倒装芯片塑料球栅阵列封装器件在外应力下的失效机理

倒装芯片塑料球栅阵列(FC-PBGA)封装形式独特而被广泛应用, 分析研究其在实际应用过程中, 在高温、电、水汽等多种综合环境应力条件作用下的失效机理对提高其应用可靠性有重要意义. 本文对0.13 μm 6层铜布线工艺的FC-PBGA FPGA器件, 通过暴露器件在以高温回流焊过程中的热-机械应力为主的综合外应力作用下的失效模式, 分析与失效模式相对应的失效机理. 研究结果表明, FC-PBGA器件组装时的内外温差及高温回流焊安装过程中所产生的热-机械应力是导致失效的根本原因, 在该应力作用下, 芯片上的焊球会发生再熔融、桥接相邻焊球致器件短路失效; 芯片与基板之间的填充料会发生裂缝分层、倒装芯片焊球开裂/脱落致器件开路失效; 芯片内部的铜/低k互连结构的完整性受损伤而影响FC-PBGA器件的使用寿命.     

CMOS反相器的快上升沿强电磁脉冲损伤特性

随着电磁环境的日益复杂,保证集成电路（IC）的可靠性成为一个巨大的挑战。在此基础上,通过对CMOS反相器的仿真和实验研究,研究了快上升沿电磁脉冲（EMP）引起的陷阱辅助隧穿（TAT）效应。对此进行了详细的机理分析用于解释其物理损伤过程。EMP感应电场在氧化层中产生陷阱和泄漏电流,从而导致器件的输出退化和热失效。建立了退化和失效的理论模型,以描述输出退化及热积累对EMP特征的依赖性。温度分布函数由半导体中的热传导方程导出。基于TLP测试系统进行的相应实验证实了出现的性能退化,与机理分析一致。Sentaurus TCAD的仿真结果表明,EMP引起的损坏是由栅极氧化层中发生的TAT电流路径引起的,这也是器件的易烧坏位置。此外,还讨论了器件失效与脉冲上升沿的关系。本文的机理分析有助于加强其他半导体器件的EMP可靠性研究,可以对CMOS数字集成电路的EMP加固提出建议。     

CMOS反相器的快上升沿强电磁脉冲损伤特性（英文）

随着电磁环境的日益复杂,保证集成电路(IC)的可靠性成为一个巨大的挑战。在此基础上,通过对CMOS反相器的仿真和实验研究,研究了快上升沿电磁脉冲(EMP)引起的陷阱辅助隧穿(TAT)效应。对此进行了详细的机理分析用于解释其物理损伤过程。EMP感应电场在氧化层中产生陷阱和泄漏电流,从而导致器件的输出退化和热失效。建立了退化和失效的理论模型,以描述输出退化及热积累对EMP特征的依赖性。温度分布函数由半导体中的热传导方程导出。基于TLP测试系统进行的相应实验证实了出现的性能退化,与机理分析一致。Sentaurus TCAD的仿真结果表明,EMP引起的损坏是由栅极氧化层中发生的TAT电流路径引起的,这也是器件的易烧坏位置。此外,还讨论了器件失效与脉冲上升沿的关系。本文的机理分析有助于加强其他半导体器件的EMP可靠性研究,可以对CMOS数字集成电路的EMP加固提出建议。     

高功率转换效率905 nm垂直腔面发射激光器的设计与制备

通过对影响垂直腔面发射激光器(vertical cavity surface emitting laser, VCSEL)的功率转换效率的因素进行理论分析,得出斜率效率是影响功率转换效率的主要因素的结论.为获得高功率转换效率,通过对有源区量子阱、P型和N型分布布拉格反射镜(DBR)等进行优化,设计出了905 nm VCSEL的外延结构并进行了高质量外延生长.成功制备出了不同氧化孔径的905 nm VCSEL器件,获得的最大斜率效率为1.12 W/A,最大转换效率为44.8%.此外,探究了氧化孔径对VCSEL的远场和光谱特性的影响.这种具有高功率转换效率的905 nm VCSEL器件为激光雷达的小型化、低成本化提供了良好的基础数据.     

多结级联垂直腔面发射激光器失效分析

对自主研发的940 nm大功率三结垂直腔面发射激光器(VCSEL)单点器件的高温高电流老化失效后的器件进行了失效分析研究.首先,通过热阻测试确定了加速老化实验的结温,并计算了老化加速因子为104.随后,对老化过程中产生的失效器件进行失效分析.通过老化前后器件L-I-V、正反向V-I、光学及红外外观、近场光斑及透射电子显...     

高速光通讯面发射激光器的热分析及优化

垂直腔面发射激光器(VCSEL)已成为短距离数据通信传输系统的首选光源。热限制是VCSEL器件调制带宽进一步增加的一个主要的制约因素。本文基于有限元分析的方法对影响980 nm-VCSEL器件有源区温度的参数,如驱动电流、氧化孔径尺寸、氧化层材料等做了比较分析,还数值分析了二元系Ga As/Al As材料DBR用于高速低能耗VCSEL器件的优势,为绿色光子器件设计提供优化思路。     

高速850 nm垂直腔面发射激光器的优化设计与外延生长

利用传输矩阵理论和TFCalc薄膜设计软件分析了分布布拉格反射镜和垂直腔面发射激光器(VCSEL)的反射率谱特性,对比了从谐振腔入射与从表面入射时反射率谱的差异,为白光反射谱表征VCSEL外延片提供了依据.利用Crosslight软件模拟了InGaAs/AlGaAs应变量子阱的增益谱随温度的变化特性及VCSEL器件内部温度分布,设计了增益-腔模调谐的VCSEL.采用金属有机物化学气相淀积设备外延生长了顶发射VCSEL,制作了氧化孔径为7.5μm的氧化限制型VCSEL器件,测试了器件的直流特性、光谱特性和眼图特性;6 mA,2.5 V偏置条件下输出光功率达5 mW,4级脉冲幅度调制传输速率达50 Gbit/s.     

高速低能耗垂直腔面发射激光器的基于氧化限制孔径影响的强度噪声分析（英文）

对不同氧化孔径尺寸的高速,低能耗的垂直腔面发射激光器(VCSEL)进行了相对强度噪声(RIN)分析.小氧化物尺寸孔径的VCSELs器件更适用于低能耗数据传输,且RIN特性与低能耗性能没有冲突.实验结果表明,适合低能耗、高温度稳定性工作的小氧化孔径VCSELs器件同时表现出较好的噪声性能.高速低能耗VCSEL能够满足32GFC光纤通道标准的RIN要求,在将来的高性能计算机应用中具有巨大优势.     

氧化孔形状对光子晶体垂直腔面发射激光器模式的影响

用时域有限差分方法对氧化孔限制型外腔式光子晶体垂直腔面发射激光器 (VCSEL) 在小氧化孔下氧化孔形状对激光器模式特性的影响进行了模拟计算. 建立了三维光子晶体面发射激光器光场计算模型, 分析了氧化孔形状变化对器件远场特性与频率特性的影响. 研究发现, 氧化孔形状可影响光子晶体VCSEL的模式特性, 尤其是频谱特性. 从模场分布的角度可解释为菱形氧化孔的对称性与高阶模的不一致. 但随着光子晶体刻蚀深度的增加和氧化孔的增大, 这种影响逐渐减小, 分析解释了其原因. 研究结果为提高光子晶体面发射激光器的性能提供了参考.     

基于VCSEL的高速光收发模块研究

基于垂直腔面发射激光器(VCSEL)的高速光模块在现代光通信系统中的应用已越来越广泛。本文在简单介绍光收发模块和VCSEL器件的基础上，着重讨论了GBIC模块的总体设计和主要技术关键。     

采用BCB平整技术的高速850 nm垂直面发射激光器

垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯（BCB）平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7 μm氧化孔径下3 dB小信号调制带宽可达15.2 GHz。     

Current spreading modification to enhance single-fundamental-mode VCSEL operation at higher temperatures

Continuous-wave (CW) performance of modern oxide-confined (OC) vertical-cavity surface-emitting diode lasers (VCSELs) at room and elevated temperatures is investigated with the aid of the comprehensive fully self-consistent optical-electrical-thermal-gain model. A standard OC GaInNAs/GaAs double-quantum-well VCSEL emitting the 1.3-μm radiation is used as a typical modern VCSEL structure. The oxide aperture is placed at the anti-node position of an optical standing wave within a VCSEL cavity. The desired single-fundamental-mode (SFM) operation has been found to be expected only in VCSELs equipped with relatively small active regions of diameters equal or smaller than 10 μm. Therefore a proton implantation used as an radial additional confinement of the current spreading from the upper annular contact towards the centrally located active region is proposed and its impact on the VCSEL performance is investigated. The above structure modification has been found to enable a radical improvement in the VCSEL performance. In particular, in this case, the SFM VCSEL operation is possible even in VCSELs with quite large active regions and for much wider ambient-temperature range than in the standard OC VCSELs.     

Comparative analysis of lasing performance of oxide-confined and proton-implanted vertical-cavity surface-emitting diode lasers

The comprehensive optical-electrical-thermal-recombination self-consistent VCSEL model is used to compare the performance of oxide-confined (OC) and proton-implanted (PI) VCSELs and to optimise their structures. Generally index-guided (IG) OC VCSELs demonstrate lower lasing thresholds whereas both gain-guided (GG) OC and PI ones manifest much better mode selectivity. Therefore, their either low-threshold IG or mode-selective GG versions may be intentionally used for different VCSEL applications. Lasing thresholds of OC IG VCSELs have been found to be very sensitive to the exact localisation of their thin oxide apertures, which should be shifted as close as possible towards the anti-node position. PI VCSELs, on the other hand, are simpler and cheaper in their manufacturing than OC ones. Although lower threshold currents are manifested by PI VCSELs with very thick implanted regions, lower threshold powers are achieved in these devices with much thicker upper unaffected layer used for the radial current flow from the ring contact towards the laser axis. Paradoxically poor thermal properties of PI VCSELs enable lower lasing thresholds of slightly detuned devices. To conclude, cheaper and mode-selective PI VCSELs may be used instead of OC ones in many of their applications provided ambient temperatures and laser outputs are not too high.     

Low threshold current density, low resistance oxide-confined VCSEL fabricated by a dielectric-free approach

We present the fabrication process and experimental results of 850-nm oxide-confined vertical cavity surface emitting lasers (VCSELs) fabricated by using dielectric-free approach. The threshold current of 0.4 mA, which corresponds to the threshold current density of 0.5 kA/cm², differential resistance of 76 Ω, and maximum output power of more than 5 mW are achieved for the dielectric-free VCSEL with a square oxide aperture size of 9 μm at room temperature (RT). L–I–V characteristics of the dielectric-free VCSEL are compared with those of conventional VCSEL with the similar aperture size, which indicates the way to realize low-cost, low-power consumption VCSELs with extremely simple process. Preliminary study of the temperature-dependent L–I characteristics and modulation response of the dielectric-free VCSEL are also presented.     

光反馈诱发长波长垂直腔面发射激光器低功耗偏振开关

基于扩展的自旋反转模型,对光反馈诱发下长波长垂直腔面发射激光器中的低功耗偏振开关进行了理论研究.研究表明:长波长垂直腔面发射激光器在自由运行下未能获得的偏振开关现象,可以通过引入中等强度的偏振旋转光反馈来实现.对比强弱两种不同的线性色散效应,发现了一些有趣的现象:弱线性色散条件下更易于在低注入电流下获得偏振开关,并且产生偏振开关所需的反馈强度具有更大的调控范围;强色散效应中未能始终获得偏振开关,会出现两模共存区,并且偏振开关出现的注入电流值较高.同时,观察到的偏振模跳变和多偏振开关现象类似于短波长垂直腔面发射激光器,因而证实这两类激光器在偏振开关的本质规律上是相似的.此外,还对长波长垂直腔面发射激光器不易在低注入电流下获得偏振开关的原因进行了分析,并给出了合理的解释.     

Thermal aspects of designing CW-operated nitride VCSELs

A room-temperature (RT) continuous-wave (CW) operation of possible nitride vertical-cavity surface-emitting lasers (VCSELs) is considered in the present paper using a simple VCSEL simulation to give some essential guidelines for their proper designing. It is revealed that a substrate material has a critical influence on a possibility of reaching RT CW thresholds which practically excludes currently used sapphire substrates of relatively low thermal conductivity from this application. SQW nitride VCSELs are found to be very sensitive to an increase in temperature, which is followed by their inappropriate CW-operation characteristics. A moderate increase in a number of quantum wells in VCSEL active regions significantly improves their CW achievements, i.e. decreases RT CW thresholds as well as considerably widens their CW threshold ranges.     

基于单向注入垂直腔面发射激光器系统的密钥分发

随机源对于信息理论安全的密钥分发至关重要,本文提出了一种基于单向注入垂直腔面发射激光器系统的密钥分发方案.首先基于单向注入的方式产生无时延特征的激光混沌信号,并通过单向注入驱动两个从激光器产生带宽增强的混沌同步信号.然后经过采样、量化以及异或等后处理,生成密钥流.数值仿真结果表明,在单阈值情况下,合法用户之间的误比特率低至1%左右,合法用户与窃听者之间的误比特率都高于10%;在双阈值情况下,误比特率可以低至10^-6.最后,对生成的密钥流进行了NIST随机性测试.该方案有效地增强了密钥分发的安全性.     

1.3μm量子点垂直腔面发射激光器高频响应的优化设计

结合垂直腔面发射激光器(VCSEL)原理以及量子点增益特点，计算了有源层p掺杂结构的量子点VCSEL的材料增益和3 dB带宽，发现p掺杂结构可以大大提高频率特性.结合VCSEL激射条件和阈值特性，分析了对VCSEL结构的要求；分析了分布参数对频率特性的影响，对其外部封装提出了要求.设计了高频率响应的含氧化限制层的1.3 μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 微分增益 3 dB带宽     

Sensitivity of a VCSEL threshold performance to inaccuracies in its manufacturing

The paper describes an impact of various possible inaccuracies in manufacturing of verticalcavity surface-emitting diode lasers (VCSELs), like thicknesses and compositions of their layers different from assumed ones, on VCSEL room-temperature (RT) continuous-wave (CW) threshold performance. To this end, the fully self-consistent comprehensive optical-electrical-thermal-recombination VCSEL model has been applied. While the analysis has been carried out for the 1.3-μm oxide-confined intra-cavity contacted GaInNAs/GaAs VCSEL, its conclusions are believed to be more general and concern most of modern VCSEL designs. As expected, the VCSEL active region has been found to require the most scrupulous care in its fabrication, any uncontrolled variation in compositions and/or thicknesses of its layers is followed by unaccepted RT CW lasing threshold increase. Also spacer thicknesses should be manufactured with care to ensure a proper overlapping of the optical standing wave and both the gain and lossy areas within the cavity. On the contrary, less than 5% thickness changes in distributed-Bragg-reflectors are followed by nearly insignificant changes in VCSEL RT CW threshold. However, exceeding the above limit causes a rapid increase in lasing thresholds. As expected, in all the above cases, VCSELs equipped with larger active regions have been confirmed to require more careful technology. The above results should enable easier organization of VCSEL manufacturing.     

Power dissipation in oxide-confined 980-nm vertical-cavity surface-emitting lasers

We presented 980-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) with a 16-μm oxide aperture. Optical power, voltage, and emission wavelength are measured in an ambient temperature range of 5℃ C-80℃. Measurements combined with an empirical model are used to analyse the power dissipation in the device and the physical mechanism contributing to the thermal rollover phenomenon in VCSEL. It is found that the carrier leakage induced selfheating in the active region and the Joule heating caused by the series resistance are the main sources of power dissipation. In addition, carrier leakage induced selfheating increases as the injection current increases, resulting in a rapid decrease of the internal quantum efficiency, which is a dominant contribution to the thermal rollover of the VCSEL at a larger current. Our study provides useful guidelines to design a 980-nm oxide-confined VCSEL for thermal performance enhancement.