Na-Mg共掺杂ZnO薄膜的结构和光学性质

利用溶胶-凝胶法,在普通载玻片上使用旋转涂膜技术制备了具有c轴择优取向生长的Na-Mg共掺杂的ZnO薄膜。用XRD、SEM、光致发光(PL)及透射光谱对薄膜样品进行了表征。结果表明:Na-Mg共掺杂有利于ZnO薄膜的c轴择优取向生长,并且随着Na+掺杂浓度的增加,晶粒尺寸先增大后减小;通过比较不同掺杂浓度ZnO薄膜的PL谱,推测发光峰值位于380nm的紫外发射与ZnO的自由激子复合有关;发现掺入Mg的确能使ZnO禁带宽度增大,掺杂组分为Na0.04Mg0.2Zn0.76O时,其PL谱只有一个很强的紫光发射峰,其近带边紫外光发射强度较未掺杂的ZnO增强了近10倍,极大地提高了薄膜紫外发光性能;并且随Na+浓度增加薄膜透光性减弱。     

MgxZn1-xO单晶薄膜的结构和光学性质

用等离子辅助分子束外延(P-MBE)的方法,在蓝宝石c平面上外延生长了MgxZn1-xO合金薄膜。在0≤x≤0．2范围内薄膜保持着ZnO的纤锌矿结构不变。X射线双晶衍射谱的结果表明生长的样品是单晶薄膜。据布喇格衍射公式计算得到,随着Mg含量的增加,薄膜的品格常数C由0．5205nm减小到0．5185nm。室温光致发光谱出现很强的紫外近带发射(NBE)峰,没有观察到深能级(DL)发射,且随着Mg的掺入量的增加,紫外发射峰有明显的蓝移。透射光谱的结果表明,合金薄膜的吸收边随着Mg离子的掺入逐渐向高能侧移动,这与室温下光致发光的结果是相吻合的,并计算出随着x值增加,带隙宽度从3．338eV逐渐展宽到3．682eV。通过研究Mg0.12Zn0.88O样品的变温光谱,将紫外发射归结为束缚在施主能级上的束缚激子发射。并详细地研究了在整个温度变化过程中,束缚激子的两个不同的猝灭过程以及谱线的半峰全宽与温度变化的关系。     

Mg掺杂ZnO所致的禁带宽度增大现象研究

采用第一性原理的超软赝势方法，研究了纤锌矿ZnO及不同量Mg掺杂ZnO合金的电子结构.理论计算表明，Mg的掺杂导致ZnO晶体的禁带宽度增大.研究发现，Zn 4s态决定导带底的位置，Mg的掺入导致Zn 4s态向高能端的偏移是导致禁带宽度增大的根本原因. 关键词： 密度泛函理论 赝势 Mg掺杂ZnO     

Zn1-xMgxO薄膜p型导电和光学性能

采用超声喷雾热分解(Ultrasonic Spray Pyrolysis,USP)方法,以醋酸锌、醋酸镁、醋酸铵、氯化铝的混合水溶液为前驱溶液,在单晶Si(100)衬底上制备了ZnO,Zn_0.81Mg_0.19O,N-Al共掺杂ZnO和N-Al共掺杂Zn_0.81Mg_0.19O薄膜。以X射线衍射(XRD)、场发射-扫描电镜(FE-SEM)、霍尔效应(Hall-effect)、光致发光(Photoluminescence,PL)谱等手段研究了薄膜的晶体结构、表面形貌、电学性能、光学性能和带隙变化。电学测试结果表明,未掺杂ZnO及Zn_0.81Mg_0.19O薄膜为n型导电;而N-Al共掺杂ZnO和N-Al共掺杂Zn_0.81Mg_0.19O薄膜呈p型导电。Zn_0.81Mg_0.19O和N-Al共掺杂Zn_0.81Mg_0.19O(p型)薄膜在维持ZnO纤锌矿结构的前提下,光学带隙随Mg掺杂量增加而增大。初步结果显示,优化工艺参数下通过Mg掺杂制备光学带隙可调的p型Zn_0.81Mg_0.19O薄膜,对于试制Zn_1-xMg_xO基同质p-n结、短波长(紫外、深紫外)器件等方面有重要意义。     

Cu掺杂ZnO纳米材料的制备及表征

利用CuO作为前驱体对ZnO进行了Cu掺杂研究,分别在不同温度下获得了ZnO纳米带及有纳米带构成的微米花状结构,对其生长机理进行了分析。并且以Cu片为衬底获得了ZnO的纳米梳以及有纳米梳构成的多层结构ZnO。XRD表明产物中只有ZnO单质相的存在,EDS证明产物中存在Cu元素。ZnO室温下的PL谱表明其UV与深能级发射强度比随Cu掺杂量的增加而变大,说明Cu的掺杂能够降低ZnO的缺陷峰强度。     

非掺杂ZnO薄膜中紫外与绿色发光中心

用直流反应溅射方法在硅衬底上淀积了ZnO薄膜,测量它们的光致发光(PL)光谱,观察到两个发光峰,峰值能量分别为3.18(紫外峰,UV)和2.38eV(绿峰).样品用不同温度分别在氧气、氮气和空气中热处理后,测量了PL光谱中绿峰和紫外峰强度随热处理温度和气氛的变化,同时比较了用FP-LMT方法计算的ZnO中几种本征缺陷的能级位置.根据实验和能级计算的结果,推测出ZnO薄膜中的紫外峰与ZnO带边激子跃迁有关,而绿色发光主要来源于导带底到氧错位缺陷(O_Zn)能级的跃迁,而不是通常认为的氧空 关键词： ZnO薄膜 热处理 光致发光光谱 缺陷能级     

Al和Sb共掺对ZnO有序阵列薄膜的结构和光学性能的影响

采用水热合成法在预先生长的ZnO种子层的玻璃衬底上制备出Al和Sb共掺ZnO纳米棒有序阵列薄膜. 通过X射线衍射、扫描电镜、透射电镜和选区电子衍射分析表明:所制备的薄膜由垂直于ZnO种子层的纳米棒组成, 呈单晶六角纤锌矿ZnO结构, 且沿[001]方向择优生长, 纳米棒的平均直径和长度分别为27.8 nm和1.02 μm. Al和Sb共掺ZnO纳米棒有序阵列薄膜的拉曼散射分析表明:相对于未掺杂ZnO薄膜的拉曼振动峰(580 cm^-1), Al和Sb共掺ZnO阵列薄膜的E₁(LO)振动模式存在拉曼位移. 当Al和Sb的掺杂量为3.0at%,4.0at%,5.0at%,6.0at%时, Al和Sb共掺ZnO阵列薄膜的拉曼振动峰的位移量分别为3,10,14,12 cm^-1. E₁ (LO) 振动模式位移是由Al和Sb掺杂ZnO产生的缺陷引起的. 室温光致发光结果表明:掺杂Al和Sb后, ZnO薄膜在545 nm处的发光强度减小,在414 nm处的发光强度增加. 这是由于掺杂Al和Sb后, ZnO薄膜中Zn_i缺陷增加, O_i缺陷减少引起的. 关键词： Al和Sb共掺ZnO薄膜 纳米棒有序阵列 结构表征 拉曼散射     

Ga高掺杂对ZnO的最小光学带隙和吸收带边影响的第一性原理研究

采用基于密度泛函理论框架下的第一性原理平面波超软赝势方法, 建立了纯的和四种不同Ga掺杂量的ZnO超胞模型, 分别对模型进行了几何结构优化、能带结构分布、态密度分布和吸收光谱的计算. 结果表明, 在本文限定的Ga掺杂量2.08 at%–6.25 at%的范围内, 随着Ga掺杂量的增加, 掺杂后的ZnO体系体积变化不是很大, 但是, 掺杂体系ZnO的能量增加, 掺杂体系变得越来越不稳定, 同时, 掺杂体系ZnO的Burstein-Moss 效应越显著, 最小光学带隙变得越宽, 吸收带边越向高能方向移动. 计算结果和实验结果相一致. 关键词： Ga高掺杂ZnO 电子结构 吸收光谱 第一性原理     

退火对非故意掺杂4H-SiC外延材料386 nm和388 nm发射峰的影响

10 K条件下,采用光致发光(PL)技术研究了不同退火处理后非故意掺杂4H-SiC外延材料的低温PL特性.结果发现,在370—400 nm范围内出现了三个发射峰,能量较高的峰约为3.26 eV,与4H-SiC材料的室温禁带宽度相当.波长约为386 nm和388 nm的两个发射峰分别位于~3.21 eV和~3.19 eV,与材料中的N杂质有关.当退火时间为30 min时,随退火温度的升高,386 nm和388 nm两个发射峰的PL强度先增加后减小,且退火温度为1573 K时,两个发射峰的PL强度均达到最大. 关键词： 光致发光 退火处理 能级 4H-SiC     

Sn掺杂ZnO电子结构与光学性质的第一性原理研究

采用密度泛函理论框架下的第一性原理计算方法,利用广义梯度近似和Perdew-Burke-Ernzerdorf泛函,计算了不同Sn掺杂浓度下SZO(Sn∶ZnO)体系的电子结构与光学性质.研究了Sn掺杂浓度对SZO(Sn∶ZnO)的晶体结构、能带结构、电子态密度及光学性质的影响,并结合计算的能带结构和差分电荷密度对比分析了掺杂位置对计算结果的影响.研究结果表明,随着Sn掺杂浓度的增加,晶格常数c与a的比值变化很小,掺杂后晶胞没有发生畸变.掺杂体系的能量逐渐增大,稳定性减弱,且随着掺杂浓度的增加,带隙呈现先减小后增大的变化规律.掺杂后的SZO(Sn∶ZnO)成为间接带隙半导体,在导带底部附近出现了大量Sn原子贡献的导电载流子,明显提高了掺杂体系的电导率,并在费米能级附近与价带顶部之间出现一条由Sn原子贡献的杂质能级,能带结构呈现半填满状态,价带部分的电子态密度峰值向低能方向移动约1.5eV.同层掺杂的电子得失程度较大,带隙比相邻层掺杂和隔层掺杂时小.掺杂后吸收带边发生红移,材料对紫外光的吸收能力明显增强,介电常数虚部增大,主要跃迁峰向高能方向移动.计算结果表明SZO(Sn∶ZnO)是一种优良的透明导电薄膜材料.     

退火对ZnO:Al薄膜光致发光性能的影响

 采用溶胶-凝胶工艺在石英衬底上制备ZnO:Al（AZO）薄膜，通过不同温度的退火处理，研究了退火对AZO薄膜结构和光致发光特性的影响。XRD图谱表明：所制备的薄膜具有c轴高度择优取向，随着退火温度的升高，(002)峰的强度逐渐增强，同时(002)峰的半高宽逐渐减小,表明晶粒在不断增大。未退火样品的光致发光（PL）谱由361 nm附近的紫外带边发射峰和500 nm附近的深能级发射峰组成。样品经退火后，以500 nm为中心的绿带发射逐渐减弱，而带边发射强度有所增强,并且逐渐红移到366 nm附近，与吸收边移动的测试结果相吻合。对经过不同时间退火的样品分析表明，AZO薄膜的发光特性与退火时间也有很大关系，时间过短可见波段的发射较强，但时间过长会使晶粒发生团聚，导致紫外发射峰强度减弱。     

Enhancement in UV emission and band gap by Fe doping in ZnO thin films

Enhancement of the optical band gap of ZnO from 3.14 to 3.29 eV has been obtained using Fe dopant. Undoped and doped ZnO films are deposited by sol-gel spin coating. XRD patterns indicate polycrystalline nature and hexagonal wurtzite structure of Zn_1?xFe_xO films. EDX analysis confirms the presence of iron dopant. The photoluminescence spectra show an ultraviolet emission peak at 398 nm (NBE emission) and defect emission peak at 485 nm. Intensity of the NBE emission is much higher for the doped samples with its ratio to defect emission intensity highest for 2 at. %doping. The NBE emission shifts to higher energy with increasing dopant concentration in a manner similar to that exhibited by the band gap. Surface morphology has been studied using FESEM.     

Influence of buffer layer thickness on the structure and optical properties of ZnO thin films

A series of ZnO thin films were deposited on ZnO buffer layers by DC reactive magnetron sputtering. The buffer layer thickness determination of microstructure and optical properties of ZnO films was investigated by X-ray diffraction (XRD), photoluminescence (PL), optical transmittance and absorption measurements. XRD results revealed that the stress of ZnO thin films varied with the buffer layer thickness. With the increase of buffer layer thickness, the band gap edge shifted toward longer wavelength. The near-band-edge (NBE) emission intensity of ZnO films deposited on ZnO buffer layer also varied with the increase of thickness due to the spatial confinement increasing the Coulomb interaction between electrons and holes. The PL measurement showed that the optimum thickness of the ZnO buffer layer was around 12 nm.     

Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering

ZnO and Al-doped ZnO(ZAO) thin films have been prepared on glass substrates by direct current (dc) magnetron sputtering from 99.99% pure Zn metallic and ZnO:3 wt%Al₂O₃ ceramic targets, the effects of substrate temperature on the crystallization behavior and optical properties of the films have been studied. It shows that the surface morphologies of ZAO films exhibit difference from that of ZnO films, while their preferential crystalline growth orientation revealed by X-ray diffraction remains always the (0 0 2). The optical transmittance and photoluminescence (PL) spectra of both ZnO and ZAO films are obviously influenced by the substrate temperature. All films exhibit a transmittance higher than 86% in the visible region, while the optical transmittance of ZAO films is slightly smaller than that of ZnO films. More significantly, Al-doping leads to a larger optical band gap (E_g) of the films. It is found from the PL measurement that near-band-edge (NBE) emission and deep-level (DL) emission are observed in pure ZnO thin films. However, when Al was doped into thin films, the DL emission of the thin films is depressed. As the substrate temperature increases, the peak of NBE emission has a blueshift to region of higher photon energy, which shows a trend similar to the E_g in optical transmittance measurement.     

Quenching of surface traps in Mn doped ZnO thin films for enhanced optical transparency

The structural and photoluminescence analyses were performed on un-doped and Mn doped ZnO thin films grown on Si (1 0 0) substrate by pulsed laser deposition (PLD) and annealed at different post-deposition temperatures (500-800 °C). X-ray diffraction (XRD), employed to study the structural properties, showed an improved crystallinity at elevated temperatures with a consistent decrease in the lattice parameter ‘c’. The peak broadening in XRD spectra and the presence of Mn 2p3/2 peak at ∼640 eV in X-ray Photoelectron Spectroscopic (XPS) spectra of the doped thin films confirmed the successful incorporation of Mn in ZnO host matrix. Extended near band edge emission (NBE) spectra indicated the reduction in the concentration of the intrinsic surface traps in comparison to the doped ones resulting in improved optical transparency. Reduced deep level emission (DLE) spectra in doped thin films with declined PL ratio validated the quenching of the intrinsic surface traps thereby improving the optical transparency and the band gap, essential for optoelectronic and spintronic applications. Furthermore, the formation and uniform distribution of nano-sized grains with improved surface features of Mn-doped ZnO thin films were observed in Field Emission Scanning Electron Microscopy (FESEM) images.     

V高掺杂ZnO最小光学带隙和吸收光谱的第一性原理研究

对于V高掺杂ZnO,当摩尔分数为0.0417—0.0625时,随着掺杂量的增加,吸收光谱出现蓝移减弱和蓝移增强两种不同实验结果均有文献报道.采用密度泛函理论的第一性原理平面波超软赝势方法,构建未掺杂ZnO单胞模型、V高掺杂Zn1-xVxO(x=0.0417,0.0625)两种超胞模型,采用GGA+U方法计算掺杂前后体系的形成能、态密度、分波态密度、磁性和吸收光谱.结果表明,当V的掺杂量(原子含量)为2.083%—3.125%时,随着V掺杂量增加,掺杂体系磁矩增大,磁性增强,并且掺杂体系体积增加,总能量下降,形成能减小,掺杂体系更稳定,同时,掺杂ZnO体系的最小光学带隙增宽,吸收带边向低能级方向移动.上述计算结果与实验结果一致.     

带隙可调的Al，Mg掺杂ZnO薄膜的制备

利用射频磁控溅射（RF-MS）方法,固定Al₂O₃掺杂量2 wt%,Mg掺杂量分别为1 wt%,3 wt%和5 wt%,在玻璃基底上制备了Al掺杂和Al,Mg共掺杂的ZnO薄膜,在500 ℃空气中退火2 h后,测量并比较了它们的光学和电学性质．结果表明,Al,Mg共掺杂的ZnO薄膜结晶质量良好,具有ZnO纤锌矿结构,具有较强的（002）面衍射峰,表明薄膜晶体沿c轴优先生长;与Al掺杂ZnO薄膜相比蓝端光透射率增加,1 wt%和3 wt% Mg掺杂薄 关键词： 射频磁控溅射 ZnO薄膜 Al Mg共掺杂     

不同Yb掺杂浓度的ZnO的电子结构与光学特性

本文基于密度泛函理论(DFT)框架下的第一性原理计算方法,研究了不同Yb浓度掺杂ZnO体系的电子结构和光学性质.计算得到的结果证明,Yb掺杂ZnO后会造成电子结构和光学性质的明显改变.增加掺杂浓度使能带带隙逐渐变窄,其费米能级向上移动到导带,表现出n型半导体的特性;在Yb-4f态导带附近的带隙中产生了新的缺陷,同时观察到更好的吸收系数和折射率.因此,Yb掺杂ZnO对其电子性质和光学结构有很大的影响,为进一步深入了解掺杂ZnO性质的影响提供理论基础.     

On single doping and co-doping of spray pyrolysed ZnO films: Structural, electrical and optical characterisation

In this paper we present studies on ZnO thin films (prepared using Chemical Spray pyrolysis (CSP) technique) doped in two different ways; in one set, ‘single doping’ using indium was done while in the second set, ‘co-doping’ using indium and fluorine was adopted. In the former case, effect of in-situ as well as ex-situ doping using In was analyzed. Structural (XRD studies), electrical (I-V measurements) and optical characterizations (through absorption, transmission and photoluminescence studies) of the films were done. XRD analysis showed that, for spray-deposited ZnO films, ex-situ doping using Indium resulted in preferred (0 0 2) plane orientation, while in-situ doping caused preferred orientation along (1 0 0), (0 0 2), (1 0 1) planes; however for higher percentage of in-situ doping, orientation of grains changed from (0 0 2) plane to (1 0 1) plane. The co-doped films had (0 0 2) and (1 0 1) planes. Lowest resistivity (2 × 10⁻³ Ω cm) was achieved for the films, doped with 1% Indium through in-situ method. Photoluminescence (PL) emissions of ex-situ doped and co-doped samples had two peaks; one was the ‘near band edge’ emission (NBE) and the other was the ‘blue-green’ emission. But interestingly the PL emission of in-situ doped samples exhibited only the ‘near band edge’ emission. Optical band gap of the films increased with doping percentage, in all cases of doping.