多波长广角f-theta透镜光学设计

f-theta透镜作为激光扫描系统中必不可少的部件,对系统工作面尺寸、测量速度、测量精度等起着决定性的作用。为改变以往f-theta透镜扫描范围小、工作波长单一等不足,设计出了一种工作于486 nm~656 nm波段的广角f-theta透镜。通过初级像差分析,确定系统的初级结构参数,利用光学材料的不同色散性能分配合理的光焦度来进行色差校正。设计结果表明:f-theta镜头像散值在像差容限范围内满足平像场要求,f-theta镜头系统最大色差为3 μm,线性畸变误差值不超过0.015%,光能利用率接近90%,聚焦性能接近衍射极限,满足多工作波长、高精度激光打标机的实际需求。     

MEMS变形反射镜主要特性测试

介绍了基于微机电系统技术的微变形反射镜的基本结构和电极分布.分析了微机系统变形镜的变形原理,推导了微变形镜的镜面变形与外加驱动电压的关系.分析了基于计算机控制的频闪显微干涉测量系统的组成及测试原理,并利用该系统实现了对微变形镜静态电压-位移曲线、静态面形、动态离面变形以及谐振频率的测试.实验表明,测试结果与理论分析有很好的一致性.     

MEMS变形反射镜主要特性测试

介绍了基于微机电系统技术的微变形反射镜的基本结构和电极分布.分析了微机系统变形镜的变形原理,推导了微变形镜的镜面变形与外加驱动电压的关系.分析了基于计算机控制的频闪显微干涉测量系统的组成及测试原理,并利用该系统实现了对微变形镜静态电压-位移曲线、静态面形、动态离面变形以及谐振频率的测试.实验表明,测试结果与理论分析有很好的一致性.     

超广角大工作面f-theta镜头的光学设计

 目前国内用于激光标刻机的f-theta镜头的视场角一般小于60°。采用望远镜结构,利用视觉放大率增大视场角,得到了超广角90°镜头。该方法具有简洁、可靠、易实现等特点。通过初级像差分析,确定系统的初级结构参数,利用ZEMAX软件优化得到了大工作面为285 mm的f-theta镜头,镜头线性畸变误差值不超过1 %,在半径为698 μm的圆内,能量集中度为80%,聚焦性能接近衍射极限。     

用于半导体激光打标机的谐衍射/折射f-theta镜

根据半导体激光器发射波长的范围和谐衍射透镜的特点,讨论了含有谐衍射光学元件的混合f-theta镜的设计.将谐衍射面型引入到半导体激光器及Nd:YAG激光器打标镜的设计中,使用普通的光学材料,使系统在0.8-1.5 μm波段内很好地校正了各种单色像差和色差,在各个分立波长上系统的光学传递函数接近或达到衍射极限.系统结构紧凑、片数少、兼容性好、具有良好的像差特性,适用于半导体激光器及Nd:YAG激光器打标系统.     

基于2D微电子机械系统(MEMS)镜全向激光雷达光学系统设计

为了满足全向激光探测的需求,提出一种基于2DMEMS镜扫描的激光雷达结构。激光器通过1×6高速光开关分时地给6个扫描子系统提供光信号,6个扫描子系统探测视场叠加起来可实现360°激光探测。每个扫描子系统的扫描范围为60°×30°,其中包含一个扩展MEMS镜扫描角度的发射光学天线和一个大视场有增益的接收光学天线。发射光学天线将MEMS镜±10°的扫描角扩展到±30°,发散度小于0.2mrad;接收视场内的激光波经过接收天线在探测器上所成的半像高小于1mm,接收增益为3.65。通过计算修正后的激光雷达方程可得到发射功率20 W的激光束在工作距离100 m内的回波功率≥1 nW,结果表明该光学系统可适用于激光雷达系统。     

Active Phase-Shifting Interferometer Using Current Modulation of a Laser Diode

An active phase-shifting interferometer using current modulation of a laser diode is proposed. Fringe movement in the instrument is detected by a spatial filtering detector whose output is fed back to the injection current of the laser diode to lock the fringes and shift them correctly for phase shifting analysis. Frequency modulation characteristics of the laser diode and frequency response of the feedback system are first investigated. We constructed a portable interferometer head set apart from a mirror under test then measured the shape of a spherical mirror 130 mm in diameter, which was placed on a wooden table subject to vibration. Measurement repeatability of λ/35 was achieved.     

大口径球面反射镜曲率半径的精确测量

介绍了大口径球面反射镜曲率半径的传统测量方法,提出了利用组合测杆结合激光干涉仪测量球面反射镜曲率半径的新方法。首先利用激光干涉仪检测球面反射镜的面型,调整干涉仪与被测镜的位置,使被测镜达到零条纹干涉状态,然后架设合理长度组合测杆,调整组合测杆靠近干涉仪端测量球头的位置,使之达到零条纹干涉状态,再使组合测杆另一端测头与镜面接触完成测量,通过计算分析即可得到被测球面镜的曲率半径。对该方法的基本测量原理进行了研究分析,并对口径为600 mm的望远镜球面主镜的曲率半径进行了多次测量,测得其曲率半径均值为2 836.774 mm,标准偏差为0.071 mm。最后对该方法的测量不确定度进行了分析,找出了影响测量精度的主要因素,合成标准不确定度为0.061 mm。     

电磁驱动大尺寸MEMS扫描镜的研究

基于微机电系统工艺,设计并制作了一种电磁驱动大尺寸的二维扫描振镜.分析了两种不同的电磁驱动方式产生的力的大小,选择驱动力较大的双极子方式作为驱动.运用有限元法模拟了器件的谐振频率静态及动态响应,仿真结果与实际测得的结果一致.描述了振镜的工艺流程及封装方式,并制备了振镜.实验测得振镜在120mA静态电流驱动下,慢轴和快轴分别能达到的最大转角为±4.5°及±5°,慢轴及快轴的谐振频率分别为348Hz及660Hz,并得到在此谐振频率下的李萨如图形.将器件用于激光成像系统之中,使得散斑对比度下降到4.2%,激光成像质量得到很大提升.     

计算电容中Fabry-Perot干涉仪测量位移的相位修正方法

计算电容是复现电学阻抗单位的基准装置, 利用计算电容值和量子霍尔电阻值可以准确计算出精细结构常数α. 计算电容的本质是通过高准确度地测量屏蔽电极的位移, 实现对电容量值的测量. 因此, 基于Fabry-Perot干涉仪的精密电极位移测量系统是计算电容装置中最为核心和关键的部分. 在Fabry-Perot干涉仪测位移过程中, 由于高斯激光束存在轴向Gouy相位, 该附加相位将会引起相邻干涉条纹对应位移的变化(大于或者小于λ/2), 导致位移的测量值与实际值存在偏差. 本文阐述了高斯激光场的传播特性, 利用高斯激光束在自由空间和透过薄透镜复振幅的变换关系, 建立了计算电容装置中Fabry-Perot干涉仪透射光束的传输模型; 通过对不同腔长的Fabry-Perot干涉仪透射光场相位的分析, 获得了高斯激光束轴向Gouy相位修正与传输距离的关系. 结果表明, 当腔长从111.3 mm移动至316.3 mm时, 在接收距离为560 mm的情况下, 高斯光束轴向Gouy 相位引起的位移修正的绝对值最小为0.7 nm, 其相对相位修正量|δL|/|ΔL| = 3.4×10^-9.     

激光无铅钎焊速度的影响因素(英文)

为了提高激光无铅钎焊的速度,对影响激光无铅钎焊速度的因素(如激光的参数、所用钎料和基体的特性、钎焊的系统结构等)进行了分析研究。研究认为,在激光器、钎料及基体等已定的情况下,相对于那些受到机械惯性制约的移动激光加工头或移动工作台的激光钎焊系统,一种配备了振镜扫描系统和f-theta聚焦透镜的激光钎焊系统具有更高的钎焊速度。另外,对激光钎焊过程中激光束的扫描路径进行了优化,这种优化能在不增加硬件成本的基础上大大缩短总扫描路程,较大程度地提高激光钎焊速度。最后通过实例对激光钎焊的快速性进行了验证。     

Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

An extensive characterization of the spectral properties of a largely tunable laser in the 1.56-μm spectral range is reported. This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement. The large tunability obtained by an electro-thermal actuation of the MEMS mirror makes this device very attractive for high-resolution spectroscopy. Relevant laser parameters for the implementation of wavelength modulation spectroscopy techniques in gas sensing, such as tuning and modulation properties, are presented. A preliminary gas spectroscopy experiment performed with this laser is also shown.     

Two-wavelength speckle interferometry on rough surfaces using a mode hopping diode laser

Two measurements performed on rough surfaced objects are described in this paper. The first sample is a mechanical component with a rather difficult accessible surface to be measured. A two-wavelength krypton laser interferometer with an effective wavelength of 36.47 μm has been used. The second example is a convex surface of a ground lens. Here a mode hopping diode laser interferometer with an effective wavelength of 2·020 mm has been used.     

一种折反式红外/激光复合导引头光学系统设计

设计了一种用于长波非制冷红外和半主动激光复合导引的共口径折反式光学系统。为了减小反射式系统的零件加工和装调难度,将卡塞格林系统次反射镜简化为平面反射镜,主反射镜采用金属抛物面,优化目镜组透镜尺寸,避免光路内部遮挡,利用反射式系统一次像面,配合红外材料选取实现红外通道的光学被动消热差设计;在平行光路中设置平板分光和激光窄带滤光片,提高系统分光效率和透过率。设计结果表明:红外通道特征频率35.7 lp/mm处MTF＞0.2,激光线性区为2°,满足系统指标要求。     

小型化望远式激光共焦扫描显微内窥镜

研制了一种激光共焦扫描显微内窥镜,采用望远式显微内窥光学系统,同时实现长距离的图像中继传输、远心f-theta光学扫描和显微内窥成像功能.二维共焦扫描由双振镜实现,低噪音扫描控制信号由嵌入式系统产生.为实现便携式应用,激光共焦扫描显微内窥镜采用小型化设计方案.首先,体内的显微内窥成像光学系统,外径尺寸为8 mm,工作长度为250.3 mm,可通过标准腹腔镜手术孔进行体内显微内窥成像;其次,采用3 mm通光孔径的小尺寸平面反射镜实现体外共焦扫描,摆动频率为100 Hz,实现快速共焦扫描;最后,激光控制和荧光探测仅通过电缆和光纤与共焦扫描显微内窥镜前端连接,减小了显微内窥镜的前端尺寸和重量.通过实验验证,本系统的成像视场为φ 600 μm,光学分辨率为2.2 μm,可采用手持式或者其他方式工作,进行体内组织的共焦扫描成像,实现微创、在体的荧光显微内窥术.     

Doppler optical coherence tomography with a micro-electro-mechanical membrane mirror for high-speed dynamic focus tracking

An elliptical microelectromechanical system (MEMS) membrane mirror is electrostatically actuated to dynamically adjust the optical beam focus and track the axial scanning of the coherence gate in a Doppler optical coherence tomography (DOCT) system at 8 kHz. The MEMS mirror is designed to maintain a constant numerical aperture of approximately 0.13 and a spot size of approximately 6.7 microm over an imaging depth of 1mm in water, which improves imaging performance in resolving microspheres in gel samples and Doppler shift estimation precision in a flow phantom. The mirror's small size (1.4 mm x 1 mm) will allow integration with endoscopic MEMS-DOCT for in vivo applications.     

同步辐射压弯准直镜姿态的检测--大曲率半径小口径光斑的波前检测

提出了利用微小楔角剪切干涉仪测量同步辐射压弯准直镜姿态的方法。利用透镜和针孔产生与同步辐射发散度相同的激光束。通过剪切干涉仪．测量经压弯准直镜输出激光束的平行度,可将准直镜的位置、俯仰角度和镜面曲率皆调整到最佳。该剪切干涉仪结构简单,可根据条纹图样判断光束的平行度,每一幅干涉条纹图样与准直镜的一种姿态对应,因而这种方法能确定准直镜表面各点反射X射线的整体效果。该方法适用于测量波前曲率半径大竖直口径小的光束,不但精度高．而且具有实用价值。     

Analysis and compensation of thermal lens effects in Tm：YAP lasers

The thermal lens effects in Tm：YAP laser are analyzed by solving the Poisson equation with finite difference method. The thermal focal lengths measured are in the range of 40-90 mm at the pump power of 16-34 W, consistent with the simulation results. The temperature contribution coefficient （the linear coefficient between the maximum temperature in the laser crystal and the pump power） of 1.19 K/W is also obtained. The convex lens and plano-concave mirror thermal lens compensation methods are proposed and applied to a high power pumped Tm：YAP laser.     

Ring fibre laser with interferometer based in long period grating for sensing applications

This work presents two distinct configurations based on phase-wavelength conversion using a ring fibre laser with two different long period gratings interferometer topologies. The sensors are interrogated by analysing the wavelength change of the emission laser, which is directly dependent on the interferometer phase change. The first configuration integrates a Mach-Zehnder interferometer, which is based on a pair of long period gratings and is used as sensing head for bending radius and longitudinal strain measurement. The second configuration, comprehends a Michelson interferometer, which is based on a single LPG and a fibre end mirror and is used as a liquid level sensor or as an optical refractometer.     

The application of an optical Doppler frequency discriminator in a laser velocimeter

A laser velocimeter is described which uses an optical Doppler frequency discriminator in the form of a spherical mirror confocal Fabry-Perot interferometer (SFPI). The SFPI pass band is made to coincide with the laser frequency using a system of external control. Experimental results are given.