Absolute small-angle measurement based on optical feedback interferometry

We present a simple but effective method for small-angle measurement based on optical feedback interferometry （or laser self-mixing interferometry）. The absolute zero angle can be defined at the biggest fringe amplitude point, so this method can also achieve absolute angle measurement. In order to verify the method, we construct an angle measurement system. The Fourier-transform method is used to analysis the interference signal. Rotation angles are experimentally measured with a resolution of 10^-6 rad and a measurement range of approximately from -0.0007 to ＋0.0007 rad.     

Stray light suppression in BRDF measurement infrared optical system

A set of system based on personal computer for the bi-directional reflectance distribution function (BRDF) measurement was developed, whose laser wavelengths cover 0.6328, 1.34, 3.39, and 10.6 μm from visible to infrared. Stray light in BRDF measurement system was analyzed. It can be reduced and suppressed by the design of the system light path in BRDF measurement system, the choice of the measuring scheme, the processing to the optoelectronic signal, and the radiation control of the optical components and mechanical equipments. So the minimum measurable value of BRDF is less than 10-5/sr.     

A miniaturized system for measurement of the refractive index of sub-microliter liquid

This study introduced the research and development of a portable and miniaturized system for the measurement of the refractive index of sub-microliter liquid based on a microfluidic chip. A technical method of double-beam interference, was proposed for use in the measurement. Based on this, by using a laser diode as a light source,changes in the refractive index were calculated by utilizing a complementary metal–oxide–semiconductor to detect the movement of interference fringes of the liquid. Firstly, this study simulated the effects of influencing factors on the interference infringes of two Gaussian beams, such as their spot sizes, distance between two beam spots, and detection range. Secondly, this research introduced the system design and construction of the doublebeam interference method and analyzed the results of refractive index tests on sub-microliter aqueous glucose solutions with different concentrations. The measurement accuracy reached 10~(-4) refractive index units. This system has a compact structure and is rendered portable by using batteries for its power supply. The entire system is designed to be a double Z-shaped structure with a length of about 15 cm, a width of 5 cm, and a height of about 10 cm. It can be used to measure changes in the refractive index of sub-microliter to nanoliter liquids based on the use of a microfluidic chip.     

Novel homodyne frequency-shifting interference pattern locking system

We present a novel homodyne frequency-shifting interference pattern locking system to enhance the exposure contrast of interference lithography and scanning beam interference lithography(SBIL). The novel interference pattern locking system employs a special homodyne redundant phase measurement interferometer(HRPMI) as the sensor and an acousto-opto modulator(AOM) as the actuator. The HRPMI offers the highly accurate value as well as the direction recognition of the interference pattern drift from four quadrature interference signals. The AOM provides a very fine resolution with a high speed for phase modulation. A compact and concise system with a short optical path can be achieved with this new scheme and a small power laser head in tens of microwatts is sufficient for exposure and phase locking, which results in a relatively low-cost system compared with the heterodyne system. More importantly, the accuracy of the system is at a high level as well as having robustness to environmental fluctuation. The experiment results show that the short-time(4 s) accuracy of the system is 0.0481 rad e3σT at present. Moreover, the phase of the interference pattern can also be set arbitrarily to any value with a high accuracy in a relatively large range, which indicates that the system can also be extended to the SBIL application.     

Growth and properties of wide spectral white light emitting diodes

Wide spectral white light emitting diodes have been designed and grown on a sapphire substrate by using a metal-organic chemical vapor deposition system. Three quantum wells with blue-light-emitting, green-light-emitting and red-light-emitting structures were grown according to the design. The surface morphology of the film was observed by using atomic force microscopy. The films were characterized by their photoluminescence measurements. X-ray diffraction θ/2θ scan spectroscopy was carried out on the multi-quantum wells. The secondary fringes of the symmetric ω/2θ X-ray diffraction scan peaks indicate that the thicknesses and the alloy compositions of the individual quantum wells are repeatable throughout the active region. The room temperature photoluminescence spectra of the structures indicate that the white light emission of the multi-quantum wells is obtained. The light spectrum covers 400-700 nm, which is almost the whole visible light spectrum.     

Self-mixing interferometry based on nanometer fringes and polarization flipping

Self-mixing interferometry (SMI) based on nanometer fringes and polarization flipping is realized. The interferometer comprises a single-mode He-Ne laser and a high-amplitude reflectivity feedback mirror. The nanometer fringes are obtained by tilting the external feedback mirror. The fringe density is 35 times higher than that derived with conventional two-beam interference, and each fringe corresponds to a λ/70 displacement in external cavity length. Moreover, polarization flipping occurs when the external feedback mirror moves in the opposite direction. Such movement can be used to easily distinguish displacement direction. Experimental results show an optical resolution of displacement measurement of 9.04 nm with a range of 100 μm. The proposed SMI presents promising application prospects in precisely measuring displacement and calibrating other micro-displacement sensors because of its optical wavelength traceability.     

Non-contact angle measurement based on parallel multiplex laser feedback interferometry

We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry （PLFI）, which outputs two parallel laser beams and thus their displacement difference reflects the angle variation of the target. Due to its ultrahigh sensitivity to the feedback light, PLFI realizes the direct non-contact measurement of non- cooperative targets. Experimental results show that PLFI has an accuracy of 8＂ within a range of 1400＂. The yaw of a guide is also measured and the experimental results agree with those of the dual-frequency laser interferometer Agilent 5529A.     

An approach of open-path gas sensor based on tunable diode laser absorption spectroscopy

Tunable diode laser absorption spectroscopy(TDLAS)is a new method to detect trace-gas qualitatively or quantificationally based on the scan characteristic of the diode laser to obtain the absorption spectroscopy in the characteristic absorption region.A time-sharing scanning open-path TDLAS system using two near infrared distributed feedback(DFB)tunable diode lasers is designed to detect CH_4 and H_2S in leakage of natural gas.A low-cost Fresnel lens is used in this system as receiving optics which receives the laser beam reflected by a solid corner cube reflector with a distance of up to about 60 m.High sensitivity is achieved by means of wavelength-modulation spectroscopy with second-harmonic detection.The minimum detection limits of 1.1 ppm·m for CH_4 and 15 ppm·m for H_2S are demonstrated with a total optical path of 120 m.The simulation monitoring experiment of nature gas leakage was carried out with this system. According to the receiving light efficiency of optical system and detectable minimum light intensity of detection,the detectable optical path of the system can achieve 1-2 km.The sensor is suitable for natural gas leakage monitoring application.     

Sub-external cavity effect and elimination method in laser self-mixing interference wave plate measurement system

Laser self-mixing interference(SMI) wave plate measurement method is a burgeoning technique for its simplicity and efficiency. But for the non-coated sample, the reflected light from the surface can seriously affect the measurement results.To analyze the reason theoretically, a self-consistent model for laser operation with a sub-external and an external cavity is established, and the sub-external cavity formed by the sample and a cavity mirror is proved to be the main error source.A synchronous tuning method is proposed to eliminate the sub-external cavity effect. Experiments are carried out on the synchronously tuning double external cavities self-mixing interference system, and the error of the system is in the range of -0.435°~0.387° compared with the ellipsometer. The research plays an important role in improving the performance and enlarging the application range of the laser self-mixing interference system.     

Laser self-mixing interference fibre sensor

Fibre sensors exhibit a number of advantages over other sensors such as high sensitivity, electric insulation, corrosion resistance, interference rejection and so on. And laser self-mixing interference can accurately detect the phase difference of feedback light. In this paper, a novel laser self-mixing interference fibre sensor that combines the advantages of fibre sensors with those of laser self-mixing interference is presented. Experimental configurations are set up to study the relationship between laser power output and phase of laser feedback light when the fibre trembles or when the fibre is stretched or pressed. The theoretical analysis of pressure sensors based on laser self-mixing interference is indicated to accord with the experimental results.     

Recent contribution in color interferometry and applications to high-speed flows

Recent improvements brought to color interferometry for analyzing high-speed flows are described through different applications. First, the optical technique based on differential interferometry using a polarized white light and one or two Wollaston prisms allows to record high-speed interferograms of the flow downstream of a circular cylinder. Then, this technique has been applied to axisymmetric flows for studying an interaction between a supersonic hot jet and a coaxial supersonic flow. Another application concerns the study of hypersonic flows using Wollaston prisms with a large birefringence angle. Finally, the analysis of gaseous mixture and the evolution of two-gases interface submitted to an acceleration is presented. Interferograms analysis is made from a modeling of interference fringes versus the optical path difference which allows to easily extract quantitative information of the gas density. In order to obtain absolute measurements of the gas density, real-time holographic interferometry has been developed using a three-color laser source and a panchromatic holographic plate. The technique generates the achromatic white fringe which makes the zero order of interference fringes easy to identify. An application is presented in a 2D subsonic wind tunnel, in which the unsteady wake flow past a cylinder is recorded at high framing rate. In this optical setup, transmission holograms are used. As a conclusion, an approach is proposed to analyze the 3D flows from real-time color holographic interferometry using reflection holograms and the problems to solve are described.     

基于适度光反馈自混合干涉技术的振动测量

光反馈自混合干涉技术是一种新浮现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行振动的精密测量,提出了一种基于适度光反馈自混合干涉技术的振动测量方法。经对光反馈自混合干涉信号条纹分析,发现通过选定合适的光反馈水平及激光器线宽展宽因数,可以得到锯齿干涉条纹。这种干涉信号不仅包含振动幅度信息也包含振动方向信息。该振动测量方法利用锯齿干涉条纹的特点,首先通过条纹记数实现大范围振幅粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的线性表达式,从而实现位移的精测。仿真计算表明,该方法可以实现大量程高分辨力振动位移测量,在叠加20 dB的噪声下,振幅测量相对误差平均为0.5%。     

平面反射镜表面散射光干涉

激光束照射到表面被粘污的反射镜上会产生干涉环,入射光束和反射光束在被粘污表面产生散射光干涉.随着入射角的变化,光束在反射镜玻璃片内光程改变,引起干涉环从中心冒出或缩进,干涉环级数的变化与入射角的平方成正比.     

干涉条纹密度的计算及其应用研究

采用光的干涉方法检测曲面光学表面的加工质量时,都需要事先设计好系统光路的最佳检测技术参数,并能对检测的难度进行有效的评估,从而确保检测的精度。该研究采用了一种计算干涉条纹密度的新方法,对任意光学曲面检测的难度进行评估,并用于确定球面参考光点光源的最佳位置。以非球面为例,计算了非球面的最接近球面的半径和最大非球面度以及非球面检测时球面参考光点光源的最佳位置,说明了计算干涉条纹密度方法在确定干涉检测系统光路调试最佳条件的优越性,可为各种干涉检测系统的设计以及优化调试过程提供理论依据和分析指导。     

地基气辉成像干涉仪探测高层大气风场的定标研究

我们研制的地基气辉成像干涉仪(ground based airglow imaging interferometer,GBAⅡ)样机成功地探测了地球上空90—100 km的大气风速和温度.为了提高GBAⅡ的探测精度,本文研究GBAⅡ所拍摄的成像干涉条纹的定标:对干涉条纹中心位置定标、电荷耦合器(CCD)暗噪声和平场定标、整个光学系统衰减系数定标、步进步长定标、光程差随入射角变化量定标、仪器响应度定标和零风速相位定标等理论和实验进行了研究.利用最小二乘法对GBAⅡ拍摄的30幅成像干涉图的圆心坐标定标在CCD(123.3,121.1)像素位置;利用632.8 nm激光获得GBAⅡ所用CCD的平场定标系数矩阵,分别得到平场前后的干涉图并检测出CCD的噪声和坏点;利用GBAⅡ获得图像的边缘亮环相位与中心亮斑相位的差值对入射角10.24°时,光程差相对0°入射角时变化了0.356个条纹;拍摄200幅成像干涉图的实验离散点进行正弦拟合后的均方根标准偏差达90.34%,该完整干涉条纹的步进间隔为4.06 nm,对应步进相位为0.0094π;针对正演公式中GBAⅡ的系统衰减系数对所拍摄的原始干涉图利用IDL编程得到光学系统衰减系数的多项式,拟合的均方根标准偏差达99.98%;采用632.8 nm激光作光源,简化了GBAⅡ的响应度表达式,通过实验得其响应度为4.97×10~(-3)counts·(Rayleigh·s)~(-1);针对GBAⅡ室外观测,给出零风速定标的矩阵表达式后,对532.0 nm和632.8 nm激光的对应零风速相位分别为-9.2442°和-68.6353°.本文提供了多种定标方法,并逐一通过实验进行验证,为国内被动遥感探测高层大气风场提供了强有力的实验支持.     

基于双边倾斜傅里叶干涉具的激光光谱探测技术研究

为了在不改变静态傅里叶干涉具尺寸的基础上提高光谱分辨率,设计了双边倾斜傅里叶干涉具及等光程条纹展宽的方法。通过计算分析双边倾斜傅里叶干涉具空间产生光程差与传统干涉具光程差的关系,得到在整个干涉具尺寸不变的条件下,光谱分辨率提高到9.1 cm-1,比同尺寸静态傅里叶干涉具提高了近8倍,并且不会因干涉条纹混叠而造成无法采集。采用BK7材料加工制成双边倾斜傅里叶干涉具,用6种不同波长的激光照射分析干涉条纹,实验结果显示干涉条纹会因反射位置增大而导致探测波长较长的激光时中心波长偏大,根据其满足线性变化的规律,拟合可知每1nm的激光波长变化造成0.021 1 nm的增大误差,经过标定后平均误差与传统干涉具接近,同时可以有效地提高静态干涉系统的光谱分辨率。     

弹流油膜彩色光干涉系统的特性研究

彩色光干涉技术是润滑油膜厚度测量的最有效的方法之一,但对其测量光学理论的研究并不十分透彻。以球-盘弹性流体动压润滑油膜测量装置为对象,建立了彩色光干涉的色度学计算模型,对该系统的干涉条纹和色彩进行了数值模拟与分析。分析结果与实验数据的一致性表明了所建立的模型和分析方法的正确。分析表明:铬膜厚度对图像的色彩和对比度有明显的影响,当其厚度为5～10nm时,能够获得对比度和色彩理想的图像;垫层厚度影响各颜色分量强度分布的初相变;LED光源可产生对比度较好的干涉条纹。     

新型干涉条纹计数器的设计与应用

针对用迈克尔逊干涉仪测量激光波长实验需要人工记录干涉环改变数量问题,研制一种干涉条纹自动计数器。该计数器不仅能显示干涉条纹改变数量,还能显示不同光强对应信号强度。同时,准确度高、操作简便,能在不同背景光强环境和光源光强条件下使用。     

基于干涉条纹图像对比法测量微位移

研究了基于迈克尔逊干涉条纹对比法测量微位移的实验。用He-Ne激光器、反射镜和分束镜组成的干涉光路,其中一个反射镜固定在被测物体上,通过被测物体的移动带动反射镜移动使干涉光路发生变化,从而导致干涉条纹的改变。在形成干涉条纹的位置利用线阵CCD采集干涉条纹图像,用序列图像对比的方法对图像进行处理和计算,得出被测物体的微位移。实验表明利用序列图像对比的方法测量微位移,方法切实可行、测量准确度高、测量的精度能够达到微米量级。     

基于波像差判据的同步相移显微干涉检焦方法

为了实时准确地将激光直写系统中经直写物镜聚焦的光斑定位于待加工元件表面,提出了一种基于波像差判据的同步相移显微干涉检焦方法,实现了对离焦量的实时检测与调整。在直写系统中引入检焦光路,与直写光路共享同一物镜,构建Linnik型同步相移显微干涉检焦系统,提取包含离焦量的波面相位信息;再从大数值孔径（NA）的物镜波像差数据中解析出离焦量的大小与方向。仿真结果验证了基于波像差判据的离焦计算方法的正确性,NA≥0.5时,离焦探测灵敏度可达4 nm, 通过实验验证了同步相移显微干涉检焦方法的可行性,检焦精度可达10 nm以内,满足激光直写高精度的测量要求。