多光束纳秒紫外激光制作硅表面微结构

使用波长351 nm的半导体泵浦全固态脉冲激光器作为光源,经过位相光栅分束,形成干涉光场,在硅表面直接刻蚀微结构,制作了周期为0.55 μm,槽深可达55 nm的一维微光栅和周期为1.25 μm,刻蚀深度45 nm的正交微光栅结构.给出了微光栅形貌结构的扫描电子显微镜和原子力显微镜的测量结果.正交微光栅的一级衍射效率在1.8%～6.3%之间.该研究是改变硅表面微结构,优化硅材料特性的一种新方法,并扩展了大功率激光刻蚀在表面微加工领域的应用.     

1064 nm纳秒脉冲激光诱导硅表面微结构研究

利用Nd:YAG纳秒激光(波长为1064 nm)在不同气氛(空气、N₂,真空)中对单晶硅进行累积脉冲辐照,研究了表面微结构的演化情况.在激光辐照的初始阶段,与532和355 nm纳秒脉冲激光在硅表面诱导出波纹结构不同,1064 nm脉冲激光诱导出了微孔结构和折断线结构,并且硅的晶面取向不同,相应的折断线结构也不同.对于Si(111)面,两条折线交角为120°或60°,形成网状;而对于Si(100)面,两条折断线正交,从而将表面分成了15—20 μm的矩形块.结果表明,微孔结构的生长过程主要与相爆炸有关,而折断线的形成主要是热应力作用的结果.不同气氛对微结构形成的影响表明,刻蚀率和生长率与微结构的形成有密切的关系. 关键词： 纳秒激光 硅的微结构 相爆炸 热应力     

多光束纳秒紫外激光制作硅表面微结构

使用波长351 nm的半导体泵浦全固态脉冲激光器（DPSSL）作为光源,经过位相光栅分束,形成干涉光场,在硅表面直接刻蚀微结构,制作了周期为0.55 µm,槽深可达55 nm的一维微光栅和周期为1.25 µm,刻蚀深度45nm的正交微光栅结构。给出了微光栅形貌结构的扫描电子显微镜(SEM)和原子力显微镜(AFM)的测量结果。正交微光栅的一级衍射效率在1.8%到6.3%之间。该研究是改变硅表面微结构,优化硅材料特性的一种新方法,并扩展了大功率激光刻蚀在表面微加工领域的应用。     

飞秒传输表面等离激元的近场成像表征与激发效率的调控

飞秒传输表面等离激元(femtosecond propagating surface plasmon, fs-PSP)的近场成像表征和激发效率的主动控制是实现其应用的先决条件.本文利用光发射电子显微镜对银纳米薄膜上刻蚀的凹槽耦合结构处激发的fs-PSP进行近场成像.并系统测量了入射激光波长在720—900 nm范围内fs-PSP近电场与入射激光场干涉信号的周期和fs-PSP的波长.在此基础上,进一步利用飞秒双光束泵浦-探测实验证实了调节入射激光的偏振方向可实现对fs-PSP激发效率的调控.由实验结果可知,当入射激光偏振接近0°(P偏振)时, fs-PSP的激发效率最高,当入射光偏振接近90°(S偏振)时, fs-PSP的激发效率最低.相较于有限时域差分方法模拟,在飞秒双光束泵浦-探测实验中归一化光发射电子产额随入射激光偏振方向变化的曲线出现平台区,我们把这一现象归因于探测激光的背景噪声淹没了fs-PSP激发效率的变化.该研究为实现fs-PSP激发效率的工程性调控和优化等离激元器件的性能奠定了基础.     

薄膜微结构的近红外透射诱导增强特性

在SiNx薄膜中引入微金字塔结构,综合利用包含界面的薄膜光学微结构的折射、衍射与干涉现象,实现透反射的调控.通过单点金刚石切削与纳米压印、等离子体各向异性刻蚀技术相结合,将大面积、高效率、低成本的微结构制备方法推广至光学薄膜中,实现了多种尺寸的金字塔薄膜微结构的制备,结构单元尺寸可以在1.5～10μm之间进行调控.光谱特性检测结果表明,SiNx薄膜微金字塔结构阵列在近红外至长波红外波段,表现出超宽波段的减反射特性;在0.8～2.5μm的近红外波段,反射率低于1.0%;在3～5μm的中红外波段,反射率小于2.5%;在10～12μm长波红外波段,平均反射率低于5%;与传统的四分之一波长抗反射膜系相比,SiNx薄膜微金字塔结构阵列的减反射效果的实现,无需膜系设计时的折射率匹配,简化了膜系结构.研究发现SiNx薄膜微金字塔结构阵列的近红外透射诱导增强特性,高度为2～4μm的SiNx薄膜微金字塔结构阵列,均在2.1μm波长处出现明显的透射诱导增强效应,且高为4μm,底宽为8μm的微金字塔结构阵列的透射增强作用最为明显,透射率达到了96%以上.实验检测与仿真分析证明,透射增强的位置和强度由微结构的形貌尺寸及其结构比例关系决定.     

硫化锌表面微结构抗反射特性的理论模拟及制备EI北大核心CSCD

针对硫化锌表面微纳米结构在中远红外波段7~10μm的增透性能开展理论及实验研究。基于时域有限差分软件建立物理模型,理论研究微结构参数变化对减反性能产生的影响,依据红外光谱值分布图宏观展示微结构参数与透过率的关系。利用飞秒激光在空气环境中制备不同规格的微纳米结构阵列,通过实验实现了设计的结构。分别测试样品在中远红外波段7~10μm范围内透过率,其中8μm的网格结构在8.5~10μm波段的平均透过率可提高4%,在10μm波长处透过率提升7%。实验结果表明所制备的结构具有良好的抗反射性能。对比结果显示实验所示透过率变化趋势与仿真结果具有一致性。     

背景气体对激光等离子体和外磁场界面上槽纹不稳定性的影响

等离子体在外磁场中膨胀产生的抗磁腔和不稳定性是空间物理和聚变物理中的重要现象.本文实验研究了激光产生的等离子体在外磁场中膨胀时在抗磁腔表面产生的槽纹不稳定性,数据分析显示实验中观察到的不稳定性属于大拉莫尔半径槽纹不稳定性.实验发现充入稀薄背景气体能够显著抑制槽纹不稳定性的发展,背景气体气压超过50 Pa时(约为抗磁腔表面等离子体密度的1%),槽纹不稳定性几乎被完全抑制.动理学分析表明离子-离子碰撞是抑制不稳定性发展的主要因素.这些结果对磁场辅助激光聚变和爆炸空间物理现象等领域有重要参考价值.     

锗衬底表面圆柱形仿生蛾眼抗反射微结构的研制EI北大核心CSCD

采用严格耦合波分析方法研究了长波红外波段锗基底的圆柱形周期阵列仿生蛾眼抗反射微结构的衍射特性,并进行理论分析和模拟仿真验证。重点分析了周期、深度、占空比和整体面型轮廓等参数对微结构抗反射特性的影响,得出具有较好抗反射效果的结构组合参数。采用二元曝光技术和反应离子刻蚀技术在锗基底上制备该亚波长周期微结构。通过热场发射扫描电子显微镜对微结构表面形貌进行表征,并应用红外成像光谱仪在长波红外波段分别对双面抛光锗片、单面微结构和双面微结构进行测试对比,结果显示在8~12μm范围内双面微结构的反射率小于8%,基本达到设计要求。     

锗衬底表面圆柱形仿生蛾眼抗反射微结构的研制

采用严格耦合波分析方法研究了长波红外波段锗基底的圆柱形周期阵列仿生蛾眼抗反射微结构的衍射特性,并进行理论分析和模拟仿真验证。重点分析了周期、深度、占空比和整体面型轮廓等参数对微结构抗反射特性的影响,得出具有较好抗反射效果的结构组合参数。采用二元曝光技术和反应离子刻蚀技术在锗基底上制备该亚波长周期微结构。通过热场发射扫描电子显微镜对微结构表面形貌进行表征,并应用红外成像光谱仪在长波红外波段分别对双面抛光锗片、单面微结构和双面微结构进行测试对比,结果显示在8~12μm范围内双面微结构的反射率小于8%,基本达到设计要求。     

飞秒激光多光束干涉光刻硅表面减反微结构

为了得到均匀分布的硅表面微结构,提出了一种利用多束激光干涉光刻的方法来实现对硅表面微结构分布特征的控制.利用空间光调制器实现飞秒激光多光束干涉,形成分布均匀、周期可控的空间点阵,利用聚焦的空间点阵在单晶硅表面烧蚀得到规则分布的凹坑状结构,并通过改变附加给空间光调制器的相位实现对微结构分布特征及间距的控制.用扫描电子显微镜和分光光度计分别对结构的形貌特征和光学特性进行了测量,结果表明:采用底角为2°的四棱锥镜相位形成四光束干涉,通过10×物镜聚焦,在激光功率25 mW、曝光时间30 s时,可以形成间距约为3.3 μm的密排凹坑微结构,所形成的凹坑结构具有良好的减反效果,在1.2～2μm近红外波段的透过率相对抛光硅平均提高了11.5％o.     

X-ray backlighting of two-wire Z-pinch plasma using X-pinch

Two 50-μm Mo wires in parallel used as a Z-pinch load are electrically exploded with a pulsed current rising to 275 kA in 125 ns and their explosion processes are backlighted using an X-pinch as an x-ray source.The backlighting images show clearly the processes similar to those occurring in the initial stages of a cylindrical wire-array Z-pinch,including the electric explosion of single wires characterised by the dense wire cores surrounded by a low-density coronal plasma,the expansion of the exploding wire,the sausage instability (m=0) in the coronal plasma around each wire,the motion of the coronal plasma as well as the wire core toward the current centroid,the formation of the precursor plasma column with a twist structure something like that of higher mode instability,especially the kink instability (m=1).     

X-ray laser studies at LLE

New target geometries for collisional excitation X-ray laser experiments (in nickel) were proposed, analyzed, and experimentally studied on the glass development laser. The new geometries are designed to yield a higher gain and reduced refraction due to (1) a higher plasma density, (2) a wide lateral density profile, and (3) a concave lateral density profile. These new geometries were (a) two parallel exploding (thin) foils, irradiated from one side only, (b) two ablating (thick) foils, one of which was irradiated on its inner face, and (c) and exploding foil in front of an ablating foil, irradiated by a single laser beam incident on the thin foil. Long-line-focus experiments are described. Theoretical developments included development of a ray-tracing code for an amplifying medium of varying lateral density profile and prediction of high gain on new type transitions in neon-like ions, involving the excitation of an inner (2 s) electron     

Feasibility studies on performance enhancement in electrically exploding foil accelerators

Electrically exploding foil (EEF) technique offers a unique small-scale device to accelerate thin plastic foils (liner) to high (>10 km) velocities. Besides direct application as a macroparticle accelerator for various applications, such systems can also serve as plasma injectors or pre-accelerators to electromagnetic launchers. Though empirical models for scaling of liner velocity in such devices suggest the important role of burst current density in exploding foil, but behavior of slow and fast (dI/dt/spl ges/10/sup 12/ A/s) systems appear to differ significantly. In this paper, based on some established models and realistic current profiles, it is inferred that higher energy of a capacitor bank may not translate to higher velocity in "optimized" EEF systems, if its rise time is poor. A possible way to overcome this problem could be to use an additional stage of metallic foil as an opening switch. The consequent fast rising current may be expected to enhance the liner velocity by a factor of 2-5 in typical capacitor banks. Analysis and relevant experiments are described to investigate the issues.     

Disintegration of metastable liquid during electrical explosion of aluminum foil

The mechanisms of disintegration of a metal melt formed during electrical explosion of aluminum foils are experimentally and theoretically investigated. The experiments were carried out on an experimental setup consisting of two current generators, one of them provided microwire explosion, while the other, an x-pinch radiograph, was used for diagnostics. In the experiments, the upper time limit of disintegration of metastable state of exploding aluminum foil was determined. For the metastable state of aluminum at internal energy of 3.5–4.5 kJ/g the calculated nucleation velocity exceeds 10¹⁴ cm^?3 · s^?1 and the critical nucleation energy is 9 ± 0.3 eV.     

Study of current drain during electrochemical etching of polycarbonate detectors

Polycarbonate (PC) detector is one of the common detectors for neutron and radon gas detection. Using this detector it is possible to measure the dose in mSv, by counting tracks/cm² on an etched surface. In this paper, a special procedure has been suggested to determine the dose based on current drain during the etching process. In these experiments the effects of voltage, frequency, effective etched area, PC detector's thickness, etched area (one side or two sides), etching solution temperature and dose absorbed by the PC foil have been studied.The results obtained show the current drain variation for a voltage of 200–1600 V, a frequency of 2–10 kHz, effective area with a diameter of 2–12 cm, PC thickness of 125–250–375– and a temperature of etching solution of 25–.Lexan PC foils were exposed to doses of of neutrons. The unexposed foils were considered as the background (BG) foils. Most of the experiments were performed at a voltage of 800 V, a frequency of 2 and 8 kHz, foil thickness of , diameter of effective etched area of foils of 2, 6 and 12 cm, temperatures of 25 and and the etching process from 0 up to overload stage. Overload stage occurs when the foil becomes so thin due to growth of the tracks that it leads to sparking between phase and null that makes a hole in the foil.Current drain curves versus the function of the etching time are absolutely different for various doses from zero (BG) to 10 rad (BG up to ). This is true especially for the time interval from 3 h of etching up to overload stage. In this way, it is possible to obtain a calibration of PC detector net current drain based on its absorbed dose.In this experiment, the number and diameter of tracks and their relation with drain current and PC foil residual thickness at overload stage have been studied.The same experiment has been performed for various concentrations of radon gas (Bq/m3) as well.     

铜镍合金丝电爆炸放电特性与时空演化行为

脉冲电流驱动金属丝电爆炸可产生具有较高能量密度的等离子体,并伴随脉冲电磁辐射、强冲击波等效应,广泛应用于Z箍缩、电热化学武器、油气助采等领域;与纯金属相比,合金具备电阻率高、成分可调、相变复杂等特点,在电爆炸效应参数的调控方面具有很大潜力。开展了大气空气介质中铜、镍、铜镍（康铜）丝在微秒时间尺度电脉冲作用下电爆炸实验研究,通过放电参数与自辐射图像诊断,获取电爆炸过程放电参数与时空演变的特性规律,得到脉冲电流作用下合金电爆炸在相变与等离子体方面的特征。实验发现,在电爆炸早期,铜镍合金的高电阻率能够提高能量沉积效率:铜52%、镍74%、铜镍合金78%;而相爆开始后,合金丝负载则更接近纯镍丝负载性能。等离子体通道早期膨胀速率在5 mm/μs量级,随后迅速衰减;合金丝等离子体膨胀时间更久,击穿后平均电阻率上升缓慢,且等离子体辐射与金属爆炸产物在空间尺度上存在关联性。特别地,铜镍合金气溶胶分层同时具有横向和纵向特征（特征尺度10?1 mm）,但整体较铜气溶胶更为均匀。     

超高速激光纹影技术测量脉冲功率驱动的磁重联现象

用超高速激光纹影技术测量了Z箍缩等离子体磁重联现象。实验采用超高速光电分幅相机,配合激光纹影技术,测量了XP-1装置上两根金属丝产生的等离子体分布,论证了超高速激光纹影技术研究Z箍缩磁重联现象的可行性。双钨丝实验结果表明,电流加载约10ns后金属丝已有明显膨胀,线性拟合得到平均膨胀速度约8km/s,金属丝内外两侧出现了规则的极有可能是垂直磁场的电热不稳定性扰动,并沿角向高度关联。铝丝负载的实验结果表明,早期的不稳定性波长为0.4mm,电流峰值之后金属丝初始位置仍有大量等离子体,后期的不稳定性波长约1.5mm。这些现象揭示了不稳定性发展的一个主要特征:短波模式受抑制,长波模式将占主导。     

Study of latent and etched tracks by a charged particle transmission technique

A recently suggested technique for non-destructive investigation of inhomogeneities in thin objects, which is based on the measurement of the energy spectra of charged particles transmitted through the object, is used for the study of thermal annealing of 10–20 μm thick polyethylene terephtalate, polypropylene and polycarbonate foils irradiated with 1–10 MeV/amu heavy ions. At elevated temperature a foil linear contraction is observed on pristine and irradiated material. Also the foil roughness increases with increasing temperature. On the same foils with etched pores 0.5–1.0 μm in diameter, the thermal annealing results in gradual closing of the pores up to about 30% of their initial diameter at the temperatures of 150–175°C. At higher temperatures the pore diameter increases and achieves its initial value.     

真空中铝单丝电爆炸的实验研究

开展了铝单丝在负极性电流脉冲作用下电爆炸特性的研究.利用皮秒激光探针,搭建了阴影、纹影和干涉的光学诊断平台,得到了不镀膜铝丝典型的能量沉积过程,在电压崩溃时刻其沉积能量为2.4 eV/atom.为了增加金属丝内的沉积能量,开展了相同电参数及金属丝尺寸下的镀膜铝丝电爆炸实验,其沉积能量可达到5 eV/atom,实现了在电压崩溃之前铝丝完全气化(完全气化所需能量为4 eV/atom).阴影图像展示了高密度丝核区域的膨胀过程,不镀膜铝丝平均膨胀速度为2.2 km/s,而镀膜铝丝因为沉积能量大,其膨胀速度约为不镀膜铝丝的2.3倍,高密度区域膨胀速度为5 km/s.由于阴影不能反映低密度等离子体的膨胀,开展了平行双丝实验,通过测量自发光辐射,估算了低密度等离子体的膨胀速度.利用条纹相机拍摄了不镀膜铝丝电爆炸过程中自发光区域的图像.纹影图像清晰地展示了不镀膜铝丝在电爆炸过程中形成的核冕结构,而镀膜铝丝电爆炸过程中核冕结构得到了一定程度的抑制.从干涉图像计算了相移,在轴对称假设下对相移进行阿贝尔逆变换,重构了三维的铝原子数密度分布.     

真空及空气中金属丝电爆炸特性研究

开展了铝丝在真空和空气环境中的电爆炸特性研究.从金属丝电爆炸的电压、电流波形得到了金属丝内的沉积能量,并基于以上电参数特征分析了电爆炸产物的状态,获得了空气中铝丝电爆炸电流暂停时间随初级储能电容充电电压的变化规律.真空和空气中铝丝电爆炸在电压击穿时刻的沉积能量分别为2.8和6 eV/atom.采用波长为532 nm、亚纳秒激光探针对金属丝电爆炸物理过程开展了高时空分辨率的阴影和纹影诊断.阴影图像清晰地展示了不同气氛环境中高密度电爆炸产物的膨胀过程,根据光学诊断图像分析了高密度丝核沉积能量的结构和空气中铝丝电爆炸产生的激波的膨胀轨迹.真空和空气环境中高密度电爆炸产物的平均膨胀速度分别为1.9和3 km/s.基于实验数据和输运参数模型,估算了金属丝在电压击穿时刻的温度.