质子注入能量对垂直腔面发射激光器的阈值和功率的影响

文章研究了如何兼顾质子注入型垂直腔面发射激光器的功率和阈值性能.从模拟和实验两方面分析了质子注入能量与器件功率和阈值特性的关系.发现注入能量过高时,损伤有源区,降低了功率性能.而能量过低则会减弱对注入电流的限制,增加阈值.计算和实验结果表明,对于文中的器件结构,315 keV的注入能量是合适的.在10μm的注入孔径下获得器件的阈值为4.3 mA,功率为1.7 mW.     

Single-mode low threshold current multi-hole vertical-cavity surface-emitting lasers

A multi-hole vertical-cavity surface-emitting laser(VCSEL) operating in stable single mode with a low threshold current was produced by introducing multi-leaf scallop holes on the top distributed Bragg-reflector of an oxidationconfined 850 nm VCSEL.The single-mode output power of 2.6 mW,threshold current of 0.6 mA,full width of half maximum lasing spectrum of less than 0.1 nm,side mode suppression ratio of 28.4 dB,and far-field divergence angle of about 10 are obtained.The effects of different hole depths on the optical characteristics are simulated and analysed,including far-field divergence,spectrum and lateral cavity mode.The single-mode performance of this multi-hole device is attributed to the large radiation loss from the inter-hole spacing and the scattering loss at the bottom of the holes,particularly for higher order modes.     

Vertical cavity surface emitting laser transverse mode and polarization control by elliptical hole photonic crystal

The polarization of traditional photonic crystal(PC) vertical cavity surface emitting laser(VCSEL) is uncontrollable,resulting in the bit error increasing easily.Elliptical hole photonic crystal can control the transverse mode and polarization of VCSEL efficiently.We analyze the far field divergence angle,and birefringence of elliptical hole PC VCSEL.When the ratio of minor axis to major axis b/a = 0.7,the PC VCSEL can obtain single mode and polarization.According to the simulation results,we fabricate the device successfully.The output power is 1.7 mW,the far field divergence angle is less than 10°,and the side mode suppression ratio is over 30 dB.The output power in the Y direction is 20 times that in the X direction.     

基于石墨烯-ZnO纳米线的复合电极在GaN LED中的应用

使用一维ZnO纳米线和二维石墨烯复合结构集成到p-GaN表面来同时实现电流扩展和提高LED光提取效率。通过两组有无ZnO纳米线器件的对比,发现ZnO纳米线使器件的光提取效率提高了30%.通过分析两组器件的开启电压、工作电压和反向漏电流等关键参数,验证了本结构应用于GaN LED不会恶化其电性能。本文所采用的复合结构用于GaN LED,同时达到了良好欧姆接触、避免使用ITO和增强出光的效果。     

Vertical cavity surface emitting laser transverse mode and polarization control by elliptical holes photonic crystal

The polarization of traditional photonic crystal (PC) vertical cavity surface emitting laser (VCSEL) is uncontrollable, resulting in the bit error increasing easily. Elliptical hole photonic crystal can control the transverse mode and polarization of VCSEL efficiently. We analyze the far field divergence angle, and birefringence of elliptical hole PC VCSEL. When the ratio of minor axis to major axis b/a=0.7, the PC VCSEL can obtain single mode and polarization. According to the simulation results, we fabricate the device successfully. The output power is 1.7 mW, the far field divergence angle is less than 10°, and the side mode suppression ratio is over 30 dB. The output power in the Y direction is 20 times that in the X direction.     

氧化孔形状对光子晶体垂直腔面发射激光器模式的影响

用时域有限差分方法对氧化孔限制型外腔式光子晶体垂直腔面发射激光器 (VCSEL) 在小氧化孔下氧化孔形状对激光器模式特性的影响进行了模拟计算. 建立了三维光子晶体面发射激光器光场计算模型, 分析了氧化孔形状变化对器件远场特性与频率特性的影响. 研究发现, 氧化孔形状可影响光子晶体VCSEL的模式特性, 尤其是频谱特性. 从模场分布的角度可解释为菱形氧化孔的对称性与高阶模的不一致. 但随着光子晶体刻蚀深度的增加和氧化孔的增大, 这种影响逐渐减小, 分析解释了其原因. 研究结果为提高光子晶体面发射激光器的性能提供了参考.     

Beam Steering Analysis in Optically Phased Vertical Cavity Surface Emitting Laser Array

Beam steering in implant defined coherently coupled vertical cavity surface emitting laser(VCSEL) arrays is simulated using the FDTD solution software. Angular deflection dependent on relative phase differences among elements, inter-element spacing, element size and emitted wavelength is analyzed detailedly and systematically.We design and fabricate 1×2 implant defined VCSEL arrays for optimum beam steering performance. Electronically controlled beam steering with a maximum deflection angle of 1.6° is successfully achieved in the 1×2 VCSEL arrays. The percentage of the power in the central lobe is above 39% when steering. The results show that the steering is controllable. Compared with other beam steering methods, the fabrication process is simple and of low cost.     

A Single-Fundamental-Mode Photonic Crystal Vertical Cavity Surface Emitting Laser

Single-fundamental-mode photonic crystal （PhC） vertical cavity surface emitting lasers （VCSEL） are produced and their single-fundamental-mode performances are investigated and demonstrated. A two-dimensional PhC with single-point-defect structure is fabricated using UV photolithography and inductive coupled plasma reactive ion etching on the surface of the VCSEL＇s top distributed Bragg-reflector. The PhC VCSEL maintains single-fundamental-mode operating with output power 1.7 mW and threshold current 2.5 mA. The full width half maximum of the lasing spectrum is less than 0.1 nm, the far field divergence angle is less than 10° and the side mode suppression ratio is over 35 dB. The device characteristics are analyzed based on the effective index model of the photonic crystal fiber. The experimental results agree well with the theoretical expectation.     

光子晶体垂直腔面发射激光器的电流分布研究

对氧化限制型外腔式光子晶体垂直腔面发射激光器注入到有源区的电流密度分布进行了分析研究.提出三维电流分布计算模型,研究了光子晶体结构对电流密度分布和器件串联电阻的影响.研究发现,光子晶体孔刻蚀深度越深,电流分布圆对称性越差,引起的串联电阻越大.不同光子晶体图案对电流分布的均匀性和圆对称性也有很大的影响.该模型对于研究、设计氧化限制型外腔式光子晶体垂直腔面发射激光器提供了一个有用的分析方法.     

Single-mode low threshold current multi-hole vertical-cavity surface-emitting lasers

A multi-hole vertical-cavity surface-emitting laser (VCSEL) operating in stable single mode with a low threshold current was produced by introducing multi-leaf scallop holes on the top distributed Bragg-reflector of an oxidation-confined 850 nm VCSEL. The single-mode output power of 2.6 mW, threshold current of 0.6 mA, full width of half maximum lasing spectrum of less than 0.1 nm, side mode suppression ratio of 28.4 dB, and far-field divergence angle of about 10° are obtained. The effects of different hole depths on the optical characteristics are simulated and analysed, including far-field divergence, spectrum and lateral cavity mode. The single-mode performance of this multi-hole device is attributed to the large radiation loss from the inter-hole spacing and the scattering loss at the bottom of the holes, particularly for higher order modes.