纳米云纹法条纹倍增技术研究 |
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引用本文: | 刘战伟,谢惠民,方岱,戴福隆,王卫,方炎.纳米云纹法条纹倍增技术研究[J].光子学报,2005,34(9):1431-1433. |
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作者姓名: | 刘战伟 谢惠民 方岱 戴福隆 王卫 方炎 |
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作者单位: | 清华大学教育部破坏力学重点实验室 北京100084
(刘战伟,谢惠民,方岱宁,戴福隆,王卫宁),清华大学教育部破坏力学重点实验室 北京100084(方炎) |
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基金项目: | 国家自然科学基金(10232030,10121202),教育部科学技术研究重大项目(项目批准号0306),教育部优秀青年教师资助计划,北京市纳米光电子学重点实验室开放基金资助 |
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摘 要: | 提出了一种纳米云纹法的条纹倍增技术,可用于单晶材料纳米级变形测量.在测量中,单晶材料的晶格结构由透射电镜(TEM)采集并记录在感光胶片上作为试件栅,几何光栅作为参考栅.对纳米云纹条纹的形成原理,透射电镜放大倍数与试件栅的频率关系,条纹倍增技术,位移、应变测量方法等进行了详细讨论.该方法不仅能够测量连续力学参量,如应变和位移,而且能够表征纳观非连续参量,如位错、夹杂.
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关 键 词: | 纳米云纹法 倍增技术 晶格 |
收稿时间: | 2004-06-28 |
A Study on the Multiplication Technique of Nano-moiré Fringe |
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Institution: | (Department of Engineer Mechanics, FML, Tsinghua University, Beijing 100084) |
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Abstract: | A nano-moiré fringe multiplication method is proposed and used to measure nano-deformation of single crystal materials. The lattice structure of single crystal materials is captured by TEM (Transmission Electron Microscope) and acted as a specimen grating. An unidirectional grating fabricated on glass or film is selected as a reference grating. The formation principles of TEM nano-moiré fringe, the relationship between TEM magnification and grating frequency, as well as displacement and strain measurement method are discussed. A nano-moiré fringe pattern can be reproduced in a 4f optical filter system with a specimen grating and a prepared reference grating. By selecting the reference grating with specific frequency and utilizing different diffraction order, a multiplying moiré fringe pattern can be obtained. The results illustrate that this technique can be used to measure deformation in nano-scale. This method is especially useful in the measurement of inhomogeneous displacement field, and can be utilized to reveal nano-mechanical behavior such as dislocation and atomic bond failure. |
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Keywords: | Nano-moiré method Multiplication technique Crystal lattice |
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