基于波长扫描塔尔博特效应的阶高测量理论研究

近年来,多维阶高测量问题倍受关注,两波长或波长扫描方式的塔尔博特效应被应用于多维阶高测量.研究表明,基于塔尔博特(Talbot)效应的阶高测量方法具有仪器结构紧凑、无需机械扫描、稳定性高和测量范围大等优点.因没有光栅或检测器件的任何机械移动,可避免由此导致的相位问题及测量误差.取代相位信息,该方法采用衍射条纹的最大衬比度来判定塔尔博特像,测试中均采用占空比为1:2的龙基(Ronchi)光栅作为周期结构衍射物,利用不同波长塔尔博特像的像距来确定物体阶高.因为测量的是条纹衬比度而非绝对强度,所以阶高测量精度依赖于条纹衬比度,最大衬比度的获取与判定是非常重要的.在分析对比的基础上指出,采用非龙基型光栅,如正弦振幅光栅或相位光栅,能使成像条纹分布更合理,有效地提高成像条纹的衬比度.研究还表明,所采用周期结构衍射物的空间周期越小,分辨率就越高,从而给出了分辨率同衍射物空间周期的定量关系.     

铋光栅X射线相衬成像条纹对比度的定量计算

吸收光栅是X射线相衬成像系统的关键器件,铋吸收光栅由于其制作成本低廉且适于在普通实验室开展制作而受到青睐。提出了一种针对铋光栅X射线相衬成像条纹对比度的定量计算方法,通过建立模型,数值计算了不同铋层厚度的吸收光栅所对应的叠栅条纹对比度,并比较了π和π/2相位光栅两种情形下的结果。结果显示,随着吸收光栅铋层厚度的增加,条纹对比度逐渐增加,当源光栅和分析光栅的铋层厚度分别达到150μm和110μm时,利用π相位光栅在40kV管电压下其条纹对比度可达48%,60kV管电压下其条纹对比度只能达到22%。而在两个吸收光栅铋层厚度相同的情况下,采用π/2相位光栅所得条纹对比度略优于π相位光栅的结果。对铋光栅X射线相衬成像条纹对比度的计算分析,可作为X射线相衬成像系统设计的参考依据,推动该成像技术走向实用化。     

扫描积分塔尔博特光刻条纹质量影响因素模拟分析

基于角谱衍射理论,对扫描积分塔尔博特光刻术进行了理论分析与数值模拟。研究了扫描距离、扫描起始位置、扫描速度非匀速以及照明光源不同特性对扫描积分塔尔博特光刻所得光栅条纹质量的影响。模拟结果表明,当扫描距离为塔尔博特周期的整数倍时,扫描起始位置、扫描速度的非匀速性对扫描积分塔尔博特光刻的成像质量影响较小;当入射光源存在一定谱宽或发散角不大于0.05°时,扫描积分塔尔博特光刻仍可得到对比度较一致的倍频光栅条纹,证实了扫描积分塔尔博特光刻具有良好的工艺适用性。扫描积分塔尔博特光刻不需要昂贵而复杂的投影光学系统,可克服塔尔博特自成像有限焦深问题,对掩模与基片的定位精度及涂胶基片的平整度容忍度较高。该方法具有在非平面基底上制备大面积、低成本、高精度周期微纳结构的应用前景。     

部分相干同步辐射照射下光栅分数塔尔博特效应

基于高斯谢尔光束的相干模式分解理论和波动光学,建立了部分相干同步辐射硬X射线光束通过光学器件的传播模型。模拟了微聚焦X射线光束照射下光栅的分数塔尔博特效应,得到了聚焦光束的光强分布和相干特性变化,并分析了散焦光束入射下的光栅自成像。然后通过模拟准直光束入射下的光栅塔尔博特效应,得到了不同传播距离处自成像条纹的变化情况,分析了影响光栅自成像条纹形状的因素。通过光栅衍射条纹测量同步辐射相干度,发现对矩形相位光栅来说,应该对衍射图样进行傅里叶分解,求出各级傅里叶系数随传播距离的变化曲线,从而得到入射光束相干特性。     

基于级联光栅的X射线相衬成像实验研究

为避免小周期高宽比吸收光栅的制作,提出了由泰伯-劳干涉仪和逆泰伯-劳干涉仪组成的级联光栅X射线相衬成像装置,该装置利用泰伯-劳干涉仪的自成像作为逆泰伯-劳干涉仪的源.通过实验验证了该方法的有效性,得到了成像系统的莫尔条纹和强度振荡曲线.条纹最高对比度为17.4%,随着吸收光栅偏离零点位置,条纹对比度逐渐降低,但是在其位置跨越从-17mm到12mm的范围内,条纹对比度仍保持在10%以上.实验讨论了样品位置对成像灵敏度的影响,结果表明当样品位置靠近相位光栅两侧时,其成像灵敏度最高.本文的研究可应用于生物医学成像的大视场X射线相衬成像系统的设计.     

双能分析光栅的设计

双能X射线光栅相衬成像系统具有成像效率高、辐射小、无须步进装置、成像平台简单等优点。研究了不同X射线能量下,CsI厚度与荧光透射率、金属铋的厚度与光强透射率的关系。基于以上研究,设计了一种双能分析光栅,阐述了光栅结构及栅条的制作材料,分析了栅条厚度的计算方法。对双能分析光栅成像进行了仿真,结果表明,设计的双能分析光栅可以获得清晰的条纹图像,并具有良好的条纹对比度。将设计的双能分析光栅应用于双能X射线光栅相衬成像系统,对成像系统进行了仿真,成像系统可以获得被测物体的相位一阶导数图像,表明设计的双能分析光栅是有效的。     

纳米厚度贫铀/Au多层膜的制备及特性研究

理论和实验研究表明,纳米厚度周期调制的贫铀(DU)/Au多层膜材料具有高效的激光X射线转换效率. 采用交替磁控溅射制备纳米厚度的DU/Au平面多层周期结构,通过白光干涉仪、扫描电子显微镜、 X射线光电子能谱对DU/Au多层膜的几何参数、表面形貌、成分以及界面形貌进行表征.实验结果表明: 8 nm为Au连续成膜的厚度阈值,结合理论计算最优化原子配比,选取DU层厚度为30 nm、 Au层厚度为8 nm的调制周期结构;实测周期厚度为37 nm;扫描电子显微镜照片显示DU/Au分层明显; X射线光电子能谱深度刻蚀分析表明DU/Au界面处存在扩散, DU, Au, O三者原子比为73:26:1; 由于团簇效应, Au原子4f电子结合能向高能端移动,没有观察到DU相应的电子结合能移动现象.     

多层介质膜脉冲压缩光栅近场光学特性分析

利用傅里叶模式理论分析了TE波自准直角入射的使用条件下，多层介质膜光栅的光栅区和多层膜区电场分布的特点.分别讨论了HfO₂和SiO₂为顶层光栅材料时，光栅结构参数对光栅脊峰值电场的影响，结果表明，对于不同膜厚的顶层材料，存在一个最佳膜厚度，使光栅脊峰值电场最小，并且当膜厚增大时，设计大高宽比的光栅可以降低该电场峰值.最后，在大角度条件下使用多层膜光栅也可以降低光栅脊处的峰值电场. 关键词： 衍射光学 多层介质膜光栅 模式理论 损伤阈值     

AIN/Si3N4 纳米多层膜的外延生长与力学性能

采用射频磁控溅射方法制备单层AlN,Si3N4薄膜和不同调制周期的AlN/S3N4纳米多层膜.采用X射线衍射仪、高分辨透射电子显微镜和纳米压痕仪对薄膜进行表征.结果发现,多层膜中Si3N4层的晶体结构和多层膜的硬度依赖于Si3N4层的厚度.当AlN层厚度为4.0 nm、Si3N4层厚度为0.4nm时,AlN和Si3N4层共格外延生长,多层膜形成穿过若干个调制周期的柱状晶结构,产生硬度升高的超硬效应.随着Si3N4层厚的增加,Si3N4层逐步形成非晶并阻断了多层膜的共格外延生长,多层膜的硬度迅速降低,超硬效应消失.采用材料热力学和弹性力学计算了Si3N4层由晶态向非晶转变的临界厚度.探讨了AlN/Si3N4纳米多层膜出现超硬效应的机理.     

多层介质膜脉宽压缩光栅的严格矢量分析

用于展宽和压缩激光脉冲的多层膜脉宽压缩光栅是由多层介质高反膜和位于其顶层的浮雕光栅构成。以设计的高反射多层膜为基础,利用傅里叶模式理论分析了其衍射场分布,给出了TE波自准直角入射的使用条件下,多层介质膜脉宽压缩光栅衍射效率的表达式。以-1级衍射效率为评价函数,分别讨论了HfO2和SiO2为顶层材料时,多层膜脉宽压缩光栅-1级衍射效率高于0.95的光栅结构参量范围。结果表明,在该条件下,选择HfO2为顶层材料时,光栅结构参量有较大的取值范围。给出了优化的光栅结构参量,并分析了光栅制作误差及其使用条件的宽容度,对光栅制作工艺和使用具有一定的指导意义。     

Use of steel substrates in diffractive optics: Near field of high surface quality steel tape gratings

Steel tape is used in optical applications due to its mechanical properties. However, roughness of steel surfaces affects to wave propagation. The effect can be observed using diffraction gratings with low periods. In such a case, self-images of the grating appear at certain periodic distances from the grating (Talbot planes). When standard steel is used, the contrast of Talbot self-images strongly decreases with the distance from the grating. In this work, we prove that controlling the surface quality of steel, it is possible to improve its optical behavior and, as a consequence, high quality surface steel represents a good choice for diffractive optics when the use of chrome-on-glass masks is not indicated. As an example, we have manufactured a diffraction grating over a high quality steel surface by means of an ablation process with a nanosecond pulsed laser. The contrast of the self-images for these gratings decreases very slowly with the distance, in comparison with the self-images obtained with standard steel tape gratings.     

利用保角变换实现环形光栅的Talbot效应

Talbot效应是一种近场自成像效应,通常只有周期光栅可以产生Talbot效应,而环形光栅无法产生.本文通过引入保角变换,发现可以在环形光栅外部设计适当的折射率渐变层介质,使得其中也能够产生严格的Talbot效应,并计算了对应的自成像半径表达式.本文利用FDTD软件分别将一个环形光栅放置在真空中以及人工设计的折射率渐变层中进行了模拟,并对二者的结果进行了比较分析,发现这种折射率渐变层介质确实对点光源入射的环形光栅的自成像情况有着很好的改善.希望这一工作能够推广Talbot效应的应用范围.     

Self-imaging with curved gratings

We analyze the near field behavior of binary amplitude gratings which present a curved profile. This configuration has an important application in rotary optical encoders. This kind of encoders is used to measure the angular displacement between two different parts of the devices. To our knowledge, its behavior in the near field has not been analyzed yet. We have found that Talbot effect is produced but the period of the self-images and Talbot distances change as we separate from the grating. We have fabricated a curved grating and have performed the experiment to corroborate the behavior theoretically found. This fact could be useful in systems that use Talbot effect to measure displacements, since the mechanical tolerances grow.     

Quasi-fractional Talbot effect of resonant diffraction grating

The Fresnel diffraction of resonant diffraction grating is studied on the basis of the modal method, and it shows that the conventional fractional Talbot effect can still occur by choosing appropriate parameters. The Fresnel diffraction distributions of the resonant diffraction gratings with periods between λ and 4λ are analyzed, and the diffraction fields exhibit periodicity in both grating direction and the propagating direction. The experiment is carried out to verify the simulation results of the quasi-fractional Talbot effect of the resonant diffraction grating. This effect has potential application in lithography for high-resolution patterning.     

一般多值相位光栅菲涅耳衍射光场的分析

基于光栅结构与距离的关系,给出了一种求解一般多值相位光栅菲涅耳衍射光场的解析表达式利用该表达式可以直接分析一般多值相位光栅的分数泰伯数效应及在阵列照明中的应用,克服了间接分析法只能分析某些类型的泰伯阵列照明器的不足之处.     

Talbot effect of a high-density grating under femtosecond laser illumination

The Talbot effect of a high-density grating under femtosecond laser illumination is analyzed with rigorous electromagnetic theory which is based on the Fourier decomposition and the rigorous coupled-wave analysis (RCWA). Numerical simulations show that the contrast of the Talbot images steadily decreases as the transmitted femtosecond laser pulses propagate forward and with wider spectrum width of the femtosecond laser pulses. The Talbot images of high-density gratings have much higher sensitivity of the spectrum widths of the incident laser pulses than those of the traditional low-density gratings. In experiments, the spectrums and the pulse widths of the incident pulses are measured with a frequency-resolved optical grating (FROG) apparatus. The Talbot images are detected by using a Talbot scanning near-field optical microscopy (Talbot-SNOM) technique, which are in coincidence with the numerical simulations. This effect should be useful for developing new femtosecond laser techniques and devices.     

3-光栅系统的干涉效应

本文用部份相干的观点提出并研究了三个独立光栅串联排列系统的干涉效应。用模糊函数导出了干涉条纹光强分布为三个光栅等效函数的联合卷积-相关积分。给出了条纹存在的光栅间距离和周期比条件。随光源光栅狭缝宽度的变化相应产生相干的Talbot效应、部份相干效应和非相干的Lau效应。部份相干条纹的波形随光栅的平移而变化。最后给出了实验验证。 关键词：     

多层膜闪耀光栅衍射的运动学研究

用 X射线运动学理论对软 X射线多层膜闪耀光栅的衍射特性进行了详细的研究 ,得到了衍射规律的一般表达式 ,讨论了产生衍射极大值的条件、光谱特性 ,不同于光栅和多层膜的色散特性。以及用作软 X射线单色器的一般性问题。发现只要选择合适的光栅参数 ,便可以将衍射光的大部分能量集中到某一个非零衍射级上。     

Collimation method using fourier imaging and moire techniques

Two techniques are proposed for beam collimation with the Talbot interferometer. One is called the mismatch method in which two gratings with slightly different periods are used. In the other method (called the grating shift method), one of two gratings of the same period is shifted in its plane in the direction perpendicular to the grating lines.     

The influence of the polarization effect in Talbot self-imaging of high-density gratings

The Talbot self-imaging of high-density gratings with different period at half Talbot distance for different polarization is analyzed with the finite-difference time-domain (FDTD) method. The numerical results indicate that the Talbot self-imaging of high-density gratings is obviously different for different polarization when the period d of the grating between 2λ and 3λ, which is verified through experimental results with the scanning near-field optical microscopy (SNOM) technique. Furthermore, the Fourier spectrum (far field) generated by the gratings is also given with the rigorous coupled-wave method, which is in agreement with the near field.