衍射型长程大型非球面轮廓测量仪

分析了基于衍射准直技术的f-θ系统的特点，在此基础上提出了一种新型长程面形仪用以实现对大型非球面光学表面，特别是同步辐射中掠入射光学元件的高精度轮廓测量。成功地研制了样机，目前新型长程面形仪样机的纵向扫描范围可达370mm，分辨率优于0．25μrad，单点稳定性小于0．7μrad/200s，全程测量精度可达1．14μrad，全长扫描的重复精度为0．09μrad。样机测试结果表明，新型长程面形仪轮廓测量方案能够胜任对第三代及后继同步辐射光源中各种非球面光学元件的轮廓测量任务。

A Diffractive Long Trace Profiler for Large Aspherical Optics

Characteristics of the f θ lens system based on diffraction alignment technique are analyzed, thereafter a novel diffractive long trace profiler (DLTP) for large aspherical optics, especially for those optical component used in synchrotron radiation, is introduced. Details of the DLTP such as the principle of its optical subsystem, characteristics of the diffraction pattern, data processing methods are investigated. A prototype of the DLTP has been developed, its scanning range is 370 mm, and the slope resolution is better than 0.25 μrad. Experimental results show that the prototype has excellent stability and precision even in rather poor circumstance without temperature controller and air condition, and the measurement stability is about 0.7 μrad/200 s, measurement precision within whole scanning range is 1.14 μrad.