激光致晶态Ag11In12Te26Sb51相变介质光学常量的研究

研究了结晶度对Ag11In12Te26Sb51相变薄膜光学常数的影响。用初始化仪使相变薄膜晶化，改变晶化参量得到不同的结晶度，当转速固定时，随激光功率的增加，折射率基本随之减小，消光系数先是增大，而后减小；当激光功率固定时，随转速的增大，折射率也随之增大，消光系数也是先增大后减小。非晶态与晶态间的变换、薄膜微结构的变化（包括晶型的转变和原子间键合状态的变化）以及薄膜内残余应力的影响Ag11In12Te26Sb51相变薄膜复数折射率的主要原因。测量了单层膜的透过率和CD－RW相变光盘中Ag11In12Te26Sb51薄膜非晶态和晶态的反射率。     

Ge2 Sb2 Te5相变薄膜光学及擦除性能研究

利用蓝绿激光对非晶态Ge2Sb2Te5 相变薄膜进行擦除性能的研究,分别用1000 ns,500 ns,100 ns,60 ns脉宽的蓝绿激光进行实验.结果表明,一定脉宽下,反射率对比度随擦除功率的增加而增大.并且,在1000 ns,500 ns,100 ns,60 ns的激光作用时间范围内,非晶态薄膜均可转变成晶态.对于脉宽为60 ns的蓝绿激光,擦除功率大于4.49 mW以后,薄膜的反射率对比度高于15％,这表明Ge2Sb2Te5相变薄膜在短脉宽、低擦除功率条件下,可具有较高的晶化速度.同时,分析了非晶态和晶态Ge2Sb2Te5相变薄膜的光谱特性,对比研究了780 nm,650 nm,514 nm和405 nm波长处的反射率和反射率对比度,提出了Ge2Sb2Te5相变薄膜用于蓝光光盘的改进方法.     

AgInSbTe薄膜的短波长记录性能分析

采用自制的装置研究了Ag5In5Sb47Te33薄膜的静态记录性能与记录激光的功率和脉冲宽度的关系，并对其记录畴形貌特点进行了直接观察。结果表明只有记录激光的功率和脉冲宽度在一定范围之内才能起到信息记录的作用，所得的记录畴形貌十分清晰，基本为非晶态Ag5In5Sb47Te33；小于该范围的激光能量不能使材料结构发生较大的变化，所得的记录畴形貌模糊，反射率对比度低于2％；大于该范围所得的记录畴由烧蚀区和其周围的非晶态Ag5In5Sb47Te33组成。另外，得到了记录激光功率为12mW、脉冲宽度为90ns的Ag5In5Sb47Te33薄膜的短波长最佳记录条件，其记录畴的反射率对比度为22％，直径为380nm-400nm。     

纳秒单脉冲激光诱导AgInSbTe薄膜的相变特性

利用磁控溅射法在K9玻璃基底上制备了Ag8In14Sb55Te23(AIST)纳米薄膜,并利用激光抽运-探测技术测量了薄膜的时间分辨反射率变化特性。研究结果表明,在合适能量密度的单脉冲纳秒激光脉冲作用下,AIST薄膜可以快速从沉积非晶态转化为晶态结构,晶化过程包含中间熔化态。在较低能量密度范围内,反射率变化量和晶化时间都随能量密度变化呈线性增加趋势。     

氮掺杂Ge2Sb2Te5相变存储器的多态存储功能

通过反应溅射的方法,制备了N掺杂的Ge2Sb2Te5(N-GST)薄膜,用作相变存储器的存储介质.研究表明,掺杂的N以GeN的形式存在,不仅束缚了Ge2Sb2Te5 (GST)晶粒的长大也提高了GST的晶化温度和相变温度.利用N-GST薄膜的非晶态、晶态面心立方相和晶态六方相的电阻率差异,能够在同一存储单元中存储三个状态,实现相变存储器的多态存储功能.     

溅射气压对Ge2Sb2Te5薄膜光学常数的影响

实验研究了氩气气压对溅射制备的Ge2 Sb2 Te5 薄膜的光学常数随波长变化的影响 ,结果表明 :随薄膜制备时氩气气压的增加 ,Ge2 Sb2 Te5 薄膜的折射率n先增大后减小 ,而消光系数k先减小后增大。二者都随波长的变化而变化 ,且在长波长范围变化较大 ,短波长范围变化较小 ,解释了溅射气压对Ge2 Sb2 Te5 薄膜的光学常数影响的机理     

基于Si掺杂Sb2Te3薄膜的相变存储器研究

采用磁控三靶(Si,Sb及Te)共溅射法制备了Si掺杂Sb2Te3薄膜,作为对比,制备了Ge2Sb2Te5和Sb2Te3薄膜,并且采用微加工工艺制备了单元尺寸为10μm×1Oμm的存储器件原型来研究器件性能.研究表明,Si掺杂提高了Sb2Te3薄膜的晶化温度以及薄膜的晶态和非晶态电阻率,使得其非晶态与晶态电阻率之比达到106,提高了器件的电阻开/关比;同Ge2Sb2Te5薄膜相比,16at%Si掺杂Sb2Te3薄膜具有较低的熔点和更高的晶态电阻率,这有利于降低器件的RESET电流.研究还表明,采用16at%Si掺杂Sb2Te3薄膜作为存储介质的存储器器件原型具有记忆开关特性,可以在脉高3V、脉宽500 ns的电脉冲下实现SET操作,在脉高4 V、脉宽20 ns的电脉冲下实现RESET操作,并能实现反复写/擦,而采用Ge2Sb2Te5薄膜的相同结构的器件不能实现RESET操作.     

基于Ge2Sb1.5Bi0.5Te5可饱和吸收体的锁模光纤激光器

Ge2Sb1.5Bi0.5Te5薄膜具有宽光谱吸收和高稳定性的特点.在金镜上采用磁控溅射制备了40 nm厚的Ge2Sb1.5Bi0.5Te5薄膜,将其在150℃下退火20 min,退火后Ge2Sb1.5Bi0.5Te5由非晶态转变为晶态.测试发现晶态Ge2Sb1.5Bi0.5Te5可饱和吸收体的调制深度提高到了原来的1...     

新型AgInSbTe相变薄膜的光学及记录性能

利用直流磁控溅射法制备了一种新型AgInSbTe相变薄膜。示差扫描量热(DSC)实验测定的结晶峰温度为193．92℃。X射线衍射(XRD)表明未经热处理的沉积态薄膜是非晶态,而经过200℃热处理,X射线衍射图出现衍射峰,薄膜从非晶态转变到晶态。同时,研究了晶态和非晶态相变薄膜的吸收率、透射率和反射率随波长的变化。测定了650nm激光作用下的相变薄膜的记录性能,分析了记录功率、记录脉宽对薄膜反射率衬比度的影响,在同一记录脉宽条件下,记录功率越大,反射率衬比度也越大;在同一记录功率条件下,随记录脉宽的增加,反射率衬比度也增大。结果表明,新型AgInSbTe相变薄膜在激光作用下具有较高的反射率衬比度,可获得良好的记录性能。     

热致晶化高反射率SbOx薄膜的结构分析和光学性质

利用直流磁控反应溅射法制备了SbOx薄膜,利用X射线衍射分析仪和光谱仪分别研究了这种薄膜热致晶化的微观结构和光学性质的变化,并通过非晶态薄膜粉末的示差扫描量热实验测出不同加热速度条件下结晶峰温度,研究了这种薄膜的结晶动力学。发现沉积态SbOx薄膜为非晶态,非晶态SbOx薄膜在热致晶化过程中发生了两种变化,分别对应为较低温度下Sb晶体和较高温度下立方Sb2O3相的生成。退火后晶态薄膜中出现了单质Sb和Sb2O3,300℃退火后Sb2O3相含量最大。晶态薄膜的反射率均高于沉积态,在晶态薄膜中200℃退火的薄膜反射率最大。     

Novel material for nonvolatile ovonic unified memory (OUM)－Ag11In12Te26Sb51 phase change semiconductor

In this paper, Ag_{11}In_{12}Te_{26}Sb_{51} phase change semiconductor films have been prepared by dc sputtering. The crystallization behaviour of amorphous Ag_{11}In_{12}Te_{26}Sb_{51} thin films was investigated by using differential scanning calorimetry and x-ray diffraction. It was found that the crystallization temperature is about 483K and the melting temperature is 754.8K and the activation energy for crystallization, E_a, is 2.07eV. The crystalline Ag_{11}In_{12}Te_{26}Sb_{51} films were obtained using initializer. The initialization conditions have a great effect on the sheet resistance of Ag_{11}In_{12}Te_{26}Sb_{51} films. We found that the effect of the initialization condition on the sheet resistance can be ascribed to the crystallinity of Ag_{11}In_{12}Te_{26}Sb_{51} films. The sheet resistance of the amorphous (R_{amo}) film is found to be larger than 1×10^6Ω and that of the crystalline (R_{cry}) film lies in the range from about 10^3 to 10^4Ω. So we have the ratio R_{amo}/R_{cry}=10^2～10^3, which is sufficiently large for application in memory devices.     

On RF magnetron-sputtering preparation of Ag–Sb–S thin films

One important application area of chalcogenide materials is rewritable optical data storage. This technology is based on a reversible phase transition between the crystalline and the amorphous state and vice versa. Currently dominant materials for rewritable optical recording are Ge–Sb–Te and Ag–In–Sb–Te alloys. Material research still continues due to the need for increasing storage capacity and data rates. Polycrystalline bulks of AgSbS₂ were prepared by melt-quench technique. Composition and homogeneity of these bulks were checked by scanning electron microscopy with energy dispersive X-ray analysis (SEM-EDX), crystallinity was studied by X-ray diffraction (XRD). Targets for RF magnetron sputtering were prepared from pulverized bulks by hot-pressing technique. Targets were characterized the same way as bulks. Thin Ag–Sb–S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films. Composition and homogeneity of prepared thin films were characterized by SEM-EDX, Rutherford Back Scattering (RBS) and Elastic Recoil Detection Analysis (ERDA); character (amorphous/crystalline) was traced by XRD. Optical properties (spectral dependence of refractive index) were evaluated on the basis of UV–Vis–NIR spectroscopy and variable angle spectral ellipsometry (VASE). Crystallization abilities were studied by the measurement of thermal dependence of the prepared thin films optical transmission.     

Laser induced crystallization of as-deposited amorphous Ge2Sb2Te5 films

Crystallization is induced by pulsed laser irradiation of s-deposited amorphous Ge2Sb2Te5 films. Changes of the irradiated areas have been analyzed with the reflectivity contrast. As laser fluences increasing,the reflectivity contrast increases from 0% - 2% to 14% - 16%, which indicates the structure of as deposited films transforms from amorphous to crystalline phases. The process of crystallization driven by the movement and rearrangement of atoms is described. And also the influence of the pulse duration on the threshold of crystallization is discussed, the results show that a lower threshold of crystallization can be produced for as-deposited films irradiated by the laser with short pulse duration. However, by the laser with long pulse duration, crystallization can only be formed with a higher threshold. The crystallization of films by irradiation of laser pulses is studied by Raman spectra.     

氟化铒薄膜晶体结构与红外光学性能的关系

使用热蒸发技术在锗(111)衬底上制备了氟化铒(ErF₃)薄膜. XRD衍射结果表明，随着衬底温度的增加，氟化铒薄膜发生了从非晶状态到结晶状态的转变，薄膜的表面形貌和红外光学性能也发生了显著的变化，部分结晶的氟化铒薄膜的远红外透射谱和完全非晶的薄膜基本一致，但是与结晶薄膜则没有相似之处. 晶格常数计算表明薄膜中存在压应力. 使用洛伦兹谐振子模型对薄膜的透射率曲线进行拟合计算，得到ErF₃薄膜的折射率和消光系数. 在10μm处非晶薄膜的折射率和消光系数最小值分别为1.38和0.01，结晶薄膜的折射率和消光系数最小值分别为1.32和0.006. 关键词： 氟化铒 红外光学性质 光学常数 洛伦兹谐振子模型     

Optical and Short- wavelength Recording Properties of Ag_8In_( 14) Sb_( 55) Te_(23) Phase-change Films

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Raman spectra and XPS studies of phase changes in Ge2Sb2Te5 films

Ge_2Sb_2Te_5 film was deposited by RF magnetron sputtering on Si (100) substrate. The structure of amorphous and crystalline Ge_2Sb_2Te_5 thin films was investigated using XRD, Raman spectra and XPS. XRD measurements revealed the existence of two different crystalline phases, which has a FCC structure and a hexagonal structure, respectively. The broad peak in the Raman spectra of amorphous Ge_2Sb_2Te_5 film is due to the amorphous －Te－-Te－ stretching. As the annealing temperature increases, the broad peak separates into two peaks, which indicates that the heteropolar bond in GeTe_4 and the Sb－Sb bond are connected with four Te atoms, and other units such as (TeSb) Sb－Sb (Te_2) and (Sb_2) Sb－Sb (Te_2), where some of the four Te atoms in the above formula are replaced by Sb atoms, remain in crystalline Ge_2Sb_2Te_5 thin film. And from the results of Raman spectra and XPS, higher the annealing temperature, more Te atoms bond to Ge atoms and more Sb atoms substitute Te in (Te_2) Sb－Sb (Te_2).