电磁驱动大尺寸MEMS扫描镜的研究

基于微机电系统工艺,设计并制作了一种电磁驱动大尺寸的二维扫描振镜.分析了两种不同的电磁驱动方式产生的力的大小,选择驱动力较大的双极子方式作为驱动.运用有限元法模拟了器件的谐振频率静态及动态响应,仿真结果与实际测得的结果一致.描述了振镜的工艺流程及封装方式,并制备了振镜.实验测得振镜在120mA静态电流驱动下,慢轴和快轴分别能达到的最大转角为±4.5°及±5°,慢轴及快轴的谐振频率分别为348Hz及660Hz,并得到在此谐振频率下的李萨如图形.将器件用于激光成像系统之中,使得散斑对比度下降到4.2%,激光成像质量得到很大提升.

Research on Large Size MEMS Scanning Mirror Driven by Electromagnetic

Based on the Micro Electronic Mechanical System(MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented.Two different driving methods were compared, and the method of dipole driving was chosen because of its higher torque.Meanwhile, the static response and dynamic response of the device were analyzed by using finite element simulation, the simulation results matched with the measurement data of the device.The fabrication and packaging steps for the MEMS mirror were described in details, and the mirror was fabricated.The testing results show that when the driving current reaches 120 mA, the MEMS mirror has static titling angles of ±4.5° and ±5° along slow axis and fast axis respectively.The scanning resonant frequency for the mirror along slow axis is 348 Hz, and 660 Hz along fast axis.Finally, the MEMS mirror was used in laser display system to reduce the laser speckle, the speckle contrast can be reduced to 4.2%, and the image quality of a laser display system can be greatly improved with the MEMS mirror.