.     

Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices.     

Rapid laser fabrication of microlens array using colorless liquid photopolymer for AMOLED devices

Microlens array (MLA) is microfabricated using Ultra Violet (UV) laser for display device applications. A colorless liquid photopolymer, Norland Optical Adhesive (NOA) 60, is spin-coated and pre-cured via UV light for completing the laser process. The laser energy controlled by a galvano scanner is radiated on the surface of the NOA 60. A rapid thermal volume expansion inside the material creates microlens array when the Gaussian laser energy is absorbed. The fabrication process conditions for various shapes and densities of MLA using a non-contact surface profiler are investigated. Furthermore, we analyze the optical and display characteristics for the Organic Light Emitting Diode (OLED) devices. Optimized condition furnishes the OLED with the enhancement of light emission by 15%. We show that UV laser technique, which is installed with NOA 60 MLA layer, is eligible for improving the performance of the next generation display devices.     

Femtosecond laser microfabrication of periodic structures using a microlens array

A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed. PACS 42.82.Cr; 07.60.Pb; 42.62.Cf     

扩展微透镜数值孔径范围的阶梯光刻热熔法研究

在微透镜阵列的光刻热熔制作法中，临界角效应严重影响了微透镜的制作范围和面形质量。在对临界角效应定性研究的基础上，提出了用阶梯光刻熔法来扩展热熔型微透镜阵列的数值孔径范围。实验结果表明，采用这一方法制作的微透镜，其单元孔径范围扩展为５０￣９００μｍ，相对口径范围扩大到为Ｆ／１￣Ｆ／１０，并有效地改善了临界角效应对大孔径微透镜面形质量的影响。     

Numerical analysis and design of patterned electrode liquid crystal microlens array with dielectric slab

The phase profile of hole patterned electrode liquid crystal (LC) microlens array (MLA) was studied by a numerical method. It indicated that the formation of inverse domain and tilt wall in the liquid crystal cell limits the optical performance of the microlens array. The physical mechanism that determines the formation of inverse domain and tilt wall was elucidated by analyzing the phase profile and the liquid crystal director distribution. According to our numerical results, a new configuration for hole patterned electrode liquid crystal microlens array was proposed by introducing a dielectric slab between the patterned electrode and the liquid crystal. The physical parameters that influence the optical performance of this new configuration LC MLA were studied, which provide fundamental information for the design. The results indicate that the phase profile and focusing power of the new configuration is greatly improved.     

折射型微透镜列阵的光刻热熔法研究

研究了制作折射型微透镜列阵的一种新方法光刻胶热熔成形法，获得了２０×２０的折射型微透镜列阵，单元微透镜相对口径为Ｆ／２，单元透镜直径为９０μｍ，中心间隔１００μｍ，透镜的波像差小于１．３波长。本文详细阐述了光刻热熔法的基本原理及微透镜设计方法，并讨论了工艺参数对微透镜列阵质量的影响。     

Silicon microlens structures fabricated by scanning-probe gray-scale oxidation

We report on the micromachining of silicon microlens structures by use of scanning-probe gray-scale anodic oxidation along with dry anisotropic etching. Convex, concave, and arbitrarily shaped silicon microlenses with diameters as small as 2 microm are demonstrated. We also confirm the high fidelity of pattern transfer between the probe-induced oxides and the etched silicon microlens structures. Besides the flexibility, the important features of scanning-probe gray-scale anodic oxidation are small pixel size and pitch (of the order of tens of nanometers), an unlimited number of gray-scale levels, and the possibility of creating arbitrarily designed microlens structures with exquisite precision and resolution. With this approach, refractive, diffractive, and hybrid microlens arrays can be developed to create innovative optical components.     

用于近场集成光学头的面阵平面微透镜

讨论了采用常规的光刻热熔法及灰度掩模技术制作非梯度折射率型平面折射和平面衍射微透镜的情况。定性地分析了在不同的工艺条件下可能得到的平面端面微光学器件的种类和形貌特征。给出了在石英衬底表面通过光刻热熔工艺和氢离子束蚀刻所得到的球面及圆弧轮廓特征的凹形掩模的SEM照片 ,并对用于近场集成光学头的平面微透镜和半导体激光器的集成结构作了初步分析。利用这一技术所制成的平面折射微透镜可以很方便地与半导体光源等器件匹配耦合及集成固联     

连续表面微透镜列阵元件检测

系统分析了连续表面微透镜列阵的几何参量和光学性能的检测方法和评价标准,针对典型的折射型聚焦列阵元件,给出其结构尺寸及光学性能的测试结果,两者结果一致.从而建立了一套通过测试元件的几何参量、加工误差及光学性能指标来综合评估微光学元件性能的方法.     

纳米半球微镜阵列结构对GaN基LED光提取效率的影响

为了分析表面纳米半球微镜结构对GaN基发光二极管（LED)光提取效率的影响,利用时域有限差分法(FDTD)分别对GaN、ZnO、SiO2、聚苯乙烯组成的半球微镜结构进行了分析和比较,同时用模式分析方法从理论上对FDTD计算结果进行了进一步验证。研究发现,在亚波长范围,折射率较小的材料不利于导模与表面结构层的耦合,不会对光提取效率的提高产生明显影响。相比之下,折射率较大的材料会使更多的模式耦合到半球微镜阵列层,更有利于光提取效率的提高;当材料选定,纳米半球半径增加时,光提取效率也逐渐增加,优化后半径为600 nm的半球微镜阵列结构GaN基LED,其光提取效率比没有结构的普通平板LED增强5.66倍,在以上波导材料结构中最为优化。在此基础上,通过等效折射率的计算得到半球微镜结构的等效折射率模型,并利用非对称平板模式分析的办法对以上得到的结论进行了分析和验证。这些结果对实际的高性能GaN基LED的设计与优化具有重要意义。     

Fabrication of concave microlens arrays using controllable dielectrophoretic force in template holes

This Letter presents a method for fabricating concave microlens arrays of UV-curable polymer by using the dielectrophoresis (DEP) force. The DEP force, generated by a voltage between the patterned conductive template and substrate, acting on the polymer-air interface, can drive the dielectric liquid polymer into the template holes and change the shape of the polymer-air interface. The upper polymer surface of fabricated microlens is super smooth, which can reduce optical noise. The upper surface geometry is measured approximately as parabolic in general, which can lead to a negligible spherical aberration, compared to spherical surfaces.     

一种大F数微透镜阵列的制备方法

针对大F数(大于10)微透镜阵列难以制备的现状,提出了一种制备大F数微透镜阵列的方法.首先采用传统光刻胶热熔法及刻蚀技术制作出成形的微透镜阵列,再将一层具有较高粘滞系数的光刻胶均匀地涂覆在该微透镜阵列上,在光刻胶的粘滞作用以及烘烤过程中光刻胶自身表面张力的共同作用下,微透镜阵列的F数得到提高.采用该方法制备的二氧化硅微透镜阵列的F数达40,与传统大F数微透镜阵列的加工方法相比,该方法简便易行、制备的微透镜阵列面形良好,且只需调节光刻胶的粘滞系数,即可获得F数不同的微透镜阵列.