激光分子束外延BaTiO3薄膜最顶层表面原子平面与薄膜生长机理

用激光分子束外延技术在SrTiO₃(001)衬底上外延生长了高质量的BaTiO_{3< /sub>薄膜,薄膜的生长过程由反射式高能电子衍射仪(RHEED)原位实时监测,表明薄膜具有 二维层状生长模式.薄膜的晶体结构和表面形貌分别由X射线衍射和原子力显微镜表征,显示 该薄膜为完全c轴取向四方相晶体结构,其表面具有原子尺度光滑性.采用角分辨X射线光电 子谱技术(ARXPS),研究了BaTiO3薄膜表面最顶层原子种类和排列状况.结果表 明,BaTiO3 关键词： 激光分子束外延 3薄膜')" href="#">氧化物BaTiO3薄膜 最顶层表面 角分辨X射线光电子谱}     

C60分子在GaAs(001)表面的外延生长的扫描隧道显微镜研究

利用扫描隧道显微镜（STM）系统地研究了C₆₀薄膜在GaAs（001）表面的异质外延生长．在GaAs（001）2×4-β相表面，观察到C₆₀薄膜以非密排面进行生长，并在生长中有结构相变产生．实验数据表明，薄膜下层面心立方（fcc）的晶格常数比C₆₀晶体的晶格常数要大13%；而薄膜的表层结构则展示了非理想的六角密堆（hcp）结构，其表面为hcp（1100）面，生长过程是非理想的层状生长模式．在GaAs（001）-c（4×4）衬底上，C₆₀薄膜的表面仍然是fcc（111）面，其结构参数与C₆₀晶体一致，但C₆₀薄膜采用了三维模式进行生长 关键词：     

反射式高能电子衍射实时监控的分子束外延生长GaAs晶体衬底温度校准及表面相变的研究

以反射式高能电子衍射(RHEED)作为实时监测工具,根据GaAs(100)表面重构相与衬底温度、As₄等效束流压强之间的关系,对分子束外延(MBE)系统中衬底测温系统进行了校准,这种方法也适用于其他的MBE系统.为生长高质量的外延薄膜材料、研究InGaAs表面粗糙化及相变等过程提供了实验依据. 关键词： 分子束外延 反射式高能电子衍射 表面重构 温度校准     

采用N2-RF等离子体氮化GaAs(001)

研究了在MBE系统中,GaAs(001)表面的氮化过程。GaAs(001)表面直接和间接地暴露在等离子体激发的N₂气流下。两种氮化过程显示了完全不同的表面氮化结果。在打开N₂发生器挡板的情况下,氮化导致GaAs(001)表面损伤,并且形成多晶结构。当增加N₂气压时,损伤变得更严重。但是,在关闭N₂发生器挡板的情况下,在500℃下,经过氮化将观察到(3×3)再构的RHEED花样,表面仍保持原子级的平整度。上述结果表明,不开N₂发生器挡板,低温(500℃下)氮化将在GaN外延生长之前形成平整的薄层c-GaN。     

在Si衬底上用分子束外延低温生长Ge薄膜

本文报道了室温下淀积的薄层Ge在Si衬底表面上通过加热形成结晶的Ge岛,然后在此“带结构”的衬底表面上用分子束外延(MBE)方法生长Ge薄膜的反射式高能电子衍射(RHEED),俄歇电子能谱(AES)研究结果。X射线双晶衍射的测试结果表明,衬底表面的Ge岛有助于释放外延层的失配应力,提高外延层的晶体质量。 关键词：     

高能电子衍射研究H钝化偏角Si衬底上Si,GexSi1-x的分子束外延生长模式

用高能电子衍射(RHEED)研究H钝化偏角Si衬底上Si,Ge_xSi_1-x材料的分子束外延(MBE)生长模式,发现经低温处理的H钝化Si衬底上要经过10nm左右的Si生长才能获得比较平整的表面.Si,Ge_xSi_1-x外延时的稳定表面均以双原子台阶为主,双原子台阶与单原子台阶并存的结构.Si双原子台阶上的Si二聚体列(dimerrow)取向垂直于台阶边缘,而Ge_xSi_1-x双原 关键词：     

La0.5Sr0.5CoO3薄膜的外延生长及其机理研究

利用脉冲激光制膜法,在多种衬底和温度条件下,系统研究了La_0.5Sr_0.5CoO₃(LSCO)薄膜的结构和外延生长特性,在LaAlO₃,SrTiO₃和MgO衬底上实现了LSCO薄膜的外延生长.外延生长的薄膜具有低的电阻率和金属性导电特征.研究表明,外延生长的最佳温度范围为700—800℃,最佳衬底为LaAlO₃.并着重探讨了衬底材料和淀积温度等多种因素对LSCO薄膜的生长与性 关键词：     

稀掺杂GaNxAs1－x(x≤0.03)薄膜的调制光谱研究

利用室温下压电调制反射光(PzR)谱技术系统测量了N掺杂浓度为0.0%—3%的分子束外延生长GaN_xAs_1-x薄膜，并对图谱中所观察的光学跃迁进行了指认.在GaN_0.005As_0.995和GaN_0.01As_0.99薄膜的PzR谱中观察到此前只在椭圆偏振谱中才看到的N掺杂相关能态E₁+Δ₁+Δ_N.当N掺杂浓度达到 关键词： 压电调制反射光谱(PzR) xAs_1-x薄膜')" href="#">GaN_xAs_1-x薄膜 分子束外延(MBE)     

InAs/GaInSb超晶格薄膜结构与电学性能

采用分子束外延(MBE)方法, 调节生长温度、Ⅴ/Ⅲ束流比等参数在(001)GaAs衬底上生长了InAs/GaInSb超晶格薄膜.结果表明:InAs/GaInSb超晶格薄膜的最佳生长温度在385~395 ℃, Ⅴ/Ⅲ束流比为5.7 :1~8.7 :1.高能电子衍射仪(RHEED)原位观测到清晰的GaAs层(4×2)、GaSb层(1×3)和InAs层(1×2)再构衍射条纹.获得的超晶格薄膜结构质量较好.随着温度的升高, 材料的载流子浓度和迁移率均上升.     

LaTiO3(110)薄膜分子束外延生长的精确控制和表面截止层的研究

LaTiO₃ 是一种典型的强关联电子材料, 其(110) 薄膜为通过晶格对称性、应变等的设计调控外延结构的物理性质提供了新的机会. 本文研究了SrTiO₃(110) 衬底表面金属La 和Ti 沉积所引起的微观结构变化, 进而利用电子衍射信号对分子束外延薄膜生长表面阳离子浓度的灵敏响应, 发展了原位、实时、精确控制金属蒸发源沉积速率的方法, 实现了高质量LaTiO₃(110) 薄膜的生长和对阳离子化学配比的精确控制. 由于LaTiO₃中Ti³⁺ 3d 电子的库仑排斥作用, 氧原子层截止的(110) 表面更容易实现极性补偿, 因此生长得到的薄膜表面暴露出单一类型的氧截止面.     

Growth and in situ high-pressure reflection high energy electron diffraction monitoring of oxide thin films

Interface and surface physics is an important sub-discipline within condensed matter physics in recent decades. Novel concepts like oxide-electronic device are prompted, and their performance and lifetime are highly dependent on the flatness and abruptness of the layer surfaces and interfaces. Reflection high-energy electron diffraction (RHEED), which is extremely sensitive to surface morphology, has proven to be a versatile technique for the growth study of oxide thin films. A differential pumping unit enables an implementation of RHEED to pulsed laser deposition (PLD) systems, ensuring an in situ monitoring of the film growth process in a conventional PLD working oxygen pressure up to 30 Pa. By optimizing the deposition conditions and analyzing the RHEED intensity oscillations, layer-by-layer growth mode can be attained. Thus atomic control of the film surface and unit-cell control of the film thickness become reality. This may lead to an advanced miniaturization in the oxide electronics, and more importantly the discovery of a range of emergent physical properties at the interfaces. Herein we will briefly introduce the principle of high-pressure RHEED and summarize our main results relevant to the effort toward this objective, including the growth and characterization of twinned La_2/3Ca_1/3MnO₃ thin films and ReTiO_3+δ/2 (Re = La, Nd; δ = 0 ～ 1) A _n B _n O_3n+2 structures, on YSZ-buffered ‘Silicon on Insulator’ and LaAlO₃ substrates, respectively, as well as the study of the initial structure and growth dynamics of YBa₂Cu₃O_7?δ thin films on SrTiO₃ substrate. Presently we have realized in situ monitoring and growth mode control during oxide thin film deposition process.     

In situ RHEED monitor of the growth of epitaxial anatase TiO2 thin films

Epitaxial anatase TiO₂ thin films were successfully grown on (0 0 1) SrTiO₃ substrates by the laser molecular-beam epitaxy (laser-MBE) method. The whole growth process is monitored by in situ reflection high-energy electron diffraction (RHEED). RHEED monitoring shows a transition from a streaky pattern to a spot pattern during deposition, indicating different growth modes of TiO₂ film. The RHEED patterns are in consistent with the RHEED intensity oscillation results. The atomic force microscopy (AFM) and X-ray diffraction (XRD) investigation show that the thin films have single crystalline orientation with roughness less than three unit cells.     

Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition

We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO₃ as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y₂O₃ phosphors.     

Periodic step structure of clean and YBa2Cu3O7 − δ-covered vicinal SrTiO3(001) surfaces

We have studied the structure of a stable vicinal SrTiO₃(001) surface by UHV scanning tunneling microscopy. We find that the regular nanoscale step structure on the vicinal surface strongly influences the growth of c-axis-orientedYBa₂Cu₃O_{7 − δ} (YBCO) thin films. It generates an almost periodic surface structure of the YBCO films. This substrate-mediated control of the film growth is particularly important, because the resultant YBCO microstructure leads to an in-plane anisotropy of the transport properties in the high-temperature superconducting material.     

高氧压下氧化物薄膜同质和异质外延的RHEED实时监测

我们自行研制了具有三级差分气路可以在高气压下工作的RHEED系统(High-pressure RHEED),并利用本系统实时监测了(001)SrTiO3基片上SrTiO3:Nb、Ba0.5Sr0.5TiO3、YBa2Cu3O7单层薄膜,及Ba0.5Sr0.5TiO3/SrTiO3:Nb双层膜的生长过程.研究结果表明当镀膜室氧压高达21Pa时该系统仍然可以正常工作,并且能够获取较清晰的衍射图样.通过分析衍射图样我们发现,所有这些薄膜都是外延生长且晶体质量良好,但薄膜生长模式及表面平整度受沉积条件影响较大.在真空下薄膜基本上以层状模式生长,具备纳米级光滑的表面,且其表面平整度并不因膜厚的改变而变化;而在10Pa量级氧压下薄膜更倾向于以岛状模式生长,膜表面平整度较差,并且随膜厚的增加粗糙度上升.此外对多层薄膜而言,底层薄膜的表面和结构直接影响到顶层薄膜的质量和品质.     

Pulsed laser deposition of (110) oriented semiconductive SrFeO3−x thin films

 The semiconductive perovskite-type oxide SrFeO_3-x (x<0.16) (SFO) thin films have been directly fabricated on (001)SrTiO₃ and (001)LaAlO₃ single crystal substrates by pulsed laser deposition(PLD) under high oxygen partial pressure of 100 Pa. The SFO thin films were (110) oriented. The x-ray photoelectron spectroscopy (XPS) analysis showed that the surface of SFO thin film has strong gas absorption capability. The resistance versus temperature has been measured in the temperature range from 77 K to 300 K. The SFO thin film showed typical semiconductive property. Dependence of resistance of SFO thin film on oxygen pressure was measured and result showed that the SFO thin film had better oxygen sensitive property. Received: 14 May 1996/Accepted: 15 August 1996     

Growth mechanism, microstructure and transport properties of Sr1−x La x CuO2 (x=0.10−0.15) thin films

Sr_1−x La _x CuO₂ (x=0.10−0.15) thin films with an infinite-layer type structure were grown on BaTiO₃ buffered (001) SrTiO₃ substrates by pulsed laser deposition (PLD). The evolution of the growth front was monitored, in-situ, by high-pressure reflection high-energy electron diffraction (RHEED), while the surface morphology was analyzed by means of atomic force microscopy (AFM), ex-situ. X-ray diffraction (XRD) was used to determine the evolution of the film structure with deposition and cooling parameters, as well as to study the type and level of epitaxial strain in the Sr_1−x La _x CuO₂ films. The RHEED data showed that the Sr_1−x La _x CuO₂ films grow on BaTiO₃/SrTiO₃ following a 2D or Stranski-Krastanov mechanism, depending on the La doping level. The transition point (critical thickness d _c) from layer-by-layer like (2D) to island (3D) growth depends on the film stoichiometry: decreasing the La doping concentration x from 0.15 to 0.10, the critical thickness d _c increases from ∼45 nm to ∼75 nm. In order to induce superconductivity, the Sr_1−x La _x CuO₂ films were cooled down under reduction conditions. The as-deposited films showed semiconducting or metallic behavior, the resistivity decreasing with increasing La concentration. Post-deposition vacuum annealing resulted in a superconducting transition onset (but no zero resistance down to 4.2 K) only for some of the x=0.15 Sr_1−x La _x CuO₂ films.     

The effect of BZO doping concentration and thickness dependent properties of YBCO films grown by PLD on buffered NiW substrates

The effect of BaZrO₃ (BZO) doping is systematically studied in YBa₂Cu₃O_6+x (YBCO) thin films deposited by pulsed laser deposition (PLD) on buffered NiW substrates. Based on the structural and magnetic properties, the optimal BZO doping concentration is obtained to vary between 4 and 7.5 wt.%, depending mainly on applied magnetic field. This relatively high optimal concentration is linked to the nanograined target material and metal substrate that cause low-angle grain-boundaries and in-plane spread of YBCO crystals on NiW. Thickness dependent analysis of undoped and BZO-doped YBCO films predicts differences in growth mechanisms where early growth next to the substrate interface is 2D-type in BZO-doped films. This leads to the situation where crystallographic structure as well as superconducting properties are improved when the film develops and the thickness is increased. Therefore from the resistivity measurements a threshold thicknesses where reasonable properties occur are determined for both set of films. Measurements in thermally activated flux-flow regime (TAFF) indicate that above the threshold thickness relatively strong and isotropic vortex pinning is realized in BZO-doped YBCO films. Generally, this paper demonstrates that especially for thin film applications on NiW substrates even more compatible buffer layer structures should be utilized.     

Optical properties of SrTiO<Subscript>3</Subscript> thin films by pulsed laser deposition

SrTiO₃ thin films were prepared on a fused-quartz substrate by pulsed laser deposition (PLD). Dense and homogeneous films with a thickness of 260 nm were prepared. Optical constants (refractive index n and extinction coefficient k) were determined from the transmittance spectra using the envelope method. The optical band gap energy of the films was found to be 3.58 eV, higher than the 3.22 eV for bulk SrTiO₃, attributable to the film stress exerted by the substrate. The dispersion relation of the refractive index vs. wavelength follows the single electronic oscillator model. The refractive index and the packing density for the PLD-prepared SrTiO₃ thin films are higher than those for the SrTiO₃ films prepared by physical vapor deposition, sol–gel and RF sputtering. Received: 18 March 2002 / Accepted: 7 October 2002 / Published online: 8 January 2003 RID="*" ID="*"Corresponding author. Fax: +86-25/359-5535, E-mail: mszhang@nju.edu.cn     

Microstructure of epitaxial superconductive YBa2Cu3O7 thin films prepared at different deposition rates

A study is reported on the growth mechanism of YBa₂Cu₃O₇ with different growth speeds by high resolution transmission microscopy (HRTEM) and analysis of the interface and thin film microstructure. Two thin films were synthesized by pulse laser deposition on [100], miscut 5°, SrTiO₃ substrate at 820 °C, one with a pulse laser frequency of 1 Hz and one with 6 Hz. Cross-sections were studied by an H-9000 NAR HRTEM along the [010] direction. The growth process of the sample made at 1 Hz was as follows. First, distorted step flow growth occurred on a step-mediated substrate surface of 3–4 cells thickness. Second, about a 15 nm thickness of island shape growth becomes superimposed on the area of the step flow layer. Finally, thin film growth occurred but with growth fluctuation. The sample made at 6 Hz showed the characteristics of island growth; the growth area of island or ball shape was of small size and dense distribution, and seemed to be a confused mosaic stack. The influence of growth speed on YBCO epitaxial film microstructure was studied explicitly by HRTEM.