共查询到18条相似文献,搜索用时 125 毫秒
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利用近共振激光驻波场操纵中性原子实现纳米量级条纹沉积技术是一种新型的研制纳米结构长度传递标准的方法,采用了一种新颖的方法,通过预准直孔的设定,将原子束在空间分成三部分,利用中间部分的原子束和近共振激光驻波场相互作用,在激光驻波场辐射压力作用下使原子按照特定周期沉积在基板上,从而实现纳米条纹的制作.利用两侧部分的原子束与探测激光束相互作用,通过其感生荧光来监测中间部分原子束沉积过程中的准直效果,从而为原子的沉积过程提供实时的原子束特性监测.最后对纳米沉积条纹在经由三狭缝预准直结构作用前后的效果进行了三维仿真,结果表明,未采用该三狭缝预准直结构时,纳米沉积条纹的半高宽为32nm,对比度为8∶1,而采用该三狭缝预准直结构之后,纳米沉积条纹的半高宽为6.2nm,对比度为28∶1,大大提高了纳米沉积条纹的质量. 相似文献
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基于半经典理论,建立了中性原子与激光驻波场相互作用的模型,分析了中性原子在激光驻波场沟道效应作用下运动轨迹及沉积特性,探讨了球差、色差和原子束发散角对沉积条纹的影响. 得到了上述三种影响因素下纳米光栅的半高宽分别为0.532,12.16,96.70 nm. 仿真结果表明,随着原子束发散角度的增加,沉积条纹的对比度将会下降,当原子束发散角分别为0.1 mard时,其对比度为85.2:1,发散角为0.3 mrad时,条纹对比度为5.33:1,而当发散角增加至0.5 mrad以上时,沉积条纹将会出现分裂现象,导致条纹的恶化.
关键词:
激光驻波场
纳米光栅
沟道效应 相似文献
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利用近共振激光驻波场操纵中性原子实现纳米级条纹沉积技术是一种新型的研制纳米结构长度标准传递的方法.分析了Cr原子在椭圆型激光驻波场作用下的沉积特性,分别对不同椭圆激光驻波场功率下Cr原子的沉积条纹及不同y平面上沉积条纹特性进行了模拟和分析.同时针对椭圆激光驻波场作用下Cr原子发散角对沉积条纹特性的影响进行了模拟计算,比较了不同发散角条件下沉积条纹的对比度和半高宽.
关键词:
原子光刻
椭圆激光驻波场
Cr原子 相似文献
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采用量子模型对近共振激光驻波原子透镜会聚Cr原子束、形成纳米量级光栅结构的物理过程进行数值模拟。为提高原子透镜的成像质量,对各种像差,如衍射像差、球差、色差、及原子束发散角、原子磁支能级、原子同位素等因素引起的像差进行了理论分析。模拟结果表明,相比粒子光学模型,量子模型能更加精确地描述原子会聚结果,且能解释原子在驻波光场中的衍射现象。在各种像差中,原子束发散角是最主要的因素,其影响大于衍射像差、球差、色差。原子的磁支能级、同位素等因素对像差影响很小,可以忽略不计。激光冷却准直原子束的方法可以减小束发散角引起的像差,压缩原子速度Vz分布范围的方法可以减小色差。 相似文献
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利用近共振激光驻波场操纵中性原子实现纳米光栅的沉积是一种新型的研制纳米结构方法,处于激光驻波场中的原子运动速度特性对最终纳米光栅的沉积特性有着重要的影响.利用半经典理论,基于4阶Runge-Kutta算法进行了不同铬原子纵向和横向运动速度条件下纳米光栅结构沉积的仿真研究.研究表明,铬原子纵向速度为最大概率速度960 m/s时,所形成的纳米光栅的半高宽为1.49 nm,对比度为62.1 ∶1,当铬原子的纵向速度为半最大概率速度480 m/s时,纳米光栅的半高宽为5.35 nm,对比度下降为25.6 ∶1.同
关键词:
原子光刻
纳米计量
激光驻波场
纳米光栅结构 相似文献
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利用激光驻波场会聚原子沉积纳米结构的技术可以用来研制纳米结构长度传递标准.当激光驻波场的频率大于原子的共振频率时,原子由于受到偶极力的作用将被会聚到驻波的波节处.采用了一种新的技术方案减小了实验对大的激光功率的要求.利用激光驻波场会聚准直性较好的Cr原子,并使其沉积在硅基片上形成纳米光栅结构.经原子力显微镜测试表明纳米光栅的周期为215 nm.
关键词:
激光偶极力
纳米计量
原子沉积
蓝失谐 相似文献
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研究了在厚透镜近似下 ,原子在激光驻波场中的动力学行为 .通过直接演化一维薛定谔方程 ,发现当激光的强度较大时 ,原子束将会聚焦形成几个焦点 .如果激光的强度更大 ,驻波场中的原子将会出现一种“隧道”现象 ,此时 ,原子受一些实验参数 (如焦平面位置、激光强度等 )的影响程度将大大降低 .这种现象有利于提高原子在驻波场中聚焦沉积的效果 . The dynamics of atoms in laser standing wave (SW) in the regime of over-focused immersion-lens is studied. Through directly evolving a one-dimensional Schrdinger equation, we find that multiple focusing appears when laser intensity is larger than that required for simple focusing. If laser intensity is much higher than that for the single focusing, a "channeling" phenomenon appears, which is insensitive to the variation of some parameters, such as focal plane position and laser intensity... 相似文献
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We study the focusing properties of a double-ring-shaped azimuthally polarized beam through an annular high NA objective lens. It is shown that a subwavelength focal hole (~0.5λ) with a quite long depth of focus (~26λ) is achieved near the focus. This kind of nondiffracting focal hole is called dark channel, which may have applications in atom optical experiments, such as with atomic lenses, atom traps, and atom switches. 相似文献
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We theoretically investigate three-dimensional(3D) focusing of pulsed molecular beam using a series of hexapoles with different orientations. Transversely oriented hexapoles provide both the transverse and longitudinal focusing force and a longitudinally oriented one provides only the transverse force. The hexapole focusing position are designed to realize the simultaneous focusing in three directions. The additional longitudinal focusing compared with the conventional hexapole can suppress the effect of chromatic aberration induced by the molecular longitudinal velocity spread, thus improving the state-selection purity as well as the beam density. Performance comparison of state selection between this 3D focusing hexapole and a conventional one is made using numerical trajectory simulations, choosing CHF_3 molecules as a tester. It is confirmed that our proposal can improve the state-selection purity from 68.2% to 96.1% and the beam density by a factor of 2.3. 相似文献
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We present results of model calculations concerning the fraction of excited atoms obtained by laser irradiation of a fast sodium atom beam (100–400 eV kinetic energy). We calculated relative absorption probabilities as a function of the intersection angle between the two beams, the atom-beam energy, the atom-beam energy spread and the atom-beam divergence. The fraction of excited atoms that can be obtained at 300 eV is at least a factor of 5 smaller than in the case of a thermal beam, due to the divergence and energy spread of the fast atom beam giving rise to a large Doppler broadening. 相似文献
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采用粒子模拟(PIC)方法模拟了强流电子束在薄磁透镜中的聚焦。建立了强流电子束的聚焦模型,模拟了神龙一号加速器某次实验的结果,得到的模拟结果非常接近实验值,证明采用建立的PIC模型模拟强流束经过磁透镜时的聚焦是可信的。应用此模型模拟了电子束参数(入射半径、发射度、能散度、相位角等)对焦斑直径的影响, 结果表明:在模拟条件下,电子束平行入射时最佳束包络半径位于20.0~22.5 mm;发射度和能散度对焦斑直径的影响和理论公式吻合得较好;只有入射电子束包络半径和相位角匹配时才能得到小的焦斑直径。 相似文献
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光束束宽对自散焦介质中诱导光束聚焦的影响 总被引:1,自引:1,他引:0
影响自散焦介质中诱导光束聚焦过程的方程参量和初始条件共有5个,即两光束波长比(方程参量)、抽运光和信号光的初始振幅、两光束初始束宽比和两光束中心初始间距。通过数值计算讨论了初始束宽比在不同初始光束间距和波长比情况下对信号光聚焦过程的影响,得到了信号光聚焦效果的最佳初始参量条件。从而实现了对影响自散焦介质中诱导光束聚焦过程5个参量的完整详细研究。 相似文献
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Tight Focusing Properties of Phase Modulated Radially Polarized Laguerre Bessel Gaussian Beam 下载免费PDF全文
《中国物理快报》2017,(5)
We propose a new approach for generating a multiple focal spot segment of subwavelength size, by tight focusing of a phase modulated radially polarized Laguerre Bessel Gaussian beam. The focusing properties are investigated theoretically by vector diffraction theory. We observe that the focal segment with multiple focal structures is separated with different axial distances and a super long dark channel can be generated by properly tuning the phase of the incident radially polarized Laguerre Bessel Gaussian beam. We presume that such multiple focal patterns and high intense beam may find applications in atom optics, optical manipulations and multiple optical trapping. 相似文献
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We investigate the focusing properties of an azimuthally polarized and amplitude modulated annular multi Gaussian beam by a high numerical aperture (NA) lens based on vector diffraction theory. We observe that our proposed system generates a subwavelength focal hole of 0.46λ having large uniform focal depth of 36λ without any annular obstruction. This kind of nondiffracting focal hole is called dark channel, which may have applications in atom optical experiments, such as with atomic lenses, atom traps, and atom switches. 相似文献