GaAs/SrTiO3外延半导体单晶薄膜带间跃迁研究

报道了在钙钛矿型结构的SrTiO₃衬底上用分子束外延方法生长闪锌矿型结构的GaAs半导体单晶薄膜.应用光调制反射光谱和光荧光方法 ,研究了GaAs半导体薄膜的带间跃迁,并与通常的GaAs体材料特性进行了对比研究.结果表明,在钙钛矿型结构SrTiO₃衬底上生长的GaAs单晶薄膜具有与单晶体材料相似的禁带与光学特性,在带间跃迁的弛豫上,外延薄膜相对体材料大了约5倍. 关键词：     

GaAs(001)衬底上分子束外延生长立方和六方GaN薄膜

采用分子束外延方法在GaAs(001)衬底上生长出了03微米厚的GaN薄膜,X射线双晶衍射和室温光荧光测试结果表明,采用GaAs氮化表面作为成核层可获得高纯度立方GaN薄膜而采用AlAs氮化表面作为成核层可获得高纯度六方GaN薄膜.这一研究结果表明在GaAs衬底上生长GaN薄膜的相结构可以通过选择不同的成核层来控制. 关键词：     

MgO（001）表面上沉积MgO薄膜过程的分子动力学模拟

采用分子动力学方法模拟了MgO分子连续沉积于MgO（001）表面上的薄膜生长过程,分析了衬底温度和分子入射能对MgO分子在衬底表面上的扩散能力以及对衬底表面覆盖率的影响.模拟结果表明,随着衬底温度的升高,在衬底表面上沉积的MgO分子扩散能力增强,MgO薄膜层中空位缺陷变少.低温下,分子入射能的增大有助于提高衬底表面覆盖率;高温下,表面覆盖率随入射能增大到3.0 eV时达到最大值,入射能继续增大,表面覆盖率减小. 关键词： MgO薄膜生长 分子动力学 计算机模拟 表面扩散     

石英衬底上Au缓冲层对ZnO薄膜微结构的影响

采用单源化学气相沉积(SSCVD)法,在石英衬底上以Au为缓冲层,Zn4(OH)2(O2CCH3)6.2H2O为固相源制备ZnO薄膜。SEM和XRD测试ZnO薄膜的微结构,结果表明:相对于SiO2衬底上生长的ZnO薄膜,Au/SiO2衬底上生长的ZnO薄膜具有较好的结晶质量和表面平整度;对制备ZnO薄膜的衬底温度进行了工艺优化,结果表明:500℃时制备的ZnO薄膜颗粒大小均匀,结晶质量较好;通过荧光光谱仪对Au/SiO2衬底上的ZnO薄膜进行光致发光(PL)谱测试,ZnO薄膜在400nm出现紫光发射峰,而没有出现与缺陷相关的深能级发射峰,表明ZnO薄膜具有较好的结晶质量。     

La0.5Sr0.5CoO3薄膜的外延生长及其机理研究

利用脉冲激光制膜法,在多种衬底和温度条件下,系统研究了La_0.5Sr_0.5CoO₃(LSCO)薄膜的结构和外延生长特性,在LaAlO₃,SrTiO₃和MgO衬底上实现了LSCO薄膜的外延生长.外延生长的薄膜具有低的电阻率和金属性导电特征.研究表明,外延生长的最佳温度范围为700—800℃,最佳衬底为LaAlO₃.并着重探讨了衬底材料和淀积温度等多种因素对LSCO薄膜的生长与性 关键词：     

分子束外延法在Sapphire衬底上生长的Zn1-xMgxO薄膜折射率及厚度的测试

利用偏振光椭圆率测量仪对分子束外延(MBE)法在Sapphire衬底上生长的Zn1-xMgxO薄膜的薄膜折射率和厚度进行了测试.结合ICP法测得的薄膜中的Mg组成量,经数值拟合,导出表征薄膜厚度与薄膜生长条件、薄膜折射率与薄膜中的Mg组成量之间关系的曲线,为MBE法在Sapphire衬底上生长Zn1-xMgxO薄膜时控制薄膜厚度以及在制作Zn1-xMgxO薄膜的波导时控制薄膜的折射率提供了理论依据.     

用激光分子束外延在玻璃衬底上生长La0.67Sr0.33MnO3薄膜

采用激光分子束外延技术,在玻璃衬底上制备了La0.67Sr0.33MnO3 (LSMO) 薄膜,X射线衍射测量结果表明在玻璃衬底上生长的LSMO薄膜沿c轴择优取向生长.在外磁场3 T和88, 220, 300 K条件下,LSMO薄膜的磁电阻变化率分别达到-37.8%, -26.8%和-6.07%.实验结果表明,在廉价的玻璃衬底上制备大面积和具有应用价值的锰氧化物薄膜是可行的.     

磁控溅射CNx薄膜的附着力、粗糙度与衬底偏压的关系

对磁控溅射生长在单晶Si(001)衬底上的CNx薄膜的附着力、粗糙度与衬底偏压的关系进行了研究。CNx薄膜沉积实验在纯N2的环境下进行．衬底温度(Ts)保持在350℃．衬底偏压(Vb)在0～-150V之间变化。利用原子力显微镜(AFM)和划痕试验机来测量CNx薄膜的表面粗糙度及对衬底的附着力。AFM和划痕实验的结果显示衬底偏压Vb对CNx薄膜的附着力和表面粗糙程度的影响很大，在-100V偏压下生长的CNx薄膜表面最光滑(粗糙度最小)，同时对Si(001)衬底的附着力最好。最后根据实验结果确定了在单晶Si(001)衬底上生长光滑而且附着力好的CNx薄膜的最佳实验条件。     

用激光分子束外延在玻璃衬底上生长La0.67Sr0.33MnO3薄膜

采用激光分子束外延技术,在玻璃衬底上制备了La_067Sr_033MnO₃ （LSMO） 薄膜,X射线衍射测量结果表明在玻璃衬底上生长的LSMO薄膜沿c轴择优取向生长.在外磁场3 T和88, 220, 300 K条件下,LSMO薄膜的磁电阻变化率分别达到-378%, -268%和-607%.实验结果表明,在廉价的玻璃衬底上制备大面积和具有应用价值的锰氧化物薄膜是可行的. 关键词： 锰氧化物薄膜 玻璃衬底 外延生长     

蓝宝石邻晶面衬底MBE生长GaN薄膜的瞬态光电导弛豫特性研究

在实验优化MBE工艺条件的基础上，采用蓝宝石(0001)邻晶面衬底制备出了具有较高质量的GaN薄膜.XRD分析表明邻晶面衬底生长的GaN薄膜晶体结构质量明显提高，AFM表征结果显示邻晶面生长的样品表面形貌显著改善.蓝宝石衬底GaN薄膜的瞬态光电导弛豫特性对比实验研究发现，常规衬底生长的GaN薄膜光电导弛豫特性出现双分子复合、单分子复合和弛豫振荡三个过程，持续时间分别为0.91，7.7和35.5ms；蓝宝石邻晶面衬底生长的GaN薄膜光电导弛豫过程主要是双分子复合和单分子复合过程，持续时间分别为0.78和14ms.理论分析表明MBE生长GaN薄膜的持续光电导效应主要起源于本生位错缺陷引发的深能级. 关键词： 邻晶面蓝宝石衬底 GaN薄膜 瞬态光电导 弛豫特性     

Influence of surface temperature and surface modifications on the initial layer growth of para-hexaphenyl on mica (0 0 1)

Ultra-thin films of para-hexaphenyl (6P) were prepared on muscovite mica (0 0 1) utilizing organic molecular beam deposition (OMBD) under well defined ultra high vacuum (UHV) conditions. The 6P growth characteristics were studied as a function of substrate temperature and substrate surface conditions. For the initial state of layer growth, thermal desorption spectroscopy (TDS) was used to verify the existence of a wetting layer. In this monomolecular continuous wetting layer, the molecules lie flat on the surface and are rather strongly bonded. For thicker films, in-situ X-ray photoelectron spectroscopy (XPS) in combination with (TDS) was applied to reveal the kinetics of the layer growth. Ex-situ atomic-force microscopy (AFM) was used to determine the film morphology. In particular, the influence of surface modifications (carbon contamination, sputtering) on 6P layer growth was investigated. XPS and low energy electron diffraction (LEED) were used to characterize the mica surface before the film deposition. TDS and AFM revealed a considerable change in film growth, from a needle-like island growth of flat laying molecules on top of the wetting layer (for the air cleaved mica) to terrace-like film growth of standing molecules, without a wetting layer (after surface modifications).     

Controlling molecular orientation of OMBE grown 6P thin films on mica(0 0 1)

The growth of para-sexiphenyl thin films by organic molecular beam epitaxy (OMBE) on mica(0 0 1) was investigated. The morphology of the films was qualitatively and quantitatively analyzed by atomic-force microscopy. Synchrotron radiation was used in order to extract information about orientation of the individual molecules with respect to the substrate. Controlling the growth environment inside the growth chamber allowed to reproduce one-dimensional film morphologies with partially oriented crystallite chains usually obtained by hot wall epitaxy (HWE). Following a dedicated pregrowth procedure results in terraces of upright standing molecules so far not obtained. Phase imaging was used to clearly distinguish film and substrate.     

X-ray pole-figure study of the epitaxial growth of C60 thin films on mica (001)

The growth of epitaxial C₆₀ thin films on mica(001) by thermal evaporation has been studied in detail by X-ray pole-figure measurements. The influence of the deposition rate, the substrate temperature and the film thickness on the in-plane epitaxial arrangements and the formation of twins has been investigated. It has been demonstrated that the C₆₀ growth is determined by two independent and equivalent C₆₀-crystal grain alignments (type-A and type-B). The nearly six-fold symmetry of the mica(001)-substrate surface offers the three-fold fcc-(111)-oriented C₆₀-crystal grains two equivalent crystal alignments. A high deposition rate of 0.5 Å/s is responsible for the formation of twins at a substrate temperature of 150°C, which diminishes by a higher substrate temperature of 200°C. By a decrease of the deposition rate down to 0.08 Å/s the twins vanish at a film thickness of 200 nm and at the substrate temperature of 150°C. Under the same sublimation conditions, in addition to the type-A and type-B crystal orientations, the growth of the thin C₆₀ films starts with a slight fibre texture which does not appear at a larger film thickness.     

四川白云母薄膜的结构特性

本文介绍了使用透射式电子显微镜和扫描电子显微镜研究厚度约为300—1000?的四川甲级白云母薄膜的结构和成分组成,结论是这种白云母薄膜具有相当完善的单晶结构特性,没有检测到存在什么杂质,但在某些区域存在图2—4所表明的缺陷。云母薄膜可以作为基底材料,在其上沉积或生长具有较大晶粒的其他薄膜。 关键词：     

MgO(111)上NbN和AlN薄膜的生长研究

在制备NbN/AlN/NbN隧道结的工艺过程中,为了获得具有优质单晶结构的NbN薄膜,我们在MgO(111)基片上探索了直流溅射法制备NbN薄膜的生长工艺条件,XRD研究分析表明,我们获得了单晶结构良好的NbN薄膜;为了支持作为上电极的NbN薄膜的生长,也需要良好的AlN薄膜用作势垒层,我们采用射频磁控溅射设备和纯净的Al靶对AlN薄膜进行了制备研究.实验结果表明,所获得的AlN薄膜具有六方c-轴取向,并讨论了衬底和薄膜界面处可能的结构情况.     

Pseudo-epitaxial C60 films prepared by a hot-wall method

We have used both reflection-geometry and grazing-incidence-geometry X-ray scattering to study thin films of C₆₀ evaporated onto mica substrates via a hot-wall technique. The growth mode yields close-packed C₆₀ planes, which are parallel to the substrate surface and which exhibit out-of-plane correlation lengths of 850 Å. In the film plane the C₆₀ is at best pseudo-epitaxial, with a 0.9° distribution of crystallite orientations, a 450 Å in-plane correlation length, and a 3.7% lattice mismatch, better than obtained by other thin film techniques but far from the accepted definition of single crystal thin film epitaxy.     

IR and SFM study of PTCDA thin films on different substrates

FT-IR spectroscopy and SFM were used to investigate the growth of thin films of the organic semiconductor 3,4,9,10-perylenetetracarboxylicdianhydride (PTCDA) deposited by vacuum sublimation onto various substrates, i.e. Ag(111) layers on mica, KBr(100), mica, oxidized Si, and TiO₂ nanoparticles on Si. Layer thicknesses of PTCDA varied from 10 to 1500 nm.The anhydride vibrations of PTCDA differ for the used substrates, which can be connected to the orientation of the molecules relative to the substrate surface and the film morphology as detected in the SFM pictures.     

Combinatorial approach to the fabrication of organic thin films

We demonstrate combinatorial approach in investigation of organic thin film fabrication. “Combinatorial substrate screening”, which is the deposition onto several kinds of substrates simultaneously, is useful to choose suitable substrate for organic thin film growth. “Combinatorial thickness-gradient films” can be fabricated using a moving mask which travels from an edge to another edge of substrate continuously during the deposition. The combinatorial thickness-gradient film can be regarded as the library for time evolution of film growth during the deposition. This mapping can serve as a powerful method for the research of growth of thin film in an initial stage. Besides, combinatorial thickness-gradient film can be utilized for the examination of a buffer layer effect. These techniques enable us to quickly optimize for the fabrication of high-quality organic thin films.     

Phase-based method in heterodyne-modulated ellipsometer

A new common-path heterodyne-modulated ellipsometer with two-phase detection to measure the ellipsometric parameters of amplitude ratio (Ψ) and phase difference (Δ) between p- and s-polarizations of the thin film isotropic materials is proposed. Uniquely, the new scheme distinct from the other previous studies is only by taking two phases from heterodyne signals. Thus, the proposed system is a phase-sensitive modulated ellipsometer that can have the ability to measure the full range of the ellipsometric parameters with high sensitivity and eliminate the intensity fluctuation in system. The ability and performance of modulated ellipsometer on measurement of thin film thickness and ellipsometric parameters are verified by experiments. The errors regarding the ellipsometric parameter measurements are also discussed. The experimental results show that the average standard variation of measured ellipsometric parameters (Ψ and Δ) and the thickness measurement of silica thin film deposited on silicon substrate are 0.13°, 0.94°, and 0.55 nm, respectively. Accordingly, this new idea can be applied to measure isotropic thin film with extremely high absorbance that results in the poor signal/noise ratio in contrast extraction from heterodyne signals.     

Simulation of the interface characterization of thin film on substrate system by bending creep tests

In the present paper, the finite element simulation of the bending creep tests of the thin film on substrate system is carried out. The purpose of the investigation is to understand the creep stress characterization of the thin film on substrate system with the three points bending creep test method, which plays an important role in the bending creep testing characterization, so as to provide some foundation on determination of interface properties of the thin film on substrate system by a bending creep testing. Finite element results shows that the influences of the thickness of thin film and the modulus ratio of thin film to substrate on stress distribution are important.