光栅衍射法测量微透镜列阵焦距时产生的光斑干扰分析

基于光栅衍射的转角法无需转动光管,与传统的转角法相比具有较高的测量效率.而微透镜阵列元件子单元数众多,利用该方法进行测量时,光栅的各级衍射斑可能发生干扰,影响测量精度甚至无法进行测量.利用Matlab软件模拟分析测量过程中子单元光栅0级和±1级衍射光斑间的干扰,通过分析测量光源波长、光栅周期、微透镜阵列的子孔径和焦距,...     

基于傅里叶光学原理的新型凹面光栅衍射效率测量方法

凹面衍射光栅兼具色散分光与光束聚焦功能,同时具有像差校正、低杂散光、无鬼线和高信噪比等优势而受到光谱仪器领域的广泛关注。衍射效率作为凹面光栅最重要的技术指标之一,其测量技术水平逐渐成为光谱仪器行业最为关注的课题之一。传统方法一般采用双单色仪结构实现凹面光栅衍射效率的测量,该方法主要存在两方面问题,一是测量标准反射镜和待测光栅的出射光谱带宽不同,二是光栅叠级、杂散光的影响;上述问题的存在降低了高性能凹面光栅衍射效率测量的准确性。本文提出了一种基于傅里叶光学原理测量凹面光栅衍射效率的新方法;针对该方法建立了凹面光栅衍射效率测量的数学模型,并采用光学追迹和傅里叶光学方法相结合对其进行了仿真分析,从而验证了该方法的正确性;针对动镜横移误差、倾斜误差、光源稳定性、动镜运动距离误差等因素影响凹面光栅衍射效率测量精度的问题,提出引入辅助探测器的方法来进一步提高衍射效率测量精度,并对有无辅助探测器情况下的上述误差对衍射效率的影响进行了数学推导和仿真分析,分析结果表明引入辅助探测器可以有效抑制了上述误差对凹面光栅衍射效率测量的影响。对比传统双单色仪测量方法而言,该方法不仅能够解决传统测量方法存在的问题,同时还具有多波长同时测量、高光通量、高分辨率、高波数精度等优势,可以有效提高凹面光栅衍射效率的测量精度和测量效率。     

利用反射式圆光栅的振镜转角测量

为了实现振镜旋转角度的高精度测量,设计了一种利用反射式圆形衍射光栅的角度测量系统,对该系统的测量原理、测量过程、测量精度等进行了相应的设计、仿真与验证。设计与振镜同轴的反射镜,搭配反射式圆光栅以及光敏检测器件,利用反射式圆光栅产生的±1级衍射光干涉,把振镜转角位移量转化为干涉条纹光强的变化,以实现振镜转角的测量。实验结果表明:该测量系统能实现振镜±10°的角度测量,测量精度为10″。实现了振镜旋转角度的高精度测量,并且该装置结构紧凑,满足扫描振镜的小巧化设计需求。     

高功率激光装置光束准直系统新型远场监测技术

利用高功率激光装置空间滤波器小孔成像和取样光栅的衍射,设计出一套新型光路远场监测方案,并且在实验平台上进行了实验验证.实验结果表明：相对传统的远场监测方法,该远场监测系统通过侧面离轴光栅取样灵活利用空间,其调整平均误差为空间滤波器小孔直径0.9%,能够满足准直系统远场调整精度(<小孔直径5%)的要求. 关键词： 激光技术 光束准直 光栅 远场     

光栅衍射实验中测量光栅常数的两种辅助方法

衍射光栅可以将不同波长的光在空间上分离开,在光谱分析领域中有广泛应用.利用光栅的衍射来测量光栅常数是大学物理实验中的一个典型实验,而本文介绍的正是光栅衍射实验中的两个有趣现象:一是旋转光栅时,谱线的偏转角存在一个最小值;二是光栅旋转到一定角度时,衍射光斑会逐渐消失在视野中.论文从理论上分析解释这两种现象,并设计出两种测量光栅常数的方法,在实验上进行验证.与传统的用最小偏转角测光栅常数的方法相比,本文重点分析了由判定最小偏转角位置偏差所带来的影响,并提出了对称旋转测量的方法来进一步减小误差.     

结构光测量中获取高精度相位的新方法

随着制造技术的快速发展．三维光学测量技术也得到迅速的发展,利用双目CCD(电耦合插件)摄像机记录的光栅投影测量技术是一种新型的光学测量方法。在该方法的测量过程中,通过测量相位值取得测量空间。为了获得连续的高精度测量相位值．提出一种结合了格雷(Gray)编码并能够优化相位精度的相移方法,该方法通过投影相位传递函数来优化测量相位值。为了消除光栅投影图像中非正弦、周期变化和其他干扰因素的影响,给出投影光栅一种新的光强函数,利用这个光强函数能够进一步提高投影光栅测量相位精度。最终,通过插值测量相位精度能达到亚像素级．     

相位板衍射图样处理方法的研究

分析了准直激光束照明条件下，相位板中心偏离准直光束中心对衍射图样的影响，并给出了数值仿真结果；提出了一种基于多层前馈神经网络的相位板衍射图样处理方法，相对于传统的最小二乘曲线拟合处理方法而言, 精度大为提高。该方法并能适用于包括无衍射光束等复杂图像的细分处理，从而为进一步提高大尺度准直精度奠定了基础。     

相位光栅非对称性对位置测量精度的影响

在相位光栅位置测量系统中,加工、后处理等工艺会导致光栅结构发生非对称性变形,增加了位置测量误差.因此,建立了非对称性光栅的衍射场理论模型,分析了光栅非对称性对位置测量精度的影响,并根据不同衍射级次对非对称性敏感度的差异提出了一种多衍射级次权重优化方法,以修正光栅非对称性变形引入的测量误差.实验结果表明,当光栅中心槽深为入射波长的1/4时,顶部倾斜非对称性和底部倾斜非对称性对测量精度的影响可以忽略;当占空比为0.5时,侧壁非对称性对测量精度的影响可以忽略.非对称性引入的位置误差,经多衍射级次权重优化法修正后可控制在0.05 nm以内.     

一种液晶相位调制特性的测量方法

提出一种基于衍射光栅的液晶相位调制特性测量方法.该方法利用液晶构建相位分别为0和φ的二值光栅,通过傅里叶光学的方法推导衍射光栅第0级衍射光斑光强和调制相位φ之间的关系,然后实测光强和液晶驱动电压之间的对应关系来得到相位和液晶驱动电压之间的对应关系,即液晶相位光栅的相位调制特性.最后利用测量相位调制特性结果构建液晶相控阵,用光束偏转误差验证调制特性测量结果,相位测量误差小于1×10~(-3)rad.     

平面光栅双单色仪的光学系统设计

平面光栅双单色仪是构成光栅衍射效率测试仪的重要组成部分,为了完成光栅衍射效率测试仪的研制,需要对平面光栅双单色仪的光学系统进行设计和模拟。仪器主要由光源、前置单色仪、测量单色仪和探测器组成;结合仪器的实际使用需要,确定了光源、探测器和光路结构,根据仪器的设计要求,分别对前置单色仪和测量单色仪的光学系统进行设计和模拟,给出了各自光学系统的像面点列图和实际光线追迹数据。设计结果保证了仪器光学系统的测量准确性。     

High precision refractometry based on Fresnel diffraction from phase plates

When a transparent plane-parallel plate is illuminated at a boundary region by a monochromatic parallel beam of light, Fresnel diffraction occurs because of the abrupt change in phase imposed by the finite change in refractive index at the plate boundary. The visibility of the diffraction fringes varies periodically with changes in incident angle. The visibility period depends on the plate thickness and the refractive indices of the plate and the surrounding medium. Plotting the phase change versus incident angle or counting the visibility repetition in an incident-angle interval provides, for a given plate thickness, the refractive index of the plate very accurately. It is shown here that the refractive index of a plate can be determined without knowing the plate thickness. Therefore, the technique can be utilized for measuring plate thickness with high precision. In addition, by installing a plate with known refractive index in a rectangular cell filled with a liquid and following the described procedures, the refractive index of the liquid is obtained. The technique is applied to measure the refractive indices of a glass slide, distilled water, and ethanol. The potential and merits of the technique are also discussed.     

连续过渡型多晶物相深度分布的X射线衍射测试方法

提出了以X射线衍射测量连续过渡型多晶物相深度分布的方案.该方案在入射角大于全反射角的常规条件下,实现了严格的真实尺度下的物相定量深度分布测量.以计算谱对方法及程序的正确性进行了验证,并用实际样品对方法的可行性进行了验证. 关键词：     

利用晶体相位板同时实现焦斑整形和偏振匀滑

提出了一种新方法, 采用单轴晶体制作相位板, 可同时实现对惯性约束聚变激光驱动器靶点焦斑的整形和偏振匀滑. 采用标量衍射方法分析了晶体相位板的原理, 从焦斑的分布特征出发求解晶体的最佳面形. 在某装置参数条件下, 对晶体相位板的应用效果进行了数值模拟. 结果表明, 在特定的晶体切割角度和面形条件下, 晶体相位板能够对靶点焦斑进行有效的整形和匀滑, 其效果与连续相位板和偏振匀滑晶体的组合相当. 关键词： 相位板 单轴晶体 焦斑整形 偏振匀滑     

3-D surface profilometry using simultaneous phase-shifting interferometry

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore, optical phase-shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high measurement accuracy. Traditional phase-shifting interferometry is very sensitive to vibrations because image acquisition in various phase-shifting sequences could easily introduce measurement errors from environmental influences, such as air disturbance and system structure vibrations. In this paper, we introduce a new simultaneous phase-shifting interferometer for 3-D surface profilometry which employs a single glass plate to generate simultaneous phase-shifted interferograms. Phase reconstruction is performed by using a developed phase-shifting algorithm which uses a three-step phase-shifting method with phase differences of 90°, 180°, and 270° for three interferograms. To verify measurement accuracy and repeatability, the system was employed to measure surface profiles of surface of a flat mirror and set of Mitutoyo gauge blocks. The experiment result shows that the method is proven to be capable of performing one-shot interferometric measurement and minimizing influences from environmental disturbances with measurement repeatability down to 10 nm or less.     

Simple method for simultaneous determination of the phase retardation and fast axis of a wave plate

A simple method for simultaneous determination of the phase retardation and fast axis of a wave plate is presented. In this method, double light path compare system is adopted to achieve better accuracy. In the main optical path, laser beam passes successively through a polarizer, a wave plate to be measured, an analyzer, and then is incident on a detector. In the reference optical path, another detector is used to monitor the fluctuation of the light source. With rotation of the wave plate, the maximum and minimum output light intensity, rotation angle of the wave plate are detected in the main light path; corresponding light intensity are simultaneously detected in the reference light path. Based on the light intensity and the rotation angle, the phase retardation and fast axis of the wave plate can be determined simultaneously. The main advantage of this method is its simplicity of apparatus, easy operation, low cost, and high accuracy. We believe that the method reported in this paper should be a useful approach to measure a wave plate without requiring any complex and expensive components.     

A new method for analyzing the collimation angle of a neutron Soller collimator

A new method for analyzing the collimation angle of a neutron Soller collimator is described. A Gaussian distribution formula is used to define the angular distribution function of the neutron source and the neutron transmission function of the Soller collimator. A relationship between the FWHM of the collimator rocking curve and the collimation angle is derived. Using this method, some rocking curve experiment results are analyzed. The results show that the new function can be a good theoretical model for fitting the experimental data, especially for the data of two collimators with different collimation angles.     

Ultrasonic SH wave velocity in textured aluminium plates

Neutron diffraction has been used to measure the crystallite orientation distribution function for a sample of rolled aluminium plate. Based on this study an expression is given for the ultrasonic velocity of the fundamental horizontally polarized shear (SH) wave propagating in the plane of the plate at an angle θ to the rolling direction. This expression is correct to second order in the leading texture component and is compared with the exact numerical result and with measurements of the SH wave velocity for this plate. In textured materials the group and phase velocities are not, in general, parallel and an expression for the angle between them is derived. Inclusion of this effect leads to better agreement between experiment and theory. The results have application to the texture-independent determination of stress with ultrasonics recently proposed by MacDonald and Thompson et al.     

Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement

A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10⁻⁸ rad.     

红外波段复合消色差1/4波片的优化设计

 在三元复合式消色差波片设计的基础上,对拓宽消色差范围的重要因素——单波片延迟量和复合角度进行了进一步分析和测试,提出了优化设计方案;利用石英晶体设计了适用于红外光通信波段的复合消色差波片。理论和实验均表明：通过调整单波片延迟量或改变复合角度可使该波片在中心波长为1 400 nm的900 nm~1 800 nm波长范围内最大延迟偏差≤5%,而在光通信波段（1 200 nm~1 600 nm）该复合波片的最大延迟偏差只有3.2%。     

半导体激光器远轴光束的准直特性研究

对半导体激光器光束准直场的研究具有重要的意义,半导体激光器的远轴模型能精确描述其发出的光束。根据瑞利索末菲衍射公式,利用稳相法得出了半导体激光器远轴光束经过透镜准直后的场分布解析表达式。根据该表达式可以得出如下结论:准直后光束在两个方向上的光斑大小与透镜焦距成正比,且与传输距离无关,沿轴光强与波导尺寸参量和准直透镜焦距有关,且与透镜焦距成平方反比关系,在传输距离较短的情况下,准直光场相位分布近似为球面,传输距离较长时,光场相位近似为平面.这些结论在工程应用中具有重要的价值。