有丢失物缺陷的铜互连线中位寿命的定量研究

本文研究了六层互连线上的丢失物缺陷对互连电迁移中位寿命的影响,提出了各层互连线缺陷处的温度模型和缺陷在不同互连层的中位寿命模型,能够定量地计算缺陷对互连电迁移中位寿命的影响,给出了提高互连线中位寿命的方法.研究结果表明：互连线宽度与缺陷处互连线有效宽度的比值越大,互连线寿命越短;缺陷处的温度越高,互连线寿命越短.在互连线参数变化明显的层与层之间,互连线寿命受比值和温度的双重影响,寿命急剧下降.根据该物理模型可以准确计算出互连线具体的温度和寿命数据,可以直接指导集成电路的设计和工艺制造. 关键词： 丢失物缺陷 中位寿命 可靠性 铜互连     

倒装芯片上金属布线/凸点互连结构中原子的定向扩散

采用倒装芯片互连凸点串联回路研究了高温、高电流密度条件下倒装芯片上金属布线/凸点互连结构中原子的定向扩散现象,分析了互连结构中受电应力和化学势梯度作用的各相金属原子的扩散行为.在电迁移主导作用下,Ni(V)镀层中的Ni原子的快速扩散导致原本较为稳定的Ni(V)扩散阻挡层发生快速的界面反应,造成Al互连金属与焊料的直接接触.Al原子在电子风力作用下沿电子流方向向下迁移造成窗口附近焊料中Al原子含量逐步上升,同时,空位的反向迁移、聚集形成过饱和,导致Al互连中形成大面积空洞.焊料中的Sn,Pb原子在化学势梯度 关键词： 倒装芯片 凸点 电迁移 扩散     

基于微观结构的Cu互连电迁移失效研究

提出了一种基于微观晶粒尺寸分布的Cu互连电迁移失效寿命模型. 结合透射电子显微镜和统计失效分析技术, 研究了Cu互连电迁移失效尺寸缩小和临界长度效应及其物理机制. 研究表明, 当互连线宽度减小, 其平均晶粒尺寸下降并导致互连电迁移寿命降低. 小于临界长度的互连线无法提供足够的空位使得铜晶粒耗尽而发生失效. 当互连长度大于该临界长度时, 在整个电迁移测试时间内, 部分体积较小的阴极端铜晶粒出现耗尽情况. 随着互连长度的增加该失效比例迅速增大, 电迁移失效寿命减小. 当互连长度远大于扩散长度时, 失效时间主要取决于铜晶粒的尺寸, 且失效寿命和比例随晶粒尺寸变化呈现饱和的波动状态. 关键词： Cu 互连 电迁移 微观结构     

金属互连电迁移噪声的相关维数研究

针对金属铝互连中噪声信号随电迁移过程变化规律及其所反映的内部失效机理问题，提出将相关维数用于对电迁移噪声时间序列的分析.通过对互连电迁移噪声实验数据的相关维数计算，发现随着电迁移的进行，金属铝互连噪声由随机性成分占主导变为确定性成分占主导，反映出噪声由随机信号转变为混沌动力学信号.应用散射理论解释上述现象，在金属互连电迁移中，空位扩散阶段噪声主要产生机制是空位随机散射；在空位聚集到空洞成核这一过程中，噪声产生机制逐渐从随机散射转变到弹道混沌腔输运机制为主.通过与传统表征参量的对比，证明相关维数可用于预测金 关键词： 电迁移 噪声 相关维数 混沌     

金属互连电迁移噪声的分形特征

为了研究金属互连电迁移失效机理并寻找新的电迁移表征参量，应用分形理论，通过电子扩散轨迹分形维数，将电迁移噪声时间序列分形维数与晶粒间界分形维数相联系，确定了噪声时间序列分形维数在电迁移演变中的变化趋势.研究结果表明，在金属互连电迁移前期，晶粒间界形貌越来越复杂，致使噪声时间序列的分形维数逐渐增大；成核后，由于空位凝聚成空洞，晶粒间界形貌变得较成核前规则，致使噪声时间序列的分形维数减小；成核时刻是其折点.实验结果证明理论分析的正确性，噪声时间序列的分形维数可望作为金属互连电迁演变的表征参量.     

Al互连线和Cu互连线的显微结构

利用电子背散射衍射(EBSD)技术，测量了由反应离子刻蚀工艺(RIE)制备的Al互连线和大马士革工艺(Damascene)制备的Cu互连线的显微结构，包括晶粒尺寸、晶体学取向和晶界特征.分析了Cu互连线线宽，及Al和Cu互连线退火工艺对互连线显微结构及电徙动失效的影响.     

铜互连电迁移失效阻变特性研究

基于铜互连电迁移失效微观机理分析建立一种Cu／SiCN互连电迁移失效阻变模型，并提出一种由互连阻变曲线特征参数即跳变台阶高度与斜率来获取失效物理参数的提取方法．研究结果表明，铜互连电迁移失效时间由一定电应力条件下互连阴极末端晶粒耗尽时间决定．铜互连电迁移失效一般分为沟槽型和狭缝型两种失效模式．沟槽型空洞失效模式对应的阻变曲线一般包括跳变台阶区和线性区两个特征区域．晶粒尺寸分布与临界空洞长度均符合正态对数分布且分布参数基本一致．阻变曲线线性区斜率与温度呈指数函数关系．利用阻变模型提取获得的电迁移扩散激活能约为0．9eV,与Black方法基本一致．     

集成电路微互连结构中的热迁移

高工作电流在集成电路微互连结构中产生大量焦耳热,引起局部区域的温升、形成高温度梯度,金属原子沿着温度梯度反向运动发生热迁移.热迁移是集成电路微互连失效的主要原因之一.阐述了热迁移原理、失效模式及原子迁移方程.综述和分析了在单纯温度场、电场和温度场耦合等不同载荷条件下金属引线和合金焊料的热迁移研究.归纳并提出了集成电路微互连结构热迁移研究亟待解决的问题. 关键词： 集成电路 微互连 热迁移     

光互连与电互连的并行运算性能比较

光互连在短距离传输中的应用是未来大规模计算领域的关键技术。针对并行运算系统对高速高效传输的应用需求,研究了不同结构和不同传输方式下并行运算系统的性能,并从并行运算性能这一角度比较了光互连系统与电互连系统的优劣。采用网孔结构和超立方结构两种模型,用加速比和效率两个指标来评价光互连系统和电互连系统在并行运算方面的性能差异。得到光互连系统及电互连系统在进行并行计算时的加速比和效率与计算规模之间的关系,分析了计算规模对计算速比和效率的影响。通过加速比和效率这两个量的比较得到结论,在大规模并行计算中,光互连系统有着电互连系统不可比拟的优势。     

基于铅铟合金线的SFQ多芯片超导互连方法研究

用基于铅铟合金线的引线键合(WB)工艺对单磁通量子(SFQ)多芯片的超导互连方法进行了研究,将铅含量75%,铟含量25%的铅铟合金线制备成WB线材,用超声楔形焊工艺成功实现SFQ芯片I/O接口焊盘的超导互连.拉力测试表明室温下铅铟合金线键合强度与同线径金线相当,优于同线径铝线;用开尔文四端法测量了铅铟合金线互连的多级超导转变温度以及线材与超导芯片之间的接触电阻,结果表明该铅铟合金线的超导转变温度为6.63 K,当温度降低至6.63 K或更低时,铅铟合金线的线阻以及线材与SFQ芯片I/O接口焊盘的接触电阻为0,实现了超导互连;并通过热冲击实验验证该WB结构具有优异的热稳定性.     

Improved electromigration failure in Al based interconnects

Electromigration (EM) failure in Al interconnects is significantly improved by inserting a WN film between Al and the interlayer dielectric: over 90% of test samples failed with the Al/TiN/Ti interconnects, whereas the failure rate of the Al film on WN is reduced to less than 13% under the stress con‐ ditions of 9 MA/cm² and 225 °C, and the EM lifetime is also much extended at the same conditions. Experimental results suggest that higher activation energy, no hillocks and compressive stress are responsible for the improved electromigration performance in the Al/WN interconnect. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

超深亚微米器件总剂量辐射效应三维数值模拟

本文分析了浅槽隔离(STI)结构辐射诱导电荷的分布情况,给出一种模拟超深亚微米器件总剂量辐射效应的新方法.研究结果表明,如果在栅附近沿着STI侧墙不加辐照缺陷,仿真出的0.18 μm超深亚微米晶体管亚阈区I-V特性没有反常的隆起,并且能够很好地反映试验结果.在研究总剂量辐照特性改善方面,在剂量不是很大的情况下,采用超陡倒掺杂相对于均匀掺杂能有效地减小辐照所引起的泄漏电流.如果采用峰值(Halo)掺杂,不仅有利于提高超深亚微米器件的抗辐照能力,而且在大剂量的情况下,可以得到明显的效果. 关键词： 总剂量 超陡倒掺杂 Halo掺杂 辐射效应     

Quasinormal modes of a Schwarzschild black hole immersed in an electromagnetic universe

We study the quasinormal modes(QNMs) of a Schwarzschild black hole immersed in an electromagnetic(EM) universe. The immersed Schwarzschild black hole(ISBH) originates from the metric of colliding EM waves with double polarization [Class. Quantum Grav. 12, 3013(1995)]. The perturbation equations of the scalar fields for the ISBH geometry are written in the form of separable equations. We show that these equations can be transformed to the confluent Heun's equations, for which we are able to use known techniques to perform analytical quasinormal(QNM) analysis of the solutions. Furthermore, we employ numerical methods(Mashhoon and 6~(th)-order Wentzel-Kramers-Brillouin(WKB)) to derive the QNMs. The results obtained are discussed and depicted with the appropriate plots.     

超构表面高效调控电磁波

实现自由调控电磁波不仅具有重要的科学研究意义,而且是通讯、能源、国防等领域的迫切需求。为了解决自然材料调控电磁波能力受限的问题,人们提出了人工超构材料这一新概念,实现了负折射、光学隐身等奇异的电磁效应。然而,经过多年的发展,超构材料仍存在结构复杂、损耗偏高、难以集成调谐等挑战。最近,本团队与国际同行一起提出了超构表面的新概念。超构表面基于电磁波在平面微结构上散射时获得的界面相位突变,充分利用人工微结构的"排列序构"这一自由度,实现了对电磁波振幅、相位、偏振及波前分布的有效调控,克服了超构材料遇到的瓶颈问题。本文主要回顾了本团队在偏振调控、波前调控及动态调控等方面开展的创新性研究。     

Self-consistent solutions for single,intense beam polariton with linear polarization

New modes of propagation for a single, intense beam of light have been theoretically studied in the frequency region of giant two photon absorption (GTA) to excitonic molecule (EM) states. Self-consistent solutions for left and right circularly polarized (LCP and RCP respectively) components have been obtained for the polariton dispersion equations which include the ω- and k-dependent self-energy term for exciton due to the GTA process to EM. There are two types of solutions: [I] k(LCP) = k(RCP), [II] k(LCP) ≠ k(RCP). The induced branch for the former has a half of EM mass. There are experimental observations which support the existence of such new propagation modes.     

Electrodynamics of Balanced Charges

We introduce here a new “neoclassical” electromagnetic (EM) theory in which elementary charges are represented by wave functions and individual EM fields to account for their EM interactions. We call so defined charges balanced or “b-charges”. We construct the EM theory of b-charges (BEM) based on a relativistic field Lagrangian and show that: (i) the elementary EM fields satisfy the Maxwell equations; (ii) the Newton equations with the Lorentz forces hold approximately when b-charges are well separated and move with non-relativistic velocities. When the BEM theory is applied to atomic scales it yields a hydrogen atom model with a frequency spectrum matching the Schrodinger model with desired accuracy. An important feature of the theory is a mechanism of elementary EM energy absorption established for retarded potentials.     

Large-amplitude electromagnetic waves in relativistic plasmas

The propagation of linearly polarized large-amplitude electromagnetic waves in relativistic plasmas is studied in the framework of the Akhiezer-Polovin-model. Different forms of the basic equations are reviewed and important solutions are presented for small and critical plasma densities. The well-known periodic solutions are generalized to quasiperiodic solutions taking account of additional electrostatic oscillations.     

Phonon-polariton in two-dimensional piezoelectric phononic crystals

The phonon-polariton behaviors of two-dimensional piezoelectric phononic crystals (PPCs) were studied using the plane wave expansion method. The governing equations combine Maxwell's equations and Newton's equations of motion. A mode-repulsion can be formed by strong coupling between electromagnetic (EM) waves and elastic waves in the vicinity of the center of the first Brillouin zone for PPC that comprises piezoelectric material and with opposite polarization in different periodically organized areas. Take a 2D ZnO PPC as a numerical example, it was decoupled into two independent groups. One refers to the mixed mode of the in-plane elastic waves and the transverse-magnetic (TM) mode EM waves. The other group refers to the mixed mode of the out-of-plane elastic waves and the transverse-electric (TE) mode EM waves. Coupling repulsion is also observed in these two groups.