| 基于干涉条纹图像对比法测量微位移 |
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| 引用本文： | 闫海涛,孟伟东,赵晓艳,甄志强.基于干涉条纹图像对比法测量微位移[J].应用光学,2012,33(6):1069-1072. |
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| 作者姓名： | 闫海涛 孟伟东 赵晓艳 甄志强 |
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| 作者单位： | 1.河南科技大学 物理与工程学院应用物理系,洛阳市光电功能材料重点实验室,河南 洛阳 471003 |
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| 基金项目： | 河南省教育厅骨干教师计划项目和河南省教育厅重点资助项目 |
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| 摘 要： | 研究了基于迈克尔逊干涉条纹对比法测量微位移的实验。用He-Ne激光器、反射镜和分束镜组成的干涉光路，其中一个反射镜固定在被测物体上，通过被测物体的移动带动反射镜移动使干涉光路发生变化，从而导致干涉条纹的改变。在形成干涉条纹的位置利用线阵CCD采集干涉条纹图像，用序列图像对比的方法对图像进行处理和计算，得出被测物体的微位移。实验表明利用序列图像对比的方法测量微位移，方法切实可行、测量准确度高、测量的精度能够达到微米量级。
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| 关 键 词： | 相干光学 微位移 线阵CCD 图像分析 |
Micro-displacement measurement based on comparison of interference fringe |
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| YAN Hai-tao
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MENG Wei-dong
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ZHAO Xiao-yan
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ZHEN Zhi-qiang.Micro-displacement measurement based on comparison of interference fringe[J].Journal of Applied Optics,2012,33(6):1069-1072. |
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| Authors: | YAN Hai-tao MENG Wei-dong ZHAO Xiao-yan ZHEN Zhi-qiang |
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| Affiliation: | 1.Luoyang Key Laboratory of Photoelectric Functional Materials,School of Physics and Engineering,Henan University of Science &Technology,Luoyang 471003,China |
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| Abstract: | The experiment on micro-displacement measurement based on the comparison of Michelson interferometer fringe was introduced. The beam path of optical interference was composed with He-Ne laser, mirrors and beam splitter. The reflector was fixed on the surface of measured object, it was moving with the object to make the interference fringes changing. The changing interference fringes were captured by using the linear charged coupled device (CCD). After image calculation by using the comparison of sequence image, the micro-displacement of measured object was obtained. Experiment shows that the method of image sequence comparison to measure micro-displacement is feasible. The measurement accuracy can reach micrometer. |
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| Keywords: | coherence optics micro-displacement linear CCD image analysis |
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