共查询到18条相似文献,搜索用时 109 毫秒
1.
2.
3.
将水转印工艺与数字图像处理方法结合,提出水转印栅线相移云纹法,该方法可用于聚氨酯类超弹性材料大变形测量。通过水转印制作试件栅与参考栅,并采用计算机对两者的数字图像进行算术相减,得到数字相移云纹条纹;运用Carré算法从相移云纹条纹图中提取出面内变形相关的相位。所提方法仅用一幅试件栅与参考栅图像实现试样变形信息的自动、准确提取,可为动态大变形的测量提供一种成本低、有效精确的测试手段。给出了所提方法用于聚氨酯圆环静载压缩变形定量测量,及圆棒的冲击压缩动态变形特性实验研究的结果。 相似文献
4.
基于液晶显示投影技术的数字影栅云纹相移实现方法 总被引:4,自引:0,他引:4
影栅云纹是物体离面变形和表面形貌测量常用的一种比较简单的方法,用单纯的影栅云纹法即便在最好的光学系统配置情况下测量精度也只有1~100μm左右,在影栅云纹测试方法中引进相移技术是提高测量精度的主要手段。采用液晶投影仪和数字图像处理技术实现数字影栅云纹测量的准确数字相移,避免了在影栅云纹法中使用结构比较复杂或特制的相移机构。由计算机产生相移条纹图经液晶显示投影,应用实时图像灰度算术相减技术得到数字相移影栅云纹条纹图。该方法具有“基准栅”的栅距和相移步长实时可调,配置高速图像采集系统和图像后处理软件,可将相移技术引入动态测量中,从而提高动态测量的精度的优点。最后的悬臂梁实验结果证实了该方法的有效性。 相似文献
5.
用于微观场小应变测量的云纹干涉载波条纹法 总被引:1,自引:0,他引:1
在云纹干涉法的基础上,研究了一种新的测量方法——云纹干涉载波条纹法,利用初始载波条纹根据物体变形前后的变化对应变进行分析。实验证明:在结合适当的数字图像处理技术情况下,应用频率为1200lp/mm的试件栅,测量试件(微观场)变形产生的应变时,精度基本控制在±10με的范围内。对该方法的研究表明:其灵敏度可在1με以下。方法可给出U场诸行、V场诸列的平均应变值,使研究微观场小应变及微观场临近区域微小应变的不同成为可能。这一技术为MEMS研究中对相关力学内容的分析提供了技术支持。 相似文献
6.
作为试件变形传感元件的云纹光栅的制作是云纹干涉法的关键技术。本文提出了在120~200℃高温下使用的光刻胶光栅模板的制作及在此温度下试件栅的复制工艺,并利用此技术研究了新型微电子封装组件在125~20℃温度载荷下的热变形。实验结果表明:采用该方法可以获得高质量的试件栅,云纹条纹质量好,可用于试件微小区域内热变形的精确测量 相似文献
7.
8.
本文提出应用菲涅耳三面镜在空间形成云纹干涉高频栅及贴片云纹干涉技术进行离面位移与振动的测量技术,文中就测量原理、定量公式推导、条纹解释、测量精度及灵敏度等方面都作了详细论述,为工程中的位移与振动模态分析提供了一种现场测试新途径。 相似文献
9.
在物体变形场的测量中,云纹干涉的载频调制技术有重要作用.在云纹干涉中,对称光照明产生的衍射光沿试件栅表面的法线传播并产生干涉.通过改变照明光的入射角度,可实现变形条纹场的空间调制.通过光程差的分析说明了载波条纹产生的机理,得出了载波频率与照明光入射角度变化之间的关系式.利用三点弯曲加载结合二维载频调制实验,给出了实验结果.证明了在初始条纹较少的情况下,载频调制技术能有效地测量物体的位移场. 相似文献
10.
11.
Jinyou Shao Yucheng Ding Hongmiao Tian Xin Li Xiangming Li Hongzhong Liu 《Optics & Laser Technology》2012,44(2):446-451
Accurate layer-to-layer alignment, which is of prime importance for the fabrication of multilayer nanostructures in integrated circuits, is one of the main obstacles for imprint lithography. Current alignment measurement techniques commonly involve an image detection process for coarse alignment followed by a grating interference process for fine alignment. Though this kind of two-level alignment system is reasonable for measurement, when it is used in real imprint lithography, it is inconvenient because of the existence of a complex loading system that needs space for alignment. In this study, we propose a fine alignment method using only image detection using grating images and digital moiré fringe technology. In this method, though the gratings are also selected as alignment marks for accurate measurement, they do not interfere with the physics. The grating images captured from the template and wafer are used to measure angular displacement and to form parallel digital moiré fringes. The relative linear displacement between the template and wafer is determined by detecting the spatial phase of parallel digital moiré fringes. Owing to the magnification effect of digital moiré fringes, this method is capable of generating accurate measurements. According to the experimental results, this digital moiré fringe technique is accurate to less than 10 nm. In addition, without a complex grating interference system, this method has the advantage of being easy to operate. 相似文献
12.
A projection-type moiré topography that uses a frequency modulation technique with two liquid crystal digital gratings (LCDGs) is proposed. In this method, moiré contours are filtered to remove the image of the original grating from the moiré contours by moving the image created by the LCDGs. The frequency modulation technique can be used to analyze the fringe of step heights or other separate areas by modulating the fringe interval. The experimental results showed the possibility of measuring three-dimensional shapes and step heights. 相似文献
13.
本文提供一种测量两束相干的ps光脉冲的空间二维时间振幅相关函数的新方法.在此方法中,光脉冲是被记录在一种光致折变的体积全息介质中,而所记录的信息可以通过直接量度在介质中所形成的光栅的空间分布而读出.这种方法可的可行性已为实验证实,它是通过3.5ps倍频锁模Nd:YAG激光测量光致折变晶体LiNbO3来实现的。 相似文献
14.
This paper presents a digital projection grating method for full field measurement of out-of-plane deformation and shape of an object. Two grating patterns on an object before and after deformation are captured by a CCD camera and stored in a computer. With the aid of Fast Fourier Transform (FFT) and signal demodulating techniques, a wrapped phase map is generated. The phases are expanded in the range of 0–2π and compared with the resulting moiré pattern. An unwrapping procedure is used to obtain a continuous phase. In addition, a digital method for fractional fringe multiplication is also developed. Results on deformation and object profile measurements are presented. 相似文献
15.
16.
Two digital systems are developed for the automatic measurement of 3-D shapes using moiré techniques—an automatic 3-D shape measuring system using the scanning moiré method and an interactive fringe analysing system for moiré fringe photographs. In the automatic 3-D shape measuring system, a deformed grating is scanned and sampled with an electronic image scanning device so that moiré fringes are generated in a computer. This technique of electronic fringe generation eliminates ambiguity with regard to the sign of the moiré fringes. The interactive fringe analyser provides a flexible and versatile tool for moiré fringe analysis. Medical applications of these analysing systems are discussed. 相似文献
17.
基于傅里叶频谱分析的相位测量轮廓术系统Gamma非线性校正方法 总被引:2,自引:0,他引:2
数字投影和成像系统的Gamma非线性效应是导致相位测量轮廓术(PMP)测量误差的重要原因。目前大多采用多帧条纹图进行Gamma校正,使测量的实时性受到限制。提出了一种Gamma校正方法,利用正交光栅像的傅里叶频谱分布计算Gamma值,再根据此Gamma值对投影相移条纹进行Gamma逆变换,实现投影条纹输入值的提前校正,以获取具有良好正弦性的结构条纹,从而降低PMP相位测量误差。校正过程中只需一帧条纹图,而且考虑了测量系统的离焦效应。实验证实了该方法的有效性和正确性。 相似文献
18.
An optical system based on shearing interference using diffraction grating was applied, to carry out the aberration inspection
process of the pickup lens of a digital versatile disc (DVD) at high speed. An algorithm was devised that processes points
allocated on certain lines on a fringe and fits relations between the distance from basis point to the measurement points,
and phase data of the fringe at these points to an equation of higher degree as curve fitting. Aberration was numerically
estimated as the size of a certain coefficient. Simulation showed that this algorithm could detect all 5th order aberrations
independently. An inspection system developed based on this optical system and algorithm detected aberration as accurately
as a conventional interferometer that has been used as the standard, attaining an inspection time of 1/10-1/20. In comparison
with the spot method, this system has 5th order aberration detecting ability and 1/3 the inspection time. 相似文献