双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

In-situ cation exchange enhances room temperature phosphorescence of a family of metal-organic frameworks

The rational designability and chemical tunability of metal-organic frameworks(MOFs)are enabling tributes to efficaciously enhance their room temperature phosphorescence(RTP)performance.A family of stable anionic MOFs,[Zn₂(4,5-ImDC)₂]M₂(NKU-132,M=(CH₃)₂NH₂or(CH₂CH₃)₂NH₂),featuring significant RTP have been synthesized.By rational cation selection and in-situ replacement from dimethylammonium to diethylammonium,the phosphorescence lifetime is increased from 30.88 to126.3 ms,along with less sensitivity to air.This work provides an anti-quenching and lifetime tuning example for RTP-MOFmaterials via facile host-guest chemistry.     

Nonseparating Independent Sets and Maximum Genus of Graphs

Acta Mathematicae Applicatae Sinica, English Series - A subset I of vertices of an undirected connected graph G is a nonseparating independent set (NSIS) if no two vertices of I are adjacent and G...     

Geometrically nonlinear dynamic analysis of the stiffened perovskite solar cell subjected to biaxial velocity impacts

Nonlinear Dynamics - The perovskite solar cell (PSC) is one of the most promising photovoltaic candidates along with the highly increasing demand for green electricity. One of the main concerns...     

吉林大学化学学院研究生课程思政的多维度构建与探索*

研究生课程思政的建设影响着研究生的培养质量,关乎着能否实现立德树人这一人才培养的根本任务。介绍了吉林大学化学学院立足学科特点,在研究生课程思政建设方面取得成功的经验,并对未来的课程思政建设方向进行了探讨。     

MWCNTs/hydroxypropyl cellulose/polyethylene glycol-based shape-stabilized phase change materials

Journal of Thermal Analysis and Calorimetry - Polyethylene glycol (PEG) is widely used as phase change materials (PCMs). However, the leakage and low thermal conductivity issues restrict its...     

Examples of compactλ-hypersurfaces in Euclidean spaces

In this paper,we first construct compact embeddedλ-hypersurfaces with the topology of torus which are calledλ-torus in Euclidean spaces?n^+1.Then,we give many compact immersedλ-hypersurfaces in Euclidean spaces?n^+1.