分子束外延生长的赝配高电子迁移率晶体管结构中深能级的研究

应用深能级瞬态谱(DLTS)技术详细研究分子束外延生长的Pseudomorphic—high electron mobility transistor(P-HEMT)结构中深能级行为。样品的DLTS表明,在P-HEMT结构的n-AlGaAs层里存在着较大浓度(10¹⁵-10¹⁷cm^-3和俘获截面(10^-16cm²)的高温电子陷阱。它们直接影响着器件性能。高温电子陷阱的产生可能与AlGaAs层里的氧     

分子束外延生长AlGaAs/GaAs GRINSCH SQW激光器中高温陷阱的研究

应用深能级瞬态谱(DLTS)技术研究分子束外延(MBE)生长的AlGaAs/GaAs gradedindex separate confinement heterostructure single well(GRIN-SCH SQW)激光器的高温陷阱。样品的DLTS表明,在激光器的n-AlGaAs层里存在着高温(空穴、电子)陷阱,它直接影响着激光器的性能。高温空穴陷阱可能分布在x_(Al)=0.2→0.43和x_(Al)=0.43的n-AlGaAs层界面附近,而高温电子陷阱则可能分布在X_(Al)=0.43的n-AlGaAs层里X_(Al)值不连续的界面附近。高温电子陷阱的产生可能与AlGaAs层里的O有关。     

分子束外延生长AlGaAs/GaAs GRIN-SCH SQW激光器中高温陷阱的研究

应用深能级瞬态谱(DLTS)技术研究分子束外延(MBE)生长的AlGaAs/GaAs graded index separate confinement heterostructure single well(GRIN-SCH SQW)激光器的高温陷阱。样品的DLTS表明,在激光器的n-AlGaAs层里存在着高温(空穴、电子)陷阱,它直接影响着激光器的性能。高温空穴陷阱可能分布在x_Al =0.2→0.43和x_Al=0.43的n-AlGaAs层界面附近,而高温电子陷阱则可能分布在x_Al=0.43的n-AlGaAs层里x_Al值不连续的界面附近。高温电子陷阱的产生可能与AlGaAs层里的O有关。 关键词：     

MBE和MOCVD生长的AIGaAs/GaAs GRIN—SCH SQW激光器深中心的比较

应用深能级瞬态谱(DLTS)技术详细研究分子束外延(MBE)和金属有机物化学汽相淀积(MOCVD)生长的AlGaAs/GaAs graded index sparate confinement beterostruc-ture single quantum well(GRIN-SCH SQW)激光器的深中心.结果表明,在激光器的n-ALGaAs层里除众所周知的DX中心外,还存在着较大浓度和俘获截面的深(电子或空穴) 陷阱,它们直接影响着激光器的性能.其中MBE生长的激光器里的深空穴陷阱H1可能分布在x_(A1)=0.22→0.43和x (A1)=0.43的n-AlGaAs层里x_(A1)值不连续的界面附近,而深电子陷阱E3则可能分布在x_(A1)=0.43的n-AlGaAs层里x_(A1)值不连续的界面附近.MOCVD生长的激光器量子阱的AlGaAs层存在着DX中心和深电子陷阱.其中深电子陷阱E3可能分布在x_(A1)=0.22→0.30和x_(A1)=0.30的n-AlGaAs层里,而DX中心则分布在x_(A1)(x_(A1)=0.22→0.30和x_(A1)=0.30)值不连续的n-AlGaAs层界面附近.     

AlGaAs/InGaAs/GaAs赝配高电子迁移晶体管的kink效应研究

利用二维器件模拟软件MEDICI对AlGaAs/InGaAs/GaAs赝配高电子迁移晶体管器(PHEMT)件进行了仿真，研究了PHEMT器件的掺杂浓度与电子浓度分布，PHEMT器件内部的电流走向及传输特性，重点研究了不同温度和不同势垒层浓度情况下PHEMT器件的kink效应.研究结果表明：kink效应主要与处于高层深能级中的陷阱俘获/反俘获过程有关，而不是只与碰撞电离有关. 关键词： 高电子迁移率晶体管 kink效应 二维电子气     

分子束外延生长的n型Al掺杂ZnS1-xTex深中心研究

应用电容-电压、光致荧光和深能级瞬态谱技术研究了分子束外延生长的n型Al掺杂ZnS_1-xTe_x外延层深中心.Al掺杂ZnS_0.977Te_0.023的光致荧光强度明显低于不掺杂的ZnS_0.977Te_0.023，这表明一部分Al原子形成非辐射深中心.Al掺杂ZnS_1-xTe_x(x=0，0.017，0.04和0.046)的深能级瞬态傅里叶 关键词：     

气源分子束外延生长的InPBi薄膜材料中的深能级中心

利用深能级瞬态谱(DLTS)研究了气源分子束外延(GSMBE)生长的InP1-xBix材料中深能级中心的性质。在未有意掺杂的InP中测量到一个多数载流子深能级中心E1,E1的能级位置为Ec-0.38 e V,俘获截面为1.87×10~(-15)cm~2。在未有意掺杂的InP0.9751Bi0.0249中测量到一个少数载流子深能级中心H1,H1的能级位置为Ev+0.31 eV,俘获截面为2.87×10~(-17)cm~2。深中心E1应该起源于本征反位缺陷PIn,深中心H1可能来源于形成的Bi原子对或者更复杂的与Bi相关的团簇。明确这些缺陷的起源对于InPBi材料在器件应用方面具有重要的意义。     

磷化铟高电子迁移率晶体管外延结构材料抗电子辐照加固设计

为研究磷化铟高电子迁移率晶体管(InP HEMT)外延结构材料的抗电子辐照加固设计的效果,本文采用气态源分子束外延法制备了系列InP HEMT外延结构材料.针对不同外延结构材料开展了1.5 MeV电子束辐照试验,在辐照注量为2×10¹⁵ cm^-2条件下,并测试了InP HEMT外延结构材料二维电子气辐照前后的电学特性,获得了辐照前后不同外延结构InP HEMT材料二维电子气归一化浓度和电子迁移率随外延参数的变化规律,分析了InP HEMT二维电子气辐射损伤与Si-δ掺杂浓度、InGaAs沟道厚度和沟道In组分以及隔离层厚度等结构参数的关系.结果表明:Si-δ掺杂浓度越大,隔离层厚度较薄,InGaAs沟道厚度较大,沟道In组分低的InP HEMT外延结构二维电子气辐射损伤相对较低,具有更强的抗电子辐照能力.经分析原因如下:1)电子束与材料晶格发生能量传递,破坏晶格完整性,且在沟道异质界面引入辐射诱导缺陷,增加复合中心密度,散射增强导致二维电子气迁移率和浓度降低;2)高浓度Si-δ掺杂和薄隔离层有利于提高量子阱二维电子气浓度,降低二维电子气受辐射...     

双异质结AlxGa1-xAs/GaAs发光管中与氧有关能级的测量

用DLTS和单次脉冲瞬态电容技术研究了液相外延生长的双异质结AlxGa1-xAs/GaAs发光管,掺Si的n-Al0.05Ga0.95As有源层中的深能级。着重分析了一个与氧有关的电子陷阱,其发射激活能为EC-ED=0.29eV。我们发现该电子陷阱随正向注入脉冲宽度tp的增加DLTS峰向低温移动,即在确定的温度下发射率随tp的增加而增加。用DLTS首次测得该能级的俘获瞬态谱,发现俘获峰随反向撤空脉冲宽度tR的增加向低温端移动,即在确定的温度下俘获率随tR的增加而增加,并且俘获激活能从△Eσ=0.28eV变化到0.26eV,用位形坐标图讨论了引起变化的原因。     

用深能级瞬态谱方法研究赝晶Si/Ge0.25Si0.75/Si单量子阱的价带偏移

应变的Ge_xSi_1-x层和未应变的硅层间的能带偏移主要是价带偏移。量子阱中载流子的热发射能与界面的能带偏移有着密切的关系。本文用深能级瞬态谱(DLTS)研究分子束外延生长的p型Si/Ge_0.25Si_0.75/Si单量子阱的价带偏移,阱宽为15nm,考虑到电场的影响和量子阱中第一子能级的位置,对从DLTS得到的热发射能进行适当的修正,可以计算出Si/Ge_0.25Si_0.75/S 关键词：     

On the temperature dependence of the electronic states and the mobility in AlGaAs/GaAs heterostructures

Experiment shows that in AlGaAs/GaAs heterostructures the sheet electron concentration remains almost constant up to a certain temperature, while it increases at higher temperatures. We attempt an interpretation of this temperature dependence, taking into account the fact that in the bulk, n-AlGaAs deep and shallow donors exist, which independently and by different mechanisms provide electrons to the different conduction band minima of the bulk n-AlGaAs, and contribute to the formation of the Q2DEG. We calculate the electronic states of this structure, the Q2DEG and the bulk concentrations, and the corresponding mobilities as a function of temperature. Our numerical results are in an excellent agreement with experimental data.PACS:     

p型硅MOS结构Si/SiO2界面及其附近的深能级与界面态

用深能级瞬态谱(DLTS)技术系统研究了Si/SiO₂界面附近的深能级和界面态。结果表明,在热氧化形成的Si/SiO₂界面及其附近经常存在一个浓度很高的深能级,它具有若干有趣的特殊性质,例如它的DLTS峰高度强烈地依赖于温度,以及当栅偏压使费密能级与界面处硅价带顶的距离明显小于深能级与价带顶的距离时,仍然可以观测到一个很强的DLTS峰。另外,用最新方法测量的Si/SiO₂界面连续态的空穴俘获截面与温度有关,而与能量位置无明显关系,DLTS测 关键词：     

Influence of surface states on deep level transient spectroscopy in AlGaN/GaN heterostructure

Deep level transient spectroscopy(DLTS) as a method to investigate deep traps in AlGaN/GaN heterostructure or high electron mobility transistors(HEMTs) has been widely utilized.The DLTS measurements under different bias conditions are carried out in this paper.Two hole-like traps with active energies of E_v + 0.47 eV,and E_v + 0.10 eV are observed,which are related to surface states.The electron traps with active energies of E_c-0.56 eV are located in the channel,those with E_c-0.33 eV and E_c-0.88 eV are located in the AlGaN layer.The presence of surface states has a strong influence on the detection of electron traps,especially when the electron traps are low in density.The DLTS signal peak height of the electron trap is reduced and even disappears due to the presence of plentiful surface state.     

A bistable, self-latching inverter by the monolithic integration of resonant tunnelling diode and high electron mobility transistor

This paper reports that the structures of AlGaAs/InGaAs high electron mobility transistor (HEMT) and AlAs/GaAs resonant tunnelling diode (RTD) are epitaxially grown by molecular beam epitaxy (MBE) in turn on a GaAs substrate. An Al_0.24Ga_0.76As chair barrier layer, which is grown adjacent to the top AlAs barrier, helps to reduce the valley current of RTD. The peak-to-valley current ratio of fabricated RTD is 4.8 and the transconductance for the 1-μm gate HEMT is 125mS/mm. A static inverter which consists of two RTDs and a HEMT is designed and fabricated. Unlike a conventional CMOS inverter, the novel inverter exhibits self-latching property.     

Study of defects in proton irradiated GaAs/AlGaAs solar cells

The properties of GaAs/AlGaAs solar cells irradiated with 40, 70, 100 and 170 keV protons have been studied. Current-voltage (IV) measurement showed that the worst degradation was found in the cells irradiated by 100 keV protons. The degradation was found defect dependent. Defect profile was obtained by the stopping and range of ions in matter (SRIM) simulation and deep-level transient spectroscopy (DLTS) measurement. In order to obtain the deep-level defect profile in depletion layer by DLTS measurement, the traditional calculation formula of defect concentration has been modified. DLTS measurement showed good agreement with that of the SRIM simulation.     

Study of metal-semiconductor interface states using deep level transient spectroscopy

This paper describes the principle of the determination of interface-state parameters by deep level transient spectroscopy (DLTS) and presents a new, simple and exact method to discriminate the DLTS signal due to the emission from interface states from that from bulk traps. The n-type Au-GaAs and Cr-GaAs interfaces have been investigated by the technique. The results obtained in the investigation have revealed the dependences of the energy position, density and capture cross section for the interface states on the metal deposited onto the semiconductor surface, which is consistent with the theoretical prediction by Yndurain and the experimental results obtained by other authors.     

AlGaAs/GaAs异质结中的平行电导效应

本文计算了AlGaAs/GaAs异质结在大栅压下,出现“平行电导效应”时的栅压与平行导电层中电荷的关系。由此给出了高电子迁移率晶体管(HEMT)在大栅压时跨导变化的特性,与实验进行了比较,符合较好。 关键词：     

Inversion of spin photocurrent due to resonant transmission

We report on the inversion of spin-dependent photocurrent via interface localized states formed at the interface of an Fe/n-AlGaAs/GaAs quantum well heterostructure by means of an optical spin orientation technique. A careful adjustment of the excitation photon energy, which is determined by a separate analysis of electroluminescence spectra under a spin injection condition, enables us to explore the spin-dependent characteristics of photoelectron transmission from the quantum well into Fe. The bias dependence of the spin-dependent photocurrent shows clear spikelike features at the voltage which is compatible with the formation of the interface localized resonant states in the Schottky depletion layer.