双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Separation,Preconcentration, and Determination of Lead,Cadmium, and Iron Using Cloud Point Extraction with Flame Atomic Absorption Spectrometry

Journal of Applied Spectroscopy - The concentration of heavy metals in drinking water is an important standard for water quality evaluation and water pipeline corrosion detection. This research...     

Cost-allocation problems for fuzzy agents in a fixed-tree network

Fuzzy Optimization and Decision Making - Cost-allocation problems in a fixed network are concerned with distributing the costs for use by a group of clients who cooperate in order to reduce such...     

Application of Machine Learning for Tool Condition Monitoring in Turning

The machining process is primarily used to remove material using cutting tools. Any variation in tool state affects the quality of a finished job and causes disturbances. So, a tool monitoring scheme (TMS) for categorization and supervision of failures has become the utmost priority. To respond, traditional TMS followed by the machine learning (ML) analysis is advocated in this paper. Classification in ML is supervised based learning method wherein the ML algorithm learn from the training data input fed to it and then employ this model to categorize the new datasets for precise prediction of a class and observation. In the current study, investigation on the single point cutting tool is carried out while turning a stainless steel (SS) workpeice on the manual lathe trainer. The vibrations developed during this activity are examined for failure-free and various failure states of a tool. The statistical modeling is then incorporated to trace vital signs from vibration signals. The multiple-binary-rule-based model for categorization is designed using the decision tree. Lastly, various tree-based algorithms are used for the categorization of tool conditions. The Random Forest offered the highest classification accuracy, i.e., 92.6%.

     

Plasma Crystal in (3 + 1) Dimensions

JETP Letters - A quasi-two-dimensional plasma crystal in (3 + 1) dimensions has been experimentally observed for the first time; i.e., three spatial coordinates of each microparticles of the...     

On Laser-Induced High-Order Wave Mixing and Harmonic Generation in a Graphene Quantum Dot

JETP Letters - We present results of numerical investigations of high-order wave mixing/harmonic generation (HWM/HHG) with many-body interaction processes derived by a strong two-frequency circular...     

A new class of spherically symmetric gravitational collapse

Theoretical and Mathematical Physics - We discuss the gravitational collapse of a spherically symmetric perfect fluid distribution of uniformly contracting stars. In a uniformly contracting star,...     

Study of Features of the Diffraction of X Rays in a Quartz Crystal Modulated by Longitudinal and Transverse Ultrasonic Vibrations

JETP Letters - Features of the simultaneous action of longitudinal and transverse ultrasonic vibrations in the quartz crystal on the parameters of reflected X-rays are studied. It is shown that...     

Structural,Computational and 3D Interaction Energy Calculations of the Compound 2-chloro-3-(1-napthyl)-5,5-dimethyl-2-cyclohexenone

Crystallography Reports - The molecular structure of 2-chloro-3-(1'-napthyl)-5,5-dimethyl-2- cyclohexenone was determined by single crystal X-ray diffraction. The compound crystallized in a...     

Nonlinear elastic constitutive relations of residually stressed composites with stiff curved fibres

Applied Mathematics and Mechanics - Mechanical models of residually stressed fibre-reinforced solids, which do not resist bending, have been developed in the literature. However, in some residually...