a-Si∶O∶H薄膜微结构及其高温退火行为研究

以微区Raman散射、X射线光电子能谱和红外吸收对等离子体增强化学气相沉积(PECVD)法制备的氢化非晶硅氧(a-Si∶O∶H)薄膜微结构及其退火行为进行了细致研究.结果表明a-Si∶O∶H薄膜具有明显的相分离结构,富Si相镶嵌于富O相之中,其中富Si相为非氢化四面体结构形式的非晶硅(a-Si),富O相为Si,O,H三种原子随机键合形成的SiO_x∶H(x≈1.35).经1150℃高温退火,薄膜中的H全部释出;SiO_x∶H(x≈1.35)介质在析出部分Si原子的同     

高温退火处理下SiNx薄膜组成及键合结构变化

采用等离子增强化学气相沉积法, 以氨气和硅烷为反应气体, p型单晶硅为衬底, 低温下(200 ℃)制备了非化学计量比氮化硅(SiN_x)薄膜. 在N₂氛围中, 于500–1100 ℃范围内对薄膜进行热退火处理. 室温下分别使用Fourier变换红外吸收(FTIR)光谱技术和X射线光电子能谱(XPS)技术测量未退火以及退火处理后SiN_x薄膜的Si–N, Si–H, N–H键键合结构和Si 2p, N 1s电子结合能以及薄膜内N和Si原子含量比值R的变化. 详细讨论了不同温度退火处理下SiN_x薄膜的FTIR和XPS光谱演化同薄膜内Si, N, H原子间键合方式变化之间的关系. 通过分析FTIR和XPS光谱发现退火温度低于800 ℃时, SiN_x薄膜内Si–H和N–H键断裂后主要形成Si–N键; 当退火温度高于800 ℃时薄膜内Si–H和N–H键断裂利于N元素逸出和Si纳米粒子的形成; 当退火温度达到1100 ℃时N₂与SiN_x薄膜产生化学反应导致薄膜内N和Si原子含量比值R增加. 这些结果有助于控制高温下SiN_x薄膜可能产生的化学反应和优化SiN_x薄膜内的Si纳米粒子制备参数. 关键词： x薄膜')" href="#">SiN_x薄膜 Fourier变换红外吸收光谱 X射线光电子能谱 键合结构     

氧、硼、磷掺杂对氢化非晶硅中铒1.54μm发光的作用

利用等离子体增强化学气相淀积(PECVD)技术生长氧、硼、磷掺杂的氢化非晶硅薄膜.在室温下注入铒离子后研究三种掺杂元素对铒离子发光的作用.室温下观察到很强的光致发光现象.氧的引入并且和铒离子形成发光中心,提高了铒离子的发光强度.退火实验表明氧、硼、磷的掺杂补偿了材料中的缺陷,提高了氢的逃逸温度,改善材料的热稳定性,使材料的退火温度因掺杂元素的加入而提高,铒的发光得到增强.讨论了铒离子的发光机制.     

掺铒Si/Al2O3多层结构中结晶形态对1.54 μm发光的影响

利用脉冲激光沉积的方法制备掺铒 Si/Al₂O₃多层结构薄膜,获得了由纳米结构的Si作为感光剂增强的Er³⁺在1.54 μm高效发光.利用拉曼散射、高分辨透射电镜和光致发光测量研究了在不同退火温度下（600—1000 ℃）纳米结构Si层的结晶形态变化,及对Er³⁺在1.54 μm的发光的影响特征.研究发现最佳发光是在退火温度600—700 ℃.在这个条件下纳米Si的尺寸和密度,Si和Er的作用距离以及Er^{3+ 关键词： 铒 纳米硅 能量转移 氧化铝}     

掺铒纳米晶硅和掺铒非晶纳米硅薄膜的发光性质

采用等离子体增强化学气相沉积（PECVD）方法制备含有纳米晶硅的SiO2（NCSO）和含有非晶纳米硅颗粒的氢化非晶氧化硅（a—SiOx：H）薄膜。采用离子注入和高温退火方法将稀土Er掺入含有纳米晶硅（ncSi）和非晶纳米硅（a—n—Si）颗粒的基体中。利用IFS／20HR傅里叶变换红外光谱仪和微区拉曼散射光谱仪研究含有纳米晶硅和非晶纳米硅颗粒的薄膜掺稀土前后的发光特性。结果表明来自Be-Si在800nm的发光强度比来自a—SiOx：H基体中非晶纳米硅的发光强度高近一个数量级,而来自a-SiOx：H在1．54μm的发光强度比NCSO高4倍。还研究了掺铒a-SiOx：H薄膜中Si颗粒和Er^3＋的发光强度随退火温度的变化,结合掺铒纳米晶硅和非晶纳米硅薄膜发光强度随Er掺杂浓度变化和Raman散射等的测量结果,进一步明确指出a-Si颗粒在Er^3＋的激发中可以起到和nc-Si同样的作用,即作为光吸收介质和敏化剂的作用。     

Er∶YbF3转光薄膜的制备及衬底温度对其光学性能的影响

采用脉冲激光沉积(PLD)方法在Si(100)衬底上成功制备了具有上下转换的Er∶YbF₃转光薄膜。研究发现,所制备的Er∶YbF₃转光薄膜实现了上下转换两种机制的结合,能有效地把紫外光和红外光转换到非晶硅太阳能电池最佳响应范围内的656 nm处。进一步分析了衬底温度对薄膜相结构及光学性能影响的物理机制。当衬底温度高于500 ℃时,薄膜会随着温度的升高而结晶性变强,但有杂相生成。研究结果表明,Er∶YbF₃转光薄膜的光学性能在衬底温度为500 ℃时最佳,有望应用到非晶硅太阳能电池上使其光电效率提高。     

退火对Ge诱导晶化多晶Si薄膜结晶特性的影响

本文采用磁控溅射法, 衬底温度500 ℃下在硅衬底上分别制备具有Ge填埋层的a-Si/Ge 薄膜和a-Si薄膜, 并进行后续退火, 采用Raman光谱、X射线衍射、原子力显微镜及场发射扫描电镜等对所制薄膜样品进行结构表征. 结果表明, Ge有诱导非晶硅晶化的作用, 并得出以下重要结论: 衬底温度为500 ℃时生长的a-Si/Ge薄膜, 经600 ℃退火5 h Ge诱导非晶硅薄膜的晶化率为44%, 在相同的退火时间下退火温度提高到700 ℃, 晶化率达54%. 相同条件下, 无Ge填埋层的a-Si薄膜经800 ℃退火5 h薄膜实现晶化, 晶化率为46%. 通过Ge填埋层诱导晶化可使在相同的条件下生长的非晶硅晶薄膜的晶化温度降低约200 ℃. Ge诱导晶化多晶Si薄膜在Si(200)方向具有高度择优取向, 且在此方向对应的晶粒尺寸约为76 nm. 通过Ge诱导晶化制备多晶Si薄膜有望成为制备高质量多晶Si薄膜的一条有效途径.     

退火温度对Er/Yb共掺Al2O3薄膜的光致荧光光谱的影响

通过对不同退火条件下Er/Yb共掺Al_２O_３薄膜光致荧光(PL)光谱的 系统分析，研究了高Er/Yb掺杂浓度所导致的晶体场变化对薄膜PL光谱的影响，并结合薄膜结构分析，探讨了Al_２O_３薄膜的结晶状态在Er^３＋激活、PL光谱宽化 中的作用及可能的物理机理.研 究结果表明：退火处理所导致的Er^３＋ PL光谱的变化与薄膜的微观状态之 间有着密 切的联系.在600—750℃范围内，薄膜呈非晶态结构，薄膜荧光强度的增加主要是薄膜内缺 陷减少所致；在800—900℃范围内，γ-Al_２O_３相的出现是导致荧 光强度明显增加的主 要原因；当退火温度为1000℃时，Er，Yb的大量析出致使荧光强度的急剧下降.此外，对PL 光谱线形分析表明，各子能级跃迁的相对强度变化是导致荧光光谱宽化的主要因素. 关键词： Er/Yb共掺 ２O_３薄膜')" href="#">Al_２O_３薄膜 光致荧光     

掺铒氢化非晶氧化硅1.54μm发光性质的研究

采用等离子体增强化学汽相沉积技术生长不同氧含量的氢化非晶氧化硅薄膜(a-SiOx:H),离子注入铒及退火后在室温观察到很强的光致发光.当材料中氧硅含量比约为1和1.76时,分别对应77K和室温测量时最强的1.54μm光致发光.从15到250K的变温实验显示出三个不同的强度与温度变化关系,表明氢化非晶氧化硅中铒离子的能量激发和发光是一个复杂的过程.提出氢化非晶氧化硅薄膜中发光铒离子来自于富氧区,并对实验现象进行了解释.氢化非晶氧化硅中铒发光的温度淬灭效应很弱.从15到250K,光致发光强度减弱约1/2.     

掺饵氢化非晶氧化硅1.54μm发光性质的研究

采用等离子体增强化学汽相沉积技术生长不同氧含量的氢化非晶氧化硅薄膜(a-SiO_{x∶H),离子注入铒及退火后在室温观察到很强的光致发光.当材料中氧硅含量比约为1和 1.76时,分别对应77Ｋ和室温测量时最强的1.54μm光致发光.从15到250Ｋ的变温实验显示 出三个不同的强度与温度变化关系,表明氢化非晶氧化硅中铒离子的能量激发和发光是一个 复杂的过程.提出氢化非晶氧化硅薄膜中发光铒离子来自于富氧区,并对实验现象进行了解 释.氢化非晶氧化硅中铒发光的温度淬灭效应很弱.从15到250Ｋ,光致发光强度减弱约1/2. 关键词： 铒 光致发光 氧含量}     

Structure and photoluminescence properties of Er3+-doped TiO2-SiO2 powders prepared by sol-gel method

Er 3+-doped TiO 2-SiO 2 powders are prepared by the sol-gel method,and they are characterized by high resolution transmission electron microscopy (HR-TEM),X-ray diffraction (XRD) spectra,and Raman spectra of the samples.It is shown that the TiO 2 nanocrystals are surrounded by an SiO 2 glass matrix.The photoluminescence (PL) spectra are recorded at room temperature.A strong green luminescence and less intense red emission are observed in the samples when they are excited at 325 nm.The intensity of the emission,which is related to the defect states,is strongest at the annealing temperature of 800 C.The PL intensity of Er 3+ ions increases with increasing Ti/Si ratio due to energy transfer between nano-TiO 2 particles and Er 3+ ions.     

Excitation of Er atoms by energy transfer from Si nanocrystallites embedded in SiO2 matrices fabricated by laser ablation

We have investigated excitation of Er³⁺ ions via energy transfer from Si nanocrystallites embedded in SiO₂ films. The Er-doped films were fabricated using a laser ablation technique. We found that a photoluminescence (PL) excitation spectra of Er³⁺ ions coincides with that of Si nanocrystallites. Thus, it is evident that Er³⁺ ions are excited via the luminescent singlet state in Si nanocrystallites. Furthermore, we obtained the results that support the energy transfer mechanism. PL intensity of Er³⁺ ions increases with Er concentration while that of Si nanocrystallites decrease inversely. PL intensity of Er³⁺ ions increases with temperature from cryogenic to room temperature under photo-excitation at power density higher than 110 mW/cm². The increase is characteristic of the luminescent state in Si nanocrystallites but not any state in Er³⁺ ions. PACS 61.72.Ww; 61.46.+w; 81.15Fg     

Role of Bi ions for Er ions efficient 1.54 μm light emission in Er/Bi codoped SiO2 thin film prepared by sol-gel method

Er/Bi codoped SiO₂ thin films were prepared by sol-gel method and spin-on technology with subsequent annealing process. The bismuth silicate crystal phase appeared at low annealing temperature while vanished as annealing temperature exceeded 1000 °C, characterized by X-ray diffraction, and Rutherford backscattering measurements well explained the structure change of the films, which was due to the decrease of bismuth concentration. Fine structures of the Er³⁺-related 1.54 μm light emission (line width less than 7 nm) at room temperature was observed by photoluminescence (PL) measurement. The PL intensity at 1.54 μm reached maximum at 800 °C and decreased dramatically at 1000 °C. The PL dependent annealing temperature was studied and suggested a clear link with bismuth silicate phase. Excitation spectrum measurements further reveal the role of Bi³⁺ ions for Er³⁺ ions near infrared light emission. Through sol-gel method and thermal treatment, Bi³⁺ ions can provide a perfect environment for Er³⁺ ion light emission by forming Er-Bi-Si-O complex. Furthermore, energy transfer from Bi³⁺ ions to Er³⁺ ions is evidenced and found to be a more efficient way for Er³⁺ ions near infrared emission. This makes the Bi³⁺ ions doped material a promising application for future erbium-doped waveguide amplifier and infrared LED.     

Long lifetime and efficient emission from Er ions coupled to Si nanoclusters in Si-rich SiO2 layers

Reactive magnetron co-sputtering of two confocal SiO₂ and Er₂O₃ cathodes in argon-hydrogen plasma was used to deposit Er-doped Si-rich SiO₂ layers. The effects of the deposition conditions (such as RF power applied on each cathode and total plasma pressure) and annealing treatment (temperature and duration) on structural, compositional and photoluminescence (PL) properties of the layers were examined. It was found that a significant enhancement of both Er³⁺ PL intensity and emission lifetime up to 9 ms have been reached through monitoring of the conditions of both deposition process and annealing treatment. The effective absorption cross section and the fraction of Er ions coupled to Si clusters were analyzed. It was shown an increase of the fraction of Er³⁺ ions coupled to Si up to 11%.     

Structural modification of synthetic opals during thermal treatment

The density and porosity of synthetic opals with spheres 315 and 1000 nm in diameter were measured in relation to the annealing temperature. At annealing temperatures of up to 500°C, the seeming density and porosity remain almost unchanged. Then, at temperatures of up to 950°C, the density increases gradually and, accordingly, the porosity decreases due to the collapse of nanopores caused by the sphere substructure. As the annealing temperature increases further, the opal density increases sharply up to 2.22 g/cm³ (which corresponds to the density of amorphous silica) and the open microporosity due to the voids between spheres disappears. Differential thermal and thermogravimetric analyses showed that SiO₂ powders with particles with average size of 315 and 1000 nm can have, respectively, two-and three-level systems of micro-and nanopores.     

溶胶-凝胶法Er2O3薄膜的结构和光学特性

针对稀土Er掺杂Si光源中Er离子掺杂浓度低的问题,采用溶胶-凝胶（Sol-gel）法在Si(100)和SiO2/Si(100)基片上旋涂法制备Er₂O₃光学薄膜,Er离子浓度与以前掺杂方法相比提高了2个数量级.900 ℃热处理获得单一立方结构的Er₂O₃薄膜材料.光致发光（PL）特性研究表明在654 nm波长的激光泵浦下,Er₂O₃薄膜材料获得了1.535 μm的发光峰,并具有较小的温度猝灭1/5.在SiO₂/Si(100)基体上制备的Er2O3薄膜材料的光致发光强度比Si(100)基体上制备的薄膜提高2-3倍.研究结果表明具有强光致发光特性的Er₂O₃薄膜是一种有前景的硅基光源和放大器材料.     

Enhanced emission of Er from alternately Er doped Si-rich Al2O3 multilayer film with Si nanocrystals as broadband sensitizers

Alternately Er doped Si-rich Al₂O₃ (Er:SRA) multilayer film, consisting of alternate Er-Si-codoped Al₂O₃ (Er:Si:Al₂O₃) and Si-doped Al₂O₃ (Si:Al₂O₃) sublayers, has been synthesized by co-sputtering from separated Er, Si, and Al₂O₃ targets. The dependence of Er³⁺ related photoluminescence (PL) properties on annealing temperatures over 700-1100 °C was studied. The maximum intensity of Er³⁺ PL, about 10 times higher than that of the monolayer film, was obtained from the multilayer film annealed at 950 °C. The enhancement of Er³⁺ PL intensity is attributed to the energy transfer from the silicon nanocrystals in the Si:Al₂O₃ sublayers to the neighboring Er³⁺ ions in the Er:Si:Al₂O₃ sublayers. The PL intensity exhibits a nonmonotonic temperature dependence: with increasing temperature, the integrated intensity almost remains constant from 14 to 50 K, then reaches maximum at 225 K, and slightly increases again at higher temperatures. Meanwhile, the PL integrated intensity at room temperature is about 30% higher than that at 14 K.     

Er3+掺杂SiO2复合的Al2O3粉末结构及光致发光特性

采用溶胶-凝胶(sol-gel)工艺制备0.1 mol% Er³⁺掺杂Al₂O₃体系和SiO₂-Al₂O₃复合体系粉末. 实验结果表明：5 mol%的SiO₂复合加入Al₂O₃抑制γ→θ和θ→α相转变. 掺0.1 mol%Er³⁺:Al₂O₃体系粉末，900℃烧结，在1.47—1.63μm波段内光致发光(PL)谱为中心波长1.53 μm、半高宽56 nm的单一宽峰，1000—1200℃烧结，劈裂为多峰PL谱. 掺0.1 mol%Er³⁺:SiO₂-Al₂O₃复合体系粉末，在高达1200℃烧结，仍保持中心波长1.53 μm的单一宽峰PL谱，由于—OH更完全的脱除，PL强度较900℃烧结Al₂O₃体系，SiO₂-Al₂O₃复合体系均提高1个数量级. 关键词： 2-Al₂O₃复合体系')" href="#">SiO₂-Al₂O₃复合体系 掺铒 溶胶-凝胶工艺 光致发光     

Er3+/Ce3+共掺TeO2-Bi2O3-TiO2玻璃的热稳定性和光谱特性研究

用高温熔融法制备了Er³⁺/Ce³⁺共掺新型碲酸盐玻璃(TeO₂-Bi₂O₃-TiO₂).采用差热分析方法研究了玻璃的热稳定性,测试并分析了不同Ce³⁺离子掺杂浓度下Er³⁺离子的吸收光谱、上转换光谱和荧光光谱特性.研究结果表明,制备的碲酸盐玻璃具有很好的热稳定性,玻璃析晶温度Tx与玻璃转变温度Tg之差(ΔT=Tx-Tg)达到了185 ℃,高于其它文献的报道|同时,Ce3+离子共掺引入的能量转移(Ce³⁺∶2F5/2+Er³⁺∶4I11/2→Ce³⁺∶2F7/2+Er³⁺∶4I13/2)有效地抑制了Er³⁺离子上转换发光并显著增强了1.53 μm波段荧光强度,而发射截面随着Ce³⁺离子掺杂浓度相应增大.优异的热稳定性以及光谱性能揭示Er³⁺/Ce³⁺共掺碲酸盐玻璃是一种潜在的制备宽带掺铒光纤放大器的理想增益介质.