缓冲层对导模共振滤光片反射光谱截止特性的影响

提出将均质多层膜系设计中的缓冲层概念71入到反射导模共振(GMR)滤光片的设计中,通过严格的耦合波理论精确计算,研究了加入缓冲层对改善导模共振滤光片反射峰边带截止深度及截止宽度的作用.双层导模共振滤光片结构中,入射光为TE偏振光时,设计增加97.5 nm缓冲层后,能够明显地展宽反射光谱范围.由原来的192.4 nm展宽到345.6 nm,并且在650～1250 nm波长范围内的边带截止度均比不含缓冲层结构的要深.入射光为TM偏振光,以类似TE结构的滤光片在布儒斯特角入射时,在700~1300 nm波长范围内,较不含缓冲层的结构,也能够获得更宽的截止带反射光谱和更深的截止度.在提出的膜系结构中,经过优化膜系、选择合适的光栅参数等,可以使反射光谱具有更好的截止特性,同时保证设计的共振峰位置不变.     

基于导模共振效应三基色窄带滤光片的研究

为获得性能优良的三基色窄带滤光片,提出了一种基于减反射薄膜波导光栅结构的导模共振滤光片.该滤光片由亚波长光栅结构、波导层和基底组成.采用严格耦合波理论分析了亚波长光栅结构和波导层厚度对导模共振滤光片反射光谱性能的影响.数值分析表明λ/4-λ/2-λ/4结构能有效提高导模共振滤光片的性能.当光栅结构位于基底侧时,红绿蓝三...     

薄膜波导光栅滤光片反射特性研究

根据将减反射薄膜结构引入波导光栅滤光片中可以较好地抑制反射旁通带的理论,设计了单层、三层薄膜结构的波导光栅滤光片,旨在运用尽可能少的膜层数,在宽光谱范围内得到窄的反射带和高反射峰.运用严格的耦合波理论,对所设计的薄膜波导光栅滤光片的各种可能光栅结构进行了精确计算,得到反射率分布良好的特性曲线,并对计算结果进行分析,同时,还得到一种操作上较易于实现、在宽光谱范围内具有良好反射特性的三层膜光栅结构.     

二维亚波长金属光栅多波长透射滤光片EI北大核心CSCD

为实现阵列化、多波长光探测器件的微型化与集成化,设计了一种基于亚波长金属光栅导模共振原理的透射滤光片。利用波导理论分析了二维金属光栅波导对称和非对称两种结构的共振特性,数值仿真分析了光栅各参数如占空比、光栅厚度、侧壁角度等对透射谱线的影响,并给出了结构优化参数范围。研究表明,透射滤光片的峰值波长与半峰全宽（带宽）取决于光栅周期和缓冲层厚度,带宽的调节范围为2~45 nm,最大透射率为81.7%,所设计的滤光片具有偏振无关性,较好地满足了当前微流控芯片、生物传感阵列等微量样品集成化探测的需求。     

基于亚波长二维光栅的入射角不敏感颜色滤光片研究

提出了一种基于二维亚波长光栅的具有非偏振光入射下入射角不敏感特性的反射式颜色滤光片. 采用严格耦合波分析方法详细分析了光栅周期、光栅层厚度以及固定光栅占空比下光栅的结构尺寸对反射率峰值、反射带位置及带宽的影响. 结合入射角不敏感特性, 经过优化设计得到了光栅的最终结构参数, 获得了中心波长424 nm, 峰值反射率56%, 带宽45 nm的反射滤光片.模拟结果表明, 在非偏振光入射下, 此滤光片的反射光谱表现出显著的入射角不敏感特性. 当入射角高达60°时反射带的中心波长偏移6 nm 反射率下降6%带宽增加8 nm 其参数没有较大变化通过调整光栅的结构参数可在400–520 nm范围内调节滤光片的中心波长以获得不同颜色的入射角不敏感滤光片. 关键词： 反射式滤光片 二维亚波长光栅 入射角不敏感 严格耦合波分析     

亚波长介质光栅导模共振研究

从平板波导的本征值方程出发,导出弱调制介质光栅共振位置的表达式,其预测结果与利用严格的耦合波理论所得值一致.对正入射时导模共振产生双反射峰现象进行解释,并就导模共振对入射角和光栅周期敏感性的成因进行了探讨.从薄膜的特征矩阵方程出发,在理论上分析了利用导模共振获得性能良好的反射滤光片的途径.     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率，低旁带反射，窄带以及带宽可控等优良特性引起了人们极大的关注，采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能，在弱调制模式下，其共振带宽可以被压缩到零点几纳米，但是由于介质表面和空气层的菲涅耳反射，使得偏离或者远离共振区时的反射率偏高，根据等效介质理论，亚波长光栅在远离共振区可以被看为均匀的薄膜，本文通过对导模共振光栅进行单层、双层以及三层抗反射设计，有效的降低了导模共振光栅的旁带反射率，从而在可见光波段获得了性能优良的共振滤波     

介质光栅导模共振耦合波分析

导模共振是由于光栅介质内高级次子波耦合进光栅所支持的泄漏模中,导致传播波能量重新分布的结果.采用严格的耦合波方法,通过分析波导的导波模式,正确估计出弱调制介质光栅导模共振的位置.并对导模共振与光栅厚度、基底厚度以及入射角的关系作了讨论.通过采用抗反射设计,获得了具有对称、低旁带特点的窄带共振峰 关键词： 导模共振 耦合波     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率,低旁带反射,窄带以及带宽可控等优良特性引起了人们极大的关注,采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能,在弱调制模式下,其共振带宽可以被压缩到零点几纳米,但是由于介质表面和空气层的菲涅耳反射,使得偏离或者远离共振区时的反射率偏高,根据等效介质理论,亚波长光栅在远离共振区可以被看为均匀的薄膜,本文通过对导模共振光栅进行单层、双层以及三层抗反射设计,有效的降低了导模共振光栅的旁带反射率,从而在可见光波段获得了性能优良的共振滤波 关键词： 导模共振 平面波导 傅里叶模式理论 窄带滤波     

基于导模共振的窄带可调谐滤波器

提出了一种分离的导模共振滤波器.该结构由光栅层和两个被空气薄层隔开的平板介质波导组成.使用时域有限差分法分析了该光栅结构在不同的结构参数下的光谱特性.研究表明,当TM偏振入射时改变空气薄层的厚度可以实现共振波长的可调谐,并且共振波长几乎随着空气薄层厚度线性变化.浅调制光栅被用于实现窄线宽特性.波长可调谐范围为1 515~1 558nm,半高全宽小于0.6nm.     

Authentication labels based on guided-mode resonant filters

A guided-mode resonance (GMR) filter with wide angular tolerances is experimentally demonstrated as an authentication label illuminated with unpolarized white light. The proposed filter, based on a free-standing silicon nitride membrane suspended on a silicon substrate, is fabricated by using anisotropic wet etching to remove the substrate beneath the silicon nitride layer. Both grating and waveguide structures without a lower cladding layer, i.e., a substrate, are fabricated simultaneously on a silicon nitride membrane. Since the silicon nitride is transparent within the spectra of visible and infrared light, such suspended-membrane-type GMR filters are well suited for applications within the visible spectrum. Moreover, the high refractive index of silicon nitride allows the proposed filters to have strongly modulated gratings and an immunity to high angular deviation. The measured reflection resonance has an angular tolerance up to +/-5 degrees under normal incidence for the wavelength of 629.5 nm.     

Particle swarm optimization and its application to the design of diffraction grating filters

Particle swarm optimization (PSO) is an evolutionary, easy-to-implement technique to design optical diffraction gratings. Design of reflection and transmission guided-mode resonance (GMR) grating filters using PSO is reported. The spectra of the designed filters are in good agreement with the design targets in a reasonable computation time. Also, filters are designed with a genetic algorithm (GA) and the results obtained by the GA and PSO are compared.     

Design of single-material guided-mode resonance filter

In this letter, a guided-mode resonance （GMR） filter with the same material for both the grating layer and the waveguide layer is designed, and its optical properties are investigated. The GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum （FWHM） of 20 nm, and its sideband reflection from 700 to 1000 nm is less than 5%. As the resonance wavelength is influenced by more than one parameter during the fabrication process, GMR filter with the same resonance wavelength can be obtained by adjusting other parameters or even one parameter to deviate from the design value.     

Transmission guided-mode resonance filters based on high reflection multilayer stacks

The transmission guided-mode resonance filters are implemented by integration of diffraction grating into classical thin films to produce high efficiency in the central wavelength and arbitrarily low sideband response over a quite large spectral range. Transmission guided-mode resonance filters require considerable fewer thin films to acquire narrow line width and high peak transmission in the central wavelength compared with classical multilayer high-reflectance coatings with a stack of quarter-wave thickness. The properties of transmission filters with single/double waveguide grating in the different layers of high refection stacks are compared each other. It is demonstrated that the narrow line width transmission filters can be abstained with only two different materials.     

Normal-incidence guided-mode resonant grating filters: design and experimental demonstration

Guided-mode resonant grating filters have numerous applications. However, in weakly modulated gratings designed for use at normal incidence, the filtering resonance of these subwavelength-period devices splits for angles of incidence that are even slightly off normal incidence. Strongly modulated gratings are designed that essentially overcome this practical problem near normal incidence. In addition, these gratings can have, by design, either broad or narrow spectral characteristics. An experimental demonstration (1.5-2.0-mu m wavelength range) of such a normal-incidence guided-mode resonant silicon grating upon a sapphire substrate is presented. The measured reflection resonance had a FWHM of 67-100 nm for angles of incidence of 0-8 degrees and peak efficiency of ~80% .     

High-efficiency guided-mode resonance filter

A high-efficiency guided-mode resonance reflection filter is reported. The device consists of a surface-relief photoresist grating and an underlying HfO (2) waveguide layer deposited on a fused-silica substrate. The spectral response measured with a dye-laser beam at normal incidence exhibited a peak reflectance of 98% at a wavelength of 860 nm with sideband reflectance below ~5% extending over the wavelength range provided by the dye (800-900 nm). At normal incidence the filter linewidth was 2.2 nm. High-efficiency double-peak resonances occurred at nonnormal incidence, with the spectral locations of the maxima vayring with the incidence angle. The filter response at various angles of incidence agreed well with the theoretically calculated reflectance curves.     

Design of internal Brewster guided-mode resonance filter

An internal Brewster guided-mode resonance （GMR） filter is designed. For this kind of GMR filter, the Brewster reflection occurs at the interface of grating/waveguide layers rather than at the interface of air/grating layers. At Brewster angle of 60~, the GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum （FWHM） of 0.2 nm. Its angle response changing with the fabrication deviation is also discussed.     

Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence

We demonstrate that properly designed one-dimensional guided-mode resonance filters (GMRFs) with only one grating layer can exhibit a nonpolarizing resonant filtering effect under normal incidence. A sinusoidal profile nonpolarizing GMRF is realized by photoinduced surface-relief grating formation on thin films of polymer-azobenzene complexes and subsequent atomic layer deposition, showing the feasibility of fabrication of such compact GMRFs.     

Polarization-Independent Guided-Mode Resonance Filters under Oblique Incidence

We present the dispersion relation of guided-mode resonances in planar periodic waveguides, both for s-polarized （TF, mode） and p-polarized （TM mode） incident waves. For a fixed homogeneous planar waveguide, dispersion curves of the TE eigenmode cannot cross that of the TM eigenmode at all. That is to say, at a certain wavelength, TE and TM modes cannot be excited with the same propagation constant. Due to Bragg reflection in the planar periodic waveguide, dispersion curves of the TE leaky mode may intersect with that of the TM leaky mode in the first Brillouin zone. We employ these intersections to achieve polarization-independent guided-mode resonance filters.