共查询到17条相似文献,搜索用时 125 毫秒
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为了研究金属互连电迁移失效机理并寻找新的电迁移表征参量,应用分形理论,通过电子扩散轨迹分形维数,将电迁移噪声时间序列分形维数与晶粒间界分形维数相联系,确定了噪声时间序列分形维数在电迁移演变中的变化趋势.研究结果表明,在金属互连电迁移前期,晶粒间界形貌越来越复杂,致使噪声时间序列的分形维数逐渐增大;成核后,由于空位凝聚成空洞,晶粒间界形貌变得较成核前规则,致使噪声时间序列的分形维数减小;成核时刻是其折点.实验结果证明理论分析的正确性,噪声时间序列的分形维数可望作为金属互连电迁演变的表征参量. 相似文献
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由于混沌时间序列和随机过程具有很多类似的性质, 因而在实际中很难将两者区分开来. 混沌信号检测与识别是混沌时间序列分析中一个重要的课题. 混沌信号是由确定性的混沌映射或混沌系统产生的, 相比于高斯白噪声序列, 其在非完整的二维相空间中表现出更加丰富的结构特性. 本文通过研究混沌时间序列和高斯白噪声序列在非完整二维相空间中的分布特性, 利用混沌信号的非线性动力学特性, 提出了一种基于非完整二维相空间分量置换的混沌信号检测方法. 该方法首先由接收序列得到非完整的二维相空间, 基于第一维分量大小关系实现对第二维分量的置换与分组, 进一步求得F检验统计量. 然后利用混沌系统的局部特性, 获取非完整二维相空间的动力学结构信息, 实现对混沌序列的有效检测. 在高斯白噪声条件下对多种混沌信号进行了信号检测的数值仿真. 仿真结果表明: 相比置换熵检测, 本文所提算法所需数据量小、计算简单以及具有更低的时间复杂度, 同时对噪声具有更好的鲁棒性. 相似文献
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将晶核析出的Avrami 方程应用于描述超大规模集成电路中金属Al薄膜互连电迁移过程中电阻的演变. 根据电子散射理论,晶界电阻主要起源于晶界处空位或者空洞对电子的散射. 为了描述这些离子的特征,引入了自由体积的概念,将晶界处电子散射这个复杂的过程简化用自由体积的有效散射截面来描述,从而建立了自由体积与电阻变化的定量关系,统一描述了电迁移过程中不同阶段的电阻变化. 数值模拟结果表明,在第一个空洞成核时刻电阻会发生急剧变化,这一结果已被实验所证实.
关键词:
电迁移
Al互连
电阻变化 相似文献
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提出了一种基于微观晶粒尺寸分布的Cu互连电迁移失效寿命模型. 结合透射电子显微镜和统计失效分析技术, 研究了Cu互连电迁移失效尺寸缩小和临界长度效应及其物理机制. 研究表明, 当互连线宽度减小, 其平均晶粒尺寸下降并导致互连电迁移寿命降低. 小于临界长度的互连线无法提供足够的空位使得铜晶粒耗尽而发生失效. 当互连长度大于该临界长度时, 在整个电迁移测试时间内, 部分体积较小的阴极端铜晶粒出现耗尽情况. 随着互连长度的增加该失效比例迅速增大, 电迁移失效寿命减小. 当互连长度远大于扩散长度时, 失效时间主要取决于铜晶粒的尺寸, 且失效寿命和比例随晶粒尺寸变化呈现饱和的波动状态.
关键词:
Cu 互连
电迁移
微观结构 相似文献
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提出了一种基于扩散-蠕变机制的空洞生长模型, 结合应力模拟计算和聚焦离子束分析技术研究了Cu互连应力诱生空洞失效现象, 探讨了应力诱生空洞的形成机制并分析了空洞生长速率与温度、应力梯度和扩散路径的关系. 研究结果表明, 在Cu M1互连顶端通孔拐角底部处应力和应力梯度达到极大值并观察到空洞出现. 应力梯度是决定空洞成核位置及空洞生长速率的关键因素. 应力迁移是空位在应力梯度作用下沿主导扩散路径进行的空位积聚与成核现象, 应力梯度的作用与扩散作用随温度变化方向相反, 并存在一个中值温度使得应力诱生空洞速率达到极大值.
关键词:
Cu互连
应力迁移
应力诱生空洞
失效 相似文献
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由于实际系统中噪声不可避免,噪声使得同步混沌吸引子A变成具有一定生存时间<τ>的准稳态吸引子A′.以加性噪声作用下的二维耦合映射混沌同步系统为例,给定系统实验时间长 度T,解析发现:仅当<τ>>2T时准稳态同步混沌吸引子的筛形吸引域才可被定性观察到;而 当<τ><2T时则不复存在,此时,根据原无噪声时的筛形吸引域特征的不同,筛形域不仅可 以转变成时变筛形结构,还可以转变成分形结构.同时利用数值模拟作了进一步验证.该结果 对于二维耦合映射混沌同步系统具有普遍意义.
关键词:
混沌同步
筛形吸引域
瞬态混沌
耦合映射
加性噪声 相似文献
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本文采用对数函数序列构造了一个新Chua多涡卷混沌系统,分析了该系统的非线性动力学行为,主要包括对称性、不变性、平衡点、最大李雅普诺夫指数等.然后,设计递归反步控制器控制Chua多涡卷混沌系统中的混沌行为.最后,利用Chua多涡卷混沌系统检测了多频微弱周期信号.结果表明,对数函数序列与新Chua双涡卷混沌系统相结合能够产生丰富的Chua多涡卷混沌吸引子.产生机制为指标2的鞍焦平衡点用于产生涡卷,指标1的鞍焦平衡点用于连接涡卷.递归反步控制器能够将Chua多涡卷混沌系统控制到不动点或给定的正弦函数. Chua多涡卷混沌系统与递归反步控制器相结合的新微弱信号检测方法能够检测出淹没在高斯噪声背景下多频微弱周期信号的各频率. 相似文献
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It is an important problem in chaos theory whether an
observed irregular signal is deterministic chaotic or stochastic. We
propose an efficient method for distinguishing deterministic chaotic
from stochastic time series for short scalar time series. We first
investigate, with the increase of the embedding dimension, the
changing trend of the distance between two points which stay close
in phase space. And then, we obtain the differences between Gaussian
white noise and deterministic chaotic time series underlying this
method. Finally, numerical experiments are presented to testify the
validity and robustness of the method. Simulation results indicate
that our method can distinguish deterministic chaotic from
stochastic time series effectively even when the data are short and
contaminated. 相似文献
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Zhang Y Jiang JJ Wallace SM Zhou L 《The Journal of the Acoustical Society of America》2005,118(4):2551-2560
Nonlinear dynamic methods and perturbation methods are compared in terms of the effects of signal length, sampling rate, and noise. Results of theoretical and experimental studies quantitatively show that measurements representing frequency and amplitude perturbations are not applicable to chaotic signals because of difficulties in pitch tracking and sensitivity to initial state differences. Perturbation analyses are only reliable when applied to nearly periodic voice samples of sufficiently long signal lengths that were obtained at high sampling rates and low noise levels. In contrast, nonlinear dynamic methods, such as correlation dimension, allow the quantification of chaotic time series. Additionally, the correlation dimension method presents a more stable analysis of nearly periodic voice samples for shorter signal lengths, lower sampling rates, and higher noise levels. The correlation dimension method avoids some of the methodological issues associated with perturbation methods, and may potentially improve the ability for real time analysis as well as reduce costs in experimental designs for objectively assessing voice disorders. 相似文献
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Grain boundary plays a key role in electromigration process of polycrystal interconnection. We take a free volume to represent a 'vacancy--ion complex' as a function of grain boundary specific resistivity, and develop a new characterisation model for grain boundary noise. This model reveals the internal relation between the boundary scattering section and electromigration noise. Comparing the simulation result with our experimental result, we find the source as well as the form of noise change in the electromigration process. In order to describe the noise enhancement at grain boundary quantitatively, we propose a new parameter-grain boundary noise enhancement factor, which reflects that the grain boundary noise can characterise the electromigration damage sensitively. 相似文献
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距离无关的高精度混沌激光测距 总被引:2,自引:0,他引:2
研究了利用类噪声混沌激光的相关特性实现目标距离的测定方法.数值分析了混沌激光自相关曲线的半峰全宽和旁瓣水平与表征其混沌状态的最大李雅普诺夫指数及关联维数的关系.同时,模拟研究了波形误差对混沌激光测距的影响,并分析了不同混沌态的波形误差的临界值.结果表明,具有窄半峰全宽和低旁瓣水平的自相关曲线的高维混沌激光序列是理想的测距激光,其测量分辨率可达1.5 cm以下,且波形误差容忍度大,测量范围大.在测量范围内,精度与距离无关. 相似文献
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Chaotic laser radar based on correlation detection is a high-resolution measurement tool for remotely monitoring targets or objects.However,its effective range is often limited by the side-lobe noise of correlation trace,which is always increased by the randomness of the chaotic signal itself and other transmission channel noises or interferences.The experimental result indicates that the wavelet denoising method can recover the real chaotic lidar signal in strong period noise disturbance,and a signal-to-noise ratio of about 8 dB is increased.Moreover,the correlation average discrete-component elimination algorithm significantly suppresses the side-lobe noise of the correlation trace when 20 dB of chaotic noise is embedded into the chaotic probe signal.Both methods have advantages and disadvantages. 相似文献
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Detecting nonlinearity of action surface EMG signal 总被引:8,自引:0,他引:8
The action surface EMG (ASEMG) signal contains the electrical properties of limb muscle contraction that undergo many complex transitions in limb different movement states; however, because of the small data nature of this kind signal, it is not clear whether its essence is stochastic or deterministic nonlinear (even chaotic). In this Letter, we show for the first time that ASEMG has deterministic nonlinear character by using the surrogate data method. Furthermore, we study the nonlinear dynamic features of ASEMG by computing its correlation dimension and applying correlation dimension as test statistics. These results indicate that ASEMG is a high-dimension nonlinear signal (even chaotic). In addition, this Letter improves the surrogate data method based on Fourier transform (FT) algorithm to avoid limitations of the previous FT algorithm. 相似文献