前置平面镜热负载对变包含角平面光栅单色器分辨率的影响

针对变包含角平面光栅单色器前置平面镜（PM）受热负载而导致的单色器分辨率降低问题,提出优化聚焦常数（C_ff）补偿分辨率的方法。首先,计算不同C_ff值时PM的热功率吸收谱,在此基础上对镜面热负载进行热-结构耦合分析,得到不同热负载时PM表面热变形的变化量;然后,结合理想分辨率公式和光线追迹软件求出加热负载的单色器分辨率;最后,优化C_ff实现分辨率的补偿。研究结果表明,以软X射线谱学显微光束线站为例,当出射光能量为1 000 eV时,将C_ff由1.8优化至1.84,单色器分辨率即可与无热负载时的相同,该优化方法可有效补偿单色器分辨率的降低。     

前置平面镜热负载对变包含角平面光栅单色器分辨率的影响

针对变包含角平面光栅单色器前置平面镜(PM)受热负载而导致的单色器分辨率降低问题,提出优化聚焦常数(C ff)补偿分辨率的方法。首先,计算不同C ff值时PM的热功率吸收谱,在此基础上对镜面热负载进行热-结构耦合分析,得到不同热负载时PM表面热变形的变化量;然后,结合理想分辨率公式和光线追迹软件求出加热负载的单色器分辨率;最后,优化C ff实现分辨率的补偿。研究结果表明,以软X射线谱学显微光束线站为例,当出射光能量为1 000 eV时,将C ff由1.8优化至1.84,单色器分辨率即可与无热负载时的相同,该优化方法可有效补偿单色器分辨率的降低。     

用于检测光栅线密度的长程面形仪系统

衍射光栅已被广泛应用于同步辐射光源软X射线与真空紫外光栅单色器中,光栅线密度偏差会直接影响单色器的性能。为了检测光栅线密度的偏差,本文在合肥先进光源预研过程中搭建了长程面形仪(LTP)系统。使用自准直仪对LTP检测光栅系统在26μrad内的检测精度进行了标定。利用LTP对自主研制的760 line/mm与2400 line/mm等间距光栅进行线密度均匀性检测,使用干涉仪对760 line/mm光栅进行0级与1级衍射波前检测,并将检测结果与LTP测量结果进行比较。结果表明:系统标定的均方根误差为30 nrad,与干涉仪检测结果相比,两者同位置处的高度轮廓曲线具有较好的一致性。这说明搭建的LTP系统具有较高精度的检测光栅线密度的能力,为检测同步辐射光栅线密度的变化提供了平台。     

软X射线谱学显微光束线单色器结构设计及精度测试

针对上海光源谱学显微光束线站的性能要求,对其核心部件单色器进行结构设计。阐述了单色器的扫描运动原理,论述了波长扫描机构的设计方案,具体分析平面镜和光栅的转角重复精度影响因素;描述光栅切换机构,着重分析其水平偏差、垂直偏差、滚角、摆角和投角的精度问题;采用六杆并联机构的方案完成镜箱调节机构的设计,分析其支杆的调节范围和分辨力情况。给出了单色器的结构,并且对其精度进行了测试。测试结果表明,平面镜和光栅的转角重复精度分别为0.166″和0.149″;光栅切换机构的滚角、摆角和投角的重复精度分别为0.08″、0.12″和0.05″。这说明了单色器的结构设计方案和机械精度满足技术要求。     

合肥光源的衍射光栅制备技术

正衍射光栅是合肥光源光束线中重要的分光元件。本文介绍伴随合肥光源而发展起来的衍射光学元件精密加工实验室衍射光栅制备技术及相关工作进展。一、引言合肥同步辐射装置是工作在真空紫外-软X射线波段的连续光源。在真空紫外-软X射线波段通常使用光栅单色器分光,将所需的单色光从同步辐射光源中分离出来。衍射光栅是合肥光源重要的色散元件。国家同步辐射实验室成立了光学组,并逐步发展成现在的衍射光学元件精密加工实验室,     

衍射型长程大型非球面轮廓测量仪

分析了基于衍射准直技术的f-θ系统的特点，在此基础上提出了一种新型长程面形仪用以实现对大型非球面光学表面，特别是同步辐射中掠入射光学元件的高精度轮廓测量。成功地研制了样机，目前新型长程面形仪样机的纵向扫描范围可达370mm，分辨率优于0．25μrad，单点稳定性小于0．7μrad/200s，全程测量精度可达1．14μrad，全长扫描的重复精度为0．09μrad。样机测试结果表明，新型长程面形仪轮廓测量方案能够胜任对第三代及后继同步辐射光源中各种非球面光学元件的轮廓测量任务。     

单色仪转角重复精度的相位板衍射准直方法测量

为准确测量上海光源软X射线谱学显微光束线采用的变包含角平面光栅单色仪的转角重复精度,提出了一种新的基于相位板衍射准直技术的测量方法.该方法将半导体激光单模光纤和相位板衍射准直技术结合起来,利用面阵CCD采集图像,通过测量光斑的位移变化确定平面镜和光栅的角度变化.实验表明.该方法可以测量掠入射情况下单色仪联动时的转角重复精度,测量精度可达士0.1",此测量精度优于同等实验条件下的商用ELCOMAT 3000自准直仪的测量精度.     

衍射增强成像方法中两种晶体排列方式的对比研究

北京同步辐射装置(BSRF)4W1A光束线形貌学实验站近两年开展了两块晶体的衍射增强成像实验研究，在实验中，晶体转轴垂直于同步辐射偏振面时的图像质量好于晶体转轴平行于同步辐射偏振面时获取的图像.本文从X光强度分布、单色器晶体的热膨胀、空间分辨率、角分辨率等方面系统地对两种晶体几何排列方式进行了比较研究.实验和理论分析的结果表明，晶体转轴垂直于同步辐射偏振面时单色器晶体上的热膨胀对成像的影响较小，因而获得了更好的成像质量. 关键词： 同步辐射 衍射增强成像 晶体衍射     

使用辅助光栅的平面变间距全息光栅加工理论研究

变间距全息光栅具有自聚焦和消像差功能,是高分辨率光谱仪与同步辐射单色器中的重要元件。研究了使用平面等间距光栅产生非球面波,记录平面变间距全息光栅的方法。根据几何光学的光线追迹理论,推导了光栅参量的四阶解析表达式。并基于费马原理,提出了记录光路的光线追迹数值算法。应用所推导的光栅参量四阶表达式,仿真设计了变间距全息光栅。通过合理选择记录参量,可以避免光栅基底受到零级及高阶衍射光场的影响。设计结果表明,理论光栅线密度与要求值相当符合;经光线追迹数值算法验证,解析表达式的展开误差在整个记录区域内小于1.5线;考虑到实际加工工艺允许误差,使用辅助光栅的记录光路对记录参量的误差并不敏感;设计实例证明了解析表达式的有效性,以及使用辅助光栅的记录光路的优越性。     

4～120 nm波段的单色仪光束线设计

合肥国家同步辐射实验（ＮＳＲＬ）在表面物理光束线中应用了新的简单平面光栅单色仪作为分光仪器。它采用平面光栅和球面镜我学成像系统,波长选择由光栅绕其中心轴转动和球面绕一镜面外的轴转动完成,单色仪在４－１２０ｎｍ光谱范围内具有高的光学传输效率、高的光谱分辨率。     

Calibration of a compact XUV soft X‐ray monochromator with a digital autocollimator in situ

A digital autocollimator of resolution 0.1 µrad (0.02 arcsec) serves as a handy correction tool for calibrating the angular uncertainty during angular and lateral movements of gratings inside a monochromator chamber under ultra‐high vacuum. The photon energy dispersed from the extreme ultraviolet (XUV) to the soft X‐ray region of the synchrotron beamline at the Taiwan Light Source was monitored using molecular ionization spectra at high resolution as energy references that correlate with the fine angular steps during grating rotation. The angular resolution of the scanning mechanism was <0.3 µrad, which results in an energy shift of 80 meV at 867 eV. The angular uncertainties caused by the lateral movement during a grating exchange were decreased from 2.2 µrad to 0.1 µrad after correction. The proposed method provides a simple solution for on‐site beamline diagnostics of highly precise multi‐axis optical manipulating instruments at synchrotron facilities and in‐house laboratories.     

极紫外、软X-射线变线距平面光栅单色仪的研究

高性能极紫外、软X射线单色仪的研制对高亮度同步辐射光源的应用具有十分重要的意义。对Itou的变线距平面光栅单色仪作了详细的分析研究,发现它的光栅工作曲线几乎与单色仪的入、出射臂长度等参量无关,仅取决于单色仪设计的边界条件。其曲线方程和SX-700单色仪的完全类似。该单色仪不仅具有很好的光栅效率和高级次谐波抑制性能,而且有利于几条光束线共享一个电子储存环窗口的光路优化设计。     

Wave theory of focusing monochromator of synchrotron radiation

The concept of a focusing monochromator with high energy resolution is presented. Different from conventional optical schemes, the device exploits not the angular but the spatial dispersion of synchrotron radiation. The wave theory of the monochromator is developed; it shows that the monochromator can reach an energy resolution of about 0.1 meV without significant loss of the spectral density of synchrotron radiation.     

Optical design of a toroidal grating monochromator based beam line on Indus-1

In this paper, we discuss the detailed optical design of a beam line that is under construction on the synchrotron radiation source, Indus-1. Toroidal mirrors are used as pre-and post- focusing elements and a toroidal grating monochromator as a dispersing element. Using three interchangeable gratings, this monochromator will give, at a moderate resolution, a good throughput on the sample in the wavelength range 40 to 1000 Å. Effect of various parameters and their optimization on the resolution and throughput characteristics have been studied by ray tracing calculations, and presented.     

Ray tracing studies of a complete plane grating monochromator beam line

Optical design of a plane grating monochromator beam line for X-ray spectroscopic studies to be installed on INDUS-1 is studied using ray tracing technique. The main components of the beam line are pre- and post-elliptical mirrors and the plane mirror-grating dispersing system. The ideal positions of the optical components are decided by using our analytical formulation of the Riemer’s kinetic principle for reflecting synchrotron radiation onto the same spot of the dispersing grating. The program is developed indigenously and can be used on a PC. The tangent error and microroughness of the mirrors is explicitly accounted for in the program. The wavelength dependent absorption of radiation at the different reflecting surfaces is also included for calculations of the optical throughput. The dependence of the final image line shape and resolution on various beam line parameters is calculated. The results are useful in deciding the tolerances of the various beam line components and their positions.     

Heat bump on a monochromator crystal measured with X‐ray grating interferometry

Deformation of the first crystal of an X‐ray monochromator under the heat load of a high‐power beam, commonly referred to as `heat bump', is a challenge frequently faced at synchrotron beamlines. Here, quantitative measurements of the deformations of an externally water‐cooled silicon (111) double‐crystal monochromator tuned to a photon energy of 17.6 keV are reported. These measurements were made using two‐dimensional hard X‐ray grating interferometry, a technique that enables in situ at‐wavelength wavefront investigations with high angular sensitivity. The observed crystal deformations were of the order of 100 nm in the meridional and 5 nm in the sagittal direction, which lead to wavefront slope errors of up to 4 µrad in the meridional and a few hundred nanoradians in the sagittal direction.     

Use of spherical gratings in a toroidal grating mount for vuv-soft x-ray synchrotron radiation

A toroidal grating monochromator (TGM) based beamline was designed earlier and it is being setup on the 450 MeV Indus-1 synchrotron radiation source. This beamline operates in 40–1000 Å wavelength range and gives a moderate resolution (～500) at high throughput. Now-a-days, spherical gratings are giving very high resolution in some complex monochromators. We have evaluated the use of spherical gratings in the simple rotation mount of a TGM. The motivation has been to evaluate if the existing TGM beamline, without any hardware changes, can be used with the much cheaper spherical gratings. The two monochromators, employing toroidal and spherical gratings respectively, have been compared by performing detailed ray tracing calculations. Our study shows that, with the same mechanical hardware, a real spherical grating monochromator gives better performance compared to the conventional TGM with respect to the spectral resolution and the flux. Furthermore, for moderate resolution this improvement is realized even when the exit slit is not moved to keep the spherical grating in-focus.     

Monochromatic X-ray-induced thermal effect on four-reflection“nested” me V-monochromators: dynamical diffraction theory and finite-element analysis

The high energy resolution monochromator(HRM) is widely used in inelastic scattering programs to detect phonons with energy resolution, down to the me V level. Although the large amount of heat from insertion devices can be reduced by a high heat-load monochromator, the unbalanced heat load on the inner pair of crystals in a nested HRM can affect its overall performance. Here, a theoretical analysis of the unbalanced heat load using dynamical diffraction theory and finite element analysis is presented. By utilizing the ray-tracing method, the performance of different HRM nesting configurations is simulated. It is suggested that the heat balance ratio, energy resolution, and overall spectral transmission efficiency are the figures of merit for evaluating the performance of nested HRMs. Although the present study is mainly focused on nested HRMs working at57 Fe nuclear resonant energy at14.4 ke V, it is feasible to extend this to other nested HRMs working at different energies.     

Higher order harmonics suppression in extreme ultraviolet and soft x-ray

The extreme ultraviolet and soft x-ray sources are widely used in various domains. Suppressing higher order harmonics and improving spectral purity are significant. This paper describes a novel method of higher order harmonics suppression with single order diffraction gratings in extreme ultraviolet and soft x-ray. The principle of harmonic suppression with single order diffraction grating is described, and an extreme ultraviolet and soft x-ray non-harmonics grating monochromator is designed based on the single order diffraction grating. The performance is simulated by an optical design software. The emergent beams of a monochromator with different gratings are measured by a transmission grating spectrometer. The results show that the single order diffraction grating can suppress higher order harmonics effectively, and it is expected to be widely used in synchrotron radiation, diagnostics of laser induced plasma, and astrophysics.