一种针对高速小目标的偏航角测算方法

射弹偏航角是影响电磁轨道发射装置发射精度的关键参数,为实时、高精度测量射弹偏航角,提升电磁轨道发射装置发射精度,基于双目视觉原理提出一种无需目标速度的射弹偏航角测算方法。利用高速射弹轨迹图像,通过构建像机线性成像模型解算高速射弹图像坐标,实现目标偏航角的测量。分析了光学系统参数对测量精度的影响,理论误差约为14.5 μrad。偏航角测量实验结果表明该方法能够实时、准确测算射弹偏航角,测算量偏差平均值为0.58 mrad。     

纳弧度分辨力角位移传感器及平均灵敏度标定

给出了基于六次临界反射棱镜的精密角位移传感器,采用的是差动式结构。实验结果表明,传感器灵敏度高,量程为500μrad,具有5nrad的分辨力。提出了适合于小量程角位移传感器的平均灵敏度的标定方法,可以快速标定平均灵敏度,降低标定过程中标定系统及传感器自身漂移对标定精度的影响。     

一种从粗到精逐步细化的变尺度光栅投影测量方法

传统的光栅投影法依靠相移法进行测量,对绝对相位的计算需要应用解包裹算法完成。由于解包裹算法要求空间相位具有连续性,因此不适合高度变化显著的物体的测量。针对该问题,提出一种多尺度条纹投影测量的方法,直接获取高密度条纹投影的绝对相位。通过对高密度64周期条纹扫描投影测量相位的二次拟合曲线的实验处理,在绝对相位 [-201,201]的变化范围内,拟合标准差达到0.096 63 rad的精度。     

光纤激光功率溯源至低温辐射计方法

介绍了1.3 μm/1.5 μm光纤激光功率溯源至低温辐射计的测量方法,与传统溯源至绝对辐射计的方法相比较,最终利用低温辐射计法通过633 nm波长稳定光源标定陷阱式探测器,然后用陷阱式探测器将量值传递到陷阱式量传探测器,最后通过1310 nm/1550 nm通信用光功率稳定光源通过热释电光功率计标定InGaAs光电探测器并用于测量光纤功率。实验结果表明,溯源至低温辐射计的光纤功率测量方法在1310 nm及1550 nm波长点处对一标准光功率计修正系数测量的相对标准差分别为0.0011及0.0007,其测量不确定度可优于0.6％(k=2),在保证量值一致性的同时有效降低了测量不确定度,提高量值传递精度。     

大口径KDP晶体角度相位匹配离线测量精度研究

为满足惯性约束聚变(ICF)实验对激光驱动器高效三倍频能力的要求, 对离线测量晶体角度相位匹配方案进行了优化。采取的主要优化措施是:提高晶体准直技术能力;降低模拟小口径激光输出变化对测量不稳定性的影响。通过理论分析和对实际测量结果的系统分析,得到了晶体离线测量的不确定度:其中二倍频相位匹配角测量扩展不确定度为15.94 rad,三倍频相位匹配角测量扩展不确定度为27.8 rad,达到了较高的晶体离线测量精度要求。     

The innovative method of high accuracy interferometric calibration of the Precision Laser Inclinometer

In this report a high accuracy method for an interferometric calibration of the Precision Laser Inclinometer (PLI) is proposed. The method is based on the simultaneous measurement of: (a) the PLI base calibration slope (angle), set by a piezoelectric positioner, via laser interferometry and (b) the PLI response signal. A calibration coefficient of 322.5 ± 1.9 μrad/V has been determined experimentally in an interval [4 × 10^–7, 4 × 10^–6] rad in which there is a linear dependence between the PLI-signal and the calibration angle.     

A new method for angular displacement measurement

We describe a new method for angular displacement measurements that is based on a Fabry-Perot interferometer. A measurement accuracy of 10-8 rad is obtained by use of the sinusoidal phase modulating interferometry. Another Fabry-Perot interferometer is used to obtain the key initial angle of incidence.     

同步辐射用光学元件面形绝对检测方法的研究

为实现同步辐射用光学元件面形的绝对检测,发展了镜面旋转对称三平板检测法。该方法将菲佐干涉法检测到的波前函数关于y轴分解成镜面对称部分与镜面非对称部分,再利用N次旋转取平均值消除镜面非对称部分,从而通过计算获得待测平面的绝对面形分布。推导了镜面旋转对称法检测矩形平面镜面形的公式,应用该方法设计了高精度矩形平面镜的测试实验,并进行了误差分析。实验结果表明,与传统三平板绝对测量方法相比较,两种方法在高度轮廓误差和斜率误差方面的计算结果都符合较好,其对比后的残差均方根(RMS)值分别为λ/500(λ=632.8nm)与0.93μrad。     

大口径光学玻璃光学均匀性干涉绝对测量方法

在光学透射材料均匀性测量的各个方法中,干涉测量方法作为绝对测量方法,能摈除干涉仪标准面及待测元件的面形影响,具有很高的测量精度而逐渐被广泛使用。详细研究了使用干涉手段测量透射材料均匀性的方法,对其中材料切割角度所引入的误差进行了详细分析,并提出修正方法。同时研究了测量光学材料均匀性的拼接算法,实验表明：该方法可以实现用小口径干涉仪测量大口径玻璃材料的光学均匀性的目的,而且其测量精度很高。     

Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer

In this paper, a new optical material application and a heterodyne interferometer are proposed for measuring small angles. In the proposed interferometer, the optical material is a (1 0 0) silicon wafer applied to compose a new architecture of small angle sensor. The small angle measurement used the phase difference which is dependent on the incident angle at the silicon wafer surface to deduce the angular variation. The proposed architecture is simple and uses the common path method to compare test and reference signals; thus, small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. The angular resolution and sensitivity levels superior to 7 × 10^?5° (1.3 × 10^?6 rad) and 150 (deg/deg), respectively, were attainable in a dynamic range of 0.45°.     

高准确度光束偏转装置的设计与分析

基于矢量折射定理推导了光束经过正交双棱镜后的偏转表达式.给出了装置的主要设计参量；用数值模拟的方法分析了主要误差项，求出了总误差和实际准确度指标.结果表明，光束在水平张角及垂直张角500 μrad内可实现准确度优于0.8 μrad的偏转，偏离准确度主要受随机误差影响；反映到棱镜转角上的总误差为12.72 arcsec,引起的光束偏离误差为0.365 μrad，大于系统读数分辨率0.0387 μrad,且小于光束偏离准确度指标0.8μrad.     

An improved reflectometric method to measure the azimuthal anchoring energy of nematic liquid crystals

Some years ago we developed an automatized reflectometric method to measure the surface azimuthal anchoring energy of nematic liquid crystals on an optically isotropic substrate. This method provides a high accuracy and sensitivity but requires the use of wedge glass plates and a sufficiently high anisotropy of the intensity reflectivity coefficients. This latter condition restricts greatly the number of possible substrates that can be investigated with this technique. Here we develop a new reflectometric method which offers comparable or better accuracy and sensitivity but does not require wedge plates and high anisotropy of the reflectivity coefficients. The method is fully automated and provides a direct measurement of the azimuthal director angle. The experimental procedure exploits the dependence of the reflectivity tensor on the surface director orientation. The measurement of the azimuthal angle does not require any knowledge of the optical parameters of the nematic material and of the optically isotropic substrate, and provides an absolute accuracy better than 0.2^° in the whole range 0-360^° and a sensitivity better than 0.1^°. This reflectometric method can be also used with weakly anisotropic substrates as well as thin rubbed polymeric layers. In this latter case, the effective uncertainty in the measurement of the director azimuthal angle depends on the substrate anisotropy. A simple and direct experimental procedure to estimate this uncertainty is proposed. Received 8 January 2002 and Received in final form 27 February 2003 / Published online: 15 April 2003 RID="a" ID="a"e-mail: faetti@df.unipi.it     

基于奇偶函数法的绝对检测实验研究

针对平面干涉检测技术的检测精度受限于参考面面形精度的问题,提出使用基于奇偶函数的高精度绝对检测方法消除干涉系统中参考面面形误差的影响。对旋转角度误差与旋转偏心误差对绝对检测方法测量精度的影响进行了仿真分析。利用商用菲索干涉仪,设计和分析了绝对检测精度实验及重复性实验。仿真结果显示:旋转角度误差在达到0.13°时,测量误差PV值为0.000 1λ;旋转偏心误差达到3 pixel时,测量误差PV值为0.005λ。实验结果显示:测得实际样品的绝对检测精度PV₁₀值为0.041 5 λ,RMS值为0.008 7 λ,小于常规干涉检测所得结果;对同一平面两次独立的绝对检测结果进行点对点作差处理,从而获得残差图,其残差图PV₁₀值为0.004 λRMS值为0.000 5 λ。实验结果表明了该方法的高重复性和有效性。     

Effects on absolute moiré contouring by using gratings with different period and profile and rotating angles

Effects on the absolute moiré contouring systems from using different period and profile gratings and rotating angles are described in this paper. It was found that by choosing a different period of the grating or the rotating angle, different resolution and accuracy of the measurement can be obtained. So, for objects with different height or depth, different period of grating or rotating angle should be chosen to ensure accuracy of the measurement. The square wave intensity grating with small period can be treated as a sinusoidal wave intensity grating in the absolute moiré contouring system. A few objects with different shapes and dimensions have been used as samples to verify the above conclusion.     

大倾斜角度下基于冷原子重力仪的绝对重力测量

冷原子重力仪的倾斜角会对绝对重力测量产生显著的影响.高精度的绝对重力测量需要对重力仪的倾斜角进行精确的测量、控制及校正.本文从理论上分析了四种不同情况下倾斜对绝对重力测量的影响规律,并在实验上对得到的理论进行了实验验证.基于此,设计了一种基于双倾斜计的绝对重力测量方案,主要是为了解决恶劣测量环境下的冷原子重力仪倾斜漂移问题.此方案利用高精度倾斜计记录放置在被动隔振平台上的拉曼反射镜的倾斜角度,并使用另外一个倾斜计监控真空系统的倾斜,以实现振动噪声的抑制和倾斜的高精度测量.基于自研的小型化冷原子重力仪,对该方案进行了实验验证,并最终实现了车间复杂环境下的高精度绝对重力测量.由于倾斜得到精确测量和补偿,冷原子重力仪的测量精度达到了12.3μGal.本文为复杂环境下的高精度绝对重力测量提供了一种可行的方案,为冷原子重力仪的实用化提供了参考数据.     

漂移量反馈控制式激光准直方法

提出一种集光纤准直与光束漂移量反馈控制准直技术于一体的激光光束准直方法 ,它是在单模光纤对激光器出射光束漂移量进行初级准直的基础上 ,进一步对光束的漂移量进行反馈控制 ,进而提高出射光束的方向稳定性。准直系统中利用漂移量分离光路和光电检测系统对光束的平漂量和角漂量进行了分离检测 ,并各自构成相应的光束空间平漂量反馈控制系统和光束空间角漂量反馈控制系统 ,减小了平漂量和角漂量反馈控制中的相互耦合。引入单模光纤使激光器与光束漂移量反馈控制准直系统相隔离 ,减小了激光管热源温度变化等因素对准直系统的影响 ,同时还便于准直系统使用中的安装布置。上述方法的应用 ,提高了准直精度及准直效率。实验表明目前该方法准直精度可达 0 .7× 10 -7rad。     

基于掠入射法溶液浓度测量系统研究

根据溶液浓度与其折射率的关系，提出用掠入射法测量溶液浓度的方法.利用其临界光线的折射角进行透明介质溶液浓度的精确测量，研发出测量实验系统.分析了临界光线的折射角与其浓度的关系，给出溶液浓度与折射角之间的简单数学解析式.用该系统对5%-80%的甘油溶液进行测量，结果最大绝对偏差小于0.003%.     

Accuracy analysis of parallel plate interferometer for angular displacement measurement

The measurement accuracy of a parallel-plate interferometer for angular displacement measurement is analyzed. The measurement accuracy of angular displacement is not only related to the accuracy of phase extraction, but also related to initial incident angle, refraction index and thickness of plane-parallel plate as well as wavelength's stability of laser diode, etc. Theoretical analysis and computer simulation show that the measurement error of the angular displacement bears a minimum value when choosing an optimal initial incident angle in a large range. These analytical results serve as a guide in practical measurement. In this interferometer, reducing the refraction index or increasing the thickness of the parallel plate can improve the measurement accuracy; and the relative error of the phase measurement is 3.0×10⁻⁴ corresponding to 1 °C temperature variation. Based on these theoretical and experimental results, the measurement accuracy of the parallel-plate interferometer is up to an order of 10⁻⁸ rad.     

Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement

A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10⁻⁸ rad.     

玻璃在线激光测厚误差的透反互补抑制

为了抑制激光在线测厚时入射角波动引起的误差,根据几何光学分析了激光透射式和反射式测厚原理,发现激光在特定入射角附近波动时,两种方式的测厚误差一正一负,具有互补性,在此基础上提出基于透射和反射同时测量的互补式测厚方法,该方法可将误差限定在透射式和反射式测量误差之间,抑制在线测厚误差.对于有机玻璃平板,理论计算表明,当激光入射角在67.013°±4°波动时,相对误差绝对值在1%以内,误差抑制率均值大于90%;当入射角为61.536°时,误差抑制率为100%.利用线结构激光器和两个线阵CCD相机搭建互补式测厚实验系统,测量了标称厚度为1~5mm的有机玻璃平板,与透射式和反射式测厚结果进行对照,除厚度为1mm的玻璃外,互补式测厚误差被限制在透射式和反射式之间,最大误差抑制率达61%.实验结果表明,该互补式方法有效抑制了误差,提高了在线厚度测量准确度,解决了在线测量不可重复性导致的无法通过均值法减小误差的问题.